CN106802191A - A kind of embedded low temperature optical fiber temperature sensor and preparation method thereof - Google Patents
A kind of embedded low temperature optical fiber temperature sensor and preparation method thereof Download PDFInfo
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- CN106802191A CN106802191A CN201710043179.2A CN201710043179A CN106802191A CN 106802191 A CN106802191 A CN 106802191A CN 201710043179 A CN201710043179 A CN 201710043179A CN 106802191 A CN106802191 A CN 106802191A
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- optical fiber
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- low temperature
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- point groove
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K2203/00—Application of thermometers in cryogenics
Abstract
The invention discloses a kind of embedded low temperature optical fiber temperature sensor and preparation method thereof, the sensor is to include optical fiber and glass capillary, the coat of the tail end optical fiber of the optical fiber is stripped off and end face cuts flat with, a small V-type point groove of size is provided with the tail end that optical fiber is stripped off coat along the vertical direction with the optical fiber radial direction, the plane of symmetry of the V-type point groove is radially vertical with the optical fiber；The tail end that the optical fiber is provided with V-type point groove is embedded in the glass capillary and ensures that V-type point groove is located in glass capillary；Two end faces of the glass capillary are sealed with low temperature binder.The sensor production is simple, small volume, electromagnetism interference, the measurement of single temperature variable under achievable low temperature environment, fiber grating pair temperature in the prior art and strain cross sensitivity are solved the problems, such as, the temperature survey in suitable majority cryogenic engineerings in the adverse circumstances such as ultralow temperature, high current, high-intensity magnetic field, intense radiation.
Description
Technical field
The invention belongs to optical fiber cable technical field, more particularly, to a kind of embedded low temperature optical fiber temperature sensor
And preparation method thereof.
Background technology
Application with low temperature in fields such as high-intensity magnetic field, the energy, nuclear fusion, military project, space technology and life sciences is continuous
Expand, the health monitoring of structure is increasingly valued by people in large-scale low-temperature engineering.Such as superconducting magnetic energy storage, mainly by
Superconducting magnet, low-temperature (low temperature) vessel, Cryo Equipment and adhesive dispenser and monitoring system are constituted, wherein the heat endurance and low temperature of superconducting magnet
Technology is the key factor for influenceing super conductive magnetic storage energy, only when the low-temperature operation parameter of superconducting magnet is within critical value, superconduction
Magnet could normally run, thus low temperature measurement monitor superconducting magnet heat endurance in terms of play an important role.Optical fiber is passed
Sense technology is easy to many unique advantages such as insert material construction inner and electromagnetism interference with its own, in large-scale low-temperature engineering
There is good development prospect in the health monitoring application of structure.
Fibre Optical Sensor uses optical fiber as optical transport medium, when light is propagated in a fiber, because of outside environmental elements effect,
Such as temperature, stress, electric field and displacement, characterize light characteristic parameter (wavelength, amplitude, phase and polarization state etc.) can directly or
Connect and change, so as to fiber optic sensing device can be sensed as sensing element to be measured.At present research concentrate the most be
Fiber-optic grating sensor, i.e.,：Fiber Bragg Grating FBG (Fiber Bragg Grating, FBG) and LPFG
(Long period fiber grating, LPFG), wherein application it is the most ripe it is most commonly used be Fiber Bragg Grating FBG,
The Cycle Length of Fiber Bragg Grating FBG is usually less than 1 μm, and it is to backward by the Mode Coupling of fl transmission in fiber core
It is a kind of reflective type device of the selectivity of optical wavelength in the core mode of transmission.Using fiber optic sensing device can with monitoring temperature,
Various physical quantitys such as displacement, stress and strain, wherein the measurement to temperature is one very important research of sensory field of optic fibre
And application direction.But at low ambient temperatures, the problems such as fiber grating can produce chirp phenomenon and the reflective light intensity to reduce, these
The accuracy of measurement result will be influenceed, while also needing to solve the problems, such as fiber grating pair temperature and strain cross sensitivity.Mesh
Before, the research of thermal coefficient of expansion, thermo-optical coeffecient and elasto-optical coefficient to fiber grating still more lacks, and this will cause fiber grating
Optical fiber grating sensing is limited in temperature survey and there is cross sensitivity for temperature and strain, when being measured under high and low temperature environment
Lack the problem of theoretical strain sensitivity and temperature control, it is impossible to complete effective temperature-compensating.
