CN106802278A - Quartz enhanced photoacoustic spectroscopy acousimeter and gas detection apparatus that double wave abdomen is excited - Google Patents
Quartz enhanced photoacoustic spectroscopy acousimeter and gas detection apparatus that double wave abdomen is excited Download PDFInfo
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- CN106802278A CN106802278A CN201710010380.0A CN201710010380A CN106802278A CN 106802278 A CN106802278 A CN 106802278A CN 201710010380 A CN201710010380 A CN 201710010380A CN 106802278 A CN106802278 A CN 106802278A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
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Abstract
The present invention relates to quartz enhanced photoacoustic spectroscopy acousimeter and gas detection apparatus that a kind of double wave abdomen is excited.Present invention aim to address existing tuning-fork type quartz crystal oscillator once general frequency mode detection sensitivity technical problem not high.The technical solution adopted by the present invention is：The quartz enhanced photoacoustic spectroscopy acousimeter that a kind of double wave abdomen is excited, including miniature sound resonance chamber I, miniature sound resonance chamber II and the support for being used to fix tuning-fork type quartz crystal oscillator and miniature sound resonance chamber I and miniature sound resonance chamber II that a tuning-fork type quartz crystal oscillator being vertically arranged and tuning-fork type quartz crystal oscillator match；The miniature sound resonance chamber II and miniature sound resonance chamber I are located at the raise one's arm position in gap of tuning-fork type quartz crystal oscillator and are overlapped with along the raise one's arm position of bottom up once two vibration antinodes of general frequency vibration of tuning-fork type quartz crystal oscillator respectively.The gas detection apparatus of the quartz enhanced photoacoustic spectroscopy acousimeter excited using double wave abdomen in the present invention have the advantages that sensitivity is high.
Description
Technical field
The invention belongs to optoacoustic spectroscopy gas sensing head and gas detection apparatus technical field, and in particular to a kind of double wave abdomen
The quartz enhanced photoacoustic spectroscopy acousimeter and gas detection apparatus for exciting.
Background technology
Quartz enhanced photoacoustic spectroscopy is one mutation of traditional optoacoustic spectroscopy, and it is a kind of very useful technology, can
It is used in environmental monitoring, the multiple fields such as industrial stokehold and medical analysis.Quartz enhanced photoacoustic spectroscopy is different from tradition
Optoacoustic spectroscopy is characterised by that it replaces microphone to detect target using a quality factor tuning-fork type quartz crystal oscillator very high
The sound wave that gas is produced after exciting light is absorbed.The spectrophone of quartz enhanced photoacoustic spectroscopy mainly includes tuning-fork type quartz-crystal
Shake and (be generally made up of two stainless steel capillaries) with miniature sound resonance chamber.Although tuning-fork type quartz crystal oscillator can be completed in itself
Can greatly enhance signal after measurement to gas signal, but the miniature sound resonance chamber of outfit.Fig. 1 is tuning-fork type quartz crystal oscillator
Front view, tuning-fork type quartz crystal oscillator have two raise one's arm, tuning-fork type quartz crystal oscillator after being encouraged by external acoustic waves, edge of raising one's arm
Arrow direction is of reciprocating vibration in figure, for convenience of description by the upper face vertical with direction of vibration of raising one's arm of tuning-fork type quartz crystal oscillator
Referred to as inside and outside vibration plane；The face (face paper on seen and the face of behind) parallel with direction of vibration is referred to as tuning-fork type stone
The side of raising one's arm of English crystal oscillator；Two raise one's arm between gap be referred to as gap of raising one's arm, gap direction of raising one's arm as shown in Figure 1 is upward.
