CN106814661A - Machine table monitoring interlocking system - Google Patents
Machine table monitoring interlocking system Download PDFInfo
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- CN106814661A CN106814661A CN201510953498.8A CN201510953498A CN106814661A CN 106814661 A CN106814661 A CN 106814661A CN 201510953498 A CN201510953498 A CN 201510953498A CN 106814661 A CN106814661 A CN 106814661A
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 152
- 230000002159 abnormal effect Effects 0.000 claims abstract description 30
- 230000005540 biological transmission Effects 0.000 claims description 12
- 230000002547 anomalous effect Effects 0.000 claims description 8
- 208000012661 Dyskinesia Diseases 0.000 claims description 3
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0428—Safety, monitoring
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/25—Pc structure of the system
- G05B2219/25257—Microcontroller
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- Engineering & Computer Science (AREA)
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- Testing And Monitoring For Control Systems (AREA)
Abstract
The application provides a machine monitoring interlocking system, which is arranged between a first remote operation interface and a plurality of machine modules and comprises an input/output interface and a monitoring processor. The input/output interface is connected between the plurality of machine modules and the network. The monitoring processor is connected to the plurality of machine modules through the input/output interface and is connected to the first remote operation interface through a network. When at least one of the machine modules is in an abnormal working mode, the machine modules transmit at least one abnormal working signal to the monitoring processor, and the monitoring processor locks the first remote operation interface corresponding to the at least one abnormal working signal. And releasing the locking of the first remote operation interface until the user operates the near-end operation interface to enable all the machine platform modules to return to the normal working mode.
Description
Technical field
On a kind of bench monitoring interlock system, more precisely, the application provides a kind of various abnormal operations according to board module to the application, limits remote control ability to ensure the bench monitoring interlock system of security.
Background technology
The continuous advancement of ic manufacturing technology has been developed that many new semiconductor technologies, and it generally needs many inputs, it is necessary to critically regulate and control to maintain preferred processing quality.Many different techniques are needed from raw semiconductor to the integrated circuit package for completing encapsulation, the growing process of such as semi-conducting material, the cutting technique that wafer is become from semiconductor crystal bar, film depositing technique, etch process, implanting processes, packaging technology and test program, and these techniques have the quite poor opposite sex each other, mostly carried out in different regions, and different technique mostly uses different control technologies.
In recent years, semiconductor manufacturing board is more strided forward towards the intelligent fields with automation, wherein with intelligent monitoring function, can optimize technique, reduce production cost, increase efficiency and quality make operator's thought be substantially reduced with labour demand.Therefore each industry develops remote monitoring function for semiconductor manufacturing board one after another.
But, in existing long distance control system, still suffer from the situation for needing to exclude board failure through near-end operation, but, when maintenance personal or user are operated in near-end, lack security mechanism to ensure that user from remotely being operated, therefore cannot often jeopardize the personal safety of near-end maintenance personal.
The content of the invention
In order to solve the above problems, the application provides a kind of bench monitoring interlock system, it is arranged between the first remote operation interface and multiple board modules, first remote operation interface controls multiple board modules through network connection and for user, and multiple board modules are respectively configured with near-end operate interface and operate multiple board modules, system to include input/output interface and monitoring processor for user's near-end.Input/output interface, is connected between multiple board modules and network.Monitoring processor is connected to multiple board modules through input/output interface, and through network connection to the first remote operation interface.Wherein when at least one of multiple board modules is in anomalous operating mode, it transmits at least one abnormal work signal to monitoring processor, monitoring processor at least one abnormal work semaphore lock the first remote operation interface of correspondence, so that user cannot be through the first remote operation Interface Controller multiple board module, until user's operation near-end operate interface makes all multiple board modules return to normal mode of operation, and transmit normal work signal to monitoring processor, locking of the monitoring processor correspondence normal work signal relief to the first remote operation interface.
Preferably, bench monitoring interlock system can also include the second remote operation interface, it is connected to input/output interface and controls multiple board modules for user, wherein when at least one of multiple board modules is in anomalous operating mode, it transmits at least one abnormal work signal to monitoring processor, monitoring processor at least one abnormal work signal of correspondence, lock the second remote operation interface, so that user cannot be through the second remote operation Interface Controller multiple board module, until user's operation near-end operate interface makes all multiple board modules return to normal mode of operation, and transmit normal work signal to monitoring processor, locking of the monitoring processor correspondence normal work signal relief to the second remote operation interface.