Deng Fan equality people exist《TEMP performance study of the optical fiber Bragg raster under 77K environment》Be have studied in one text
Thermometer sensor DS18B20 of the fiber grating in the range of 77K to 286K, and point out the temperature control coefficient and temperature of fiber grating
Relevant and not simple constant, when temperature is less than 210K, the temperature control coefficient of fiber grating diminishes, which has limited light
Use of the fine grating as temperature sensor at low ambient temperatures.Chinese patent CN 103822668 discloses a kind of strain and temperature
The Bragg gratings low-temperature sensor and its application method of degree measurement simultaneously, correspondence become optical fiber Bragg raster and temperature-measuring optical fiber
Bragg gratings carry out rational structure design and encapsulation, by measuring strain optical fiber Bragg raster and temperature-measuring optical fiber Bragg light
The centre wavelength displacement of grid calculates uniform axial strain and the temperature suffered by sensor, and then realizes that 77K~273K is low
Strain and temperature are monitored on-line simultaneously under warm environment.But optical fiber Bragg raster occurs that chirp swarming shows under cryogenic
As, and two optical fiber Bragg rasters measurements simultaneously need first to do the correction factor that calibration experiment carrys out measurement temperature in the design,
Which results in the degree of accuracy decline of actual measurement.Thus, in cryogenic engineering structure, that ignores in conventional environment measurement asks
Topic, needs careful consideration at low ambient temperatures, and existing detection method and sensing device are extreme in special ultralow temperature, high-intensity magnetic field etc.
There are many technical barriers in practicality and type selecting the layout aspect under environment.So, accelerate research and development New temperature sensing
Device to solve in large-scale low-temperature engineering the technological difficulties such as sensor solidification, high-intensity magnetic field and real-time in temperature detection, as biography
Sense technical field problem demanding prompt solution.
Related application of the optical fiber sensing technology under high and low temperature environment achieves many progress, but still there are some not yet
The problem of solution and there is technology to be hoisted.Fiber grating is sensitive for strain-Temperature cross-over in application, extreme in high/low temperature
Basic parameter research under environment but extremely lacks, and the related application of fiber grating is limited to a certain extent.
The content of the invention
Problem of the prior art and shortcoming in view of the above, it is an object of the invention to provide a kind of embedded low temperature light
Fine temperature sensor and preparation method thereof, the sensor constitutes damascene structures by optical fiber and glass capillary, it is adaptable to ultralow
The measurement of single temperature variable under the low temperature environments such as temperature, high current, high-intensity magnetic field and intense radiation, be particularly well-suited to superconducting coil and
Embedded field of temperature measurement inside cryogenic magnet, it is possible to resolve fiber-optical grating temperature sensor stress and temperature in the prior art
The problem of cross sensitivity.
To achieve these goals, the invention provides a kind of embedded low temperature optical fiber temperature sensor, including optical fiber and
Glass capillary, the coat of the tail end optical fiber of the optical fiber is stripped off and end face cuts flat with, along vertical with the optical fiber radial direction
Direction is provided with a small V-type point groove of size, the plane of symmetry of the V-type point groove and institute in the tail end that optical fiber is stripped off coat
State optical fiber radially vertical；The tail end that the optical fiber is provided with V-type point groove is embedded in the glass capillary and ensures that V-type point groove is located at
In glass capillary, the other end is located at outside glass capillary, the external diameter of the internal diameter slightly larger than the optical fiber of the glass capillary,
So that the optical fiber does not receive stress in the glass capillary；Two end faces of the glass capillary are close with low temperature binder
Envelope.
In one embodiment of the present of invention, the fiber selection Ge/B co-doped fibers.Why Ge/B co-doped fibers are selected,
It is because its effective refractive index and thermo-optical coeffecient are larger, more than common single-mode quartz optical fibers.
In one embodiment of the present of invention, the groove depth of the V-type point groove meets (b-a)<H≤2b, wherein b are Ge/B
The radius of bare fibre is co-doped with, a is fiber core radius, and h is the groove depth of the V-type point groove.
In one embodiment of the present of invention, the V-type point groove is processed for femto-second laser.Compared to hydrofluoric acid burn into spoke
The methods such as light source inscription are penetrated, the sensor construction processed using femto-second laser is more regular, controllable, while having higher
Environmental stability and repeatability.
It is another aspect of this invention to provide that a kind of preparation method of embedded low temperature optical fiber temperature sensor is additionally provided,
Comprise the following steps：
Peel the coat of tail end optical fiber off and cut flat with end face, edge is stripped off with the vertical direction of the optical fiber radial direction in optical fiber
The tail end of coat is provided with a small V-type point groove of size；
The tail end that the optical fiber is provided with V-type point groove is embedded in the glass capillary and ensures that V-type point groove is located at capillary
In glass tube, the other end is located at outside glass capillary, the external diameter of the internal diameter slightly larger than the optical fiber of the glass capillary, so that
The optical fiber does not receive stress in the glass capillary；
Two end faces of the glass capillary are sealed with low temperature binder.
