CN106824686A - Device and method for removing sprayed surface high spot - Google Patents

Device and method for removing sprayed surface high spot Download PDF

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Publication number
CN106824686A
CN106824686A CN201710134221.1A CN201710134221A CN106824686A CN 106824686 A CN106824686 A CN 106824686A CN 201710134221 A CN201710134221 A CN 201710134221A CN 106824686 A CN106824686 A CN 106824686A
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CN
China
Prior art keywords
supporting plate
control unit
drive
high spot
described control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710134221.1A
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Chinese (zh)
Other versions
CN106824686B (en
Inventor
王艳华
冯敏强
廖良生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Jicui Institute of Organic Optoelectronics Co Ltd
Original Assignee
Jiangsu Jicui Institute of Organic Optoelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201710134221.1A priority Critical patent/CN106824686B/en
Publication of CN106824686A publication Critical patent/CN106824686A/en
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Publication of CN106824686B publication Critical patent/CN106824686B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface

Landscapes

  • Special Spraying Apparatus (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Treatment Of Fiber Materials (AREA)

Abstract

Present invention is disclosed a kind of device and method for removing sprayed surface high spot, supporting plate, optical profilometer are included, the optical profilometer is electrically connected with control unit;Ultrasonic unit is provided with below the supporting plate, it is moved the ultrasonic unit along X-direction by actuator drives, and the transmission device and ultrasonic unit are electrically connected with described control unit;The supporting plate is provided with the drive device for driving and being moved back and forth before and after it, and the drive device is electrically connected with described control unit.The beneficial effects are mainly as follows:Simple and ingenious structure, efficiently solve intersection evenness of membranous layer it is poor produce display brightness it is uneven, the problem of various vestiges is caused, while also greatly extending its service life.