Two electrodes are arranged at tuning-fork type quartz crystal oscillator bottom, respectively one pin of connection, and a pin is connected with signal ground, another pin
For exporting because of the electric signal that vibration is produced.Two tubules are placed in tuning-fork type quartz crystal oscillator both sides, and pipe axle center is and light
Road is coaxial, constitutes miniature sound resonance chamber, light beam pass through after first tubule from two raise one's arm between by and then by second carefully
Pipe, as shown in Figure 2.Tested gas is absorbed after luminous energy, because the collision de excitation of gas is sent out, discharges acoustic energy, and acoustic energy is miniature
Accumulated in sound resonance chamber, then pass to tuning-fork type quartz crystal oscillator, cause tuning-fork type quartz crystal oscillator two to be raised one's arm vibration, and then sound
Mechanical vibrational energy is converted into electric signal by V shape quartz crystal oscillator by piezo-electric effect, and the intensity of these electric signals be just proportional to by
The gas concentration of detection.Quartz enhanced photoacoustic spectroscopy technology combines the major advantage of optoacoustic spectroscopy and tuning-fork type quartz crystal oscillator,
Form compact, reliable, low cost a spectrophone.
Before 2013, quartz enhanced photoacoustic acousimeter uses commercial standard (CS) tuning-fork type quartz crystal oscillator, its fundamental frequency
Resonant frequency is 32.7kHz, and spacing of raising one's arm is 300 μm.These commercial tuning-fork type quartz crystal oscillators be mainly used in mobile phone and
As time reference in quartz watch.In near infrared band, the highly sensitive gas based on commercial standard (CS) tuning-fork type quartz crystal oscillator is passed
Sensor has been widely used.But, because the Gaussian beam diameter of laser becomes big with the increase of optical maser wavelength, 300 μm
Spacing of raising one's arm limit tuning-fork type quartz crystal oscillator for infrared and terahertz wave band in long wavelength.Therefore, the sound of big spacing
V shape quartz crystal oscillator is designed.Because spacing of raising one's arm becomes big, the tuning-fork type quartz crystal oscillator of these customizations has relatively low vibration frequently
Rate, causes miniature sound resonance chamber oversize, and the collimation advantage that big spacing belt comes is destroyed.
On the other hand, by the geometry of carefully design tuning-fork type quartz crystal oscillator, tuning-fork type quartz crystal oscillator can be made
Once general frequency vibration quality factor is much higher than fundamental vibration quality factor.Due to the detection of quartz enhanced photoacoustic spectroscopy sensor
Sensitivity is directly proportional to the quality factor of tuning-fork type quartz crystal oscillator, and this is just a kind of using tuning-fork type quartz crystal oscillator to we provide
Once general frequency vibration pattern combination optoacoustic spectroscopy go detect trace gas method.But presently disclosed one kind utilizes sound
The once general frequency vibration pattern combination optoacoustic spectroscopy of V shape quartz crystal oscillator goes to detect the device of trace gas, still using tradition
Quartz enhanced photoacoustic spectroscopy acousimeter configuration, i.e., be made up of tuning-fork type quartz crystal oscillator and a miniature sound resonance chamber, although
Detection signal can be made after outfit sound resonance chamber have been strengthened, but still suffers from sensitivity problem not high, and traditional gas
Multiple LASER Light Sources are used in body detection device, biosensor power consumption has been increased, while also influenceing detectivity.
The content of the invention
Present invention aim to address existing tuning-fork type quartz crystal oscillator once general frequency mode detection sensitivity skill not high
Art problem, there is provided quartz enhanced photoacoustic spectroscopy acousimeter and gas detection apparatus that a kind of double wave abdomen is excited.
The present invention is for the solution technical scheme that is used of its technical problem：The quartz enhanced photoacoustic that a kind of double wave abdomen is excited
Spectrophone, including the miniature sound that a tuning-fork type quartz crystal oscillator being vertically arranged and tuning-fork type quartz crystal oscillator match
Resonant cavity I, miniature sound resonance chamber II and one are used to fix tuning-fork type quartz crystal oscillator and miniature sound resonance chamber I and miniature
The support of sound resonance chamber II；Described each miniature sound resonance chamber by be horizontally set on for a pair tuning-fork type quartz crystal oscillator both sides and
Stainless steel capillary perpendicular to the face of raising one's arm of tuning-fork type quartz crystal oscillator is constituted, the central axes of each pair stainless steel capillary
And both pass through the gap of raising one's arm of tuning-fork type quartz crystal oscillator；The support is made up of upper and lower two pallets, and two centres of pallet are hung down
Directly to the rectangular through holes for having placement tuning-fork type quartz crystal oscillator, the miniature sound of placement is further respectively had on upper and lower pallet and is total to
Shake the groove of chamber I and miniature sound resonance chamber II, and groove is vertical with rectangular through holes, the miniature sound resonance chamber II and micro-
Type sound resonance chamber I be located at tuning-fork type quartz crystal oscillator raise one's arm gap position respectively with along tuning-fork type quartz crystal oscillator raise one's arm bottom to
The position of two vibration antinodes of last general frequency vibration overlaps.
