CN106827255A - A kind of carborundum side's mirror biscuit Pocket Machining method - Google Patents
A kind of carborundum side's mirror biscuit Pocket Machining method Download PDFInfo
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- CN106827255A CN106827255A CN201710036699.0A CN201710036699A CN106827255A CN 106827255 A CN106827255 A CN 106827255A CN 201710036699 A CN201710036699 A CN 201710036699A CN 106827255 A CN106827255 A CN 106827255A
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- mirror
- biscuit
- paraffin
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- machining method
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/18—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by milling, e.g. channelling by means of milling tools
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L91/00—Compositions of oils, fats or waxes; Compositions of derivatives thereof
- C08L91/06—Waxes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/014—Additives containing two or more different additives of the same subgroup in C08K
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend
- C08L2205/035—Polymer mixtures characterised by other features containing three or more polymers in a blend containing four or more polymers in a blend
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Mining & Mineral Resources (AREA)
- Mechanical Engineering (AREA)
- Jigs For Machine Tools (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention relates to a kind of carborundum side's mirror biscuit Pocket Machining method, it is processed using numerical control machining center, groove diameter is more than Φ 378mm, depth is more than 5mm, bottom thickness is less than or equal to 6mm, and the hollow distance in distance from bottom loss of weight chamber upper surface is more than 60mm, it is desirable to machining accuracy ± 0.2mm.Including：The first step, using paraffin filling loss of weight chamber hollow space；Second step, the polycrystalline diamond milling cutter of selection Φ 10 Φ 12mm, using spiral way feed, with the 600 1200mm/min amount of feeding, the bite of 0.05 0.1mm is processed, and successively removes groove blank；3rd step, is removed paraffin by 100 120 DEG C of baking.The present invention can be improved to more than 95% the yield rate in square mirror biscuit process, reduce the processing capacity of carborundum Fang Jing after sintering, and production efficiency can improve 35 times.
Description
Technical field
The present invention relates to carborundum side's mirror technical field, more particularly to a kind of carborundum side's mirror biscuit Pocket Machining method.
Background technology
Carborundum Fang Jing is mainly used in integrated circuit silicon chip photo-etching machine work-piece platform.Photoetching process piece work stage will complete stepping
Motion, scanning motion, alignment motion, leveling and focusing motion, fluctuating plate etc. are moved, to ensure that it is highly sensitive that each motion has been required
Degree and high accuracy, are provided with separate non-interfering many reference signals on Fang Jing, closed loop is realized by double-frequency interference instrument
Control and on-line measurement.Therefore Fang Jing is a complex structure, the high-precision optical part more than constraints.
Carborundum has a less thermal coefficient of expansion, thermal conductivity factor higher, heat shock resistance and elastic modelling quantity and often by with
Make optics；But because the Mohs' hardness of carborundum reaches 9.2-9.5 grades, diamond is only second to, so the carbonization after sintering
Silicon Fang Jing is difficult processing, is not suitable for the processing of big removal amount, thus carborundum Fang Jing many features be both needed to it is complete under biscuit state
Into processing.Groove structure is a typical hardly possible machining feature in carborundum Fang Jing, and groove structure diameter is big, bottom is thin, and
It is hollow Lightened structure below bottom, carborundum side's mirror biscuit bending strength is low (≤25MPa), can be produced during Tool in Cutting biscuit
Damaging, occurs when being easily caused Pocket Machining in raw vibration, therefore groove structure is typically reprocessed after the completion of sintering, is directly affected
Production efficiency.
The content of the invention
In view of above-mentioned analysis, the present invention is intended to provide a kind of carborundum side's mirror biscuit Pocket Machining method, is used to solve
Existing processing method processing efficiency is low, and process easily produces the problem of damage.
