CN106811347A - A kind of washing agent for electronic materials - Google Patents
A kind of washing agent for electronic materials Download PDFInfo
- Publication number
- CN106811347A CN106811347A CN201611073954.0A CN201611073954A CN106811347A CN 106811347 A CN106811347 A CN 106811347A CN 201611073954 A CN201611073954 A CN 201611073954A CN 106811347 A CN106811347 A CN 106811347A
- Authority
- CN
- China
- Prior art keywords
- washing agent
- electronic materials
- electronic
- polyethylene glycol
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012776 electronic material Substances 0.000 title claims abstract description 16
- 239000003795 chemical substances by application Substances 0.000 title claims abstract description 13
- 238000005406 washing Methods 0.000 title claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000002202 Polyethylene glycol Substances 0.000 claims abstract description 7
- 229920001223 polyethylene glycol Polymers 0.000 claims abstract description 7
- -1 polyoxyethylene Polymers 0.000 claims abstract description 7
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims abstract description 6
- 239000008367 deionised water Substances 0.000 claims abstract description 6
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 6
- 150000002118 epoxides Chemical class 0.000 claims abstract description 6
- QDPMLKBAQOZXEF-UHFFFAOYSA-N ethanesulfonic acid;sodium Chemical compound [Na].CCS(O)(=O)=O QDPMLKBAQOZXEF-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000004615 ingredient Substances 0.000 claims abstract description 6
- 125000002811 oleoyl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])/C([H])=C([H])\C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims abstract description 6
- ICLYJLBTOGPLMC-KVVVOXFISA-N (z)-octadec-9-enoate;tris(2-hydroxyethyl)azanium Chemical compound OCCN(CCO)CCO.CCCCCCCC\C=C/CCCCCCCC(O)=O ICLYJLBTOGPLMC-KVVVOXFISA-N 0.000 claims abstract description 5
- 229940117013 triethanolamine oleate Drugs 0.000 claims abstract description 5
- 150000007942 carboxylates Chemical class 0.000 claims abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 4
- 230000007797 corrosion Effects 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 3
- 229910021645 metal ion Inorganic materials 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- 239000003945 anionic surfactant Substances 0.000 abstract description 2
- 239000006184 cosolvent Substances 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 abstract description 2
- 239000002904 solvent Substances 0.000 abstract description 2
- 239000012459 cleaning agent Substances 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical class CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D10/00—Compositions of detergents, not provided for by one single preceding group
- C11D10/04—Compositions of detergents, not provided for by one single preceding group based on mixtures of surface-active non-soap compounds and soap
- C11D10/045—Compositions of detergents, not provided for by one single preceding group based on mixtures of surface-active non-soap compounds and soap based on non-ionic surface-active compounds and soap
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D10/00—Compositions of detergents, not provided for by one single preceding group
- C11D10/04—Compositions of detergents, not provided for by one single preceding group based on mixtures of surface-active non-soap compounds and soap
- C11D10/042—Compositions of detergents, not provided for by one single preceding group based on mixtures of surface-active non-soap compounds and soap based on anionic surface-active compounds and soap
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/28—Sulfonation products derived from fatty acids or their derivatives, e.g. esters, amides
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/72—Ethers of polyoxyalkylene glycols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/74—Carboxylates or sulfonates esters of polyoxyalkylene glycols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
A kind of washing agent for electronic materials, including following weight ratio ingredient：Oleoyl epoxide ethyl sulfonic acid sodium 7 10%, polyoxyethylene carboxylate 5 8%, triethanolamine oleate 0.5 1%, polyethylene glycol 8 10%, remaining is mended to 100% for deionized water.A kind of washing agent for electronic materials of the present invention is with water base as solvent, with anion surfactant as main component, addition polyethylene glycol makees cosolvent, pollution reduction to environment, it is more environmentally friendly, and cleaning effect is more preferably, the metal ion on the surfaces such as ULSI substrates, electronic glass, organic and inorganic impurity and solids can be cleaned, while the electronic material after cleaning will not corrosion.
Description
Technical field
The present invention relates to a kind of cleaning agent, and in particular to a kind of washing agent for electronic materials.
Background technology
In the production and processing preparation process of electronic product, because electronic product precision and technical requirements to it, it is necessary to produce
Product are processed cleaning, such as to the metal ion on the surfaces such as ULS I substrates, electronic glass and LCD, organic and inorganic magazine
Cleaned with solids etc., be required to use substantial amounts of cleaning agent, the cleaning agent that traditional electron trade is used to contain greatly
Amount ozone-layer depleting substance, such as trifluorotrichloroethane and 1,1,1- trichloroethanes, with《Chinese cleaning industry ODS is integrally washed in a pan
The plan of eliminating》Implementation, this kind of cleaning agent will be eliminated, and the substitute is the cleaning agent of environment-friendly type.Existing electronic material cleaning
Agent production cost is of a relatively high, and the sodium metasilicate that contains, sodium carbonate salt can cause certain pollution to environment, while cleaning effect
Typically, the part after being cleaned using such cleaning agent occurs corrosion phenomena.
