CN106835232A - For the film flying structure and preparation method of 1064mm the laser-driven flyer systems - Google Patents
For the film flying structure and preparation method of 1064mm the laser-driven flyer systems Download PDFInfo
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- CN106835232A CN106835232A CN201611251428.9A CN201611251428A CN106835232A CN 106835232 A CN106835232 A CN 106835232A CN 201611251428 A CN201611251428 A CN 201611251428A CN 106835232 A CN106835232 A CN 106835232A
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/20—Electrolytic after-treatment
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
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- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
The invention discloses a kind of film flying structure and preparation method for 1064mm the laser-driven flyer systems, first using the alumina nanohole template of anode oxidation method manufacturing cycle structure, then in nano-pore electroplating deposition argent formation rule periodic structure Nano Silver array light absorbing zone, by the size for controlling the specification of alumina pore to adjust Nano Silver array, it is set to produce surface plasma resonance to strengthen optical absorption with incident 1064nm laser, thickness required for further film flying is thinned to is prepared into the clad aluminum film flying containing Nano Silver ablation layer, the film flying is pasted in transparent substrates, so that 1064nm the laser-driven flyer systems are used.The present invention solves that existing metallic aluminium film flying is high to laser reflectivity, and the low problem of capacity usage ratio advantageously reduces laser input energy by the present invention.
Description
Technical field
The present invention relates to laser priming system technical field, and in particular to a kind of for 1064mm the laser-driven flyer systems
Film flying structure and preparation method.
Background technology
Laser Driven Flyer Plates technology is to develop safety of weapons igniting system in last century Mo by U.S. LosAlamos laboratories
The new and high technology united and grow up first.It is using the metal film (film flying on laser beam irradiation transparent substrates surface
Target), a part of film layer of ablation is produced high pressure plasma by laser energy, and remaining film layer is promoted using the plasma for producing
(film flying) high-speed flight, produces high temporary impact pressure.The technology is in laser-impact detonation, laser threat warner, microsecond delay etc.
Research field has important application value.Film flying target is energy conversion critical component in Laser Driven Flyer Plates, and it includes ablation
Layer, heat resistant layer and film flying layer three-decker.The effect of wherein ablation layer is the energy for absorbing laser, produces high pressure plasma.
But metallic aluminium film flying surface is very high to the reflectivity of light, most of laser energy is wasted by reflection, defeated so as to result in the need for
The laser for entering high-energy removes driven flyer plates, causes to be difficult to large-scale promotion and uses Laser Driven Flyer Plates technology.
The content of the invention
Instant invention overcomes the deficiencies in the prior art, there is provided a kind of film flying knot for 1064mm the laser-driven flyer systems
Structure and preparation method, the technical problem relatively low to the S. E. A. of laser for solving existing metal film flying.
In view of the above mentioned problem of prior art, according to one side disclosed by the invention, the present invention uses following technology
Scheme：
A kind of film flying structure for 1064mm the laser-driven flyer systems, including transparent substrates and metal aluminium film；Institute
The thickness for stating metal aluminium film is 5-30 μm；By setting nano-pore and being received described in the one side of the metal aluminum film layer
Nano Silver is filled in metre hole, is allowed to be formed the porous alumina layer of Nano Silver filling；The Woelm Alumina of the Nano Silver filling
The transparent substrates are pasted or compressed to layer.
In order to the present invention is better achieved, further technical scheme is：
An embodiment of the invention, the nano-pore of the porous alumina layer of Nano Silver filling is periodic hole
Array structure, its specification is：Bore dia is 330 ± 20nm, and depth is 1-3 μm, and the cycle is 400 ± 20nm.
Another embodiment of the invention, the nano-pore of the porous alumina layer of Nano Silver filling is periodic
Hole array structure, its specification is：Bore dia is 40 ± 10nm, and depth is 1-3 μm, and the cycle is 60 ± 10nm.
Another embodiment of the invention, the nano-pore of the porous alumina layer of Nano Silver filling is periodic
Hole array structure, its specification is：Bore dia is 140 ± 10nm, and depth is 1-3 μm, and the cycle is 210 ± 10nm.
