CN106835232B - Film flying structure and preparation method for 1064mm the laser-driven flyer systems - Google Patents
Film flying structure and preparation method for 1064mm the laser-driven flyer systems Download PDFInfo
- Publication number
- CN106835232B CN106835232B CN201611251428.9A CN201611251428A CN106835232B CN 106835232 B CN106835232 B CN 106835232B CN 201611251428 A CN201611251428 A CN 201611251428A CN 106835232 B CN106835232 B CN 106835232B
- Authority
- CN
- China
- Prior art keywords
- film
- laser
- nano
- pore
- film flying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/20—Electrolytic after-treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
Abstract
The invention discloses a kind of film flying structures and preparation method for 1064mm the laser-driven flyer systems, the alumina nanohole template of anode oxidation method manufacturing cycle structure is used first, then in nano-pore electroplating deposition metallic silver formation rule periodic structure nano silver array light absorbing layer, the size of nano silver array is adjusted by controlling the specification of alumina pore, so that it is generated surface plasma resonance with incident 1064nm laser and reinforces optical absorption, film flying is further thinned to the clad aluminum film flying that required thickness is prepared into the ablation layer containing nano silver, the film flying is pasted in transparent substrates, so that 1064nm the laser-driven flyer systems use.The present invention solves existing metallic aluminium film flying to laser reflectivity height, and the low problem of capacity usage ratio advantageously reduces laser input energy through the invention.
Description
Technical field
The present invention relates to laser priming system technical fields, and in particular to a kind of for 1064mm the laser-driven flyer systems
Film flying structure and preparation method.
Background technology
Laser Driven Flyer Plates technology is to be to develop safety of weapons igniting by the U.S. laboratories LosAlamos in last century end
The new and high technology united and grown up first.It is to utilize the metal film (film flying on laser beam irradiation transparent substrates surface
Target), a part of film layer of ablation is generated high pressure plasma by laser energy, and remaining film layer is pushed using the plasma of generation
(film flying) high-speed flight generates high temporary impact pressure.The technology is in laser-impact detonation, laser threat warner, microsecond delay etc.
Research field has important application value.Film flying target is that energy converts critical component in Laser Driven Flyer Plates, and it includes ablations
Layer, heat resistant layer and film flying layer three-decker.The effect of wherein ablation layer is to absorb the energy of laser, generates high pressure plasma.
But metallic aluminium film flying surface is very high to the reflectivity of light, most of laser energy is wasted by reflection, defeated so as to cause needing
The laser for entering high-energy removes driven flyer plates, leads to be difficult to large-scale promotion and uses Laser Driven Flyer Plates technology.
Invention content
The present invention overcomes the deficiencies in the prior art, provide a kind of film flying knot for 1064mm the laser-driven flyer systems
Structure and preparation method, the technical problem relatively low to the S. E. A. of laser for solving existing metal film flying.
In view of the above problem of the prior art, according to one aspect of the present disclosure, the present invention uses following technology
Scheme：
A kind of film flying structure for 1064mm the laser-driven flyer systems, including transparent substrates and metal aluminium film；Institute
The thickness for stating metal aluminium film is 5-30 μm；By the way that nano-pore is arranged and is received described in the one side of the metal aluminum film layer
Nano silver is filled in metre hole, is allowed to form the porous alumina layer of nano silver filling；The Woelm Alumina of the nano silver filling
The transparent substrates are pasted or compressed to layer.
In order to which the present invention is better achieved, further technical solution is：
The nano-pore of an embodiment according to the present invention, the porous alumina layer of nano silver filling is periodic hole
Array structure, specification are：Bore dia is 330 ± 20nm, and depth is 1-3 μm, and the period is 400 ± 20nm.
The nano-pore of another embodiment according to the present invention, the porous alumina layer of nano silver filling is periodic
Hole array structure, specification are：Bore dia is 40 ± 10nm, and depth is 1-3 μm, and the period is 60 ± 10nm.