In one embodiment of the present of invention, the fiber selection Ge/B co-doped fibers.
In one embodiment of the present of invention, the groove depth of the V-type point groove meets (b-a)<H≤2b, wherein b are Ge/B
The radius of bare fibre is co-doped with, a is fiber core radius, and h is the groove depth of the V-type point groove.
In one embodiment of the present of invention, after tail end holds V-type point groove successfully, institute is cleaned in supersonic wave cleaning machine with alcohol
State optical fiber, it is ensured that the machining chips without residual.
In one embodiment of the present of invention, the V-type point groove is processed for femto-second laser.
In one embodiment of the present of invention, the attenuation parameter of the femto-second laser processing is 1, and diaphragm parameter is 5, energy
It is 10~20%, process velocity is 0.5~1mm/min, center of the laser spot to quasi-fiber during processing.
The embedded low temperature optical fiber temperature sensor that the present invention is provided, optical fiber used is processed using femtosecond laser and prepared, with
Glass capillary forms damascene structures, it is ensured that sensor carries out not receiving external carbuncle and strain during temperature survey at low ambient temperatures
Influence, have the advantages that small volume, preparation process be simple, electromagnetism interference, be capable of achieving single temperature variable under low temperature environment
Measurement, solve in the prior art fiber grating pair temperature and strain cross sensitivity, do Design of Temperature Compensation it is cumbersome the problems such as,
The measurement of the temperature variable in suitable majority cryogenic engineerings in the adverse circumstances such as ultralow temperature, high current, high-intensity magnetic field, intense radiation.
Brief description of the drawings
Fig. 1 is a kind of embedded low temperature optical fiber arrangement of temperature sensor schematic diagram in the embodiment of the present invention；
Fig. 2 is a kind of digit microscope of the V-type point groove of embedded low temperature optical fiber temperature sensor in the embodiment of the present invention
Figure；
The graph of a relation that Fig. 3 is varied with temperature for test process medium wavelength variable quantity in the embodiment of the present invention.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as additionally, technical characteristic involved in invention described below each implementation method
Not constituting conflict each other can just be mutually combined.
As shown in figure 1, the invention provides a kind of embedded low temperature optical fiber arrangement of temperature sensor, the sensor is by optical fiber
Damascene structures are constituted with glass capillary.Including optical fiber and glass capillary, the coat quilt of the tail end optical fiber of the optical fiber
Peel off and end face cuts flat with, edge is provided with a size with the vertical direction of the optical fiber radial direction in the tail end that optical fiber is stripped off coat
Small V-type point groove, the plane of symmetry of the V-type point groove is radially vertical with the optical fiber；The optical fiber is provided with the tail end of V-type point groove
It is embedded in the glass capillary and ensures that V-type point groove is located in glass capillary, the other end is located at outside glass capillary, described
The internal diameter of glass capillary is slightly larger than the external diameter of the optical fiber, so that the optical fiber does not receive stress in the glass capillary；
Two end faces of the glass capillary are sealed with low temperature binder.
Preferably, in embodiments of the present invention, the fiber selection Ge/B co-doped fibers.Why light is co-doped with from Ge/B
Fibre, is because its effective refractive index and thermo-optical coeffecient are larger, more than common single-mode quartz optical fibers.
As shown in figure 1, the groove depth of the V-type point groove should meet (b-a)<H≤2b, wherein b are co-doped with naked light for Ge/B
Fine radius, a is fiber core radius, and h is the groove depth of the V-type point groove, i.e. the tip of V-type point groove should be at least across light
Fine covering and be deep into fibre core.
Preferably, in embodiments of the present invention, the tail end V-type point groove of the optical fiber is to be processed to slot with femto-second laser
's.The method such as inscribe compared to hydrofluoric acid burn into radiating light source, the sensor construction processed using femto-second laser is more
It is regular, controllable, while having environmental stability and repeatability higher.As shown in Fig. 2 to use femtosecond in the embodiment of the present invention
The digit microscope figure of the V-type point groove of laser.Preferably, the attenuation parameter of femto-second laser processing is 1, and diaphragm parameter is 5,
Energy is 10~20%, and process velocity is 0.5~1mm/min, center of the laser spot to quasi-fiber during processing.
As shown in figure 1, in embodiments of the present invention, by the tail end of glass capillary and one end low temperature with optical fiber contact
Adhesive is sealed, it is ensured that the sensing body of sensor is not influenceed inside capillary by extraneous stress factor, in making capillary
Sensing body be in entirely free on his state, it is ensured that sensor measurement accuracy, while with adhesive encapsulate also allow for carry and
Install.