Preferably, bench monitoring interlock system can also include hardware interface and administrator interface.Hardware interface is arranged between monitoring processor and network.Through network connection to hardware interface, it is configured for user when monitoring processor locks the first remote operation interface or the second remote operation interface to administrator interface, controls monitoring processor and multiple board modules.
Preferably, bench monitoring interlock system can also include image monitoring module, it is configured at multiple board module the week side of boss, its through input output interface be connected to monitoring processor, and processed through monitoring processor and export the image monitoring signal related to multiple board modules to the first remote operation interface and the second remote operation interface.
Preferably, when at least one of multiple boards is in anomalous operating mode, monitoring processor continued operation and image output monitors signal to the first remote operation interface and the second remote operation interface.
Preferably; image monitoring module can also detect the warning region of multiple board module the week side of boss; if image monitoring module has abnormal movement in detecting warning region; its transmission alarm signal to monitoring processor, monitoring processor locks the first remote operation interface and the second remote operation interface according to alarm signal.
Preferably, input/output interface by etc. normal work signal and wait abnormal work signal to be converted to data signal, monitoring processor according to etc. data signal computing obtain monitored results, and according to monitored results judge whether lock the first remote operation interface and the second remote operation interface.
Preferably, monitoring processor is connected to the second RCI through relay, and produces control signal to transmit to relay according to monitored results, and relay switches according to control signal between opening and closed mode.
Preferably, the first remote operation interface and the second remote operation interface respectively include keyboard, mouse, screen and general-purpose computing system.
In sum, the signal that the bench monitoring interlock system of the application passes through the multiple board modules for the treatment of, under abnormal operation, cuts off any operation of RCI in a straightforward manner, until near-end user excludes abnormality, the locking to RCI is released then.The bench monitoring interlock system of the application reaches the flexibility of the applicability and system of height except with maltilevel security mechanism, can be also adjusted according to different platform module.
Brief description of the drawings
The above and other feature and advantage of the application will describe its exemplary embodiments in detail and become more apparent from by referring to accompanying drawing, wherein：
Fig. 1 is the block diagram of the first embodiment of the bench monitoring interlock system according to the application.
Fig. 2 is the block diagram of the second embodiment of the bench monitoring interlock system according to the application.
Fig. 3 is the hardware structure schematic diagram of the second embodiment of the bench monitoring interlock system according to the application.
Fig. 4 is the decision flow chart of the bench monitoring interlock system according to the application.
Fig. 5 is that the image monitoring module of the bench monitoring interlock system according to the application sets schematic diagram.
Description of reference numerals
100、200、500：First remote operation interface
101-104、201-204、501-504：Board module
105、205、305、405、505：Network
106-109、206-209、306-309、506-509：Near-end operate interface
110、210：Input/output interface
111、211、311：Monitoring processor
112、212：Abnormal work signal
113、213：Normal work signal
214、514：Second remote operation interface
215、415、515：Hardware interface
216、416、516：Administrator interface
217、517：Image monitoring module
Int1-Int4：Interlocking switch
O：Normal opened contact
G：Common contact
C：Normally closed contact
Relay1：First relay
CON1：First contact
USB Hub：Usb hub
GPIO：General output/incoming interface
TX：Serial transmission transmitter
K：Keyboard signal
S：Mouse signal
V：Signal of video signal
DI：Digital input end
DI(H)：High levels digital input signals
DI(L)：Low level digital input signals
DO：Digital output end
DVI：Digital video interface
CIM：Computer information management end
PC：General-purpose computations generator terminal
RS：Signal receiving end
NC：Normally off
NO：Normally open
IPCAM：Image sensor apparatus
H：High-level voltage
L：Low level voltage
RCVM：Remote control Image Management is united
SR：Control zone
Specific embodiment
It is the effect for understanding technical characteristic, content and the advantage of the application and its to be reached, by the application referring to the drawings, and described in detail with the expression-form of embodiment as follows, and the accompanying drawing used in it, its purport is only to illustrate and aid in illustrating book to be used, may not be the actual proportions after the application is implemented and precisely configuration, thus the ratio of accompanying drawing that should not be just appended understood with configuration relation, interest field of the limitation the application on actually implementing.