The nano-pore of another embodiment according to the present invention, the porous alumina layer of nano silver filling is periodic
Hole array structure, specification are：Bore dia is 140 ± 10nm, and depth is 1-3 μm, and the period is 210 ± 10nm.
The present invention can also be：
A kind of preparation method of film flying structure for 1064mm the laser-driven flyer systems, includes the following steps：
Step 1: thickness is selected to be less than 200 μm, purity is more than 99% metal aluminium film；
Step 2: rhythmic nanohole array knot is prepared in metal aluminium film one side by way of anodic oxidation
Structure；
Step 3: metallic silver is electroplated onto in nano-pore using the method for exchange deposition, the porous of nano silver filling is formed
Alumina layer；
It is thinned with physical ion or chemical attack Step 4: the another side of nano-pore is not arranged from the metal aluminium film
Metal aluminium film is thinned method, and it is 5-30 μm to make the thickness of the metal aluminium film；
Step 5: the porous alumina layer that the nano silver of the metal aluminium film for being provided with nano-pore is filled paste or
Compress the transparent substrates.
Another embodiment according to the present invention further includes moving back metal aluminium film at high temperature before step 2
Fire.
Another embodiment according to the present invention, after annealing at high temperature, by metal aluminium film (1) in acetone with super
Sound wave cleans, and removes surface grease.
Another embodiment according to the present invention, by the metal aluminium film (1) after removal surface grease in NaOH solution
The middle oxidation film for removing surface.
Another embodiment according to the present invention will go the metal aluminium film (1) after oxide film dissolving through ethyl alcohol, deionization
Water flushing is placed in electrolyte.
The mass fraction of another embodiment according to the present invention, the NaOH solution is 2%.
Compared with prior art, one of beneficial effects of the present invention are：
A kind of film flying structure and preparation method for 1064mm the laser-driven flyer systems of the present invention, which solve biographies
The aluminium ablation layer technical problem low to the absorptivity of laser, improves the utilization rate of laser, favorably through the invention in system film flying
In the optical fiber connection and miniaturization of realizing the technology.
Description of the drawings
Illustrate present specification embodiment or technical solution in the prior art in order to clearer, it below will be to embodiment
Or attached drawing needed in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is the reference to some embodiments in present specification, for those skilled in the art, what is do not made the creative labor
In the case of, other attached drawings can also be obtained according to these attached drawings.
Fig. 1 is the film flying structural representation for 1064mm the laser-driven flyer systems according to one embodiment of the invention
Figure.
Fig. 2 is nano silver ablation layer in the embodiment of the present invention 1 to the reflectance spectrum of light.
Fig. 3 is nano silver ablation layer in the embodiment of the present invention 2 to the reflectance spectrum of light.
Wherein, entitled corresponding to the reference numeral in attached drawing：
1- transparent substrates, the porous alumina layer of 2- nano silvers filling；3- nano-pores；4- metal aluminium films.
Specific implementation mode
The present invention is described in further detail with reference to embodiment, embodiments of the present invention are not limited thereto.
As shown in Figure 1, Fig. 1 show it is according to an embodiment of the invention for 1064mm the laser-driven flyer systems
Film flying structure, a kind of film flying structure for 1064mm the laser-driven flyer systems, including the filling of transparent substrates 1, nano silver
Porous alumina layer 2 and aluminum film layer 4；The thickness of the metal aluminium film 4 is 5-30 μm, the one side of the metal aluminium film 4
On be provided with the porous alumina layer 2 Woelm Alumina light absorbing layer of filling (nano silver) of nano silver filling, be provided with nanometer
The transparent substrates 1 are pasted or compressed to the one side of the metal aluminium film 4 in hole.1 preferable K9 glass of transparent substrates, transparent pottery
Porcelain or transparent crystal etc..Metal aluminium film 1 can be pasted onto in transparent substrates 2 by transparency liquid, and transparency liquid can be selected preferentially
Water or silicone oil.