Further, the brachium of the tuning-fork type quartz crystal oscillator is 17mm, and spacing of raising one's arm is 700 μm, the length-width ratio raised one's arm
It is 17.
Further, the end face of the stainless steel capillary and the lateral distance of raising one's arm of tuning-fork type quartz crystal oscillator are 20 μ
m。
Further, the length of the stainless steel capillary is 8.5mm, and internal diameter is 1.3mm, and external diameter is 1.58mm.
A kind of detection of gas dress of the quartz enhanced photoacoustic spectroscopy acousimeter excited present invention also offers use double wave abdomen
Put, including opticator and electronic section, opticator includes laser, optical isolator, optical circulators, beam collimator
Ith, the quartz enhanced photoacoustic spectroscopy acousimeter and Al-flim reflector that beam collimator II, optical phase compensator, double wave abdomen are excited,
The optical fiber output port of laser connects the input of optical isolator, the output end connection optical circulators of optical isolator
First port, the second port of optical circulators connects beam collimator I by optical fiber, and the 3rd port of optical circulators passes through
Optical fiber connects the input of optical phase compensator, and the output end of optical phase compensator connects beam collimator by optical fiber
II, what beam collimator II was located at miniature sound resonance chamber I in the quartz enhanced photoacoustic spectroscopy acousimeter that double wave abdomen is excited enters light
Side, what beam collimator I was located at miniature sound resonance chamber II in the quartz enhanced photoacoustic spectroscopy acousimeter that double wave abdomen is excited enters light
Side, Al-flim reflector is located at the light extraction of miniature sound resonance chamber II in the quartz enhanced photoacoustic spectroscopy acousimeter that double wave abdomen is excited
Side；Electronic section includes power meter, laser driving, signal generator, preamplifier, lock-in amplifier and computer, power
Meter is located at the light emission side of miniature sound resonance chamber I in the quartz enhanced photoacoustic spectroscopy acousimeter that double wave abdomen is excited, and laser drives
Control end connecting laser, the modulation port that the signal output port connecting laser of signal generator drives, signal occurs
The synchronous port of device connects the synchronous signal input end of lock-in amplifier, the quartz enhanced photoacoustic spectroscopy acousimeter that double wave abdomen is excited
Signal output part connect the signal input part of preamplifier, the signal output part connection lock-in amplifier of preamplifier
The signal output part of signal input part, lock-in amplifier and power meter connects the signal acquisition port of computer.
Further, described optical phase compensator is by a bare fibre for peelling off covering and cylindrical piezoelectric ceramics group
Into bare fibre is wrapped on cylindrical piezoelectric ceramics.
The beneficial effects of the invention are as follows：Double wave abdomen quartz enhanced photoacoustic spectroscopy acousimeter in the present invention used two it is micro-
Type sound resonance chamber, making the detectivity of acousimeter strengthens, and in the gas detection apparatus of the acousimeter are used in the present invention
A laser is mounted with, the light beam of laser emitting is raised one's arm by tuning-fork type quartz crystal oscillator two by three times after phase matched
Gap, while promoting the double wave abdomen vibration of tuning-fork type quartz crystal oscillator, compared to multiple laser excitations, efficiently make use of single laser
Light beam, biosensor power consumption is minimized, while detectivity also strengthens.