Used in this, vocabulary " and/or " any or all combination comprising one or more related bar list of items.When the narration prefix of " at least one " is in before bill of component when, whole manifest component is modified and the individual elements in non-modified inventory.
Describe the embodiment of the bench monitoring interlock system of the application in detail below with reference to accompanying drawing.Fig. 1 is the block diagram of the first embodiment of the bench monitoring interlock system according to the application.As shown in the figure, the bench monitoring interlock system 1 of the application is arranged between the first remote operation interface 100 and multiple board module 101-104, first remote operation interface 100 is connected through network 105 and controls multiple board module 101-104 for user, and multiple board module 101-104 is respectively configured with near-end operate interface 106-109 and operates multiple board module 101-104 for user's near-end, bench monitoring interlock system 1 includes input/output interface 110 and monitoring processor 111.Input/output interface 110 is connected between multiple board module 101-104 and network 105.Monitoring processor 111 is connected to multiple board module 101-104 by input/output interface 110, and is connected to the first remote operation interface 100 through network 105.
Herein, board module 101-104 can be each module of single board, each can have independent control circuit by oneself, also can be each module of different platform, such as similar device such as vacuum cavity door lock, mechanical arm, specifically, the bench monitoring interlock system of the application is applicable to the board module of different size.
Monitoring processor 111 can be central processing unit (Central Processing Unit, CPU), microprocessor (microprocessor), network processing unit (NP:Network Processor), microcontroller or be the semiconductor integrated circuit (Integrated Circuit (IC)) with special function.
Input/output interface 110 can be GPIO interface, normal work signal and abnormal work signal can be converted to data signal by input/output interface 110, converted data signal can be obtained monitored results by computing by monitoring processor 111, and be judged whether to lock the first remote operation interface 100 according to monitored results.First remote operation interface 100 can include keyboard, mouse, screen and general-purpose computing system.
According to the configuration of bench monitoring interlock system 1, when at least one of multiple board module 101-104 is in anomalous operating mode, it transmits at least one abnormal work signal 112 to monitoring processor 111, the correspondence at least one abnormal work signal 112 of monitoring processor 111 locks the first remote operation interface 100, so that user cannot control multiple board module 101-104 through the first remote operation interface 100, all multiple board module 101-104 are made to return to normal mode of operation until user operates corresponding near-end operate interface 106-109, and transmit normal work signal 113 to monitoring processor 111, the corresponding normal work signal 113 of monitoring processor 111 releases the locking to the first remote operation interface 100.
By this mechanism, when one of board module 101-104 produces abnormal work signal, monitoring processor 111 further shows alert notification in the first remote operation interface 100, so that operating the user of the first remote operation interface 100 after alert notification is perceived, can notify that near-end user carries out failture evacuation, after board module 101-104 recovers normal operating conditions, the ability of monitoring processor 111 unlocks to the first remote operation interface 100.So, it can be ensured that near-end user will not be worked on when being repaired because long-range user does not examine, so lifted board security.
Fig. 3 is refer to, it is the block diagram of the second embodiment of the bench monitoring interlock system according to the application.As shown in the figure, the bench monitoring interlock system 2 of the application is arranged between the first remote operation interface 200, the second remote operation interface 214 and multiple board module 201-204, first remote operation interface 200 is connected through network 205 and controls multiple board module 201-204 for user, and multiple board module 201-204 is respectively configured with near-end operate interface 206-209 and operates multiple board module 201-204 for user's near-end, bench monitoring interlock system 2 includes input/output interface 210 and monitoring processor 211.Input/output interface 210 is connected between multiple board module 201-204 and network 205, and monitoring processor 211 is connected to multiple board module 201-204 through input/output interface 210, and is connected to the first remote operation interface 200 through network 205.Second remote operation interface 214 is connected to input/output interface 210 and controls the plurality of board module 201-204 for user.