The purpose of the present invention is mainly achieved through the following technical solutions：
A kind of carborundum side's mirror biscuit Pocket Machining method, carborundum side's mirror biscuit Pocket Machining method includes following step
Suddenly：
Step 1, paraffin is filled into carborundum side's mirror biscuit loss of weight chamber hollow space；
Step 2, the processing that groove is carried out using numerical control machining center；
Step 3, the carborundum side's mirror biscuit after processing is toasted, until paraffin is all removed.
In step 1, filling paraffin is by compound paraffin and rosin in mass ratio 10:1-5:1 configuration is formed, and packing volume is big
In the half of loss of weight cavity volume.
The raw material of compound paraffin is that every 1kg fully refined paraffin waxs are added：Palmitic acid 10g-20g, stearic acid 60g-80g, arachidic acid
10g-20g, polypropylene 2g-5g, polyethylene 8g-15g, beeswax 30g-60g；
Fully refined paraffin wax is 58# fully refined paraffin waxs, 60# fully refined paraffin waxs by the mixing of any mass ratio.
The raw material of compound paraffin is that every 1kg fully refined paraffin waxs are added：Palmitic acid 16.6g, stearic acid 62.5g, arachidic acid
14.9g, polypropylene 3.3g, polyethylene 9.2g, beeswax 49.5g；
Fully refined paraffin wax is 58# fully refined paraffin waxs, 60# fully refined paraffin waxs in mass ratio 1：3 mixing.
In step 2, numerical control machining center uses the polycrystalline diamond milling cutter of Φ 10- Φ 12mm, and is entered using spiral way
Knife.
In step 2, the initial amount of feeding is 1200mm/min, and the depth of cut is 0.1mm, and the amount of feeding and the depth of cut are with processing
Carrying out be gradually reduced, and be directly proportional to the thickness of bottom portion of groove, the final amount of feeding is decreased to 600mm/min, and the depth of cut subtracts
As low as 0.05mm.
In step 3, the temperature of baking is 100-120 DEG C, and temperature need to be slowly raised to baking temperature in paraffin subtractive process,
And heating rate should keep 3-5 DEG C/min.
In step 3, the paraffin of removing is reclaimed, and reused.
The carborundum Fang Jing shaped using carborundum side's mirror biscuit Pocket Machining method, the carborundum side mirror bottom
With complicated Lightened structure, front is provided with groove, and groove diameter is more than Φ 378mm, and depth is more than 5mm, and bottom thickness is less than
Equal to 6mm, the hollow distance in distance from bottom loss of weight chamber upper surface is more than 60mm, it is desirable to machining accuracy ± 0.2mm.The beneficial effect of the present invention
Fruit is as follows：
1. the present invention reduces tool sharpening by the way that paraffin to be filled into the hollow space in the loss of weight chamber of carborundum side's mirror biscuit
The vibration produced during carborundum biscuit, improves carborundum side's mirror biscuit machining yield.
2. carborundum side's mirror groove structure can be molded in the biscuit stage using the present invention, effectively reduce and be carbonized after burning till
The processing capacity of silicon Fang Jing, improve production efficiency.
Other features and advantages of the present invention will be illustrated in the following description, and be become from specification aobvious and easy
See, or understood by implementing the present invention.The purpose of the present invention and other advantages can be wanted by the specification, right write
Specifically noted structure in book and accompanying drawing is asked to realize and obtain.
Brief description of the drawings
Accompanying drawing is only used for showing the purpose of specific embodiment, and is not considered as limitation of the present invention, in whole accompanying drawing
In, identical reference symbol represents identical part.
Fig. 1 is carborundum side's mirror Lightened structure schematic diagram；
Fig. 2 is carborundum side's mirror groove structure schematic diagram；
Fig. 3 is carborundum side's mirror profile
Specific embodiment
The preferred embodiments of the present invention are specifically described below in conjunction with the accompanying drawings, wherein, accompanying drawing constitutes the application part, and
It is used to explain principle of the invention together with embodiments of the present invention.