In order to prepare above-mentioned embedded low temperature optical fiber temperature sensor, adopted with the following method in the embodiment of the present invention：Take one
The moderate optical fiber of segment length (such as Ge/B co-doped fibers), the optical fiber coating of its tail end is peeled off, and end face is cut flat with cutter,
Optical fiber is fixed in three-dimensional mobile platform using fixture, it is small in the tail end of optical fiber to open a size using femto-second laser
V-type point groove, depth is 102 μm (its digit microscope figure is as shown in Figure 2), after machining, optical fiber is provided with into the one of V-type point groove
End alcohol is cleaned by ultrasonic in supersonic wave cleaning machine, to ensure machining chips noresidue.Then optical fiber is provided with V-type point groove
One end is embedded into glass capillary (external diameter is 250 μm, and internal diameter is 126 μm), finally with low temperature binder by glass capillary
Tail end and sealed with the place of optical fiber contact, it is ensured that the sensing body of sensor is inside capillary not by extraneous stress factor
Influence, makes the sensing body in capillary be in entirely free on his state.
It should be noted that the internal diameter of the glass capillary need to be slightly larger than the external diameter of the optical fiber, but also should not be too big,
As long as can make the optical fiber that stress is not received in the glass capillary；The internal diameter of example glass capillary as mentionedIt is full
Foot Slightly larger than the diameter (125 μm) of bare fibre.
Because the coat of optical fiber is mostly the organic materials such as acrylic resin, during femtosecond laser processing optical fiber
Can be ablated, so as to influence process.Therefore in preparation method of the present invention, optical fiber before being processed with femto-second laser,
The coat of optical fiber must first be removed.
The embodiment of the present invention, the fibre optic temperature sensor prepared using femtosecond laser processing is in freely not by the shape of external force
State, only temperature is sensitive to external world, so that the sensor can realize the single temperature variable without temperature-compensating under low temperature environment
Measurement.
By the embedded low temperature optical fiber temperature sensor of embodiment of the present invention preparation, its low temperature measuring method is：Will system
The Fibre Optical Sensor got ready carries out sealing thermal insulation treatment, and the other end of Ge/B optical fiber directly connects with (FBG) demodulator wire jumper, while
A RTD low-temperature sensor is placed in place in heat insulation tank near sensor, then holds the sensor together with sealing thermal insulation
Device is integrally dipped into liquid nitrogen container together, by 4~24h, -193 DEG C is reduced in RTD low-temperature sensor thermometer registration
Above-mentioned sealing container is taken out when (80K), makes its slow intensification, whole temperature-rise period reaches 0 DEG C (273K) after 4~24h, surveyed
Process monitoring wavelength variable quantity Δ λ is with temperature T situations of change for examination.
Two faces and optical fiber of the embedded low temperature optical fiber temperature sensor by Ge/B co-doped fiber tail ends V-type point groove
The reflecting surface of tail end end face composition, forms triple interference, and use unimodal method demodulated interferential spectral signal.
Interference light intensity (I) is represented by：
Wherein, I1And I2It is the light intensity of two-way light, as shown in figure 1,It is the phase difference of the two-way light, is represented by：
Wherein, Δ neffFor the effective refractive index of fiber core and micro- chamber air is poor, λ is wavelength, and L is the length of microcavity,It is initial phase.
Δ L=Δ T α L
Δ L is microcavity variation with temperature amount, and Δ T is the variable quantity of temperature, and α is the thermal coefficient of expansion of optical fiber.
The embedded low temperature optical fiber temperature sensor that the present invention is provided is applicable to 77~273K scopes under low temperature environment
Temperature survey.
As shown in figure 3, being a kind of individual example of low temperature measuring method in the embodiment of the present invention：The Fibre Optical Sensor that will be prepared
Device carries out sealing thermal insulation treatment, and the other end of Ge/B optical fiber directly connects (FBG) demodulator wire jumper, while near sensor in heat insulation tank
Place place a RTD low-temperature sensor, then by the sensor together with sealed insulation container integrally be dipped into liquid
In nitrogen tank, by the time of about 10h, will be above-mentioned close when RTD low-temperature sensor thermometer registration is reduced to -193 DEG C (80K)
Envelope container takes out, and makes its slow intensification, and whole temperature-rise period reaches 0 DEG C (273K) after about 10h.Monitored in test process and remembered
Record wavelength variable quantity Δ λ changes with temperature T.Test data is arranged, its relation as shown in Figure 3, can from figure
Go out, wavelength variable quantity and temperature are into conic section relation.