Additionally, bench monitoring interlock system 2 also includes hardware interface 215 and administrator interface 216.Hardware interface 215 is arranged between the monitoring processor 211 and network 205.Administrator interface 216 is connected to hardware interface 215 through network 205, it is configured for user when the monitoring processor 211 locks the first remote operation interface 200 or the second remote operation interface 214, controls monitoring processor 211 and multiple board module 201-204.This is set in order to when the first remote operation interface 200 or the second remote operation interface 214 are locked, there is provided the user with manager's authority directly can remotely carry out removal of obstacle, wherein, administrator interface 216 can be included and control (php) or telnet/ssh interfaces etc. using word control interface (txt), webpage.
Furthermore, bench monitoring interlock system 2 can further include image monitoring module 217, it is configured at the plurality of board module 201-204 the week side of boss, its through input output interface 210 be connected to monitoring processor 211, and processed through monitoring processor 211 and export the image monitoring signal related to multiple board modules to the first remote operation interface 200 and the second remote operation interface 214.
In this embodiment, the normal work such as this signal 213 and the grade abnormal work signal 212 are converted to data signal by input/output interface 210, monitoring processor 211 obtains monitored results according to data signal computing, and is judged whether to lock the first remote operation interface 200 and the second remote operation interface 214 according to monitored results.Similar to previous embodiment, the second remote operation interface 214 can also include keyboard, mouse, screen and general-purpose computing system.
According to the configuration of bench monitoring interlock system 2,When at least one of multiple board module 201-204 is in anomalous operating mode,It transmits at least one abnormal work signal 212 to monitoring processor 211,Monitoring processor 211 correspondence at least one abnormal work signal 212 locking the first remote operation interface 200 and the second remote operation interface 214,So that user cannot control multiple board module 201-204 through the first remote operation interface 200 or the second remote operation interface 214,All multiple board module 201-204 are made to return to normal mode of operation until user operates corresponding near-end operate interface 206-209,And transmit normal work signal 213 to monitoring processor 211,The corresponding normal work signal 213 of monitoring processor 211 releases the locking to the first remote operation interface 200 and the second remote operation interface 214.
By this mechanism, when one of board module 201-204 produces abnormal work signal, monitoring processor 211 is further in the first remote operation interface 200 and the display alert notification of the second remote operation interface 214, so that operating the user of the first remote operation interface 200 or the second remote operation interface 214 after alert notification is perceived, can notify that near-end user carries out failture evacuation, after board module 201-204 recovers normal operating conditions, the ability of monitoring processor 211 unlocks to the first remote operation interface 200 and the second remote operation interface 214.So, it can be ensured that near-end user will not be worked on when being repaired because long-range user does not examine, so lifted board security.
Another feature of this embodiment be except by network connection in addition to the first RCI, bench monitoring interlock system is additionally provided with the second RCI, therefore, positioned at user's also operable multiple board modules of system end, however, presently filed embodiment not limited to this, bench monitoring interlock system also can be only arranged between the second RCI and multiple board modules, not necessarily there is network connection, improve the flexibility ratio of this system.
Fig. 3 is refer to, it is the hardware structure schematic diagram of the second embodiment of the bench monitoring interlock system according to the application.As shown in the figure, multiple board modules represent with multiple interlocking switch Int1-Int4, wherein, multiple interlocking switch Int1-Int4 respectively have control circuit and are connected to feeder ear, and each multiple normal opened contact O (Normal Open) to the first contact CON1, for input control signal.And the common contact G of the multiple of the first contact CON1 is connected as shown in the figure with normal opened contact O so that multiple interlocking switch Int1-Int4 are series connection.Voltage source then supplies voltage to the normally closed contact C (Normal Close) of the first contact CON1, is 5V direct currents (DC) in the present embodiment.Usually in open circuit, just contact G is connected normal opened contact O together after coil electricity, and normally closed contact C in closed circuit (contact G is connected together), just turns into open circuit usually after coil electricity.