Brief description of the drawings
Fig. 1 is the front view of existing tuning-fork type quartz crystal oscillator；
Fig. 2 is the quartz enhanced photoacoustic spectroscopy acousimeter that existing quartz tuning-fork is constituted with miniature sound cavities；
Fig. 3 is the quartz enhanced photoacoustic spectroscopy acousimeter structural representation that double wave abdomen of the present invention is excited；
Fig. 4 is that the gas detection apparatus structure of the quartz enhanced photoacoustic spectroscopy acousimeter that the present invention is excited based on double wave abdomen is shown
It is intended to；
Fig. 5 is the variation diagram that signal amplitude of the present invention increases with h；
Fig. 6 is the variation diagram that signal phase of the present invention increases with h；
Fig. 7 is based on once general frequency vibration for the present invention, and the signal amplitude under three kinds of different devices compares.
Specific embodiment
The present invention is further described with reference to the accompanying drawings and examples.
As shown in figure 3, the quartz enhanced photoacoustic spectroscopy acousimeter that a kind of double wave abdomen in the present embodiment is excited, including one
Miniature sound resonance chamber I 2, miniature sound that the tuning-fork type quartz crystal oscillator 1 and tuning-fork type quartz crystal oscillator 1 being vertically arranged match
Resonant cavity II 3 and one are used to fix tuning-fork type quartz crystal oscillator 1 and miniature sound resonance chamber I 2 and miniature sound resonance chamber II 3
Support 5；The brachium of the tuning-fork type quartz crystal oscillator 1 is 17mm, and spacing of raising one's arm is 700 μm, and the length-width ratio raised one's arm is 17；It is described
Each miniature sound resonance chamber is horizontally set on the both sides of tuning-fork type quartz crystal oscillator 1 and perpendicular to tuning-fork type quartz crystal oscillator 1 by a pair
The stainless steel capillary 4 in face of raising one's arm constitute, the central axes of each pair stainless steel capillary 4 and both pass through tuning-fork type quartz
The gap of raising one's arm of crystal oscillator 1, the end face of the stainless steel capillary 4 and the lateral distance of raising one's arm of tuning-fork type quartz crystal oscillator 1 are 20 μ
M, the length of stainless steel capillary 4 is 8.5mm, and internal diameter is 1.3mm, and external diameter is 1.58mm；The support 5 is by upper and lower two pallets
Composition, two intermediate verticals of pallet place the rectangular through holes 20 of tuning-fork type quartz crystal oscillator 1 to having, on upper and lower pallet
Further respectively have the groove for placing miniature sound resonance chamber I 2 and miniature sound resonance chamber II 3, and groove and rectangular through holes 20
Vertically, the miniature sound resonance chamber II 3 and miniature sound resonance chamber I 2 are located at tuning-fork type quartz crystal oscillator 1 and raise one's arm the position in gap
Overlapped with along the raise one's arm position of bottom up once two vibration antinodes of general frequency vibration of tuning-fork type quartz crystal oscillator respectively.
As shown in figure 4, the gas of the quartz enhanced photoacoustic spectroscopy acousimeter excited using the double wave abdomen in the present embodiment is visited
Device, including opticator and electronic section are surveyed, opticator includes laser 7, optical isolator 8, optical circulators 9, light
The quartz enhanced photoacoustic spectroscopy survey sound that beam collimator I 10, beam collimator II 12, optical phase compensator 11, double wave abdomen are excited
Device 6 and Al-flim reflector 13, the optical fiber output port of laser 7 connect the input of optical isolator 8, optical isolator 8
Output end connects the first port of optical circulators 9, and the second port of optical circulators 9 connects beam collimator I by optical fiber
10, the 3rd port of optical circulators 9 connects the input of optical phase compensator 11, optical phase compensator 11 by optical fiber
It is made up of a bare fibre for peelling off covering and cylindrical piezoelectric ceramics, bare fibre is wrapped on cylindrical piezoelectric ceramics；Optics
The output end of phase compensator 11 connects beam collimator II 12 by optical fiber, and beam collimator II 12 is located at what double wave abdomen was excited
The incident side of miniature sound resonance chamber I 2 in quartz enhanced photoacoustic spectroscopy acousimeter 6, beam collimator I 10 is located at double wave abdomen and excites
Quartz enhanced photoacoustic spectroscopy acousimeter 6 in miniature sound resonance chamber II 3 incident side, Al-flim reflector 13 be located at double wave abdomen swash
The light emission side of miniature sound resonance chamber II 3 in the quartz enhanced photoacoustic spectroscopy acousimeter 6 of hair；Electronic section include power meter 14,
Laser drives 15, signal generator 16, preamplifier 17, lock-in amplifier 18 and computer 19, power meter 14 to be located at double wave
The light emission side of miniature sound resonance chamber I 2 in the quartz enhanced photoacoustic spectroscopy acousimeter 6 that abdomen is excited, laser drives 15 control
End connecting laser 7, the signal output port connecting laser of signal generator 16 drives 15 modulation port, signal generator
16 synchronous port connects the synchronous signal input end of lock-in amplifier 18, the quartz enhanced photoacoustic spectroscopy survey sound that double wave abdomen is excited
The signal output part of device 6 connects the signal input part of preamplifier 17, the signal output part connection lock phase of preamplifier 17
The signal output part of the signal input part of amplifier 18, lock-in amplifier 18 and power meter 14 connects the signal acquisition terminal of computer 19
Mouthful.
