CN105118770B - One kind peels off liquid supply system - Google Patents
One kind peels off liquid supply system Download PDFInfo
- Publication number
- CN105118770B CN105118770B CN201510528506.4A CN201510528506A CN105118770B CN 105118770 B CN105118770 B CN 105118770B CN 201510528506 A CN201510528506 A CN 201510528506A CN 105118770 B CN105118770 B CN 105118770B
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- Prior art keywords
- peel
- stripper
- drug slot
- device unit
- connecting line
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- 239000007788 liquid Substances 0.000 title claims abstract description 27
- 239000003814 drug Substances 0.000 claims abstract description 92
- 229940079593 drug Drugs 0.000 claims abstract description 89
- 239000012535 impurity Substances 0.000 claims abstract description 12
- 238000000605 extraction Methods 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 101100314150 Caenorhabditis elegans tank-1 gene Proteins 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000003196 chaotropic effect Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31058—After-treatment of organic layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention discloses one kind to peel off liquid supply system, including：Some drug slots, for holding stripper；Multiple peel-off device units, it is grouped based on predetermined principle, and the peel-off device unit after packet in same group is connected to same drug slot, to receive the stripper of drug slot supply to carry out lift-off processing to being stripped thing.The present invention can simplify drug slot usage quantity, simplify device hardware structure, reduce equipment investment, be advantageous to decoction unified management, improve product operation uniformity caused by decoction, be remained so as to be advantageous to improve photoresistance caused by impurity in stripper.
Description
Technical field
The present invention relates to semiconductor fabrication process technical field, specifically, is related to a kind of stripping liquid supply system.
Background technology
In general thin film transistor (TFT) TFT manufacturing process flows, required electricity is gradually formed using 4~5 light shield techniques
Road pattern, wherein per pass technique are almost both needed to carry out overburden operation.Overburden operation is generally realized by stripping machine.Stripping machine Chinese medicine
The decoction supply of liquid storage tank is typically realized by chemicals center feed system CCSS.After decoction supply terminates, stored up with pump from decoction
Groove extracts decoction, is filtered, is supplied to the spray system of each peel-off device unit, molten by medicine liquid spray on substrate
Solution removes photoresistance.
The chemical liguid supply system of current common stripping machine, which is unfavorable for decoction unified management and cost, to be reduced.It is further, since each
Stripping machine controls decoction to use alone, adds the investment of the equipment such as pump, the filter of each board.
The content of the invention
To solve problem above, the invention provides one kind to peel off liquid supply system, to be managed collectively to decoction
And reduce stripping cost.
According to one embodiment of present invention, there is provided one kind peels off liquid supply system, including：
Some drug slots, for holding stripper；
Multiple peel-off device units, it is grouped based on predetermined principle, and the peel-off device unit connection after packet in same group
To same drug slot, to receive the stripper of drug slot supply to carry out lift-off processing to being stripped thing.
According to one embodiment of present invention, included based on predetermined principle packet：There to be identical stripper species, peel off
The peel-off device unit of liquid concentration and injection conditions is divided into one group.
According to one embodiment of present invention, the peel-off device unit in same group respectively by a connecting line with
Same drug slot connection, and a pump to the extraction stripper from the drug slot is set on each connecting line.
According to one embodiment of present invention, set on connecting line of each peel-off device unit with the drug slot
A filter between the pump and the peel-off device unit is equipped with, to the stripper extracted from the drug slot
Filtered.
According to one embodiment of present invention, each peel-off device unit in same group and the connection of the drug slot
Pipeline collects for a public connecting line, is connected by the public connecting line with the drug slot, and in the shared connection
One is configured on pipeline to extract the pump of stripper from the drug slot.
According to one embodiment of present invention, one is provided with the shared connecting line positioned at the pump and each institute
The filter between peel-off device unit is stated, to be filtered to the stripper extracted from the drug slot.
According to one embodiment of present invention, the connecting tube between each peel-off device unit and the filter
One automatic valve is respectively set on road, to control the opening/closing of connecting line.
According to one embodiment of present invention, by controlling the automatic valve being connected with the peel-off device unit and the stripping
Cooperated from unit and the pump on the drug slot connecting line, to realize the extraction stripper from the drug slot and will shell
Chaotropic delivers to corresponding peel-off device unit.