In the present embodiment, multiple interlocking switch Int1-Int4 are also respectively connected with general output/incoming interface GPIO, usb hub USB Hub and serial transmission transmitter TX, and it is used for for user input keyboard signal K and mouse signal S.Serial transmission transmitter TX is used to send keyboard signal K and mouse signal S to the common contact G of the first relay Relay1, then is transmitted to the second relay Relay by the normally closed contact C of the first relay.The working signal for receiving multiple interlocking switch Int1-Int4 of output/incoming interface GPIO, digital input end DI is input into after being converted into data signal, transmitted to monitoring processor 311 from digital output end DO again, monitoring processor 311 obtains monitored results after the data signal of acquisition is carried out into computing, and control whether the first relay Relay1 allows the mouse signal K and keyboard signal K of the second remote USB to pass through according to monitored results, then transmitted through usb hub USB Hub and control multiple interlocking switch Int1-Int4.
In addition, the power supply S of serial transmission transmitter TX is input into by the DI/DORS-232 interfaces of output/incoming interface GPIO, and its signal of video signal V can be input into from the imaging monitoring module for being arranged at multiple interlocking switch Int1-Int4 the week side of boss, digital video interface DVI is provided at the second long-range place.In addition, serial transmission transmitter TX also sends mouse signal M by network 305 to the general-purpose computations generator terminal PC that the computer information management end CIM and first at the first long-range place remotely locates, signal of video signal V and keyboard signal K, there is computer information management end CIM remote control image management system RCVM to be used to show image, general-purpose computations generator terminal PC has RS-232 interface and signal receiving end RS, user can watch monitoring image by signal of video signal V at the first long-range place on general-purpose computations generator terminal PC after transmission, and multiple interlocking switch Int1-Int4 are controlled by mouse signal V and keyboard signal K.
It is similar with previous embodiment, when at least one of multiple interlocking switch Int1-Int4 is in abnormal operation, multiple interlocking switch Int1-Int4 are to output/incoming interface GPIO output abnormality working signals, the converted output digit signals of backward monitoring processor 311 of GPIO, monitoring processor 311 will obtain monitored results after its computing be exception, the mouse signal M and keyboard signal K of its general-purpose computations generator terminal PC for passing through the long-range place of the locking of network 305 first, and the first relay Relay1 is disconnected, so that user cannot control multiple interlocking switch Int1-Int4 from the second long-range place by the mouse signal M and keyboard signal K of usb hub USBHub.Until near-end user operation near-end control interface 306-309 excludes abnormal operation, the locking of monitoring processor 311 and then releasing to the mouse signal M and keyboard signal K of general-purpose computations generator terminal PC, and the first relay Relay1 is returned to closed circuit state so that user recovers to control multiple interlocking switch Int1-Int4 by the mouse signal M and keyboard signal K of usb hub USB Hub from the second long-range place.
It is worth mentioning that, because signal of video signal V is not through the first relay Relay1, still can remotely locate transmission signal of video signal V to general-purpose computations generator terminal PC, computer information management end CIM and second under abnormal operation, and monitoring processor 311 also can transmit abnormal information to the user at above-mentioned three end, therefore user can notify that near-end user carries out abnormality exclusion.
Fig. 4 is refer to, it is the decision flow chart of the bench monitoring interlock system according to the application.Please also refer to Fig. 3, as shown in the figure, multiple interlocking switch Int1-Int4 respectively have voltage source 3.3V direct currents (DC), if in normal operation, multiple interlocking switch Int1-Int4 are in normally off NC (Normal Close) or normally open (Normal Open), therefore the voltage that voltage receiving terminal V1 and V2 are received may be high potential or low potential, this low potential high can be input into general output/incoming interface GPIO after being converted to data signal as digital input signals DI (H) or digital input signals DI (L).However, at least one is under abnormal operation as multiple interlocking switch Int1-Int4, to voltage receiving terminal V1 transmission abnormality operating voltages, and it is judged as that voltage quasi position height makes a variation.After being converted to data signal, general output/incoming interface GPIO is input into as low level digital input signals DI (L).