The design of the quartz enhanced photoacoustic spectroscopy acousimeter that double wave abdomen is excited in the present invention is built upon such a theory
On the basis of derivation and experimental verification：Tuning-fork type quartz crystal oscillator has two kinds of vibration modes, once fundamental vibration and general frequency vibration.Base
The root of raising one's arm of tuning-fork type quartz crystal oscillator is maintained static during frequency vibration, raises one's arm for two and separates and draw close to both sides simultaneously, and maximum is shaken
Dynamic amplitude is located at top of raising one's arm, and is open yet with top of raising one's arm, and causes soundwave leakage, and peak signal appears in top and leans on
Subsequent point.Once during general frequency vibration, the two of tuning-fork type quartz crystal oscillator raise one's arm middle part and two raise one's arm top simultaneously opposite direction vibration, when
Two raise one's arm top separate when, two raise one's arm middle part draw close, when two raise one's arm top draw close when, two raise one's arm middle part separate.So, maximum is shaken
Dynamic amplitude has at two, two raise one's arm top and two raise one's arm middle part.Also due to top of raising one's arm is open, cause soundwave leakage, institute
Appeared in peak signal and raise one's arm top more on the lower and middle part of raising one's arm, form two signal antinodes.But due to the vibration at two
In the opposite direction, its signal has 180 degree phase difference value.
In theory, the once general frequency pattern of tuning-fork type quartz crystal oscillator can be seen as two coupled vibrations of quality point, often
One quality point is located at antinode, and vibration 180 degree is anti-phase, and the two vibration antinodes are located at the maximum that tuning-fork type quartz crystal oscillator is raised one's arm
At vibration amplitude.Tuning-fork type quartz crystal oscillator is raised one's arm along bottom up distance of raising one's arm as the once general frequency vibration amplitude D at h can
To be represented by the following formula：
In formula：A is resonant amplitude, is definite value for known this value of tuning-fork type quartz crystal oscillator, and L is tuning-fork type quartz crystal oscillator
Raise one's arm length, kL is constant 4.694, and k is parameter, and when L values determine, k is definite value.There are two maximum in this formula, but
Phase 180 degree is anti-phase.