Description

Device and method for removing sprayed surface high spot
Technical field
The present invention relates to surface spraying field, specifically, the device of sprayed surface high spot is more particularly, to removed And method.
Background technology
With expanding economy, Display Technique is fast-developing, including FMM evaporations turn into industry with ink jet printing OLED technology Focus.Fine metal mask plate (FMM) be deposited with and ink jet printing between Main Differences be manufacture these organic layers equipment and Material., it is necessary to use a vacuum equipment when manufacturing these organic layers using FMM.Solid-state material is added into the device, then Operation principle by heating evaporation ink print OLED is different.General principle and the common ink-jet printer class of family and office Seemingly, ink jet printing method is mainly and is melted OLED organic materials using solvent, then by the direct spray printing of material in substrate surface Form R (red), G (green), B (indigo plant) organic luminous layer.
But due to ink gun limited width in actual ink-jet, need particles to spray, in the friendship of adjacent scan areas Evenness of membranous layer is poor at boundary produces display brightness uneven, causes the phenomenon of various vestiges, is greatly influenceing user just Often use, while also can largely reduce its service life.
The content of the invention
The purpose of the present invention is to overcome the shortcomings of that prior art is present, there is provided a kind of for removing sprayed surface high spot Device and method.
The purpose of the present invention is achieved through the following technical solutions:
A kind of device for removing sprayed surface high spot, including supporting plate, and the shower nozzle above supporting plate are adjacent The distance between described shower nozzle is less than the medium that the distance that medium is sprayed between shower nozzle its described, the adjacent shower nozzle spray Overlapping portion is lug boss, and the side of the supporting plate is provided with for the optical profilometer to the lug boss precise positioning, described Optical profilometer is electrically connected with control unit;Be provided with ultrasonic unit below the supporting plate, the ultrasonic unit by It is moved actuator drives along X-direction, and the transmission device and ultrasonic unit are electrically connected with described control unit;Institute State supporting plate and be provided with the drive device for driving and being moved back and forth before and after it, the drive device electrically connects with described control unit Connect.
Preferably, the transmission device is drive motor, and the motor drive shaft of the drive motor is affixed with drive lead screw, described Rectilinear movement of the convert rotational motion of drive lead screw into the X-direction of the ultrasonic unit.
Preferably, the ultrasonic unit at least includes supersonic oscillator and base, the axis and Y of the supersonic oscillator Direction of principal axis is parallel, and the base is connected with the drive lead screw.
Preferably, the bottom of the base is provided with the screw thread matched with the drive lead screw, between the two by screw mandrel Transmission.
Preferably, the drive device at least includes the body of rod positioned at the supporting plate both sides, is also fixed on the body of rod There is guide rail, the supporting plate is slidably disposed on the guide rail.
Preferably, also including for driving the driver moved back and forth before and after the supporting plate, the driver with it is described Control unit is electrically connected with.
Present invention further teaches a kind of method for removing sprayed surface high spot, comprise the following steps:
S1, coordinate setting step, the optical profilometer is controlled by the coordinate on the border of the supporting plate 1 by described control unit It is set to origin;
S2, detecting step, the optical profilometer detect to the upper surface of the supporting plate after spraying, the lug boss are entered Row is accurately positioned, and measures its coordinate value, height h and angle character value a, transfers data to described control unit;
S3, alignment procedures, the coordinate value that described control unit is obtained according to its measurement control to surpass described in the actuator drives Acoustic wave device is moved horizontally;Control the drive device to drive the supporting plate to move forward and backward simultaneously, make the ultrasonic unit To the underface of the lug boss, the transmission device and drive device stop motion immediately remain static;
S4, concussion process step, described control unit control the supersonic oscillator of the ultrasonic unit according to its measurement data Start to launch ultrasonic wave and the lug boss is shaken, the energy of the ultrasonic wave meets equation below:W=(P*V/h*V/ h*h/t*A*A)/(4h/tan a), wherein:P is medium inkjet materials density, and A is amplitude, and V is velocity of wave, and h is height of projection, T is action time, and a is angle character value;
S5, reset process, described control unit control the transmission device and drive device to reset;
S6, again detecting step, the optical profilometer again to concussion after the upper surface of the supporting plate detect, if The angle character value a of the supporting plate reaches requirement, then all devices reset;If the angle character value a of the supporting plate does not reach To requiring, then repeat step 1 is to step 6, untill the angle character value a of the supporting plate reaches requirement.
Preferably, the amplitude of the lug boss height reduction is directly proportional to the frequency of the ultrasonic wave.
The beneficial effects are mainly as follows:Simple and ingenious structure, efficiently solves intersection evenness of membranous layer Poor generation display brightness is uneven, the problem of various vestiges is caused, while also greatly extending its service life.
Brief description of the drawings
Technical solution of the present invention is described further below in conjunction with the accompanying drawings:
Fig. 1:Structural representation of the invention;
Fig. 2:Lug boss schematic diagram of the invention.
Specific embodiment
Below with reference to specific embodiment shown in the drawings, the present invention will be described in detail.But these implementation methods are simultaneously The present invention is not limited to, structure that one of ordinary skill in the art is made according to these implementation methods, method or functionally Conversion is all contained in protection scope of the present invention.
