CN106784142A - Solar battery slice etching device and method - Google Patents
Solar battery slice etching device and method Download PDFInfo
- Publication number
- CN106784142A CN106784142A CN201611167673.1A CN201611167673A CN106784142A CN 106784142 A CN106784142 A CN 106784142A CN 201611167673 A CN201611167673 A CN 201611167673A CN 106784142 A CN106784142 A CN 106784142A
- Authority
- CN
- China
- Prior art keywords
- solar battery
- battery sheet
- nozzle
- control
- making herbs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000005530 etching Methods 0.000 title claims abstract description 25
- 235000008216 herbs Nutrition 0.000 claims abstract description 35
- 210000002268 wool Anatomy 0.000 claims abstract description 35
- 239000007788 liquid Substances 0.000 claims abstract description 33
- 239000007921 spray Substances 0.000 claims abstract description 12
- 238000002347 injection Methods 0.000 claims abstract description 9
- 239000007924 injection Substances 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Hybrid Cells (AREA)
Abstract
The present invention relates to a kind of solar battery slice etching device and method, the device includes：Loader mechanism, for solar battery sheet whne making herbs into wool surface down when fix and solar battery sheet and control solar battery sheet to rotate；And liquid feed device, it is placed on the lower section of loader mechanism, liquid feed device includes multiple nozzles and multiple control pieces, each nozzle is used to spray Woolen-making liquid to the correspondence position for treating making herbs into wool surface of solar battery sheet upwards, multiple control pieces are corresponded with multiple nozzles, each control piece is used to control the Woolen-making liquid injection flow of nozzle corresponding with the control piece, and solar battery slice etching device and method of the invention has the good making herbs into wool uniformity and can improve product quality.
Description
Technical field
The present invention relates to solar battery slice etching device and method, more particularly to a kind of solar battery slice etching device
And method.
Background technology
In crystal silicon solar energy battery manufacturing process will by process for etching, will certain thickness backing material from table
Face removes, and forms pyramid surface.With reference to Fig. 1 and Fig. 2, the traditional way of the method is to be fixed on solar battery sheet 11
In machine table 15, there is the top of solar battery sheet 11 nozzle 13 Woolen-making liquid is sprayed into Woolen-making liquid downwards.
This method brings a problem for making herbs into wool lack of homogeneity, for example, in Fig. 1, the surface of solar battery sheet 11
It is not usually completely smooth, but with certain uneven, when Woolen-making liquid is ejected into 11 surface of solar battery sheet,
Recess is different with the dosage at convex place and causes making herbs into wool degree uneven, and serious near the position making herbs into wool of spray site.Work as the sun
When there is figure salient point on energy cell piece 11, because the Woolen-making liquid near spray site position is more, the salient point close to spray site
Easily cause serious corner cut, influence the property of solar cell.
The content of the invention
It is given below on brief overview of the invention, to provide the basic reason on certain aspects of the invention
Solution.It should be appreciated that this general introduction is not on exhaustive general introduction of the invention.It is not intended to determine key of the invention
Or pith, nor is it intended to limit the scope of the present invention.Its purpose only provides some concepts in simplified form, with
This is used as the preamble in greater detail discussed after a while.
A primary object of the present invention be provide a kind of making herbs into wool uniformity it is good, can according to the need for making herbs into wool position and
When adjustment injection stream solar battery slice etching device and method.
To achieve the above object, the invention provides a kind of solar battery slice etching device, including：Loader mechanism, uses
In solar battery sheet whne making herbs into wool surface down when fix and solar battery sheet and control solar battery sheet to rotate；And
Liquid feed device, is placed on the lower section of loader mechanism, and liquid feed device includes multiple nozzles and multiple control pieces, and each nozzle is used for upward
Woolen-making liquid is sprayed to the correspondence position for treating making herbs into wool surface of solar battery sheet, multiple control pieces are corresponded with multiple nozzles,
Each control piece is used to control the Woolen-making liquid injection flow of nozzle corresponding with the control piece.
Alternatively, multiple nozzles are annularly arranged.
Alternatively, multiple nozzles are arranged in X-shaped.
Alternatively, multiple nozzles are arranged in clathrate.
Alternatively, each control piece is the magnetic valve being arranged on the transmission pipeline of corresponding nozzle.
To achieve the above object, present invention also offers a kind of solar battery sheet injection etching method, including following step
Suddenly：Solar battery sheet is treated that making herbs into wool surface is fixed on loader mechanism down, and solar-electricity is controlled by loader mechanism
Pond piece rotation；And the flow of each nozzle on liquid feed device is adjusted by each control piece of liquid feed device, and by multiple nozzles
The correspondence position for treating making herbs into wool surface to solar battery sheet sprays Woolen-making liquid upwards.
Alternatively, solar battery sheet injection etching method passes through electricity of the operation setting on the transmission pipeline of each nozzle
Magnet valve controls the flow of nozzle.