In experiment, use a brachium for 17mm, spacing of raising one's arm is 700 μm of customization tuning-fork type quartz crystal oscillator.Tuning fork
The length-width ratio that formula quartz crystal oscillator is raised one's arm is 17, and its volume size is 4.6 times of standard commercial tuning-fork type quartz crystal oscillator.Its fundamental frequency
Vibration and once general frequency vibration dynamic frequency are respectively 2.8kHz and 17.7kHz.The tuning-fork type quartz crystal oscillator parameter for using is brought into
Two antinodes can be obtained in formula (1) positioned at h1=8mm (positive maximum) and h2=17mm (negative maximum) place.Choose wavelength
It is 1.37 μm of semiconductor lasers as excitation source, using the vapor in air as target molecule.According to HITRAN numbers
According to storehouse, positioned at 7306.75cm-1The waterline at place is used as target absorption line, and its intensity is 1.8 × 10-20cm/mol.Light beam is accurate
It is h with a distance from bottom of raising one's arm between raising one's arm straight through tuning-fork type quartz crystal oscillator two.The concentration of water vapour is humidified by film in air chamber
Management and control is made as 1.8%, and gas pressure is 700Torr.Harmonic modulation spectral technique is used in quartz enhanced photoacoustic spectroscopy, is swashed
Light device electric current is modulated sinusoidally, and modulating frequency is the half of the once general frequency resonant frequency of tuning fork used.Tuning-fork type quartz crystal oscillator
Piezoelectric signal amplified by preamplifier, be then fed into the demodulated signal in a lock-in amplifier.Fig. 5 and Fig. 6 show
The amplitude for obtaining is with phase as the functional relation apart from h.Two amplitudes of maximum are located at h1=8mm and h2=16mm；Phase
Potential difference is 180 degree, with agreement with theoretical calculation.So when two sound resonance chambers are respectively positioned in once two of general frequency vibration
When at antinode, output signal will be doubled and redoubled.But the sound source vibration phase in the two resonant cavities must be anti-phase, just can guarantee that
Vibration phase with tuning-fork type quartz crystal oscillator is matched, so as to the promotion tuning-fork type quartz crystal oscillator for acting in agreement is raised one's arm vibration.
In order to maximize signal, the geometric parameter to sound resonance chamber is optimized.Three kinds of different types of stainless steel wools
It is long that tubule is cut into 9.5mm, is tested evaluation, and parameter is respectively：1. internal diameter 1.2mm external diameters 1.38mm；2. internal diameter
1.3mm, external diameter 1.58mm；2. internal diameter 1.65mm, external diameter 2.13mm.It is found through experiments that when internal diameter is equipped be the tubule of 1.3mm
When, tuning-fork type quartz crystal oscillator quality factor are reduced to 11680, it is shown that the stronger coefficient of coup, accordingly, it is determined that being using internal diameter
The tubule of 1.3mm, constitutes miniature sound resonance chamber.
Influence of the length of stainless steel capillary to signal is also by experimental verification.According to theoretical and experimental results, tubule
Optimization length should be between a quarter wave length of sound 5mm and 1/2nd wave length of sound 9.5mm.Experimental result shows most preferably
Capillary length be 8.5mm.Experimental result based on the above, it is 8.5mm that the present invention chooses four length, and internal diameter is 1.3mm, outward
Footpath is the tubule of 1.58mm, and miniature sound resonance chamber is constituted two-by-two, is placed at two antinodes of tuning fork, i.e., miniature acoustic resonance
Chamber II 3 is located at h1=8mm and miniature sound resonance chamber I 2 is located at h2=16mm；The quartz enhancing that final double wave abdomen is excited
Optoacoustic spectroscopy acousimeter, quality factor have dropped 50%, resonant frequency frequency displacement than naked tuning-fork type quartz crystal oscillator<1Hz.
For single tuning-fork type quartz crystal oscillator, the higher the better for quality factor, because quality factor is higher, illustrates tuning fork
The aerial energy of formula quartz crystal oscillator dissipation is fewer.But in miniature sound resonance chamber and the coupling process of tuning-fork type quartz crystal oscillator
In, tuning-fork type quartz crystal oscillator after miniature sound resonance chamber is increased, The more the better, more explanation tuning forks of drop of quality factor drop
More in the energy transmission of formula quartz crystal oscillator to miniature sound resonance chamber, i.e. their coupling is more efficient.
