CN106774467A - 一种具有自动诊断功能的气体质量流量控制系统 - Google Patents
一种具有自动诊断功能的气体质量流量控制系统 Download PDFInfo
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- CN106774467A CN106774467A CN201611188845.3A CN201611188845A CN106774467A CN 106774467 A CN106774467 A CN 106774467A CN 201611188845 A CN201611188845 A CN 201611188845A CN 106774467 A CN106774467 A CN 106774467A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- Testing And Monitoring For Control Systems (AREA)
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CN201611188845.3A CN106774467A (zh) | 2016-12-21 | 2016-12-21 | 一种具有自动诊断功能的气体质量流量控制系统 |
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CN201611188845.3A CN106774467A (zh) | 2016-12-21 | 2016-12-21 | 一种具有自动诊断功能的气体质量流量控制系统 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101763097A (zh) * | 2009-12-18 | 2010-06-30 | 北京七星华创电子股份有限公司 | 质量流量控制器/计老化监测系统 |
CN103328936A (zh) * | 2011-01-20 | 2013-09-25 | 日立金属株式会社 | 具有板载诊断、预测和数据记录的质量流量控制器 |
CN103728991A (zh) * | 2013-12-31 | 2014-04-16 | 北京七星华创电子股份有限公司 | 气体质量流量控制系统 |
CN203745048U (zh) * | 2013-12-30 | 2014-07-30 | 开封龙宇化工有限公司 | 一种质量流量调节仪自动标定装置 |
CN105698903A (zh) * | 2014-10-31 | 2016-06-22 | 因文西斯系统公司 | 提供用于仪表校验结果的质量测量的方法 |
CN205619980U (zh) * | 2016-03-29 | 2016-10-05 | 矽翔微机电系统(上海)有限公司 | 一种质量流量计 |
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2016
- 2016-12-21 CN CN201611188845.3A patent/CN106774467A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101763097A (zh) * | 2009-12-18 | 2010-06-30 | 北京七星华创电子股份有限公司 | 质量流量控制器/计老化监测系统 |
CN103328936A (zh) * | 2011-01-20 | 2013-09-25 | 日立金属株式会社 | 具有板载诊断、预测和数据记录的质量流量控制器 |
CN203745048U (zh) * | 2013-12-30 | 2014-07-30 | 开封龙宇化工有限公司 | 一种质量流量调节仪自动标定装置 |
CN103728991A (zh) * | 2013-12-31 | 2014-04-16 | 北京七星华创电子股份有限公司 | 气体质量流量控制系统 |
CN105698903A (zh) * | 2014-10-31 | 2016-06-22 | 因文西斯系统公司 | 提供用于仪表校验结果的质量测量的方法 |
CN205619980U (zh) * | 2016-03-29 | 2016-10-05 | 矽翔微机电系统(上海)有限公司 | 一种质量流量计 |
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Address after: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Applicant after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Applicant before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180511 Address after: 100176 506, room 1, 8 Wenchang Avenue, Beijing economic and Technological Development Zone. Applicant after: BEIJING SEVENSTAR FLOW Co.,Ltd. Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Applicant before: North China Science and technology group Limited by Share Ltd. |
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