CN106774150B - Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof - Google Patents

Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof Download PDF

Info

Publication number
CN106774150B
CN106774150B CN201611249961.1A CN201611249961A CN106774150B CN 106774150 B CN106774150 B CN 106774150B CN 201611249961 A CN201611249961 A CN 201611249961A CN 106774150 B CN106774150 B CN 106774150B
Authority
CN
China
Prior art keywords
block
open loop
movement
stroke
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201611249961.1A
Other languages
Chinese (zh)
Other versions
CN106774150A (en
Inventor
杨斌堂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiaotong University
Original Assignee
Shanghai Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiaotong University filed Critical Shanghai Jiaotong University
Priority to CN201611249961.1A priority Critical patent/CN106774150B/en
Publication of CN106774150A publication Critical patent/CN106774150A/en
Application granted granted Critical
Publication of CN106774150B publication Critical patent/CN106774150B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/402Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/37Measurements
    • G05B2219/37404Orientation of workpiece or tool, surface sensor

Abstract

The invention provides an accurate repeated positioning driving system capable of being controlled by open loop and a control method thereof, comprising the following steps: one or more travel limiting mechanisms; the stroke limiting mechanism includes: a moving block (100), a fixed block (200) and a driving mechanism; the motion block (100) is provided with a passive piece connecting end; the movement block (100) is limited in a first direction in a movement stroke defined by a chute of the fixed block (200); there are differences in the direction of the movement stroke of the movement block in the plurality of stroke limiting mechanisms. The invention realizes the limitation of the movement stroke of the movement block through the structural cooperation between the movement block and the fixed block, and can limit the composite stroke of the movement block when a plurality of stroke limiting mechanisms are arranged, thereby improving the precision of driving control and realizing the movement such as sweeping.