For metal aluminium film 4 preferably with 99.9% fine aluminium, 99.9% fine aluminium preferably guarantee can prepare nano-pore
Rule, if purity is low, in anode oxidation process, may result in the foraminous die plate of preparation, there are larger defects.
It is periodic hole array structure to be arranged on the porous alumina layer 2 of its nano silver filling, and specification is divided into three
Kind, it is respectively：A diameter of 330 ± 20nm, depth are 1-3 μm, and the period is 400 ± 20nm；A diameter of 40 ± 10nm, depth 1-
3 μm, the period is 60 ± 10nm；A diameter of 140 ± 10nm, depth are 1-3 μm, and the period is 210 ± 10nm；Period is exactly hole in rule
Arrangement then, the spacing at hole center；Nano silver cylinder after filling is corresponding with dimensions above.It is found by analysis, it is only above-mentioned
In the three kinds of range of structures provided, the film flying of preparation can generate surface plasma resonance effect with laser, reinforce the absorption of light.
A kind of preparation method of film flying structure for 1064mm the laser-driven flyer systems, includes the following steps：
Step 1: select thickness be less than 200 μm (thickness is thinned to required thickness less than 200 μm convenient for the later stage,
If too thick, it is also higher that cost is thinned in later stage bad operation), purity is more than 99% metal aluminium film 4, by metal aluminium film 4
It anneals at high temperature, after annealing, metal aluminium film 4 is used into ultrasonic cleaning in acetone, surface grease is removed, then in NaOH
The oxidation film that surface is removed in solution is placed on through ethyl alcohol, deionized water flushing in acidic electrolysis bath；
Step 2: in the electrolytic solution, rhythmic receive is prepared in 4 one side of metal aluminium film by way of anodic oxidation
Metre hole array structure；By changing electrolyte ingredient, the porous of three kinds of specifications of voltage and time preparation of anodic oxidation is controlled
(bore dia is 330 ± 20nm to aluminium film, and depth is 1-3 μm, and the period is 400 ± 20nm；Or bore dia is 40 ± 10nm, depth
It it is 1-3 μm, the period is 60 ± 10nm；Or bore dia is 140 ± 10nm, depth is 1-3 μm, and the period is 210 ± 10nm)；Sun
Pole oxidation principle be：Porous anodic aluminium oxide, abbreviation PAA are that rafifinal is placed in acidic electrolysis bath at low temperature through sun
High-sequential nano-pore array structure of prepared by pole aoxidizes with self-organizing.It is made of barrier layer and porous layer, Kong great
It is small uniform.Oxalic acid, sulfuric acid are mostly used, phosphoric acid is electrolyte.
Step 3: metallic silver is electroplated onto in nano-pore using the method for exchange deposition；Control electroplating technology makes nano oxygen
Change and fills full metallic silver in aluminium hole；
Step 4: from the metal aluminium film 4 be not arranged the another side (one side of non-electrosilvering) of nano-pore with physics from
Son is thinned or metal aluminium film 4 is thinned the method for chemical attack, and it is 5-30 μm to make the thickness of the metal aluminium film 4；Its object
Reason ion milling method can be, such as ion beam etching；
Step 5: 2 one side of porous alumina layer that the nano silver for the metal aluminium film 4 for being provided with nano-pore is filled
Paste or compress the transparent substrates 1.