The present invention can also be：
A kind of preparation method of film flying structure for 1064mm the laser-driven flyer systems, comprises the following steps：
Step one, from thickness be less than 200 μm, purity more than 99% metal aluminium film；
Step 2, by metal aluminium film one side rhythmic nanohole array knot is prepared by way of anodic oxidation
Structure；
Be electroplated onto argent in nano-pore by step 3, the method deposited using exchange, forms the porous of Nano Silver filling
Alumina layer；
Step 4, the another side for being not provided with nano-pore from the metal aluminium film are thinning or chemical attack with physical ion
Method is thinning by metal aluminium film, and the thickness for making the metal aluminium film is 5-30 μm；
Step 5, will be provided with nano-pore the metal aluminium film Nano Silver filling porous alumina layer paste or
Compress the transparent substrates.
Another embodiment of the invention, also included at high temperature moving back metal aluminium film before step 2
Fire.
Another embodiment of the invention, after annealing at high temperature, metal aluminium film (1) is used in acetone super
Sound wave is cleaned, and removes surface grease.
Another embodiment of the invention, will remove the metal aluminium film (1) after surface grease in NaOH solution
The oxide-film on middle removing surface.
Another embodiment of the invention, the metal aluminium film (1) that will be gone after oxide film dissolving is through ethanol, deionization
Water is placed in electrolyte after rinsing.
Another embodiment of the invention, the mass fraction of the NaOH solution is 2%.
Compared with prior art, one of beneficial effects of the present invention are：
A kind of film flying structure and preparation method for 1064mm the laser-driven flyer systems of the invention, which solves biography
The aluminium ablation layer technical problem low to the absorptivity of laser, the utilization rate of laser is improve by the present invention, favorably in system film flying
Connect and minimize in the optical fiber for realizing the technology.
Brief description of the drawings
For clearer explanation present specification embodiment or technical scheme of the prior art, below will be to embodiment
Or the accompanying drawing to be used needed for the description of prior art is briefly described, it should be apparent that, drawings in the following description are only
It is the reference to some embodiments in present specification, for those skilled in the art, is not paying creative work
In the case of, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the film flying structural representation for 1064mm the laser-driven flyer systems according to one embodiment of the invention
Figure.
Fig. 2 is reflectance spectrum of the Nano Silver ablation layer to light in the embodiment of the present invention 1.
Fig. 3 is reflectance spectrum of the Nano Silver ablation layer to light in the embodiment of the present invention 2.
Wherein, it is entitled corresponding to the reference in accompanying drawing：
1- transparent substrates, the porous alumina layer of 2- Nano Silvers filling；3- nano-pores；4- metal aluminium films.
Specific embodiment
The present invention is described in further detail with reference to embodiment, but embodiments of the present invention not limited to this.
As shown in figure 1, Fig. 1 show it is according to an embodiment of the invention for 1064mm the laser-driven flyer systems
Film flying structure, a kind of film flying structure for 1064mm the laser-driven flyer systems, including the filling of transparent substrates 1, Nano Silver
Porous alumina layer 2 and aluminum film layer 4；The thickness of the metal aluminium film 4 is 5-30 μm, the one side of the metal aluminium film 4
On be provided with the porous alumina layer 2 Woelm Alumina light absorbing zone of filling (Nano Silver) of Nano Silver filling, be provided with nanometer
The transparent substrates 1 are pasted or compressed to the one side of the metal aluminium film 4 in hole.The preferable K9 glass of transparent substrates 1, transparent pottery
Porcelain or transparent crystal etc..Metal aluminium film 1 can be pasted onto in transparent substrates 2 by transparency liquid, and transparency liquid can prioritizing selection
Water or silicone oil.
Metal aluminium film 4 preferably with 99.9% fine aluminium, 99.9% fine aluminium preferably guarantee can prepare nano-pore
Rule, if purity is low, in anode oxidation process, there is larger defect in the foraminous die plate that may result in preparation.
What is set on the porous alumina layer 2 of its Nano Silver filling is periodic hole array structure, and its specification is divided into three
Kind, it is respectively：A diameter of 330 ± 20nm, depth is 1-3 μm, and the cycle is 400 ± 20nm；A diameter of 40 ± 10nm, depth is 1-
3 μm, the cycle is 60 ± 10nm；A diameter of 140 ± 10nm, depth is 1-3 μm, and the cycle is 210 ± 10nm；Cycle is exactly hole in rule
Arrangement then, the spacing at hole center；Nano Silver cylinder after filling is corresponding with dimensions above.Found by analysis, it is only above-mentioned
In the three kinds of range of structures for providing, the film flying of preparation can produce surface plasma resonance effect with laser, strengthen the absorption of light.