Description

Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof
Technical Field
The invention relates to the field of precise driving, in particular to an accurate repeated positioning driving system capable of being controlled by an open loop and a control method thereof.
Background
In the field of precise or precise repeated positioning driving, precise driving is required to be performed on the passive element to finely adjust the position of the passive element, and the movement mode can be translational movement and rotation. The disadvantage of the prior art is that the driving force is difficult to control precisely, and too large or too small a driving force will cause the passive member to fail to reach or move past the specified position.
Thus, the prior art generally performs precise control of the drive in a closed-loop manner, but the control accuracy in the closed-loop manner is still difficult to significantly improve, especially in terms of the implementation of repeated positioning with large fluctuation in accuracy.
Therefore, there is a need for an open loop controllable accurate repositioning drive system and method of controlling the same. One of the advantages is that the closed-loop control can be selected not to be used any more, and the other advantage is that the closed-loop control can be continuously used in consideration of the reconstruction and upgrading cost of the existing equipment, but the closed-loop control can be not required to have high precision, and the high-precision performance is realized by the invention.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an accurate repeated positioning driving system capable of being controlled by open loop and a control method thereof.
According to the present invention, there is provided an open loop controllable accurate repositioning drive system comprising: a stroke limiting mechanism;
the stroke limiting mechanism includes: a moving block 100, a fixed block 200, and a driving mechanism;
the motion block 100 has a passive element connection;
the driving mechanism can drive the motion block 100 to move;
the moving block 100 is defined in a first direction in a movement stroke defined by a chute of the fixed block 200;
the number of the stroke limiting mechanisms is one or more, wherein the directions of the movement strokes of the movement blocks in the plurality of the stroke limiting mechanisms are different.
Preferably, in the stroke limiting mechanism, the movement manner of the movement block 100 is:
-translation, the first direction being accordingly a rectilinear direction; or alternatively
-rotating, accordingly, the first direction is a circumferential direction.
Preferably, the drive mechanism comprises any one or more of the following:
-a first magnet 300, a second magnet 400; the first magnet 300 is disposed on the moving block 100; the second magnet 400 is disposed on the fixed block 200; the first magnet comprises an electromagnet, and the second magnet comprises an electromagnet, a magnetizer or a permanent magnet; alternatively, the first magnet comprises an electromagnet, a magnetizer, or a permanent magnet, and the second magnet comprises an electromagnet;
-a thermally induced telescopic drive;
-electrostatic drive means;
-smart material driving means;
-pneumatic drive means; or alternatively
-a mechanical drive.
Preferably, in the plurality of stroke limiting mechanisms, the moving block of at least one stroke limiting mechanism is limited in the second direction in the moving stroke defined by the sliding groove of the fixed block of the other stroke limiting mechanism by the linkage of the driven body 500 connected with the connecting end of the driven member.
Preferably, the passive element connecting end is rigidly connected with the passive element, or the passive element connecting end is connected with the passive element through an elastomer.
Preferably, the device further comprises an elastic reset mechanism;
the passive element is connected between the elastic restoring mechanism and the passive element connecting end of the moving block 100.
Preferably, in the stroke limiting mechanism, the moving block 100 is limited in a third direction to a movement stroke defined by a chute of the fixed block 200, in addition to the first direction.
Preferably, the sliding groove of the fixed block 200 is matched with the motion space configuration constraint of the motion block 100;
the movement stroke is determined by the difference of the structural dimensions of the sliding grooves of the movement block 100 and the fixed block 200; wherein the size difference is a fixed or adjustable value;
the sliding groove plays a role in guiding and limiting the moving block 200 in the non-moving travel direction of the moving block 200;
the driving mechanism is driven in an open loop control mode.
Preferably, the moving block 100 has a cross-shaped structure, and the fixed block 200 has a cross-shaped chute matched with the moving block 100;
the two crossed arm directions of the cross structure are the first direction and the third direction respectively.
The invention provides a control method of the precise repeated positioning driving system capable of being controlled by an open loop, which enables the appointed part of the driven body to carry out sweeping motion through the driving of the driving mechanism.
Compared with the prior art, the invention has the following beneficial effects:
the invention realizes the limitation of the motion formation of the motion block through the structural cooperation between the motion block and the fixed block, and can limit the composite stroke of the motion block when a plurality of stroke limiting mechanisms are arranged, thereby improving the precision of driving control and realizing the motions such as sweeping.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
fig. 1, fig. 2, fig. 3, fig. 4 are schematic structural diagrams of an open loop controllable accurate positioning driving system according to a first embodiment of the present invention.
Fig. 5 is a schematic structural diagram of an open loop controllable accurate positioning driving system according to a second embodiment of the present invention.
Fig. 6 is a schematic structural diagram of an open loop controllable accurate positioning driving system according to a third embodiment of the present invention.
Fig. 7 is a schematic structural diagram of an open loop controllable accurate positioning driving system according to a fourth embodiment of the present invention.
Fig. 8 and 9 are schematic structural diagrams of an open loop controllable accurate positioning driving system according to a fifth embodiment of the present invention.
Fig. 10 is a schematic structural diagram of an open loop controllable accurate positioning driving system according to a sixth embodiment of the present invention.
Fig. 11 and 12 are schematic structural diagrams of an open loop controllable accurate positioning driving system according to a seventh embodiment of the present invention.
Fig. 13 is a schematic structural diagram of an open loop controllable accurate positioning driving system according to an eighth embodiment of the present invention.
The figure shows:
motion block 100
Fixed block 200
First magnet 300
Second magnet 400
Passive body 500
Elastomer 600
Optical fiber 700
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Basic embodiment
The invention provides an accurate repeated positioning driving system capable of being controlled by an open loop, which comprises the following components: a stroke limiting mechanism; the stroke limiting mechanism includes: a moving block 100, a fixed block 200, and a driving mechanism; the motion block 100 has a passive element connection; the driving mechanism can drive the motion block 100 to move; the moving block 100 is defined in a first direction in a movement stroke defined by a chute of the fixed block 200; the number of the stroke limiting mechanisms is one or more, wherein the directions of the movement strokes of the movement blocks in the plurality of the stroke limiting mechanisms are different.
The preferred embodiments of the basic embodiment will be described in detail below with reference to the accompanying drawings.