As shown in figure 1, present invention is disclosed a kind of device for removing sprayed surface high spot, including supporting plate 1, and Shower nozzle 2 above supporting plate, is provided with glass film plates between the supporting plate 1 and the shower nozzle 2, the glass film plates falls to putting In the distance between described shower nozzle 2 in the supporting plate 1 and adjacent less than the distance that medium is sprayed between shower nozzle its described 2, Due to ink gun limited width, particles are needed to spray, the poor generation of the intersection evenness of membranous layer in adjacent scan areas shows Show device brightness irregularities, the overlapping portion for medium easily occur is lug boss 3.
The side of the supporting plate 1 is provided with for the optical profilometer to the precise positioning of the lug boss 3, the optics wheel The wide simple course of work of instrument is as follows, is sent from its light source and a branch of is become to enter polarization spectro rib after linearly polarized light by the polarizer Mirror, the polarization splitting prism is divided into two beams has small angle, and the mutually perpendicular linearly polarized light of direction of vibration.This two Shu Guang is projected onto the upper surface of the supporting plate 1 by after microcobjective, producing a parallel shearing displacement, from the supporting plate The two beam crossed polarized lights that 1 upper surface is reflected back are combined collinearly again through backtracking by polarization splitting prism, are then passed through Interfered after quarter wave plate and analyzer, using phase shift interference technology, realized to the upper surface lug boss 3 of the supporting plate 1 Height precise positioning and elevation carrection.The optical profilometer is electrically connected with control unit, and the optical profilometer will be measured The data for obtaining afterwards are conveyed to described control unit.
The lower section of the supporting plate 1 is provided with ultrasonic unit 5, and the ultrasonic unit 5 drives it along X by transmission device 6 Direction of principal axis is moved, and the transmission device 6 and ultrasonic unit 5 are electrically connected with described control unit;The supporting plate 1 is provided with The drive device 7 moved back and forth before and after it, the drive device 7 is driven to be electrically connected with described control unit.
The ultrasonic unit 5 at least includes supersonic oscillator 52 and base 53, the axis and Y of the supersonic oscillator 52 Direction of principal axis is parallel, and the carrying out launched by the supersonic oscillator 52 is shaken the lug boss 3, reduces the projection The height in portion 3, lifts the homogeneity of the upper level of supporting plate 1.The base 53 is connected with the drive lead screw 62, i.e., The bottom of the base 53 is provided with the screw thread matched with the drive lead screw 62, between the two by screw rod transmission.The biography Dynamic device 6 is drive motor 61, and the motor drive shaft of the drive motor 61 is affixed with drive lead screw 62, the rotation of the drive lead screw 62 The rectilinear movement of the dynamic X-direction for changing into the ultrasonic unit 5 of transhipment.
The present invention controls the rotating speed of the transmission device 6 by described control unit according to the data of the optical profilometer And rotation time, while also controlling the ultrasonic unit 5 to launch time and the frequency of ultrasonic wave.
The drive device 7 at least includes the body of rod 8 positioned at the both sides of the supporting plate 1, is further fixed on leading on the body of rod 8 Rail 82, the supporting plate 1 is slidably disposed on the guide rail 82.Before for driving the supporting plate 1 The driver 81 for moving back and forth afterwards, the driver 81 is electrically connected with described control unit.
Present invention further teaches a kind of method for removing sprayed surface high spot, comprise the following steps:
S1, coordinate setting step, the optical profilometer is controlled by the coordinate on the border of the supporting plate 1 by described control unit It is set to origin;
S2, detecting step, the optical profilometer are detected to the upper surface of the supporting plate 1 after spraying, to the lug boss 3 It is accurately positioned, and is measured its coordinate value, height h and angle character value a, is transferred data to described control unit;
S3, alignment procedures, the coordinate value that described control unit is obtained according to its measurement control the transmission device 6 to drive described Ultrasonic unit 5 is moved horizontally;Control the drive device 7 to drive the supporting plate 1 to move forward and backward simultaneously, make the ultrasonic wave Behind device 5 to the underface of the lug boss 3, the transmission device 6 and the stop motion immediately of drive device 7, in static shape State;
S4, concussion process step, described control unit control the ultrasonic wave shake of the ultrasonic unit 5 according to its measurement data Son 52 starts to launch ultrasonic wave the lug boss 3 is shaken, and the energy of the ultrasonic wave meets equation below:W=(P* V/h*V/h*h/t*A*A)/(4h/tan a),
Ultrasonic energy(P*F*F*V*A*A)/2, P is medium inkjet materials density, and F sound frequencies, A is amplitude, and V is velocity of wave, L It is raised bottom width, h is height of projection, and T is action time, and a is angle character value
W=(P*F*F*V*A*A)/2L;
V=F*h =h/t;
Tan a=h/0.5L;
Therefore can obtain W=(P*V/h*V/h*h/t*A*A)/(4h/tan a more than).
S5, reset process, described control unit control the transmission device 6 and drive device 7 to reset;
S6, again detecting step, the optical profilometer again to concussion after the upper surface of the supporting plate 1 detect, If the angle character value a of the supporting plate 1 reaches requirement, all devices reset;If the angle character value a of the supporting plate 1 Not up to require, then repeat step 1 is to step 6, untill the angle character value a of the supporting plate 1 reaches requirement.
Preferably, the amplitude of the height reduction of the lug boss 3 is directly proportional to the frequency of the ultrasonic wave.
The beneficial effects are mainly as follows:Simple and ingenious structure, efficiently solves intersection evenness of membranous layer Poor generation display brightness is uneven, the problem of various vestiges is caused, while also greatly extending its service life.
It should be understood that, although the present specification is described in terms of embodiments, but not each implementation method only includes one Individual independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art will should say Used as an entirety, technical scheme in each implementation method can also be through appropriately combined, and forming those skilled in the art can for bright book With the other embodiment for understanding.
Those listed above is a series of to be described in detail only for feasibility implementation method of the invention specifically Bright, they simultaneously are not used to limit the scope of the invention, all equivalent implementations made without departing from skill spirit of the present invention Or change should be included within the scope of the present invention.