According to one embodiment of present invention, some drug slots are based on the big of its internal stripper species and impurity concentration
It is small to be sequentially communicated by connecting pipe, reach to the stripper in the drug slot and realize after replacing condition between the drug slot
Liquid is changed in cascade.
According to one embodiment of present invention, some drug slots are connected with chemicals center feed system, the chemistry
Product center feed system is used to provide stripper to the drug slot.
Beneficial effects of the present invention：
The present invention is by merging or meeting the peel-off device unit point of certain principle extremely the drug slot for meeting certain principle
Same drug slot is connected to after same group, drug slot usage quantity can be simplified, simplifies device hardware structure, reduces equipment investment.Will
The connecting line of each peel-off device unit and drug slot in same group collects for a public connecting line, and shares connection at this
One pump and filter are set on pipeline, can further reduce equipment investment.In addition, the stripping in from same drug slot to same group
From unit feed flow, be advantageous to decoction unified management, and with uniformities such as preferable liquor strengths, so as to improve indirectly
Product operation uniformity caused by decoction.Further, since decoction is easy to manage, impurity is easily controlled in decoction, so as to be advantageous to
Improve photoresistance caused by impurity in stripper to remain.
Other features and advantages of the present invention will be illustrated in the following description, also, partly becomes from specification
Obtain it is clear that or being understood by implementing the present invention.The purpose of the present invention and other advantages can be by specification, rights
Specifically noted structure is realized and obtained in claim and accompanying drawing.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing required in technology description to do simple introduction：
Fig. 1 is semiconductor of the prior art/TFT manufacturing process flow diagrams；
Fig. 2 is the chemical liguid supply system structural representation of stripping machine of the prior art；
Fig. 3 is stripping liquid supply system schematic diagram according to an embodiment of the invention；And
Fig. 4 is stripping liquid supply system schematic diagram according to another embodiment of the invention.
Embodiment
Embodiments of the present invention are described in detail below with reference to drawings and Examples, and how the present invention is applied whereby
Technological means solves technical problem, and the implementation process for reaching technique effect can fully understand and implement according to this.Need to illustrate
As long as not forming conflict, each embodiment in the present invention and each feature in each embodiment can be combined with each other,
The technical scheme formed is within protection scope of the present invention.
It is as shown in Figure 1 general semiconductor/TFT manufacturing process flow diagrams in the prior art.As shown in figure 1, general half
In conductor/TFT manufacturing process flow, required circuit pattern is gradually formed using 4~5 light shield techniques.Corresponding to each
Road light shield technique, clean, film forming, gold-tinted, etching will be undergone successively and peels off several steps.It is it follows that corresponding per together
Technique is both needed to carry out overburden operation.
In the prior art, generally use stripping machine carries out overburden operation.It is illustrated in figure 2 general stripping machine in the prior art
Chemical liguid supply system structural representation, be the structural representation of existing general stripping machine (corresponding stripping unit) in dotted line frame
Figure, is illustrated below with reference to Fig. 2 to existing stripping machine structure and working principle.
As shown in Fig. 2 the stripping machine is mainly made up of chemicals center feed system and stripping unit.Wherein, chemicals
Central feed system is used to provide stripper to stripping unit.Existing feed system includes CCSS systems.Stripping unit is stripping
The major part disembarked, including multiple decoction storage tanks (Tank-1, Tank-2, Tank-3 in such as Fig. 2) and corresponding tables of equipment
First (Unit-1, Unit-2, Unit-3 in such as Fig. 2).
The stripper that decoction storage tank storage of chemical product center feed system provides, for providing stripping to corresponding unit
Chaotropic.The substrate that photoresistance need to be peeled off is sequentially placed into progress photoresistance stripping in each unit.Stripping conditions based on photoresistance, stripping
Chaotropic species etc. is divided into different units.As shown in Figure 2, unit can be divided into high pressure peel-off device unit and
Normal pressure peel-off device unit.Stripper is extracted from drug slot for convenience of each unit, in each unit and corresponding drug slot
Connecting line on be provided with pump and filter, pump is used to extract decoction from drug slot, and filter is used to remove in decoction
Grain.In addition, be additionally provided with spray system in each unit, for spraying decoction on substrate.