For the film flying structure and preparation method disclosed above for 1064mm the laser-driven flyer systems, below by
Specific example further illustrates：
Embodiment 1：First, 150 μm of aluminium flake (purity 99.95%) is annealed at high temperature, eliminates aluminium flake and is rolling
The internal stress formed in the process.Then by aluminium flake ultrasonic cleaning in acetone, surface grease is removed；It is in mass fraction again
The oxidation film that surface is removed in 2% NaOH solution, most rinses afterwards through ethyl alcohol and deionized water, is finally placed in the phosphoric acid of 0.7M
In electrolyte, at low temperature (- 5 DEG C~-8 DEG C), control oxidation voltage has in prepared by 24V or so, anodic oxidation from group
The high-sequential nano-pore array structure (a diameter of 140 ± 10nm in hole, depth are 2 μm, and the period is 210 ± 10nm) knitted, is adopted
Metallic silver is filled in hole with exchange deposition method, plating solution for silver-plating is (0.1M silver nitrates), deposition voltage 16V, pH=3, exchange
Electric frequency is 50HZ, is deposited 5-8 minutes, and the full nano-pore of silver filling is made.It is thinned using ion beam etching method and is not filled by metallic silver
One side, film flying is thinned to 20 μm by control time.Then silicone oil is dripped in transparent sapphire substrates, will contained in film flying
Nano silver fits in substrate on one side.By analyze the film flying light absorption find, the film flying 1064nm laser it is anti-
It penetrates rate and is less than 6%.Its nano silver ablation layer is as shown in Figure 2 to the reflectance spectrum of light.
Embodiment 2：200 μm of aluminium flakes (purity 99.9%) are annealed at high temperature, eliminate aluminium flake during the rolling process
The internal stress of formation.Then by aluminium flake ultrasonic cleaning in acetone, surface grease is removed；It is again 2% in mass fraction
The oxidation film that surface is removed in NaOH solution, most rinses afterwards through ethyl alcohol and deionized water, carries out anodic oxidation in a cell.Electricity
The oxalic acid that 0.2M is used in slot is solved, temperature is controlled at 5 DEG C or so, oxidation voltage 20V or so, and oxidation is prepared porous for about 40 minutes
Alumina formwork (bore dia is 40 ± 10nm, and depth is 1-3 μm, and the period is 60 ± 10nm), using exchange deposition method in hole
Interior filling metallic silver, plating solution for silver-plating are (0.1M silver nitrates), and deposition voltage 16V, pH=3, ac frequency 50HZ make silver fill out
Full of nano-pore.Using the method for chemical attack, the one side aluminium film for being not filled by metallic silver is thinned in the HCl solution of 0.2M
30μm.Then silicone oil is dripped in transparent K9 substrate of glass, by fitting in substrate on one side containing nano silver in film flying.It is logical
The light absorption discovery for analyzing the film flying is crossed, laser absorption rate of the film flying in 1064nm is more than 85%.Its nano silver ablation layer pair
The reflectance spectrum of light is as shown in Figure 3.
The present invention utilizes the surface plasma resonance characteristic of Nano silver grain, and the ablation layer of film flying is prepared into the nanometer of silver
Periodic structure makes it generate surface plasmon resonance absorption effect with incident 1064nm laser, improves laser absorption, promotes to swash
The progress of optical drive film flying technology.
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with it is other
The difference of embodiment, identical similar portion cross-reference between each embodiment.
" one embodiment " for being spoken of in the present specification, " another embodiment ", " embodiment ", etc., refer to tying
Specific features, structure or the feature for closing embodiment description are included at least one embodiment of the application generality description
In.It is not centainly to refer to the same embodiment that statement of the same race, which occur, in multiple places in the description.Appoint furthermore, it is understood that combining
When one embodiment describes a specific features, structure or feature, to be advocated be realized in conjunction with other embodiment it is this
Feature, structure or feature are also fallen within the scope of the present invention.
Although reference be made herein to invention has been described for multiple explanatory embodiments of the invention, however, it is to be understood that
Those skilled in the art can be designed that a lot of other modification and implementations, these modifications and implementations will be fallen in this Shen
It please be within disclosed scope and spirit.It more specifically, within the scope of the present disclosure and claims, can be to master
The building block and/or layout for inscribing composite configuration carry out a variety of variations and modifications.In addition to what is carried out to building block and/or layout
Outside variations and modifications, to those skilled in the art, other purposes also will be apparent.