The operation principle of gas detection apparatus of the present invention is：The optical fiber output port of the laser 7 is first attached to
On one optical isolator 8, to prevent bulk of optical feedback return laser light device 7.The laser beam of outgoing is by optical fiber from optics annular
The first port of device 9 enters, then shines beam collimator I 10 from second port, and the quartz for then being excited by double wave abdomen is increased
Miniature sound resonance chamber II 3 in strong optoacoustic spectroscopy acousimeter 6, the beam diameter of collimation is 200 μm, the angle of divergence<9mrad.Aluminium
The reflection laser light beam of film speculum 13, makes laser beam secondary by miniature sound resonance chamber II 3, and from optical circulators 9
Second port enters.The laser beam of reflection from the 3rd port outgoing of optical circulators 9, and by optical phase compensator
11.Laser beam from the 3rd port outgoing of optical circulators 9 passes through double wave by beam collimator II 12 by collimation again
Miniature sound resonance chamber I 2 in the quartz enhanced photoacoustic spectroscopy acousimeter 6 that abdomen is excited, the monitoring emergent power of power meter 14.Signal
Generator 16 produces a slow change ramp voltage signal of 10mHz, and synchronous signal generator 16 also produces sinusoidal modulation signal, folds
Plus after send into laser together and drive 15, the output light wavelength of scanning and modulation laser is allowed to cover the target absorption of hydrone
Line.The synchronizing signal of signal generator 16 is admitted to the synchronous signal input end of lock-in amplifier 18.The quartz that double wave abdomen is excited
Enhancing optoacoustic spectroscopy acousimeter 6 exports electric signal, is amplified by preamplifier 17 first, is then fed into the letter of lock-in amplifier 18
Number input, computer 19 reads final result from lock-in amplifier 18.
Optical phase compensator 11 is used to adjustment by phase difference between two two light beams of miniature sound resonance chamber.
Under correct phase compensation, laser beam passes twice through miniature sound resonance chamber II 3, once by miniature sound resonance chamber I 2,
Two vibration antinodes of tuning-fork type quartz crystal oscillator once general frequency vibration pattern are excited simultaneously.Optical power is common by miniature sound
It is 13mW to shake behind chamber II 3, and due to the reflection loss of Al-flim reflector 13, coupling loss, the insertion of optical phase compensator 11 is damaged
Consumption, causes light beam power after finally by miniature sound resonance chamber I 2 to be reduced to 8mW.
Fig. 7 shown under 700Torr pressure, the measurement signal of 1.8% steam under three kinds of different devices：In figure：
1. it is the measurement signal of the gas detection apparatus of the quartz enhanced photoacoustic spectroscopy acousimeter excited using double wave abdomen；2. it is to use biography
The measurement signal of the gas detection apparatus of the miniature sound resonance chamber of list of system；3. it is the naked tuning-fork type for being not equipped with sound resonance chamber
The measurement signal of the gas detection apparatus of quartz crystal oscillator.Three kinds of tuning-fork type quartz crystal oscillators are measured under once general frequency vibration pattern
The present invention in the quartz enhanced photoacoustic spectroscopy acousimeter configuration sound resonance chamber more miniature than traditional list that excites of double wave abdomen survey
Sound device configuration signal improves 3 times, and the naked tuning-fork type quartz crystal oscillator signal than being not equipped with sound resonance chamber improves about 100 times.
The detectivity of steam is 230ppb (1 second time of integration), and normalization noise equivalent absorption coefficient is 1.73 × 10-9cm-1·
W·Hz-1/2。
Claims (6)
1. the quartz enhanced photoacoustic spectroscopy acousimeter that a kind of double wave abdomen is excited, it is characterised in that：Including a sound being vertically arranged
The miniature sound resonance chamber I (2), miniature sound resonance chamber that V shape quartz crystal oscillator (1) and tuning-fork type quartz crystal oscillator (1) match
II (3) and one be used for fix tuning-fork type quartz crystal oscillator (1) and miniature sound resonance chamber I (2) and miniature sound resonance chamber II
(3) support (5)；Described each miniature sound resonance chamber is horizontally set on tuning-fork type quartz crystal oscillator (1) both sides by a pair and is hung down
The straight stainless steel capillary (4) in the face of raising one's arm of tuning-fork type quartz crystal oscillator (1) is constituted, the center of each pair stainless steel capillary (4)
Axis overlaps and both passes through the gap of raising one's arm of tuning-fork type quartz crystal oscillator (1)；The support (5) is made up of upper and lower two pallets, and two
The intermediate vertical of individual pallet places the rectangular through holes (20) of tuning-fork type quartz crystal oscillator (1) to having, and also divides on upper and lower pallet
The groove for placing miniature sound resonance chamber I (2) and miniature sound resonance chamber II (3), and groove and rectangular through holes are not provided with
(20) vertical, the miniature sound resonance chamber II (3) and miniature sound resonance chamber I (2) are located at tuning-fork type quartz crystal oscillator (1) and raise one's arm
The position in gap respectively with two positions of vibration antinode of bottom up once general frequency vibration of being raised one's arm along tuning-fork type quartz crystal oscillator
Overlap.