A kind of preparation method of film flying structure for 1064mm the laser-driven flyer systems, comprises the following steps：
Step one, from thickness less than 200 μm (thickness is easy to the later stage to be thinned to required thickness less than 200 μm,
If too thick, later stage bad operation, thinning cost is also higher), metal aluminium film 4 of the purity more than 99%, by metal aluminium film 4
Anneal at high temperature, after annealing, metal aluminium film 4 is cleaned with ultrasonic wave in acetone, surface grease is removed, then in NaOH
The oxide-film on surface is removed in solution, is placed in acidic electrolysis bath after ethanol, deionized water rinsing；
Step 2, in the electrolytic solution, the one side of metal aluminium film 4 prepares rhythmic receiving by way of anodic oxidation
Metre hole array structure；By changing electrolyte composition, the voltage and time for controlling anodic oxidation prepare the porous of three kinds of specifications
(bore dia is 330 ± 20nm to aluminium film, and depth is 1-3 μm, and the cycle is 400 ± 20nm；Or bore dia is 40 ± 10nm, depth
It it is 1-3 μm, the cycle is 60 ± 10nm；Or bore dia is 140 ± 10nm, depth is 1-3 μm, and the cycle is 210 ± 10nm)；Sun
Pole oxidation principle be：Porous anodic aluminium oxide, abbreviation PAA is that rafifinal is placed in acidic electrolysis bath at low temperature through sun
Prepared by pole aoxidizes has the high-sequential nano-pore array structure of self-organizing.It is made up of barrier layer and porous layer, Kong great
It is small uniform.Use oxalic acid, sulfuric acid, phosphoric acid is electrolyte more.
Be electroplated onto argent in nano-pore by step 3, the method deposited using exchange；Control electroplating technology makes nano oxygen
Change the full argent of filling in aluminium hole；
Step 4, be not provided with from the metal aluminium film 4 another side (one side of non-electrosilvering) of nano-pore physics from
Thinning or chemical attack the method for son is thinning by metal aluminium film 4, and the thickness for making the metal aluminium film 4 is 5-30 μm；Its thing
Managing ion milling method can be, such as ion beam etching；
The one side of porous alumina layer 2 that step 5, the Nano Silver of the metal aluminium film 4 that will be provided with nano-pore are filled
Paste or compress the transparent substrates 1.
For the film flying structure and preparation method for 1064mm the laser-driven flyer systems disclosed above, below by
Specific example is further illustrated：
Embodiment 1：First, 150 μm of aluminium flake (purity is 99.95%) is annealed at high temperature, eliminates aluminium flake in rolling
During formed internal stress.Then by aluminium flake ultrasonic wave cleaning in acetone, surface grease is removed；It is in mass fraction again
The oxide-film on surface is removed in 2% NaOH solution, most the phosphoric acid of 0.7M is finally placed in through ethanol and deionized water rinsing afterwards
In electrolyte, at low temperature (- 5 DEG C~-8 DEG C), control oxidation voltage has from group prepared by 24V or so, anodic oxidation
The high-sequential nano-pore array structure (a diameter of 140 ± 10nm in hole, depth is 2 μm, and the cycle is 210 ± 10nm) knitted, adopts
Argent is filled in hole with exchange deposition process, plating solution for silver-plating is (0.1M silver nitrates), deposition voltage 16V, pH=3, exchange
Electric frequency is 50HZ, is deposited 5-8 minutes, makes the full nano-pore of silver filling.Argent is not filled by using ion beam etching method is thinning
One side, film flying is thinned to 20 μm by control time.Then silicone oil is dripped in transparent sapphire substrates, will be contained in film flying
The one side of Nano Silver is fitted in substrate.By analyze the film flying light absorbs find, the film flying 1064nm laser it is anti-
Rate is penetrated less than 6%.Its Nano Silver ablation layer is as shown in Figure 2 to the reflectance spectrum of light.