Claims (7)
1. a kind of film flying structure for 1064mm the laser-driven flyer systems, it is characterised in that including transparent substrates (1) and gold
Belong to aluminium film (4)；The thickness of the metal aluminium film (4) is 5-30 μm；By setting in the one side of the metal aluminum film layer (4)
It accommodates metre hole and fills nano silver in the nano-pore (3), be allowed to form the porous alumina layer (2) of nano silver filling；
The transparent substrates (1) are pasted or compressed to the porous alumina layer (2) of the nano silver filling；
The nano-pore (3) of the porous alumina layer (2) of the nano silver filling is periodic hole array structure, and specification is：
A diameter of 330 ± 20nm, depth are 1-3 μm, and the period is 400 ± 20nm；Or the porous alumina layer (2) of the nano silver filling
Nano-pore (3) be periodic hole array structure, specification is：A diameter of 40 ± 10nm, depth are 1-3 μm, the period 60
±10nm；Or the nano-pore (3) of the porous alumina layer (2) of the nano silver filling is periodic hole array structure, rule
Lattice are：A diameter of 140 ± 10nm, depth are 1-3 μm, and the period is 210 ± 10nm.
2. it is a kind of prepare as described in claim 1 for 1064mm the laser-driven flyer systems film flying structure be used for 1064mm
The preparation method of the film flying structure of the laser-driven flyer system, it is characterised in that include the following steps：
Step 1: thickness is selected to be less than 200 μm, purity is more than 99% metal aluminium film (4)；
Step 2: rhythmic nanohole array knot is prepared in metal aluminium film (4) by way of anodic oxidation on one side
Structure；
Step 3: metallic silver is electroplated onto in nano-pore using the method for exchange deposition, the porous oxidation of nano silver filling is formed
Aluminium layer (2)；
It is thinned with physical ion or chemical attack Step 4: the another side of nano-pore is not arranged from the metal aluminium film (4)
Metal aluminium film (4) are thinned method, and it is 5-30 μm to make the thickness of the metal aluminium film (4)；
Step 5: the porous alumina layer (2) that the nano silver for the metal aluminium film (4) for being provided with nano-pore is filled is pasted
Or compress the transparent substrates (1).
3. the preparation method of the film flying structure according to claim 2 for 1064mm the laser-driven flyer systems, special
Sign is before step 2 to further include that metal aluminium film (4) is annealed at high temperature.
4. the preparation method of the film flying structure according to claim 3 for 1064mm the laser-driven flyer systems, special
Sign is after annealing at high temperature, and metal aluminium film (4) is used ultrasonic cleaning in acetone, removes surface grease.
5. the preparation method of the film flying structure according to claim 4 for 1064mm the laser-driven flyer systems, special
Levy the oxidation film that the metal aluminium film (4) after being to remove surface grease removes surface in NaOH solution.
6. the preparation method of the film flying structure according to claim 5 for 1064mm the laser-driven flyer systems, special
Sign is that the metal aluminium film (4) after oxide film dissolving will be gone to be placed in electrolyte through ethyl alcohol, deionized water flushing.
7. the preparation method of the film flying structure according to claim 5 or 6 for 1064mm the laser-driven flyer systems,
It is characterized in that the mass fraction of the NaOH solution is 2%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611251428.9A CN106835232B (en) | 2016-12-29 | 2016-12-29 | Film flying structure and preparation method for 1064mm the laser-driven flyer systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611251428.9A CN106835232B (en) | 2016-12-29 | 2016-12-29 | Film flying structure and preparation method for 1064mm the laser-driven flyer systems |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106835232A CN106835232A (en) | 2017-06-13 |
| CN106835232B true CN106835232B (en) | 2018-08-31 |
Family
ID=59114181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611251428.9A Active CN106835232B (en) | 2016-12-29 | 2016-12-29 | Film flying structure and preparation method for 1064mm the laser-driven flyer systems |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106835232B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108091579A (en) * | 2017-12-22 | 2018-05-29 | 哈尔滨工业大学 | A kind of method that electro-deposition prepares high-density electronic package vertical interconnection substrate |