The content of the invention
It is an object of the invention to propose a kind of cleaning effect it is good, cleaning after material not corrosion and direct discharge opeing is pollution-free
Washing agent for electronic materials.
The purpose of the present invention is realized using following technical scheme.Cleaned according to a kind of electronic material proposed by the present invention
Agent, including following weight ratio ingredient：Oleoyl epoxide ethyl sulfonic acid sodium 7-10%, polyoxyethylene carboxylate 5-8%, oleic acid triethanolamine
Amine 0.5-1%, polyethylene glycol 8-10%, remaining is mended to 100% for deionized water.
A kind of washing agent for electronic materials of the present invention, as solvent, with anion surfactant as main component, is added with water base
Addition polymerization ethylene glycol makees cosolvent, the pollution reduction to environment, more environmentally friendly, and cleaning effect is more preferably, can be to ULSI substrates, electronics
Metal ion, organic and inorganic impurity and solids on the surfaces such as glass are cleaned, while the electronic material after cleaning is not
Can corrosion.
Described above is only the general introduction of technical solution of the present invention, in order to be able to better understand technological means of the invention, and
Can be practiced according to the content of specification, and be to allow the above and other objects, features and advantages of the invention can be brighter
It is aobvious understandable, below especially exemplified by preferred embodiment, describe in detail as follows.
Specific embodiment
Further to illustrate the present invention to reach technological means and effect that predetermined goal of the invention is taken, below in conjunction with
Preferred embodiment, to according to washing agent for electronic materials proposed by the present invention its specific embodiment, structure, feature and its effect,
Describe in detail as after.
Embodiment 1
A kind of washing agent for electronic materials of the present invention, including following weight ratio ingredient：Oleoyl epoxide ethyl sulfonic acid sodium 7%, fat
Sour polyoxyethylene ester 5%, triethanolamine oleate 0.5%, polyethylene glycol 8%, deionized water 79.5%.
Embodiment 2
A kind of washing agent for electronic materials of the present invention, including following weight ratio ingredient：Oleoyl epoxide ethyl sulfonic acid sodium 8%, fat
Sour polyoxyethylene ester 6%, triethanolamine oleate 0.8%, polyethylene glycol 9%, deionized water 76.2%.
Embodiment 3
A kind of washing agent for electronic materials of the present invention, including following weight ratio ingredient：Oleoyl epoxide ethyl sulfonic acid sodium 10%, fat
Sour polyoxyethylene ester 8%, triethanolamine oleate 1%, polyethylene glycol 10%, deionized water 71%.
The above, is only presently preferred embodiments of the present invention, and any formal limitation is not done to the present invention, is appointed
What those skilled in the art, without departing from the scope of the present invention, according to technical spirit of the invention to
Any simple modification, equivalent variations and modification that upper embodiment is made, still fall within the range of technical solution of the present invention.
Claims (1)
1. a kind of washing agent for electronic materials, it is characterised in that including following weight ratio ingredient：Oleoyl epoxide ethyl sulfonic acid sodium 7-10%,
Polyoxyethylene carboxylate 5-8%, triethanolamine oleate 0.5-1%, polyethylene glycol 8-10%, remaining for deionized water mend to
100%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611073954.0A CN106811347A (en) | 2016-11-29 | 2016-11-29 | A kind of washing agent for electronic materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611073954.0A CN106811347A (en) | 2016-11-29 | 2016-11-29 | A kind of washing agent for electronic materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106811347A true CN106811347A (en) | 2017-06-09 |
Family
ID=59106613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611073954.0A Pending CN106811347A (en) | 2016-11-29 | 2016-11-29 | A kind of washing agent for electronic materials |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106811347A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1271000A (en) * | 1999-04-20 | 2000-10-25 | 关东化学株式会社 | Base board cleaning liquid of electronic material |
| CN101818103A (en) * | 2010-05-17 | 2010-09-01 | 江西瑞思博化工有限公司 | Washing agent for electronic materials |
| CN101848987A (en) * | 2007-09-14 | 2010-09-29 | 三洋化成工业株式会社 | Cleaning agent for electronic material |
| CN105219545A (en) * | 2015-10-19 | 2016-01-06 | 南京润屹电子科技有限公司 | A kind of clean-out system for electronic material and preparation method thereof |
-
2016
- 2016-11-29 CN CN201611073954.0A patent/CN106811347A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1271000A (en) * | 1999-04-20 | 2000-10-25 | 关东化学株式会社 | Base board cleaning liquid of electronic material |
| CN101848987A (en) * | 2007-09-14 | 2010-09-29 | 三洋化成工业株式会社 | Cleaning agent for electronic material |
| CN101818103A (en) * | 2010-05-17 | 2010-09-01 | 江西瑞思博化工有限公司 | Washing agent for electronic materials |
| CN105219545A (en) * | 2015-10-19 | 2016-01-06 | 南京润屹电子科技有限公司 | A kind of clean-out system for electronic material and preparation method thereof |
Non-Patent Citations (3)
| Title |
|---|
| 刘幸平编: "《物理化学》", 31 July 2012 * |
| 荆忠胜主编: "《表面活性剂概论》", 31 May 1999 * |
| 贺浪冲主编: "《工业药物分析》", 31 May 2012 * |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170609 |