Embodiment 2：200 μm of aluminium flakes (purity is 99.9%) are annealed at high temperature, elimination aluminium flake is in the operation of rolling
The internal stress of formation.Then by aluminium flake ultrasonic wave cleaning in acetone, surface grease is removed；It is again 2% in mass fraction
The oxide-film on surface is removed in NaOH solution, most anodic oxidation is carried out in a cell through ethanol and deionized water rinsing afterwards.Electricity
Using the oxalic acid of 0.2M in solution groove, temperature control at 5 DEG C or so, prepare porous for about 40 minutes by oxidation voltage 20V or so, oxidation
Alumina formwork (bore dia is 40 ± 10nm, and depth is 1-3 μm, and the cycle is 60 ± 10nm), using exchange deposition process in hole
Interior filling argent, plating solution for silver-plating be (0.1M silver nitrates), deposition voltage 16V, pH=3, ac frequency is 50HZ, fills out silver
Full of nano-pore.Using the method for chemical attack, the one side aluminium film that argent will be not filled by the HCl solution of 0.2M is thinned to
30μm.Then silicone oil is dripped in transparent K9 substrate of glass, the one side containing Nano Silver in film flying is fitted in substrate.It is logical
The light absorbs discovery for analyzing the film flying is crossed, the film flying is more than 85% in the laser absorption rate of 1064nm.Its Nano Silver ablation layer pair
The reflectance spectrum of light is as shown in Figure 3.
The ablation layer of film flying is prepared into the nanometer of silver using the surface plasma resonance characteristic of Nano silver grain for the present invention
Periodic structure, makes it produce surface plasmon resonance absorption effect with incident 1064nm laser, improves laser absorption, promotes to swash
The progress of optical drive film flying technology.
Each embodiment is described by the way of progressive in this specification, and what each embodiment was stressed is and other
The difference of embodiment, identical similar portion cross-reference between each embodiment.
" one embodiment ", " another embodiment ", " embodiment " for being spoken of in this manual, etc., refer to knot
Specific features, structure or the feature for closing embodiment description are included at least one embodiment of the application generality description
In.It is not necessarily to refer to same embodiment that statement of the same race occur in multiple places in the description.Furthermore, it is understood that with reference to appoint
When one embodiment describes specific features, structure or a feature, what is advocated is this to realize with reference to other embodiment
Feature, structure or feature also fall within the scope of the present invention.
Although reference be made herein to invention has been described for multiple explanatory embodiments of the invention, however, it is to be understood that
Those skilled in the art can be designed that a lot of other modification and implementation methods, and these modifications and implementation method will fall in this Shen
Please be within disclosed spirit and spirit.More specifically, in the range of disclosure and claim, can be to master
The building block and/or layout for inscribing composite configuration carry out various variations and modifications.Except what is carried out to building block and/or layout
Outside variations and modifications, to those skilled in the art, other purposes also will be apparent.
Claims (10)
1. a kind of film flying structure for 1064mm the laser-driven flyer systems, it is characterised in that including transparent substrates (1) and gold
Category aluminium film (4)；The thickness of the metal aluminium film (4) is 5-30 μm；By setting in the one side of the metal aluminum film layer (4)
Metre hole and the filling Nano Silver in the nano-pore (3) are accommodated, is allowed to be formed the porous alumina layer (2) of Nano Silver filling；
The transparent substrates (1) are pasted or compressed to the porous alumina layer (2) of the Nano Silver filling.
2. the film flying structure for 1064mm the laser-driven flyer systems according to claim 1, it is characterised in that described
The nano-pore (3) of the porous alumina layer (2) of Nano Silver filling is periodic hole array structure, and its specification is：A diameter of 330
± 20nm, depth is 1-3 μm, and the cycle is 400 ± 20nm.
3. the film flying structure for 1064mm the laser-driven flyer systems according to claim 1, it is characterised in that described
The nano-pore (3) of the porous alumina layer (2) of Nano Silver filling is periodic hole array structure, and its specification is：A diameter of 40
± 10nm, depth is 1-3 μm, and the cycle is 60 ± 10nm.
4. the film flying structure for 1064mm the laser-driven flyer systems according to claim 1, it is characterised in that described
The nano-pore (3) of the porous alumina layer (2) of Nano Silver filling is periodic hole array structure, and its specification is：A diameter of 140
± 10nm, depth is 1-3 μm, and the cycle is 210 ± 10nm.