When the stripping machine works, substrate is moved into high pressure peel-off device unit first, high pressure peel-off device unit will
Stripper is extracted from drug slot Tank-1, after stripper is filtered, the spray system of Unit-1 units is supplied to, by medicine
Liquid is sprayed on substrate, and dissolving removes photoresistance.After the completion of being peeled off in Unit-1 units, on substrate or photoresistance can be remained, is connect
Get off to sequentially enter in normal pressure peel-off device unit Unit-2 and Unit-3, carry out the photoresistance stripping in similar Unit-1 units respectively
From processing.After the completion of photoresistance lift-off processing, substrate is washed and drying process after, substrate is taken out of.In each peel-off device
When the stripper species that unit uses is identical, decoction Tank-1, Tank-2, Tank-3 can be entered be sequentially connected, form cascade
Change liquid system.
Stripping machine liquid-supplying system shown in Fig. 2, which is unfavorable for decoction unified management and cost, to be reduced.Further, since each stripping machine
Internal each peel-off device unit controls decoction to use alone, this method increases the throwing of the equipment such as pump, the filter of stripping machine
Money.Therefore, the present invention proposes a kind of new stripping machine chemical liguid supply system, to simplify device hardware structure, reduces equipment
Investment, be advantageous to decoction unified management.
The structural representation of stripping machine liquid-supplying system according to an embodiment of the invention is illustrated in figure 3, is joined below
Examining Fig. 3, the present invention is described in detail.
As shown in figure 3, the stripping liquid supply system includes some drug slots and multiple peel-off device units.Wherein, drug slot is used
In holding stripper.Multiple peel-off device units are primarily based on predetermined principle packet, the peel-off device list after packet in same group
Member is connected to same drug slot, to receive the stripper of drug slot supply to carry out lift-off processing to being stripped thing.
Specifically, when being grouped based on predetermined principle to multiple peel-off device units, there will be identical stripper kind
The peel-off device unit of class, stripper concentration and injection conditions (spray flow and pressure of spray system) is divided into one group.Will be according to
One group of peel-off device unit (Strp 1#Unit-1, StrpN#Unit-1 in such as Fig. 3) after upper principle packet according to this) even
It is connected to same drug slot.Or can also be by the peel-off device list with identical stripper species, stripper concentration and injection conditions
Drug slot corresponding to member merges into a drug slot (Tank-1, Tank-2 and Tank-N in such as Fig. 3), from this drug slot into the group
Peel-off device unit stripper is uniformly provided.So, avoid the need for setting and peel-off device unit one-to-one corresponding, identical quantity
Drug slot, be advantageous to simplify device hardware structure, reduce equipment investment.Multiple peel-off devices in from same drug slot to same group
Unit feed flow, be advantageous to decoction unified management, can more effectively improve stripping residual.N number of stripping such as some drug slot operation is set
In standby unit, as long as confirming the situation that the first unit causes photoresistance to remain because of decoction, then together more dressing in same group
Liquid, other peel-off device units can be avoided photoresistance residual subsequently also occur.In addition, after identical decoction carries out base board operation, extremely
During back segment procedures, substrate surface situation is convergent, so that the uniform performance of back segment operation makes moderate progress.
In one embodiment of the invention, the peel-off device unit in same group respectively by a connecting line with it is same
Drug slot is connected, and a pump 1 to the extraction stripper from drug slot is configured on each connecting line.In peel-off device unit
When carrying out lift-off processing to the photoresistance on substrate, by controlling the pump 1 to extract stripper from corresponding drug slot.
In one embodiment of the invention, when the peel-off device unit in same group respectively by a connecting line with it is same
When one drug slot connects, configuration one from drug slot to extracting between the pump and peel-off device unit on each connecting line
The filter 2 that stripper is filtered.The filter 2 is used to remove impurity particle or the undissolved drug particles in decoction
Deng to improve decoction performance, improving the peeling effect of decoction.
It is illustrated in figure 4 the structural representation of stripping liquid supply system according to another embodiment of the invention.Such as Fig. 4
Shown, each peel-off device unit in same group is connected with drug slot by a shared connecting line, and in the company of sharing
Take on road and configure one to extract the pump 1 of stripper from drug slot.Each peel-off device unit in same group can lead to
Cross the pump and stripper is extracted from drug slot.The quantity of pump can be thus reduced, simplifies device hardware structure, equipment is reduced and throws
Money.
In one embodiment of the invention, set between the pump on connecting line is shared and each peel-off device unit
One filter 2 to be filtered to the stripper extracted from drug slot.Both the impurity that can have been removed in decoction is so set
Particle or undissolved drug particles etc., improve decoction performance, improve the peeling effect of decoction, the number of filter can also be reduced
Amount, device hardware structure is simplified, reduce equipment investment.