By the present invention in that solar battery sheet treats making herbs into wool surface down, upwards making herbs into wool table is treated to solar battery sheet
Woolen-making liquid is sprayed in face, due to the effect of gravity, it is to avoid due to solar battery sheet treat what making herbs into wool surface irregularity brought
The uneven problem of making herbs into wool, while it also avoid the interior corner cut problem of the figure salient point on solar battery sheet.Because the present invention is adopted
The diverse location that making herbs into wool surface is treated to solar battery sheet with multiple nozzle needles sprays, it is to avoid sprayed by single-nozzle
The problem that the far and near making herbs into wool degree brought differs, and the control piece of control flow is all set to each nozzle, can be according to product
Need to adjust in time the flow of any nozzle, improve making herbs into wool efficiency and product quality.
Brief description of the drawings
Below with reference to the accompanying drawings illustrate embodiments of the invention, can be more readily understood that it is of the invention more than and
Other objects, features and advantages.Part in accompanying drawing is intended merely to show principle of the invention.In the accompanying drawings, identical or class
As technical characteristic or part will be represented using same or similar reference.
Fig. 1 is the operating diagram of existing solar battery slice etching device.
Fig. 2 is a kind of structural representation of implementation method of solar battery slice etching device of the present invention.
Fig. 3, Fig. 4, Fig. 5 are respectively the arrangement mode schematic diagram of the nozzle in Fig. 2.
Specific embodiment
Illustrate embodiments of the invention with reference to the accompanying drawings.Retouched in an accompanying drawing of the invention or a kind of implementation method
The element and feature that the element and feature stated can show in one or more other accompanying drawings or implementation method are combined.Should
Work as attention, for purposes of clarity, eliminated known to unrelated to the invention, those of ordinary skill in the art in accompanying drawing and explanation
Part and treatment expression and description.
With reference to Fig. 2, a kind of implementation method of solar battery slice etching device of the invention includes loader mechanism 20 and supplies
Liquid device 30.Loader mechanism be used for solar battery sheet 11 whne making herbs into wool surface down when fix and solar battery sheet 11 and control
Solar battery sheet processed 11 rotates.Liquid feed device 30 is placed on the lower section of loader mechanism 20, including multiple nozzles 31 and multiple controls
Product, each nozzle 31 is used to spray Woolen-making liquid to the correspondence position for treating making herbs into wool surface of solar battery sheet 11 upwards.Multiple control
Product is corresponded with above-mentioned multiple nozzles 31, and each control piece is used to control the Woolen-making liquid of nozzle 31 corresponding with the control piece
Injection flow.By operating each control piece, injection Woolen-making liquid can be stopped to the position for not needing making herbs into wool, or adjust as needed
The emitted dose of Woolen-making liquid, flow that can be as needed in time to corresponding nozzle 31 is adjusted.
Alternatively, above-mentioned multiple nozzles 31 can be in variously-shaped arrangement, such as be in arrangement annular in shape, the Fig. 4 in Fig. 3
Being arranged in clathrate in X-shaped arrangement and Fig. 5, in other embodiments, above-mentioned multiple nozzles 31 can also other shapes
Shape is arranged.
Alternatively, each control piece is to be arranged on the transmission pipeline of corresponding nozzle 31 (transmission pipeline 32 in such as Fig. 2)
Magnetic valve 33.
Making herbs into wool is sprayed present invention also offers a kind of solar battery sheet based on above-mentioned solar battery slice etching device
A kind of method, its implementation method is comprised the following steps：Step S1：Solar battery sheet 11 is treated that making herbs into wool surface is fixed on down
On loader mechanism 20, and solar battery sheet 11 is controlled to rotate by loader mechanism 20.
Step S2：The flow of each nozzle 31 on liquid feed device 30 is adjusted by each control piece of liquid feed device 30, and is passed through
Above-mentioned multiple nozzles 31 spray Woolen-making liquid to the correspondence position for treating making herbs into wool surface of solar battery sheet 11 upwards.
Alternatively, in step S2, solar battery sheet injection etching method passes through biography of the operation setting in each nozzle 31
Magnetic valve 33 on defeated pipeline 32 controls the flow of nozzle.
In above-mentioned solar battery slice etching apparatus and method, due to the effect of gravity, Woolen-making liquid will not treat making herbs into wool
The recess on surface or figure salient point root are accumulated, and can avoid problem and salient point that the uneven making herbs into wool degree brought differs
The problem of nearly corner cut, sprayed by the multiple nozzles corresponding to diverse location, is overcome due to closely being brought apart from nozzle
Excessive making herbs into wool or due to the not enough problem of the making herbs into wool far brought apart from nozzle, is applied to the solar cell with figure salient point
During piece, can avoid producing corner cut and influenceing product quality in bump location.