General output/incoming interface GPIO exports signal from digital signal output part DO, and is sent to monitoring processor.If the non-normal operation of monitoring processor, each RCI is in lock-out state.If monitoring processor normal operation, it processes the data signal for receiving first, and computing simultaneously obtains monitored results.Preferably, be multiplied for multiple data signals by monitoring processor, for example, high levels digital input signals DI (H) are 1, low level digital input signals DI (L) are 0, if there is the presence of low level digital input signals DI (H), then multiplied result is 0, now result be 0 data signal by system be judged to interlocking anomaly occur, the general output of monitoring processor order/incoming interface GPIO sending control signals interdict the first relay, so that the first relay is in normal off state, then mouse signal M and keyboard signal K cannot be by the first Control multiple board module 306-309.And serial transmission transmitter TX also cannot be by mouse signal M and keyboard signal K by network transmission, then first is long-range and second be remotely in lock-out state.
Additionally, also including hardware interface 415 and administrator interface 416 in this flow.Hardware interface 415 is arranged between the monitoring processor and network 405.Administrator interface 416 is connected to hardware interface 415 by network 405, and it is configured for user in the first remote operation interface or locked the second remote operation interface, controls monitoring processor and multiple interlocking switch Int1-Int4.This is set in order in the first remote operation interface or locked the second remote operation interface, there is provided the user with manager's authority directly can remotely carry out removal of obstacle.
Because the board module of each manufacturer designs different, but the bench monitoring interlock system for passing through the application, it is applicable to the board module of different configuration and specification, under abnormality, remote control is directly cut off by monitoring processor, long-range user must confirm to be gone again after equipment is errorless with personal security to start remote control by near-end user or signal of video signal.
Fig. 5 is refer to, it is the image monitoring module setting schematic diagram of the bench monitoring interlock system according to the application.As illustrated, the bench monitoring interlock system 5 of the application is connected to multiple board module 501-504, near-end control interface 506-509 is respectively configured with.Wherein, the first RCI 500, the second RCI 514, administrator interface 516 and computer information management end CIM are similar to previous embodiment, therefore omit repeated description.The present embodiment difference is, the image monitoring module of bench monitoring interlock system 5 is further connected to Image sensor apparatus IPCAM, and Image sensor apparatus IPCAM is used to sense in the control zone SR of multiple board module 501-504 the week side of boss, if there is object to enter.If image monitoring module has abnormal movement in detecting control zone SR, it transmits alarm signal to monitoring processor, monitoring processor locks the first remote operation interface and the second remote operation interface according to alarm signal, and produce alarm signal to the first RCI 500, second RCI 514, administrator interface 516 and computer information management end CIM, after near-end user excludes the object in warning or control zone SR using near-end control interface 506-509, monitoring processor releases the locking to the first remote operation interface and the second remote operation interface then.In this way, the security of bench monitoring interlock system can be lifted further, it is to avoid when personnel are appeared in control zone, long-range user continue to control the running of board module because not examining and caused by work peace accident.
In sum, the signal that the bench monitoring interlock system of the application passes through the multiple board modules for the treatment of, under abnormal operation, cuts off any operation of RCI in a straightforward manner, until near-end user excludes abnormality, the locking to RCI is released then.The bench monitoring interlock system of the application reaches the flexibility of the applicability and system of height except with maltilevel security mechanism, can be also adjusted according to different platform module.
Claims (9)
1. a kind of bench monitoring interlock system, is arranged on the first remote operation interface and multiple machines
Between platform module, the first remote operation interface through network connection and controls this many for user
Individual board module, and the plurality of board module is respectively configured with near-end operate interface for user's near-end
Operate the plurality of board module, it is characterised in that the system is included：
Input/output interface, is connected between the multiple board module and network；And
Monitoring processor, the multiple board mould is connected to through the input/output interface
Block, and through network connection to the first remote operation interface；
Wherein, when at least one of the multiple board module is in anomalous operating mode
When, it passes through the input/output interface and transmits at least one abnormal work signal to the prison
Control processor, the monitoring processor is corresponded to described at least one abnormal work semaphore lock
First remote operation interface so that user cannot pass through the first remote operation Interface Controller
The multiple board module, until user's operation near-end operate interface makes all the multiple machines
Platform module returns to normal mode of operation, and transmits normal work signal to the monitoring processor,
The monitoring processor correspondence normal work signal relief connects to first remote operation
The locking of mouth.