In one embodiment of the invention, respectively set on the connecting line between each peel-off device unit and filter
An automatic valve 3 is put, to control the opening/closing of connecting line, as shown in Figure 3 and Figure 4.Specifically, based on peel-off device unit
Working condition, the opening/closing of automatic valve 3 is controlled, to realize decoction is entered each peel-off device unit.
In one embodiment of the invention, by controlling the automatic valve and peel-off device list that are connected with peel-off device unit
Member cooperates with the pump on drug slot connecting line, to realize the extraction stripper from drug slot and stripper is delivered into corresponding stripping
From unit.Generally, it is engaged with feed system and is provided with control system.Certain work(is realized by loading in the controls
The control program of energy, to realize the collaborative work of control automatic valve and pump.
Specifically, working condition control automatic valve of the control system based on peel-off device unit is opening/closing, to realize
Can the stripper in control connecting line flow into peel-off device unit.Meanwhile the control system can also control respectively it is each
The automatic valve and peel-off device unit being connected with peel-off device unit and the pump work compound on drug slot connecting line.
Corresponding diagram 3, control system can control peel-off device unit to each communicate with the work compound of pump and automatic valve on pipeline,
Stripper thus can be arbitrarily controlled to flow into time and the flow of peel-off device unit.
Corresponding diagram 4, control system can control the pump on shared connecting pipe, can also control on shared connecting pipe
The work compound of pump and the automatic valve being connected with the peel-off device unit.Stripper can also be so controlled to flow into peel-off device list
The time of member and flow, can also reduce the quantity of pump and filter, reduce equipment investment.
In one embodiment of the invention, size of some drug slots based on its internal stripper species and impurity concentration is led to
Cross connecting pipe to be sequentially connected, realize that liquid is changed in the cascade between drug slot after reaching replacing condition to the stripper in drug slot.
When the species of stripper is identical in drug slot, it is possible to achieve liquid is changed in the cascade of stripper in each drug slot, such as the 5. institute in Fig. 3 and Fig. 4
Show.Specifically, illustrated so that substrate initially enters Tank-1 as an example.Enter peel-off device unit corresponding to Tank-1 in substrate
Afterwards, because now the photoresistance of removal to be dissolved is most on substrate, so the impurity that stripper retains in Tank-1 is most.Afterwards,
Substrate enters in peel-off device unit corresponding to Tank-2, because there is the molten containing photoresistance of previous peel-off device unit residual on surface
Liquid, or previous unit do not remove clean photoresistance, but photoresistance content is less.The like, the stripping in Tank more below
Impurity in liquid is fewer.Because lift-off processing process is carried out always, the gradual change of the impurity concentration of the stripper in each Tank
Greatly, when stripper needs to carry out changing liquid in Tank, Tank-1 decoctions emptying, Tank-2 decoctions are injected in Tank-1, follow-up each
Tank the like.Tank-N injects fresh liquor from CCSS.So, the stripper in latter Tank can also be sharp again
With so as to advantageously reduce production cost.
Certainly, it may be otherwise in all drug slots of emptying after original decoction, fresh liquor benefit directly carried out by CCSS systems
Give.
In one embodiment of the invention, some drug slots are connected with chemicals center feed system, chemicals center
Feed system is used to provide stripper to drug slot.Specifically, various chemicals center supply systems of the prior art can be used
Unite such as CCSS to each drug slot offer stripper, specific connecting line as shown in Figure 3 and Figure 4 in 4..Using chemicals
Central feed system provides stripper to each drug slot, it is possible to achieve peels off the automatic job of liquid supply system, advantageously reduces
Cost of labor, realize the production automation.
The present invention is by merging or meeting the peel-off device unit point of certain principle extremely the drug slot for meeting certain principle
Same drug slot is connected to after same group, drug slot usage quantity can be simplified, simplifies device hardware structure, reduces equipment investment.Will
The connecting line of each peel-off device unit and drug slot in same group collects for a public connecting line, and shares connection at this
One pump and filter are set on pipeline, can further reduce equipment investment.In addition, the stripping in from same drug slot to same group
From unit feed flow, be advantageous to decoction unified management, and with uniformities such as preferable liquor strengths, so as to improve indirectly
Product operation uniformity caused by decoction.Further, since decoction is easy to manage, the control of impurity, which also has, in decoction is easy to improve stripping
Remained from caused photoresistance.