In the apparatus of the present, it is clear that what each part was reconfigured after can decomposing, combine and/or decomposing.These points
Solve and/or reconfigure and should be regarded as equivalents of the invention.In description above to the specific embodiment of the invention, for one
The feature planted implementation method description and/or show can be in same or similar mode in one or more other embodiments
In use, it is combined with feature in other embodiment, or substitute the feature in other embodiment.
It should be emphasized that term "comprises/comprising" refers to the presence of feature, key element, step or component when being used herein, but simultaneously
It is not excluded for the presence of one or more further features, key element, step or component or additional.
Although the present invention and its advantage has been described in detail it should be appreciated that without departing from by appended claim
Various changes can be carried out in the case of the spirit and scope of the present invention for being limited, is substituted and is converted.And, model of the invention
Enclose process, device, means, the specific embodiment of method and steps for being not limited only to described by specification.In the art is common
Technical staff will readily appreciate that from the disclosure, can be used according to the present invention and performed and corresponding reality described herein
Apply the essentially identical function of example or obtain process essentially identical with it result, existing and that future is to be developed, device,
Means, method or step.Therefore, appended claim is directed at including such process, device, hand in the range of them
Section, method or step.
Claims (7)
1. a kind of solar battery slice etching device, it is characterised in that including：Loader mechanism, in solar battery sheet
Whne making herbs into wool surface down when fix the solar battery sheet and control the solar battery sheet to rotate；And liquid feed device,
The lower section of the loader mechanism is placed on, the liquid feed device includes multiple nozzles and multiple control pieces, and each nozzle is used for upward
Woolen-making liquid, the multiple control piece and the multiple spray are sprayed to the correspondence position for treating making herbs into wool surface of the solar battery sheet
Mouth is corresponded, and each control piece is used to control the Woolen-making liquid injection flow of nozzle corresponding with the control piece.
2. solar battery slice etching device as claimed in claim 1, it is characterised in that：The multiple nozzle is annularly arranged
Row.
3. solar battery slice etching device as claimed in claim 1, it is characterised in that：The multiple nozzle is arranged in X-shaped
Row.
4. solar battery slice etching device as claimed in claim 1, it is characterised in that：The multiple nozzle is arranged in clathrate
Row.
5. the solar battery slice etching device as described in claim any one of 1-4, it is characterised in that each control piece is
It is arranged on the magnetic valve on the transmission pipeline of corresponding nozzle.
6. a kind of solar battery sheet based on any described solar battery slice etching devices of claim 1-5 sprays making herbs into wool
Method, it is characterised in that including：Solar battery sheet is treated that making herbs into wool surface is fixed on loader mechanism down, and by institute
State loader mechanism and control the solar battery sheet rotation；And it is each on each control piece regulation liquid feed device for passing through liquid feed device
The flow of nozzle, and making herbs into wool is sprayed to the correspondence position for treating making herbs into wool surface of the solar battery sheet upwards by multiple nozzles
Liquid.
7. solar battery sheet as claimed in claim 6 sprays etching method, it is characterised in that the solar battery sheet spray
Penetrate flow of the etching method by nozzle described in solenoid valve control of the operation setting on the transmission pipeline of each nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611167673.1A CN106784142A (en) | 2016-12-16 | 2016-12-16 | Solar battery slice etching device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611167673.1A CN106784142A (en) | 2016-12-16 | 2016-12-16 | Solar battery slice etching device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106784142A true CN106784142A (en) | 2017-05-31 |
Family
ID=58893086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611167673.1A Pending CN106784142A (en) | 2016-12-16 | 2016-12-16 | Solar battery slice etching device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106784142A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113690331A (en) * | 2021-08-11 | 2021-11-23 | 浙江中晶新能源股份有限公司 | Back contact type high-light-efficiency photovoltaic cell texturing device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623323A (en) * | 2012-04-01 | 2012-08-01 | 南通富士通微电子股份有限公司 | Semiconductor wafer liquid-spraying etching system and method |
| CN202786522U (en) * | 2012-08-27 | 2013-03-13 | 韩华新能源（启东）有限公司 | Single-side alkali etching device for single-crystal silicon solar cells |
| CN103219232A (en) * | 2013-03-15 | 2013-07-24 | 上海华力微电子有限公司 | Wet etching machine table device |
-
2016
- 2016-12-16 CN CN201611167673.1A patent/CN106784142A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623323A (en) * | 2012-04-01 | 2012-08-01 | 南通富士通微电子股份有限公司 | Semiconductor wafer liquid-spraying etching system and method |
| CN202786522U (en) * | 2012-08-27 | 2013-03-13 | 韩华新能源（启东）有限公司 | Single-side alkali etching device for single-crystal silicon solar cells |
| CN103219232A (en) * | 2013-03-15 | 2013-07-24 | 上海华力微电子有限公司 | Wet etching machine table device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113690331A (en) * | 2021-08-11 | 2021-11-23 | 浙江中晶新能源股份有限公司 | Back contact type high-light-efficiency photovoltaic cell texturing device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170531 |