A kind of carborundum side's mirror biscuit Pocket Machining method, carborundum side's mirror biscuit Pocket Machining method includes following step
Suddenly：
Step 1, paraffin is filled into carborundum side's mirror biscuit loss of weight chamber hollow space；
Step 2, the processing that groove is carried out using numerical control machining center；
Step 3, the carborundum side's mirror biscuit after processing is toasted, until paraffin is all removed.
In step 1, filling paraffin is by compound paraffin and rosin in mass ratio 10:1-5:1 configuration is formed, in the present embodiment
Using 8：1, packing volume, its object is to increase bottom portion of groove support, reduces cutter more than the half of the loss of weight cavity volume
The vibration produced during processing carborundum biscuit.
The raw material of compound paraffin is that every 1kg fully refined paraffin waxs are added：Palmitic acid 10g-20g, stearic acid 60g-80g, arachidic acid
10g-20g, polypropylene 2g-5g, polyethylene 8g-15g, beeswax 30g-60g.The raw material that paraffin is combined in the present embodiment is every 1kg
Fully refined paraffin wax is added：Palmitic acid 13, stearic acid 72g, arachidic acid 16g, polypropylene 4.0g, polyethylene 12g, beeswax 55g.In paraffin
The middle a small amount of stearic acid of addition, palmitic acid, arachidic acid can effectively increase the hardness of compound paraffin, compound paraffin is easier to machine
Tool is processed；Adding polypropylene and polyethylene can simultaneously increase the hardness and toughness of compound paraffin, imitate the damping of compound paraffin
Fruit is more preferably obvious；Beeswax is added, in addition to it can increase toughness, moreover it is possible to make to meet paraffin surface more preferably smooth, it is ensured that after processing
Precision and the roughness told somebody what one's real intentions are.
Fully refined paraffin wax is 58# fully refined paraffin waxs, 60# fully refined paraffin waxs are mixed by any mass ratio, using 58# essences in the present embodiment
The mass mixings such as refining paraffin, 60# fully refined paraffin waxs.
In step 2, numerical control machining center uses the polycrystalline diamond milling cutter of Φ 10mm, and uses spiral way feed, choosing
The polycrystal diamond cutter for selecting this diameter range is based on to the cutting force of cutter and considering for Product processing efficiency.
In step 2, the initial amount of feeding is 1200mm/min, and the depth of cut is 0.1mm, and the amount of feeding and the depth of cut are with processing
Carrying out be gradually reduced, and be directly proportional to the thickness of bottom portion of groove, the final amount of feeding is decreased to 600mm/min, and the depth of cut subtracts
As low as 0.05mm.During processing is carried out, bottom portion of groove thickness is gradually decreased, the amount of feeding and penetration of a cutting tool using processing beginning setting
Amount can increase the vibration of bottom portion of groove, now reduce the amount of feeding and bite, it is possible to decrease bottom portion of groove vibrates, it is to avoid carborundum side
Damage is produced during mirror biscuit Pocket Machining.
In step 3, the temperature of baking is 100 DEG C, and heating rate should keep 3-5 DEG C/min to setting in paraffin subtractive process
Temperature, temperature is too high to cause carborundum side's mirror biscuit to ftracture.
In step 3, the paraffin of removing is reclaimed, and reused.
The carborundum Fang Jing shaped using carborundum side's mirror biscuit Pocket Machining method, carborundum Fang Jing are provided with
Groove, groove diameter is more than Φ 378mm, and depth is more than 5mm, and bottom thickness is less than or equal to 6mm, distance from bottom loss of weight chamber upper surface
Hollow distance is more than 60mm, it is desirable to machining accuracy ± 0.2mm.
A certain carborundum side's mirror biscuit is processed using the method for the present invention, it is specific as follows：
The processing of carborundum side's mirror biscuit loss of weight cavity segment is completed first, and the chip inside loss of weight chamber must be complete with dust catcher
Portion is drained only, and heating paraffin is fused into liquid to 100 DEG C, first adds a small amount of vasoliniment, it is to be solidified after add again, repeat
This operation accounts for more than half of loss of weight cavity volume until adding paraffin volume, you can stop operation.
Secondly the polycrystalline diamond milling cutter of selection Φ 10mm, during square mirror biscuit Pocket Machining, starts to enter using spiral way
Knife is processed with the 1200mm/min amount of feeding, the bite of 0.1mm, and when being machined to 4mm depths, the amount of feeding is adjusted to 600mm/
Min, bite is adjusted to 0.05mm and is processed, and pilot process can be adjusted within this range.
After the completion of last carborundum side's mirror biscuit whole feature machinings, being placed in can be in the baking oven of setting program, and setting heats up
5 DEG C/min to 100 DEG C of insulation of speed removes paraffin in 2 hours, and the paraffin of removing is reusable.
In sum, a kind of carborundum side's mirror biscuit Pocket Machining method is the embodiment of the invention provides, using the present invention
Processing method the yield rate in square mirror biscuit process can be improved to more than 95%, reduce carborundum Fang Jing after sintering
Processing capacity, production efficiency can improve 3-5 times.
The above, the only present invention preferably specific embodiment, but protection scope of the present invention is not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can be readily occurred in,
Should all be included within the scope of the present invention.
Claims (9)
1. a kind of carborundum side's mirror biscuit Pocket Machining method, it is characterised in that carborundum side's mirror biscuit Pocket Machining method
Comprise the following steps：
Step 1, paraffin is filled into carborundum side's mirror biscuit loss of weight chamber hollow space；
Step 2, the processing that groove is carried out using numerical control machining center；
Step 3, the carborundum side's mirror biscuit after processing is toasted, until paraffin is all removed.
2. carborundum side's mirror biscuit Pocket Machining method according to claim 1, it is characterised in that in the step 1, fill out
Fill with paraffin by compound paraffin and rosin in mass ratio 10:1-5:1 configuration is formed, and packing volume is more than the loss of weight cavity volume
Half.
3. carborundum side's mirror biscuit Pocket Machining method according to claim 2, it is characterised in that the compound paraffin
Raw material is that every 1kg fully refined paraffin waxs are added：Palmitic acid 10g-20g, stearic acid 60g-80g, arachidic acid 10g-20g, polypropylene 2g-
5g, polyethylene 8g-15g, beeswax 30g-60g；
The fully refined paraffin wax is 58# fully refined paraffin waxs, 60# fully refined paraffin waxs by the mixing of any mass ratio.
4. carborundum side's mirror biscuit Pocket Machining method according to claim 3, it is characterised in that the compound paraffin
Raw material is that every 1kg fully refined paraffin waxs are added：Palmitic acid 16.6g, stearic acid 62.5g, arachidic acid 14.9g, polypropylene 3.3g, polyethylene
9.2g, beeswax 49.5g；
The fully refined paraffin wax is 58# fully refined paraffin waxs, 60# fully refined paraffin waxs in mass ratio 1：3 mixing.
5. carborundum side's mirror biscuit Pocket Machining method according to claim 1, it is characterised in that in the step 2, institute
The polycrystalline diamond milling cutter that numerical control machining center uses Φ 10- Φ 12mm is stated, and uses spiral way feed.
6. carborundum side's mirror biscuit Pocket Machining method according to claim 5, it is characterised in that in the step 2, just
The amount of feeding of beginning is 1200mm/min, and the depth of cut is 0.1mm, and the amount of feeding and the depth of cut are gradually reduced with the carrying out of processing, and
It is directly proportional to the thickness of bottom portion of groove, the final amount of feeding is decreased to 600mm/min, the depth of cut is decreased to 0.05mm.