| CN108994448B (en) * | 2018-09-14 | 2020-10-16 | 中国工程物理研究院化工材料研究所 | Laser-driven flyer target structure and preparation method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5301612A (en) * | 1993-05-28 | 1994-04-12 | The United States Of America As Represented By The United States Department Of Energy | Carbon-assisted flyer plates |
| US7502956B2 (en) * | 2004-07-22 | 2009-03-10 | Fujitsu Limited | Information processing apparatus and error detecting method |
| CN203845965U (en) * | 2014-01-22 | 2014-09-24 | 中国工程物理研究院化工材料研究所 | Carbon nano-tube composite film for laser driving flying plate technology |
| CN105583533A (en) * | 2016-03-18 | 2016-05-18 | 中国工程物理研究院化工材料研究所 | Flyer structure for laser driving and preparation method thereof |
-
2016
- 2016-12-29 CN CN201611251428.9A patent/CN106835232B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5301612A (en) * | 1993-05-28 | 1994-04-12 | The United States Of America As Represented By The United States Department Of Energy | Carbon-assisted flyer plates |
| US7502956B2 (en) * | 2004-07-22 | 2009-03-10 | Fujitsu Limited | Information processing apparatus and error detecting method |
| CN203845965U (en) * | 2014-01-22 | 2014-09-24 | 中国工程物理研究院化工材料研究所 | Carbon nano-tube composite film for laser driving flying plate technology |
| CN105583533A (en) * | 2016-03-18 | 2016-05-18 | 中国工程物理研究院化工材料研究所 | Flyer structure for laser driving and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106835232A (en) | 2017-06-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101962792B (en) | Method for preparing pore diameter controllable through hole anodized aluminum oxide film | |
| US10626518B2 (en) | Method for treating a surface of a metallic structure | |
| JP3675326B2 (en) | Multi-channel plate manufacturing method | |
| JP3598373B2 (en) | Nanostructures joined and regularly arranged on a substrate and a method for producing the same | |
| CN101736381B (en) | Electrolyte and method for preparing aluminum oxide template with big hole pitch | |
| US20150203984A1 (en) | Etching in the presence of alternating voltage profile and resulting porous structure | |
| CN102321905B (en) | Method for preparing multilevel-structure alumina by pattern prefabrication through micro-nano ball arrangement | |
| CN101851771A (en) | Ordered porous alumina template capable of being directly used in electrochemical deposition and production method | |
| CN106835232B (en) | Film flying structure and preparation method for 1064mm the laser-driven flyer systems | |
| Feng et al. | Uniform large-area free-standing silver nanowire arrays on transparent conducting substrates | |
| CN101840939A (en) | Aluminium alloy base plate and solar cell substrate | |
| CN105603469A (en) | CuO/Ni core-shell nanowire and preparation method thereof | |
| CN103451713B (en) | The corrosion pretreating method of mesohigh electric aluminum foil anodic oxidation deposition zinc or tin nucleus | |
| CN114709080B (en) | AAO-TiO 2 Preparation method of composite corrosion aluminum foil | |
| CN108023065B (en) | Selective melting technology-based lithium ion battery silicon electrode manufacturing method | |
| JP2008272912A (en) | Fine structure body and its manufacturing method | |
| CN104404565B (en) | Au/TiO2optoelectronic pole of nanotube composite construction and preparation method thereof | |
| CN104562097B (en) | A kind of preparation method of self-supporting nickel nano tube/linear array film | |
| CN101798701A (en) | Method for preparing alumina template by guidance of etching pattern | |
| CN102888642A (en) | Preparation method of large-area high-order porous anodised aluminium film | |
| CN112813476A (en) | Method for preparing conical AAO by alternately performing anodic oxidation and phosphoric acid hole expansion | |
| CN104846411B (en) | The method and its product of flower-like nanometer metal cobalt are prepared using anodic oxidation aluminium formwork | |
| CN111394771A (en) | Method for preparing coating on surface of copper and copper alloy and copper product | |
| CN108793065B (en) | Preparation method of MEMS (micro-electromechanical systems) supercapacitor with controllable dielectric film thickness | |
| CN103305890B (en) | The preparation method of the anodic oxidation aluminium formwork that three-dimensional runs through |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |