CN106793433A - A kind of miniaturization x-ray instrument with mean current high and pulse line - Google Patents
A kind of miniaturization x-ray instrument with mean current high and pulse line Download PDFInfo
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- CN106793433A CN106793433A CN201611117442.XA CN201611117442A CN106793433A CN 106793433 A CN106793433 A CN 106793433A CN 201611117442 A CN201611117442 A CN 201611117442A CN 106793433 A CN106793433 A CN 106793433A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/08—Electrical details
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
Abstract
The invention discloses a kind of miniaturization x-ray instrument with mean current high and pulse line, including:Electronic beam current generation system, the electronic beam current generation system is used to produce and export high-power electron beam group;Laser generating system, the generating device of laser is used to export ps laser or fs laser;Electronic beam current and laser collision system, the electronic beam current and laser collision system are used to measuring laser and high-power electron beam, laser is aligned with high-power electron beam and synchronization, and recovery residual electrons and laser;X-ray extraction system, the X-ray extraction system to the X-ray that collision is produced for being focused, monochromatic, limit light and detection.The miniaturization x-ray instrument of the embodiment of the present invention, while miniaturization is met so that X-ray meets high brightness, high-quality, accurate monochromatic and high photon flux, while mean current high and pulse line can be exported.
Description
Technical field
The present invention relates to X-ray source field, particularly relate to a kind of small-sized with mean current high and pulse line
Change x-ray instrument.
Background technology
X-ray wavelength scope is at 500A~0.01A (20eV~1MeV).Due to the size (1A~10A) of atom and molecule
Just fall in the wave-length coverage of X-ray, therefore, using X-ray scattering and diffraction can provide in detailed material atom and
The mechanism information of molecular composition.Meanwhile, change in the time cycle of atomic motion, the phase transition process of material and chemical process in material
Learn the physical processes such as key fracture and combination and be typically about 100fs magnitudes at room temperature, the research to these ultra-high speed physical phenomenas is adopted
Pumping-detecting probe method requirement probe has the time resolution of same order.Therefore research has 100fs magnitude pulsewidths
Miniaturization ultrashort X-ray source to the subject such as solid-state physics, biological and life science, femtochemistry, material subject
Development has great significance.
At present, the X-ray source being commonly used mainly has the large-scale X-ray source and utilization height with synchrotron radiation as representative
Fast cathode electron beam beats the small indoor x-ray source in anode metal target activation bremstrahlen X-ray.Although synchrotron radiation light source
Have the advantages that intensity is big, coherence is good, diverging is small, spectral range is wide and tunable, but facility is huge, it is with high costs, entirely
Limited amount in the range of ball, it is impossible to meet existing scientific research demand;Although small indoor X sources low cost, size is small, it is monochromatic
Property poor, brightness is low, wavelength is untunable, it is impossible to meet in the high-resolution parsing of atom, molecular scale and ultrafast ps, fs process
In scientific research explore.
For realization miniaturization while high brightness, high-quality, monochromatic standard, photon flux high is met in the prior art
The problem of X-ray source, not yet there is effective solution at present.
The content of the invention
In view of this, it is an object of the invention to propose a kind of to export the highlighted of mean current high and pulse line
Degree, high-quality, quasi monochromatic miniaturization x-ray instrument.
Based on a kind of miniaturization X-ray with mean current high and pulse line that the above-mentioned purpose present invention is provided
Instrument, including:
Electronic beam current generation system, the electronic beam current generation system is used to produce and export high-power electron beam group;
Optical Maser System, the laser device is used to export the ultrafast ps laser and/or fs laser arteries and veins of high repetition frequency
Punching.
Electronic beam current and laser collision system, the electron beam group are used for laser pulse with height with laser pulse collision system
Energy electron beam alignment collides to produce X-ray line and reclaim residual electrons and laser with synchronous;
X-ray line extraction system, the X-ray line extraction system be used for collision produce X-ray be focused,
Monochromatic, limit light and detection.
Further, the electronic beam current generation system includes:
Photocathode, the photocathode is used to produce electron beam group;
RF electron guns, the RF used in electron gun is in the low divergence of generation, the electronic beam current that short beam is long, the quantity of electric charge is moderate;
Electronic beam current linear accelerator, the electronic beam current linear accelerator is used for the electronics for producing the RF electron guns
Beam acceleration energy to needed for colliding;
Beam diagnostics equipment, the beam diagnostics equipment is used to enter electronic beam current the measurement of line parameter;
High accuracy low level control system, the high accuracy low level control system is used to export microwave signal to klystron
Amplitude, the measurement and control of phase;
Electron Beam Focusing and Shaping Module, the Electron Beam Focusing and Shaping Module are used to accelerate electron linear accelerator
Electron beam group carry out shaping and focusing.
Further, the laser generating system includes:
Femtosecond Ti∶sapphire laser, the pumping that the Femtosecond Ti∶sapphire laser is exported in the green (light) laser of big energy
Under, the big energy ultrafast laser of a branch of femtosecond magnitude is exported, by after optical splitter beam splitting, wherein light beam is by non-linear frequency
Transformation system carries out irradiation and produces electron beam group to the photocathode of electron beam group generation system, and another bundle of pulsed laser is used for and high
Can electron beam group collision generation X-ray.
Nonlinear frequency transformation system, the nonlinear frequency transformation system is used for export Femtosecond Ti∶sapphire laser
Frequency multiplication, frequency tripling conversion are carried out through the beam of laser after optical splitter, the laser output of ultraviolet band is obtained, for entering to photocathode
Row irradiation produces electron beam group.
Further, the electronic beam current includes with laser head-on collision system:
Vacuum chamber, the vacuum chamber is used to provide vacuum environment with femtosecond laser collision for high-power electron beam group, and can
Normal incidence and oblique incidence two ways are provided with for laser output, so as to obtain the X-ray output of ps/fs;
Light path delayed time system, the light path delayed time system is used to that the laser of laser generating system output to be split and controlled
Make it and reach the light path in collision chamber, and incide the point of impingement at different angles;
Electron recovery device, the electron recovery device is used to that electricity will to be collected into after the remaining electronic beam current deflection of collision rift
In sub- recycling bin;
Laser retracting device, the laser retracting device is used to for the remaining ultrafast laser of collision rift to be collected into laser recovery
In bucket.
Further, the X-ray extraction system includes:
KB mirrors, the KB mirrors are used for the X-ray focusing of outgoing;
Monocrystalline module, the monocrystalline module is used to improve exit Xray Unit colors;
Limit unthreaded hole, the limit unthreaded hole is used to optimize X-ray direction;
Lead glass, the lead glass is used to place fluorescent screen, and incident ray and sample position on fluorescent screen are monitored by camera
Put to monitor the beam quality of exit Xray.
Further, the electronic beam current generation system work repetition rate is in hundred Hz magnitudes, produced electron beam
Regimental commander's degree is in ps magnitudes;The laser generator can simultaneously meet exposure light cathode targets and excite electronic beam current and and high energy
Electronic beam current collides function, and the electronic beam current can control laser incident angle and light path with laser head-on collision system.
Further, colliding the X-ray for producing is at least, repetition rate 100Hz, pulse number of photons 108/ pulse, light
Sub- flux 1010/s。
From the above it can be seen that the miniaturization X with mean current high and pulse line that the present invention is provided is penetrated
Line instrument, including:Electronic beam current generation system, the electronic beam current generation system is used to produce and export high-power electron beam group;Swash
There is system in light, the generating device of laser is used to export ps laser or fs laser;Electronic beam current and laser collision system, it is described
Electronic beam current and laser pulse collision system are used to measuring laser and high-power electron beam, laser is aligned with high-power electron beam and together
Step, and reclaim residual electrons and laser;X-ray extraction system, the X-ray extraction system is used for the X produced to collision
Ray is focused, monochromatic, limit light and detection.The miniaturization x-ray instrument of the embodiment of the present invention, while miniaturization is met,
So that X-ray meets high brightness, high-quality, accurate monochromatic and high photon flux, while mean current high and pulse can be exported
Line.
Brief description of the drawings
The structured flowchart of Fig. 1 miniaturization x-ray instruments of mean current high and pulse line for the embodiment of the present invention has;
The concrete structure of Fig. 2 miniaturization x-ray instruments of mean current high and pulse line for the embodiment of the present invention has
Schematic diagram.
Specific embodiment
To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
A kind of miniaturization x-ray instrument with mean current high and pulse line that the present invention is provided, including:
Electronic beam current generation system, the electronic beam current generation system is used to produce and export high-power electron beam group;
Laser generating system, the generating device of laser is used to export ps laser or fs laser,
Electronic beam current and laser collision system, the electronic beam current are used to measure laser with high energy electricity with laser collision system
Beamlet, laser is aligned with high-power electron beam and synchronous, and reclaim residual electrons and laser;
X-ray extraction system, the X-ray extraction system to the X-ray that collision is produced for being focused, monochromatic, limit
Light and detection.
The miniaturization x-ray instrument of the embodiment of the present invention, while miniaturization is met so that X-ray meets high brightness, height
Quality, accurate monochromatic and high photon flux.
In seat other embodiment of the invention, in miniaturization x-ray instrument in the above-described embodiments, further,
The electronic beam current generation system includes:
Photocathode, the photocathode is used to produce electron beam group;
RF electron guns, the RF used in electron gun is in the low divergence of generation, the electronic beam current that short beam is long, the quantity of electric charge is moderate;
Electronic beam current linear accelerator, the electronic beam current linear accelerator is used for the electronics for producing the RF electron guns
Beam acceleration energy to needed for colliding;
Beam diagnostics equipment, the beam diagnostics equipment is used to enter electronic beam current the measurement of line parameter;
High accuracy low level control system, the high accuracy low level control system is used to export microwave signal to klystron
Amplitude, the measurement and control of phase;
Electron Beam Focusing and Shaping Module, the Electron Beam Focusing and Shaping Module are used to accelerate electron linear accelerator
Electron beam group carry out shaping and focusing.
Further, the laser generating system includes:
Femtosecond Ti∶sapphire laser, the pumping that the Femtosecond Ti∶sapphire laser is exported in the green (light) laser of big energy
Under, the big energy ultrafast laser of two beam femtosecond magnitudes is exported, the photocathode to electronic beam current generation system carries out irradiation product respectively
The high energy electron line collision of raw electron beam group and the output of electronic beam current generation system produces X-ray.
Nonlinear frequency transformation system, the nonlinear frequency transformation system is used for export Femtosecond Ti∶sapphire laser
Laser carries out frequency multiplication, frequency tripling conversion, obtains the laser output of ultraviolet band, and electron beam is produced for carrying out irradiation to photocathode
Group.
Further, the electronic beam current includes with laser head-on collision system:
Vacuum chamber, the vacuum chamber is used to provide vacuum environment for high-power electron beam and femtosecond laser are collided, and can be with
For laser output provides normal incidence and oblique incidence two ways, so as to obtain the X-ray output of ps/fs;
Light path delayed time system, the light path delayed time system is used to that the laser of laser generating system output to be split and controlled
Make it and reach the light path in collision chamber, and incide the point of impingement at different angles;
Electron recovery device, the electron recovery device is used to that electricity will to be collected into after the remaining electronic beam current deflection of collision rift
In sub- recycling bin;
Laser retracting device, the laser retracting device is used to for the remaining femtosecond laser of collision rift to be collected into laser recovery
In bucket.
Further, the X-ray extraction system includes:
KB mirrors, the KB mirrors are used for the X-ray focusing of outgoing;
Monocrystalline module, the monocrystalline module is used to improve exit Xray Unit colors;
Limit unthreaded hole, the limit unthreaded hole is used to optimize X-ray direction;
Lead glass, the lead glass is used to place fluorescent screen, and incident ray and sample position on fluorescent screen are monitored by camera
Put to monitor the beam quality of exit Xray.
The electronic beam current of the miniaturization x-ray instrument with mean current high and pulse line that the present invention is implemented produces system
System work repetition rate is in hundred Hz magnitudes, and produced electronics Electron bunch length is in ps magnitudes;State laser generator can be simultaneously
Meet exposure light cathode targets excite electronic beam current and with high energy electron line collision function, the electronic beam current and laser pair
The system of hitting can control laser incident angle and light path.Colliding the X-ray for producing is at least, repetition rate 100Hz, pulse photon
Number 108/ pulse, photon flux 1010/s。
The miniaturization x-ray instrument with mean current high and pulse line of the embodiment of the present invention, minimizes meeting
While so that X-ray meets high brightness, high-quality, accurate monochromatic and high photon flux.
As one embodiment of the present of invention, as shown in figure 1, for the embodiment of the present invention has mean current high and pulse
The structured flowchart of the miniaturization x-ray instrument of line.It can be seen that the miniaturization x-ray instrument of the present embodiment, including:
Electronic beam current generation system 100, electronic beam current generation system 100 is used to produce and export the specified quantity of electric charge, diverging
The high-power electron beam group of degree, Electron bunch length and energy;
Generating device of laser 200, generating device of laser 200 is used to export the ultrafast ps/fs of specified wavelength, energy, pulsewidth
Laser;
Electronic beam current and laser head-on collision system 300, it is laser and high energy electricity that electronic beam current is used for laser head-on collision system 300
Beamlet collision alignment, synchronization, measurement, recovery residual electrons and laser etc.;
X-ray extraction system 400, X-ray ejector 400 is used to being focused the X-ray that collision is produced, it is monochromatic,
Limit light and detection.
As a specific embodiment of the invention, as shown in Fig. 2 for the embodiment of the present invention has mean current high and list
The concrete structure schematic diagram of the miniaturization x-ray instrument of pulsed beam current.It can be seen that the miniaturization X-ray of the present embodiment
Instrument, including:Electronic beam current generation system 100, electronic beam current generation system 100 is used to produce and export the specified quantity of electric charge, diverging
The high-power electron beam group of degree, Electron bunch length and energy;
Generating device of laser 200, generating device of laser 200 is used to export the ultrafast ps/fs of specified wavelength, energy, pulsewidth
Laser;
Electronic beam current and laser head-on collision system 300, it is laser and high energy electricity that electronic beam current is used for laser head-on collision system 300
Beamlet collision alignment, synchronization, measurement, recovery residual electrons and laser etc.;
X-ray extraction system 400, X-ray ejector 400 is used to being focused the X-ray that collision is produced, it is monochromatic,
Limit light and detection.
Wherein, electronic beam current generation system 100 includes:
Photocathode 110, photocathode 110 is used to produce electron beam group with the ultrafast laser effect of ultraviolet band
RF electron guns 120, RF electron guns 120 are used to produce low divergence, the electronic beam current that short beam is long, the quantity of electric charge is moderate;
Electronic beam current linear accelerator 130, electronic beam current linear accelerator 130 is used for the electricity for producing RF electron guns 120
Beamlet stream accelerates to energy needed for collision;
Beam diagnostics equipment 140, beam diagnostics equipment 140 is used to enter electronic beam current the measurement of line parameter;
High accuracy low level control system 150, high accuracy low level control system 150 is used for klystron output microwave letter
Number amplitude, the measurement and control of phase;
Electron Beam Focusing and Shaping Module 160, Electron Beam Focusing and Shaping Module 160 are used for electronic beam current linear accelerating
The electron beam group that device 130 accelerates carries out shaping and focusing.
Generating device of laser 200 includes;
Femtosecond Ti∶sapphire laser 210, the pumping that Femtosecond Ti∶sapphire laser 210 is exported in the green (light) laser of big energy
Under, the big energy ultrafast laser of femtosecond magnitude is exported, after optical splitter beam splitting, beam of laser is by nonlinear frequency transformation system
220, the photocathode 110 to electronic beam current generation system carries out irradiation generation electron beam group, and another beam of laser and electron beam are miscarried
The high energy electron line collision of the raw output of system 100 produces X-ray.
Nonlinear frequency transformation system 220, nonlinear frequency transformation system 220 is used for a branch of Femtosecond Ti∶sapphire laser
The laser of 210 outputs carries out frequency multiplication, frequency tripling conversion, the laser output of ultraviolet band is obtained, for carrying out spoke to photocathode 110
According to generation electron beam group.
Electronic beam current includes with laser head-on collision system 300:
Vacuum chamber 310, vacuum chamber 310 is that high-power electron beam and femtosecond laser collision provide vacuum environment;
Light path delayed time system 320, light path delayed time system 320 carries out light path to the output laser pulse of generating device of laser 200
Regulation, with the time for controlling it to reach the point of impingement, makes laser pulse and the irradiation light after same beam splitting laser pulse frequency tripling
High-power electron beam group produced by negative electrode reaches the point of impingement simultaneously, collides, and produces the X-ray of different pulse widths;
Electron recovery device 330, electron recovery device 330 is used to be collected into after the remaining electronic beam current deflection of collision rift
In electron recovery bucket;
Laser retracting device 340, laser retracting device 340 is used to for the remaining femtosecond laser of collision rift to be collected into laser time
In receipts bucket.
X-ray extraction system 400 includes:
KB (Kirkpatrick-Baez) mirror 410, KB mirrors 410 are used for the X-ray focusing of outgoing;
Monocrystalline module 420, the monocrystalline module 420 is used to improve exit Xray Unit colors;
Limit unthreaded hole 430, limit unthreaded hole 430 is used for aperture and the X-ray flux of controlled output X-ray line;
Lead glass 440;Lead glass 440 is used to place fluorescent screen, and incident ray and sample on fluorescent screen are monitored by camera
The beam quality of exit Xray is monitored in position.
It should be evident that drawings in the following description are only some embodiments of the present invention, for the common skill in this area
For art personnel, on the premise of not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
It should be noted that the statement of all uses " first " and " second " is for differentiation two in the embodiment of the present invention
The entity of individual same names non-equal or the parameter of non-equal, it is seen that " first " " second " should not only for the convenience of statement
The restriction to the embodiment of the present invention is interpreted as, subsequent embodiment is no longer illustrated one by one to this.
Those of ordinary skill in the art should be understood:The discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples;Under thinking of the invention, above example
Or can also be combined between the technical characteristic in different embodiments, step can be realized with random order, and be existed such as
Many other changes of upper described different aspect of the invention, for simplicity, they are provided not in details.
In addition, to simplify explanation and discussing, and in order to obscure the invention, can in the accompanying drawing for being provided
To show or can not show to be connected with the known power ground of integrated circuit (IC) chip and other parts.Furthermore, it is possible to
Device is shown in block diagram form, to avoid obscuring the invention, and this have also contemplated that following facts, i.e., on this
The details of the implementation method of a little block diagram arrangements is to depend highly on to implement platform of the invention (that is, these details should
It is completely in the range of the understanding of those skilled in the art).Elaborating that detail (for example, circuit) is of the invention to describe
In the case of exemplary embodiment, it will be apparent to those skilled in the art that can be without these details
In the case of or implement the present invention in the case that these details are changed.Therefore, these descriptions are considered as explanation
Property rather than restricted.
Although invention has been described to have been incorporated with specific embodiment of the invention, according to retouching above
State, many replacements of these embodiments, modification and modification will be apparent for those of ordinary skills.Example
Such as, other memory architectures (for example, dynamic ram (DRAM)) can use discussed embodiment.
Embodiments of the invention be intended to fall within the broad range of appended claims it is all such replace,
Modification and modification.Therefore, all any omission, modification, equivalent, improvement within the spirit and principles in the present invention, made
Deng should be included within the scope of the present invention.
Claims (7)
1. a kind of miniaturization x-ray instrument with mean current high and pulse line, it is characterised in that including:
Electronic beam current generation system, the electronic beam current generation system is used to produce and export high-power electron beam group;
Laser generating system, the generating device of laser is used to export ps laser or fs laser,
Electronic beam current and laser collision system, the electronic beam current are used to measure laser and high energy electron with laser collision system
Beam, laser is aligned with high-power electron beam and synchronous, and reclaim residual electrons and laser;
X-ray extraction system, the X-ray extraction system is used to being focused the X-ray that collision is produced, monochromatic, limit light and
Detection.