7. carborundum side's mirror biscuit Pocket Machining method according to claim 1, it is characterised in that in the step 3, dries
Roasting temperature is 100-120 DEG C, and temperature need to be slowly raised to baking temperature in paraffin subtractive process, and heating rate should keep 3-
5℃/min。
8. carborundum side's mirror biscuit Pocket Machining method according to claim 7, it is characterised in that in the step 3, returns
The paraffin of removing is received, and is reused.
9. the carborundum side that any described carborundum side's mirror biscuit Pocket Machining method of usage right requirement 1 to 8 is shaped
Mirror, it is characterised in that the carborundum side mirror bottom has complicated Lightened structure, front is provided with groove, and groove diameter is more than Φ
378mm, depth is more than 5mm, and bottom thickness is less than or equal to 6mm, and the hollow distance in distance from bottom loss of weight chamber upper surface is more than 60mm,
Seek machining accuracy ± 0.2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710036699.0A CN106827255B (en) | 2017-01-18 | 2017-01-18 | A kind of silicon carbide side's mirror biscuit Pocket Machining method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710036699.0A CN106827255B (en) | 2017-01-18 | 2017-01-18 | A kind of silicon carbide side's mirror biscuit Pocket Machining method |
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| Publication Number | Publication Date |
|---|---|
| CN106827255A true CN106827255A (en) | 2017-06-13 |
| CN106827255B CN106827255B (en) | 2019-05-31 |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1051929A (en) * | 1990-12-06 | 1991-06-05 | 李建新 | Color flame candle |
| JP2012102264A (en) * | 2010-11-11 | 2012-05-31 | Kitagawa Ind Co Ltd | Member for countermeasure against heat |
| CN102880009A (en) * | 2012-09-04 | 2013-01-16 | 清华大学 | Six-degree-of-freedom micro-motion worktable |
| CN102880013A (en) * | 2012-09-28 | 2013-01-16 | 清华大学 | Reticle stage worktable |
| CN104387073A (en) * | 2014-10-09 | 2015-03-04 | 奉化市中立密封件有限公司 | Method for manufacturing ultrafine high-toughness silicon carbide ceramic material based on reaction sintering technology |
| CN105436823A (en) * | 2015-11-24 | 2016-03-30 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for controlling machining deformation of thin-walled part |
| CN105522206A (en) * | 2015-12-29 | 2016-04-27 | 湖南航天环宇通信科技股份有限公司 | Machining method for aluminum alloy thin-walled cavity part |
| WO2016202359A1 (en) * | 2015-06-15 | 2016-12-22 | Bison International B.V. | High strength and moisture resistant adhesive |
-
2017
- 2017-01-18 CN CN201710036699.0A patent/CN106827255B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1051929A (en) * | 1990-12-06 | 1991-06-05 | 李建新 | Color flame candle |
| JP2012102264A (en) * | 2010-11-11 | 2012-05-31 | Kitagawa Ind Co Ltd | Member for countermeasure against heat |
| CN102880009A (en) * | 2012-09-04 | 2013-01-16 | 清华大学 | Six-degree-of-freedom micro-motion worktable |
| CN102880013A (en) * | 2012-09-28 | 2013-01-16 | 清华大学 | Reticle stage worktable |
| CN104387073A (en) * | 2014-10-09 | 2015-03-04 | 奉化市中立密封件有限公司 | Method for manufacturing ultrafine high-toughness silicon carbide ceramic material based on reaction sintering technology |
| WO2016202359A1 (en) * | 2015-06-15 | 2016-12-22 | Bison International B.V. | High strength and moisture resistant adhesive |
| CN105436823A (en) * | 2015-11-24 | 2016-03-30 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for controlling machining deformation of thin-walled part |
| CN105522206A (en) * | 2015-12-29 | 2016-04-27 | 湖南航天环宇通信科技股份有限公司 | Machining method for aluminum alloy thin-walled cavity part |
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| CN106827255B (en) | 2019-05-31 |
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