Claims (8)

1. it is used to remove the device of sprayed surface high spot, including supporting plate(1), and the shower nozzle above supporting plate(2), phase The adjacent shower nozzle(2)The distance between be less than its described shower nozzle(2)Between spray medium distance, the adjacent shower nozzle (2)The overlapping portion of the medium of ejection is lug boss(3), it is characterised in that:The supporting plate(1)Side be provided with for described Lug boss(3)The optical profilometer of precise positioning, the optical profilometer is electrically connected with control unit;The supporting plate(1) Lower section be provided with ultrasonic unit(5), the ultrasonic unit(5)By transmission device(6)It is driven to be moved along X-direction, institute State transmission device(6)And ultrasonic unit(5)It is electrically connected with described control unit;The supporting plate(1)It is provided with and drives it The front and rear drive device for moving back and forth(7), the drive device(7)It is electrically connected with described control unit.
2. the device for removing sprayed surface high spot according to claim 1, it is characterised in that:The transmission device (6)It is drive motor(61), the drive motor(61)Motor drive shaft and drive lead screw(62)It is affixed, the drive lead screw(62) Convert rotational motion into the ultrasonic unit(5)X-direction rectilinear movement.
3. the device for removing sprayed surface high spot according to claim 2, it is characterised in that:The ultrasonic wave dress Put(5)At least include supersonic oscillator(52)And base(53), the supersonic oscillator(52)Axis it is parallel with Y direction, The base(53)With the drive lead screw(62)Connection.
4. the device for removing sprayed surface high spot according to claim 3, it is characterised in that:The base(53) Bottom be provided with and the drive lead screw(62)The screw thread for matching, between the two by screw rod transmission.
5. the device for removing sprayed surface high spot according to claim 1, it is characterised in that:The drive device (7)At least include being located at the supporting plate(1)The body of rod of both sides(8), the body of rod(8)On be further fixed on guide rail(82), it is described Supporting plate(1)It is slidably disposed in the guide rail(82)On.
6. the device for removing sprayed surface high spot according to claim 5, it is characterised in that:Also include for driving Move the supporting plate(1)The front and rear driver for moving back and forth(81), the driver(81)It is electrically connected with described control unit.
7. the method for removing sprayed surface high spot according to claim 1, it is characterised in that including following step Suddenly:
S1, coordinate setting step, the optical profilometer is controlled by the supporting plate by described control unit(1)The seat on border It is demarcated as origin;
S2, detecting step, the optical profilometer is to the supporting plate after spraying(1)Upper surface detected, to the projection Portion(3)It is accurately positioned, and is measured its coordinate value, height(h)And angle character value(a), transfer data to the control Unit;
S3, alignment procedures, the coordinate value that described control unit is obtained according to its measurement, control the transmission device(6)Drive institute State ultrasonic unit(5)Move horizontally;Control the drive device simultaneously(7)Drive the supporting plate(1)It is movable, make institute State ultrasonic unit(5)To the lug boss(3)Underface after, the transmission device(6)And drive device(7)Stop immediately Motion, remains static;
S4, concussion process step, described control unit control the ultrasonic unit according to its measurement data(5)Ultrasonic wave Shake(52)Start to launch ultrasonic wave to the lug boss(3)Shaken, the energy of the ultrasonic wave meets equation below: W=(P*V/h*V/h*h/t*A*A)/(4h/tan a), wherein:P is medium inkjet materials density, and A is amplitude, and V is velocity of wave, h It is height of projection, t is action time, and a is angle character value;
S5, reset process, described control unit control the transmission device(6)And drive device(7)Reset;
S6, again detecting step, the optical profilometer again to concussion after the supporting plate(1)Upper surface examined Survey, if the supporting plate(1)Angle character value(a)Requirement is reached, then all devices reset;If the supporting plate(1)Angle Degree characteristic value(a)Not up to require, then repeat step 1 is to step 6, until the supporting plate(1)Angle character value(a)Reach It is required that untill.
8. the method for removing sprayed surface high spot according to claim 7, it is characterised in that:The lug boss (3)The amplitude of height reduction is directly proportional to the frequency of the ultrasonic wave.
CN201710134221.1A 2017-03-08 2017-03-08 Device and method for removing protrusions on sprayed surface Active CN106824686B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710134221.1A CN106824686B (en) 2017-03-08 2017-03-08 Device and method for removing protrusions on sprayed surface

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Application Number Priority Date Filing Date Title
CN201710134221.1A CN106824686B (en) 2017-03-08 2017-03-08 Device and method for removing protrusions on sprayed surface

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CN106824686B CN106824686B (en) 2023-04-25