2. a kind of miniaturization x-ray instrument with mean current high and pulse line according to claim 1, its feature
It is that the electronic beam current generation system includes:
Photocathode, the photocathode is used to produce electron beam group;
RF electron guns, the RF used in electron gun is in the low divergence of generation, the electronic beam current that short beam is long, the quantity of electric charge is moderate;
Electronic beam current linear accelerator, the electronic beam current linear accelerator is used for the electronic beam current for producing the RF electron guns
Accelerate to energy needed for collision;
Beam diagnostics equipment, the beam diagnostics equipment is used to enter electronic beam current the measurement of line parameter;
High accuracy low level control system, the high accuracy low level control system is used to export klystron the width of microwave signal
Value, the measurement and control of phase;
Electron Beam Focusing and Shaping Module, the Electron Beam Focusing and Shaping Module are used for the electricity for accelerating electron linear accelerator
Beamlet group carries out shaping and focusing.
3. a kind of miniaturization x-ray instrument with mean current high and pulse line according to claim 1, its feature
It is that the laser generating system includes:
Femtosecond Ti∶sapphire laser, the Femtosecond Ti∶sapphire laser is defeated under the pumping that the green (light) laser of big energy is exported
Go out the big energy ultrafast laser of a branch of femtosecond magnitude, through optical splitter beam splitting after, wherein beam of laser is by nonlinear frequency transformation
Photocathode after system to electronic beam current generation system carries out irradiation generation electron beam group, another beam laser pulse and electronic beam current
The high energy electron line collision of generation system output produces X-ray;
Nonlinear frequency transformation system, the nonlinear frequency transformation system is used for the laser for exporting Femtosecond Ti∶sapphire laser
Frequency multiplication, frequency tripling conversion are carried out, the laser output of ultraviolet band is obtained, electron beam group is produced for carrying out irradiation to photocathode.
4. a kind of miniaturization x-ray instrument with mean current high and pulse line according to claim 1, its feature
It is that the electronic beam current includes with laser head-on collision system:
Vacuum chamber, the vacuum chamber is used to be that high-power electron beam and femtosecond laser collision provide vacuum environment, and can be sharp
The output of light device provides normal incidence and oblique incidence two ways, so as to obtain the X-ray output of ps/fs;
Light path delayed time system, the light path delayed time system is used to carry out light path tune to the laser pulse of laser generating system output
Section, it is ensured that and high-power electron beam is rolled into a ball the arrival point of impingement simultaneously and is collided;
Electron recovery device, the electron recovery device is used to that electronics time will to be collected into after the remaining electronic beam current deflection of collision rift
In receipts bucket;
Laser retracting device, the laser retracting device is used to for the remaining femtosecond laser of collision rift to be collected into laser recycling bin
In.
5. a kind of miniaturization x-ray instrument with mean current high and pulse line according to claim 1, its feature
It is that the X-ray extraction system includes:
KB mirrors, the KB mirrors are used for the X-ray focusing of outgoing;
Monocrystalline module, the monocrystalline module is used to improve exit Xray Unit colors;
Limit unthreaded hole, the limit unthreaded hole is used to optimize X-ray direction;
Lead glass, the lead glass is used to place fluorescent screen, by camera monitor on fluorescent screen incident ray and sample position come
Monitor the beam quality of exit Xray.
6. a kind of miniaturization X with mean current high and pulse line according to any one in claim 1-5
Alpha cellulose a gage, it is characterised in that the electronic beam current generation system work repetition rate is in hundred Hz magnitudes, produced electron beam
Regimental commander's degree is in ps magnitudes;State laser generator can and meanwhile meet exposure light cathode targets excite electronic beam current and with high energy electricity
Beamlet stream collides function, and the electronic beam current can control laser incident angle and light path with laser head-on collision system.
7. a kind of miniaturization X with mean current high and pulse line according to any one in claim 6 is penetrated
Line instrument, it is characterised in that colliding the X-ray for producing is at least, repetition rate 100Hz, pulse number of photons 108/ pulse, light
Sub- flux 1010/s。
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CN115524353A (en) * | 2022-11-24 | 2022-12-27 | 之江实验室 | X-ray photoacoustic and CT fusion bimodal imaging device and method |
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