It should be noted that and understand, in the feelings for not departing from the spirit and scope of the present invention required by appended claims
Under condition, various modifications and improvements can be made to the present invention of foregoing detailed description.It is therefore desirable to the model of the technical scheme of protection
Enclose and do not limited by given any specific exemplary teachings.
Applicant states that the present invention illustrates detailed process equipment of the invention and technological process by above-described embodiment,
But the invention is not limited in above-mentioned detailed process equipment and technological process, that is, do not mean that the present invention has to rely on above-mentioned detailed
Process equipment and technological process could be implemented.Person of ordinary skill in the field it will be clearly understood that any improvement in the present invention,
Addition, the selection of concrete mode to the equivalence replacement and auxiliary element of each raw material of product of the present invention etc., all fall within of the invention
Within the scope of protection domain and disclosure.
Claims (10)
1. a kind of embedded low temperature optical fiber temperature sensor, it is characterised in that including optical fiber and glass capillary, the optical fiber
The coat of tail end optical fiber is stripped off and end face cuts flat with, and edge is stripped off coat with the vertical direction of the optical fiber radial direction in optical fiber
Tail end be provided with the small V-type point groove of size, the plane of symmetry of the V-type point groove is radially vertical with the optical fiber；The light
The tail end that fibre is provided with V-type point groove is embedded in the glass capillary and ensures that V-type point groove is located in glass capillary, other end position
In outside glass capillary, the internal diameter of the glass capillary is slightly larger than the external diameter of the optical fiber, so that the optical fiber is in the hair
Stress is not received in thin glass tube；Two end faces of the glass capillary are sealed with low temperature binder.
2. a kind of embedded low temperature optical fiber temperature sensor according to claim 1, it is characterised in that the fiber selection
Ge/B co-doped fibers.
3. embedded low temperature optical fiber temperature sensor according to claim 1 and 2, it is characterised in that the V-type point groove
Groove depth meets (b-a)<H≤2b, wherein b are co-doped with the radius of bare fibre for Ge/B, and a is fiber core radius, and h is the V
The groove depth of type point groove.
4. a kind of embedded low temperature optical fiber temperature sensor according to claim 1 and 2, it is characterised in that the V-type point
Groove is processed for femto-second laser.
5. a kind of preparation method of embedded low temperature optical fiber temperature sensor, it is characterised in that comprise the following steps：
Peel the coat of tail end optical fiber off and cut flat with end face, coating is stripped off in optical fiber along the vertical direction with the optical fiber radial direction
The tail end of layer is provided with a small V-type point groove of size；
The tail end that the optical fiber is provided with V-type point groove is embedded in the glass capillary and ensures that V-type point groove is located at capillary glass
In pipe, the other end is located at outside glass capillary, the external diameter of the internal diameter slightly larger than the optical fiber of the glass capillary, so that described
Optical fiber does not receive stress in the glass capillary；
Two end faces of the glass capillary are sealed with low temperature binder.
6. the preparation method of embedded low temperature optical fiber temperature sensor as claimed in claim 5, it is characterised in that the optical fiber
From Ge/B co-doped fibers.
7. the preparation method of the embedded low temperature optical fiber temperature sensor as described in claim 5 or 6, it is characterised in that the V
The groove depth of type point groove meets (b-a)<H≤2b, wherein b are co-doped with the radius of bare fibre for Ge/B, and a is fiber core radius, h
It is the groove depth of V-type point groove.
8. the preparation method of the embedded low temperature optical fiber temperature sensor as described in claim 5 or 6, it is characterised in that in tail
After V-type point groove is held at end successfully, the optical fiber is cleaned in supersonic wave cleaning machine with alcohol, it is ensured that the machining chips without residual.
9. the preparation method of the embedded low temperature optical fiber temperature sensor as described in claim 5 or 6, it is characterised in that the V
Type point groove is processed for femto-second laser.
10. the preparation method of embedded low temperature optical fiber temperature sensor as claimed in claim 9, it is characterised in that described to fly
The attenuation parameter of second laser processing is 1, and diaphragm parameter is 5, and energy is 10~20%, and process velocity is 0.5~1mm/min,
Center of the laser spot to quasi-fiber during processing.
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| CN108362394A (en) * | 2018-02-12 | 2018-08-03 | 南开大学 | Crystal optical waveguide speckle thermometry and system based on femtosecond laser write-in |
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| CN113503827A (en) * | 2021-06-09 | 2021-10-15 | 北京航天控制仪器研究所 | Device and method for measuring strain sensitivity of fiber bragg grating at ultralow temperature |
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