2. the quartz enhanced photoacoustic spectroscopy acousimeter that a kind of double wave abdomen according to claim 1 is excited, it is characterised in that：Institute
The brachium of tuning-fork type quartz crystal oscillator (1) is stated for 17mm, spacing of raising one's arm is 700 μm, the length-width ratio raised one's arm is 17.
3. the quartz enhanced photoacoustic spectroscopy acousimeter that a kind of double wave abdomen according to claim 1 and 2 is excited, its feature exists
In：The end face of the stainless steel capillary (4) and the lateral distance of raising one's arm of tuning-fork type quartz crystal oscillator (1) are 20 μm.
4. the quartz enhanced photoacoustic spectroscopy acousimeter that a kind of double wave abdomen according to claim 1 and 2 is excited, its feature exists
In：The length of the stainless steel capillary (4) is 8.5mm, and internal diameter is 1.3mm, and external diameter is 1.58mm.
5. a kind of usage right requires the gas detection apparatus of the quartz enhanced photoacoustic spectroscopy acousimeter that the double wave abdomen in 1 is excited,
It is characterized in that：Including opticator and electronic section, opticator includes laser (7), optical isolator (8), optics ring
The quartz that shape device (9), beam collimator I (10), beam collimator II (12), optical phase compensator (11), double wave abdomen are excited
Enhancing optoacoustic spectroscopy acousimeter (6) and Al-flim reflector (13), the optical fiber output port connection optical isolator of laser (7)
(8) input, the first port of output end connection optical circulators (9) of optical isolator (8), optical circulators (9)
Second port connects beam collimator I (10) by optical fiber, and the 3rd port of optical circulators (9) connects optics phase by optical fiber
The input of position compensator (11), the output end of optical phase compensator (11) connects beam collimator II (12) by optical fiber,
Beam collimator II (12) is located at miniature sound resonance chamber I (2) in the quartz enhanced photoacoustic spectroscopy acousimeter (6) that double wave abdomen is excited
Incident side, beam collimator I (10) is located at miniature sound in the quartz enhanced photoacoustic spectroscopy acousimeter (6) that double wave abdomen is excited and is total to
Shake the incident side in chamber II (3), Al-flim reflector (13) is located at micro- in the quartz enhanced photoacoustic spectroscopy acousimeter (6) that double wave abdomen is excited
The light emission side of type sound resonance chamber II (3)；Electronic section includes that power meter (14), laser drive (15), signal generator
(16), preamplifier (17), lock-in amplifier (18) and computer (19), power meter (14) are located at the quartz increasing that double wave abdomen is excited
The light emission side of miniature sound resonance chamber I (2) in strong optoacoustic spectroscopy acousimeter (6), laser drives the control end connection of (15) to swash
Light device (7), the signal output port connecting laser of signal generator (16) drives the modulation port of (15), signal generator
(16) synchronous signal input end of synchronous port connection lock-in amplifier (18), the quartz enhanced photoacoustic spectroscopy that double wave abdomen is excited
The signal input part of signal output part connection preamplifier (17) of acousimeter (6), the signal output of preamplifier (17)
The signal output part connection electricity of the signal input part at end connection lock-in amplifier (18), lock-in amplifier (18) and power meter (14)
The signal acquisition port of brain (19).
6. gas detection apparatus according to claim 5, it is characterised in that：Described optical phase compensator (11) is by one
Root peels off bare fibre and cylindrical piezoelectric the ceramics composition of covering, and bare fibre is wrapped on cylindrical piezoelectric ceramics.
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