2. bench monitoring interlock system according to claim 1, it is characterised in that also
Comprising the second remote operation interface, it is connected to the input/output interface and for user's control
The multiple board module is made, wherein when at least one of the multiple board module is in
During anomalous operating mode, it transmits at least one abnormal work signal to the monitoring processor,
The monitoring processor correspondence at least one abnormal work signal, locks described second long-range
Operate interface so that user cannot be the multiple through the second remote operation Interface Controller
Board module, until user's operation near-end operate interface returns all the multiple board modules
To normal mode of operation, and normal work signal to the monitoring processor is transmitted, the monitoring
Locking of the processor correspondence normal work signal relief to the second remote operation interface.
3. bench monitoring interlock system according to claim 1, it is characterised in that also
Comprising：
Hardware interface, is arranged between the monitoring processor and network；And
Administrator interface, through network connection to the hardware interface, it is configured for using
Person locks the first remote operation interface or the second long-range behaviour in the monitoring processor
When making interface, the monitoring processor and the multiple board module are controlled.
4. bench monitoring interlock system according to claim 2, it is characterised in that also
Comprising image monitoring module, it is configured at the multiple board module the week side of boss, and it passes through described defeated
Enter output interface be connected to the monitoring processor, and through monitoring processor treatment simultaneously
Export the image monitoring signal related to the multiple board module to first remote operation
Interface and the second remote operation interface.
5. bench monitoring interlock system according to claim 4, it is characterised in that when
When at least one of the multiple board is in the anomalous operating mode, at the monitoring
Reason device continued operation and export the image monitoring signal to the first remote operation interface and
The second remote operation interface.
6. bench monitoring interlock system according to claim 4, it is characterised in that its
Described in image monitoring module also detect the warning region of the multiple board module the week side of boss, if institute
Stating during image monitoring module detects the warning region has abnormal movement, its transmission alarm signal
To the monitoring processor, the monitoring processor is according to alarm signal locking described first
Remote operation interface and the second remote operation interface.
7. bench monitoring interlock system according to claim 2, it is characterised in that its
Described in input/output interface by the normal work signal such as described and the abnormal work signal such as described
Data signal is converted to, the monitoring processor is monitored according to the data signal computing such as described
As a result, and according to the monitored results judge whether locking the first remote operation interface and institute
State the second remote operation interface.
8. bench monitoring interlock system according to claim 7, it is characterised in that its
Described in monitoring processor be connected to second RCI through relay, and according to
The monitored results produce a control signal to transmit to the relay, and the relay is according to institute
Control signal is stated to switch between opening and closed mode.
9. bench monitoring interlock system according to claim 2, it is characterised in that its
Described in the first remote operation interface and the second remote operation interface respectively include keyboard, mouse
Mark, screen and general-purpose computing system.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104140235A TW201721314A (en) | 2015-12-01 | 2015-12-01 | Machine monitoring and interlocking system |
| TW104140235 | 2015-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106814661A true CN106814661A (en) | 2017-06-09 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521061943.1U Expired - Fee Related CN205427515U (en) | 2015-12-01 | 2015-12-17 | Machine table monitoring interlocking system |
| CN201510953498.8A Pending CN106814661A (en) | 2015-12-01 | 2015-12-17 | Machine table monitoring interlocking system |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521061943.1U Expired - Fee Related CN205427515U (en) | 2015-12-01 | 2015-12-17 | Machine table monitoring interlocking system |
Country Status (2)
| Country | Link |
|---|---|
| CN (2) | CN205427515U (en) |
| TW (1) | TW201721314A (en) |
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| TW201721314A (en) * | 2015-12-01 | 2017-06-16 | 佳霖科技股份有限公司 | Machine monitoring and interlocking system |
| CN108227508B (en) * | 2016-12-15 | 2020-12-29 | 中芯国际集成电路制造(北京)有限公司 | Wafer loading and unloading platform efficiency monitoring method |
| JP6824121B2 (en) * | 2017-07-14 | 2021-02-03 | 株式会社東芝 | State detection device, state detection method and program |
| TWI661288B (en) * | 2018-04-18 | 2019-06-01 | 致茂電子股份有限公司 | Power monitoring method for semi-conductor testing machine |
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Also Published As
| Publication number | Publication date |
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| TW201721314A (en) | 2017-06-16 |
| CN205427515U (en) | 2016-08-03 |
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