5. it is a kind of prepare as claimed in claim 1 be used for 1064mm the laser-driven flyer systems film flying structure for 1064mm
The preparation method of the film flying structure of the laser-driven flyer system, it is characterised in that comprise the following steps：
Step one, from thickness be less than 200 μm, purity more than 99% metal aluminium film (4)；
Step 2, metal aluminium film (4) is simultaneously prepared into rhythmic nanohole array knot by way of anodic oxidation
Structure；
Be electroplated onto argent in nano-pore by step 3, the method deposited using exchange, forms the porous oxidation of Nano Silver filling
Aluminium lamination (2)；
Step 4, the another side for being not provided with nano-pore from the metal aluminium film (4) are thinning or chemical attack with physical ion
Method is thinning by metal aluminium film (4), and the thickness for making the metal aluminium film (4) is 5-30 μm；
The porous alumina layer (2) that step 5, the Nano Silver of the metal aluminium film (4) that will be provided with nano-pore are filled is pasted
Or compress the transparent substrates (1).
6. the preparation method of the film flying structure for 1064mm the laser-driven flyer systems according to claim 5, it is special
Levy is also to include at high temperature annealing metal aluminium film (4) before step 2.
7. the preparation method of the film flying structure for 1064mm the laser-driven flyer systems according to claim 6, it is special
It is after annealing at high temperature, metal aluminium film (4) to be cleaned with ultrasonic wave in acetone to levy, and removes surface grease.
8. the preparation method of the film flying structure for 1064mm the laser-driven flyer systems according to claim 7, it is special
It is the oxide-film that the metal aluminium film (4) removed after surface grease is removed surface in NaOH solution to levy.
9. the preparation method of the film flying structure for 1064mm the laser-driven flyer systems according to claim 8, it is special
The metal aluminium film (4) for being will go after oxide film dissolving is levied to be placed in electrolyte after ethanol, deionized water rinsing.
10. the preparation method of the film flying structure for 1064mm the laser-driven flyer systems according to claim 8 or claim 9,
It is characterized in that the mass fraction of the NaOH solution is 2%.
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| CN201611251428.9A CN106835232B (en) | 2016-12-29 | 2016-12-29 | Film flying structure and preparation method for 1064mm the laser-driven flyer systems |
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| CN201611251428.9A CN106835232B (en) | 2016-12-29 | 2016-12-29 | Film flying structure and preparation method for 1064mm the laser-driven flyer systems |
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| CN106835232A true CN106835232A (en) | 2017-06-13 |
| CN106835232B CN106835232B (en) | 2018-08-31 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108091579A (en) * | 2017-12-22 | 2018-05-29 | 哈尔滨工业大学 | A kind of method that electro-deposition prepares high-density electronic package vertical interconnection substrate |
| CN108994448A (en) * | 2018-09-14 | 2018-12-14 | 中国工程物理研究院化工材料研究所 | A kind of Laser Driven Flyer Plates target structure and preparation method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5301612A (en) * | 1993-05-28 | 1994-04-12 | The United States Of America As Represented By The United States Department Of Energy | Carbon-assisted flyer plates |
| US7502956B2 (en) * | 2004-07-22 | 2009-03-10 | Fujitsu Limited | Information processing apparatus and error detecting method |
| CN203845965U (en) * | 2014-01-22 | 2014-09-24 | 中国工程物理研究院化工材料研究所 | Carbon nano-tube composite film for laser driving flying plate technology |
| CN105583533A (en) * | 2016-03-18 | 2016-05-18 | 中国工程物理研究院化工材料研究所 | Flyer structure for laser driving and preparation method thereof |
-
2016
- 2016-12-29 CN CN201611251428.9A patent/CN106835232B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5301612A (en) * | 1993-05-28 | 1994-04-12 | The United States Of America As Represented By The United States Department Of Energy | Carbon-assisted flyer plates |
| US7502956B2 (en) * | 2004-07-22 | 2009-03-10 | Fujitsu Limited | Information processing apparatus and error detecting method |
| CN203845965U (en) * | 2014-01-22 | 2014-09-24 | 中国工程物理研究院化工材料研究所 | Carbon nano-tube composite film for laser driving flying plate technology |
| CN105583533A (en) * | 2016-03-18 | 2016-05-18 | 中国工程物理研究院化工材料研究所 | Flyer structure for laser driving and preparation method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108091579A (en) * | 2017-12-22 | 2018-05-29 | 哈尔滨工业大学 | A kind of method that electro-deposition prepares high-density electronic package vertical interconnection substrate |
| CN108994448A (en) * | 2018-09-14 | 2018-12-14 | 中国工程物理研究院化工材料研究所 | A kind of Laser Driven Flyer Plates target structure and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106835232B (en) | 2018-08-31 |
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