The present invention is suitable for use with the multiple devices operation of identical stripper species, such as more wet etchers or stripping
Machine.It is also applied for carrying out operation using the distinct device of identical stripper species.The present invention is not limited to liquid crystal panel manufacture row
Industry, be also applied for semiconductor and other use liquid stripper production equipment.
While it is disclosed that embodiment as above, but described content only to facilitate understand the present invention and adopt
Embodiment, it is not limited to the present invention.Any those skilled in the art to which this invention pertains, this is not being departed from
On the premise of the disclosed spirit and scope of invention, any modification and change can be made in the implementing form and in details,
But the scope of patent protection of the present invention, still should be subject to the scope of the claims as defined in the appended claims.
Claims (9)
1. one kind peels off liquid supply system, including：
Some drug slots, for holding stripper；
Size of some drug slots based on its internal stripper species and impurity concentration is sequentially communicated by connecting line, to
Stripper in the drug slot realizes that liquid is changed in the cascade between the drug slot after reaching replacing condition；
Multiple peel-off device units, it is grouped based on predetermined principle, and the peel-off device unit after packet in same group is connected to
One drug slot, to receive the stripper of drug slot supply to carry out lift-off processing to being stripped thing.
2. feed system according to claim 1, it is characterised in that included based on predetermined principle packet：To have identical
The peel-off device unit of stripper species, stripper concentration and injection conditions is divided into one group.
3. feed system according to claim 2, it is characterised in that the peel-off device unit in same group respectively passes through
One connecting line is connected with same drug slot, and sets one to be peeled off to be extracted from the drug slot on each connecting line
The pump of liquid.
4. feed system according to claim 3, it is characterised in that in each peel-off device unit and the drug slot
Connecting line on be provided with a filter between the pump and the peel-off device unit, to from the drug slot
The stripper of middle extraction is filtered.
5. feed system according to claim 2, it is characterised in that each peel-off device unit in same group with
The connecting line of the drug slot collects for a public connecting line, is connected by the public connecting line with the drug slot, and
One is configured on the public connecting line to extract the pump of stripper from the drug slot.
6. feed system according to claim 5, it is characterised in that be provided with one on the public connecting line and be located at
Filter between the pump and each peel-off device unit, to be carried out to the stripper extracted from the drug slot
Filter.
7. the feed system according to claim 4 or 6, it is characterised in that each peel-off device unit with it is described
One automatic valve is respectively set on the connecting line between filter, to control the opening/closing of connecting line.
8. feed system according to claim 7, it is characterised in that be connected by control with the peel-off device unit
Automatic valve and the peel-off device unit cooperate with the pump on the drug slot connecting line, are taken out with realizing from the drug slot
Take stripper and stripper is delivered into corresponding peel-off device unit.
9. feed system according to claim 1, it is characterised in that some drug slots and chemicals center feed system
Connection, chemicals center feed system are used to provide stripper to the drug slot.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510528506.4A CN105118770B (en) | 2015-08-25 | 2015-08-25 | One kind peels off liquid supply system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510528506.4A CN105118770B (en) | 2015-08-25 | 2015-08-25 | One kind peels off liquid supply system |
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| CN105118770A CN105118770A (en) | 2015-12-02 |
| CN105118770B true CN105118770B (en) | 2017-12-26 |
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| CN108054119B (en) * | 2017-12-06 | 2021-03-23 | 深圳市华星光电半导体显示技术有限公司 | Stripping liquid machine table for stripping process and working method thereof |
| CN110639274A (en) * | 2019-09-25 | 2020-01-03 | 京东方科技集团股份有限公司 | Stripping liquid storage tank, photoresist stripping equipment and method |
| CN111045301A (en) | 2019-11-19 | 2020-04-21 | Tcl华星光电技术有限公司 | Stripping liquid machine table and working method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102566334A (en) * | 2011-12-23 | 2012-07-11 | 友达光电股份有限公司 | Supply system and method of photoresist stripper |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3782374B2 (en) * | 2002-07-19 | 2006-06-07 | 株式会社平間理化研究所 | Resist stripping device |
| CN102662311B (en) * | 2012-04-13 | 2015-12-02 | 京东方科技集团股份有限公司 | A kind of chemicals conveying device, developing apparatus and toning system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102566334A (en) * | 2011-12-23 | 2012-07-11 | 友达光电股份有限公司 | Supply system and method of photoresist stripper |
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