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Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1208505A (en) * 1967-07-04 1970-10-14 Leitz Ernst Gmbh A device for measuring distances or angles by photoelectric scanning
MX9205742A (en) * 1991-10-15 1993-04-01 Minnesota Mining & Mfg METHOD AND APPARATUS TO APPLY A COATING, ULTRASONICALLY AUXILIATED.
US5935331A (en) * 1994-09-09 1999-08-10 Matsushita Electric Industrial Co., Ltd. Apparatus and method for forming films
JP2001129457A (en) * 1999-11-05 2001-05-15 Noritake Co Ltd Coating method and coating device
CN2447064Y (en) * 2000-11-04 2001-09-12 深圳南方中集集装箱制造有限公司 Crossless automatic spraying device
JP2002079162A (en) * 2000-09-05 2002-03-19 Toppan Printing Co Ltd Ultrasonic coating head and coater using the same
CN1422746A (en) * 2001-11-28 2003-06-11 精工爱普生株式会社 Jetting out method and apparatus
CN1442235A (en) * 2002-02-21 2003-09-17 爱信化工株式会社 Wide opening nozzle and spray coating method using said wide opening nozzle
JP2004073969A (en) * 2002-08-13 2004-03-11 Dainippon Ink & Chem Inc Method and device for coating flat plate body to be coated
CN1552091A (en) * 2001-07-03 2004-12-01 ���������ƴ���ʽ���� Coating device and coating method
CN1976755A (en) * 2004-02-02 2007-06-06 约翰·斯蒂芬·莫顿 Cost effective automated preparation and coating method for large surfaces
CN101766058A (en) * 2008-05-29 2010-06-30 松下电器产业株式会社 Organic electroluminescent display and manufacturing method therefor
CN101791604A (en) * 2010-03-18 2010-08-04 清华大学 Device and method for spraying liquid material film based on ultrasonic vibration table
CN102000650A (en) * 2009-08-28 2011-04-06 卡西欧计算机株式会社 Application device and driving method thereof
US20130017367A1 (en) * 2010-03-30 2013-01-17 Wise S.R.L. Method for the production of functionalized elastomeric manufactured articles and manufactured articles thus obtained
CN103153483A (en) * 2010-09-22 2013-06-12 赫克斯冈技术中心 Surface spattering device
KR20150038839A (en) * 2013-10-01 2015-04-09 신동호 Painting pre-processing ultrasonic apparatus
CN205236322U (en) * 2015-12-23 2016-05-18 汕头市远东轻化装备有限公司 Floating mechanism of coating machine
CN206543698U (en) * 2017-03-08 2017-10-10 江苏集萃有机光电技术研究所有限公司 A kind of device for being used to remove sprayed surface high spot

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1208505A (en) * 1967-07-04 1970-10-14 Leitz Ernst Gmbh A device for measuring distances or angles by photoelectric scanning
MX9205742A (en) * 1991-10-15 1993-04-01 Minnesota Mining & Mfg METHOD AND APPARATUS TO APPLY A COATING, ULTRASONICALLY AUXILIATED.
US5935331A (en) * 1994-09-09 1999-08-10 Matsushita Electric Industrial Co., Ltd. Apparatus and method for forming films
JP2001129457A (en) * 1999-11-05 2001-05-15 Noritake Co Ltd Coating method and coating device
JP2002079162A (en) * 2000-09-05 2002-03-19 Toppan Printing Co Ltd Ultrasonic coating head and coater using the same
CN2447064Y (en) * 2000-11-04 2001-09-12 深圳南方中集集装箱制造有限公司 Crossless automatic spraying device
CN1552091A (en) * 2001-07-03 2004-12-01 ���������ƴ���ʽ���� Coating device and coating method
CN1422746A (en) * 2001-11-28 2003-06-11 精工爱普生株式会社 Jetting out method and apparatus
CN1442235A (en) * 2002-02-21 2003-09-17 爱信化工株式会社 Wide opening nozzle and spray coating method using said wide opening nozzle
JP2004073969A (en) * 2002-08-13 2004-03-11 Dainippon Ink & Chem Inc Method and device for coating flat plate body to be coated
CN1976755A (en) * 2004-02-02 2007-06-06 约翰·斯蒂芬·莫顿 Cost effective automated preparation and coating method for large surfaces
CN101766058A (en) * 2008-05-29 2010-06-30 松下电器产业株式会社 Organic electroluminescent display and manufacturing method therefor
CN102000650A (en) * 2009-08-28 2011-04-06 卡西欧计算机株式会社 Application device and driving method thereof
CN101791604A (en) * 2010-03-18 2010-08-04 清华大学 Device and method for spraying liquid material film based on ultrasonic vibration table
US20130017367A1 (en) * 2010-03-30 2013-01-17 Wise S.R.L. Method for the production of functionalized elastomeric manufactured articles and manufactured articles thus obtained
CN103153483A (en) * 2010-09-22 2013-06-12 赫克斯冈技术中心 Surface spattering device
KR20150038839A (en) * 2013-10-01 2015-04-09 신동호 Painting pre-processing ultrasonic apparatus
CN205236322U (en) * 2015-12-23 2016-05-18 汕头市远东轻化装备有限公司 Floating mechanism of coating machine
CN206543698U (en) * 2017-03-08 2017-10-10 江苏集萃有机光电技术研究所有限公司 A kind of device for being used to remove sprayed surface high spot

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