First embodiment
As shown in fig. 1, 2, 3, and 4, in the first embodiment, there are two stroke limiting mechanisms. In each stroke limiting mechanism, the movement pattern of the moving block 100 driven by the driving mechanism is translational movement, and accordingly, the first direction is a linear direction.
The driving mechanism includes a first magnet 300 and a second magnet 400 capable of generating a magnetic circuit; the first magnet 300 is disposed on the moving block 100; the second magnet 400 is disposed on the fixed block 200; the first magnet comprises an electromagnet, and the second magnet comprises an electromagnet, a magnetizer or a permanent magnet; alternatively, the first magnet comprises an electromagnet, a magnetizer, or a permanent magnet, and the second magnet comprises an electromagnet. The movement block of each stroke limiting mechanism is limited in the second direction in the movement stroke defined by the slide groove of the fixed block of the other stroke limiting mechanism by the linkage of the passive body 500 to which the passive member connecting end is connected.
The passive piece connecting end is rigidly connected with the passive piece. Preferably, the driving mechanism is driven in an open loop control manner. Alternatively, the drive mechanism may be driven in a closed loop control manner.
Specifically, the dotted circles in fig. 1 to 4 represent specific portions of the passive member. In fig. 1, the specific part is initially located in the first quadrant, and when the moving block located below in fig. 1 moves from the left side of the chute to the right side of the chute, the specific part moves to the second quadrant, as shown in fig. 2. Further, when the moving block located on the right side in fig. 2 moves from the lower side of the chute to the upper side of the chute, the specific portion moves to the third quadrant as shown in fig. 3. Further, when the lower moving block in fig. 3 moves from the right side of the chute to the left side of the chute, the specific portion moves to the fourth quadrant as shown in fig. 4. Thus, the specific portion can perform a sweeping motion in each quadrant by the driving of the first and second magnets 300 and 400.
Second embodiment
As shown in fig. 5, the second embodiment is a variation of the first embodiment. In the first embodiment, the second magnet 400 and the first magnet 300 are parallel to each other in the axial direction; whereas in the second embodiment, the second magnet 400 is perpendicular to the axial direction of the first magnet 300.
In more variations, other angles may be set between the axial directions of the first magnet 300 and the second magnet 400, so long as a magnetic circuit structure is ensured between the first magnet 300 and the second magnet 400, and the first magnet 300 and the second magnet 400 can attract or repel each other, so as to realize driving. Further, the number of the first and second magnets 300, 400 may also be increased.
Third embodiment
As shown in fig. 6, the third embodiment is a variation of the first embodiment. In the third embodiment, the number of the stroke limiting mechanisms is four, wherein the left and right two stroke limiting mechanisms in fig. 6 are one pair, and the upper and lower two stroke limiting mechanisms are the other pair. By the two stroke limiting mechanisms in each pair, the electromagnetic driving force can be increased. For example, fig. 6 shows an initial state, in which the two stroke limiting mechanisms are arranged at the left and right sides, the two stroke limiting mechanisms can simultaneously drive the driven member to move upwards, so that the electromagnetic driving force is increased.
Fourth embodiment
As shown in fig. 7, the fourth embodiment is a variation of the first embodiment. In a fourth embodiment, the open loop controllable precisely repeatable positioning drive system further includes a resilient return mechanism, which is a spring in FIG. 7 and is two in number. The passive element 500 is connected between the elastic restoring mechanism and the passive element connection end of the moving block 100.
Specifically, in one aspect, the elastic reset mechanism may reset the passive element to the unpowered state, for example, fig. 7 shows an initial state, the first magnet and the second magnet are energized to make the passive element move to the right, and when the passive element is de-energized, the passive element can return to the initial state to the left through the spring, without driving the passive element to move to the left by reverse current. On the other hand, the spring can provide a buffering effect, and the size difference between the moving block and the chute is usually small because the invention is particularly suitable for precise control, and the size difference is easy to change due to the collision between the moving block and the chute wall after a period of use, so that part of energy can be absorbed by the spring, and the collision energy between the moving block and the chute wall is relieved. In a further aspect, in a variation, the elastic return mechanism may be used to adjust the range of motion, i.e. the range of motion of the motion block in the motion may be adjustable by replacing the spring.
Fifth embodiment
As shown in fig. 8 and 9, the fifth embodiment is a modification of the first embodiment. In a first embodiment, the passive element connecting end is rigidly connected with the passive element; in the fifth embodiment, the passive element connecting end is connected with the passive element through an elastomer. Specifically, the driven member is connected through the elastomer, so that the translational and rotational compound motion can be obtained, and the definition of the motion stroke is determined by the depth of the chute. The elastic body can be an elastic sheet, the moving elastic sheet can have better rigidity and is not easy to bend in the moving stroke direction, and the non-moving elastic sheet is easy to bend in the moving stroke direction, so that the moving block can realize the stroke in the moving direction, and the passive piece is guided and limited in the non-moving stroke direction.
Sixth embodiment
As shown in fig. 10, the sixth embodiment is a preferable example of the first embodiment. In the sixth embodiment, the optical fiber 700 is provided in the passive member, and thus, the optical fiber can perform a sweeping motion in four quadrants under the drive of the drive mechanism.
In the variation, the driving mechanism may be driven by other energy, such as gas, heat, machinery, static electricity, and deformation of smart materials.
It should be further noted that, in this embodiment, the propagation path of the light beam in the optical fiber port is changed by the sweeping motion, and in a variation, the optical fiber port may be changed to a medium output guide port to sweep, for example, a medium such as an air flow, a liquid, or the like, and may be changed to a probe, so as to implement the oscillation of the probe.
Seventh embodiment
As shown in fig. 11 and 12, the seventh embodiment is a preferable example of the first embodiment. In the seventh embodiment, in the stroke limiting mechanism, the moving block 100 is limited in the third direction in addition to the first direction in the movement stroke defined by the slide groove of the fixed block 200. As shown in fig. 12, the first aspect is perpendicular to the third direction. The sliding grooves of the fixed block 200 are matched with the motion space configuration constraint of the motion block 100. The moving block 100 is in a cross-shaped structure, and the fixed block 200 is provided with a cross-shaped chute matched with the moving block 100; the two crossed arm directions of the cross structure are the first direction and the third direction respectively.
Specifically, as can be clearly understood from fig. 11, the movement stroke is determined by the difference of structural dimensions of the sliding grooves of the moving block 100 and the fixed block 200; wherein the size difference is a fixed or adjustable value; the movement stroke direction of the movement block 100 is a direction perpendicular to the paper surface and a direction perpendicular to the paper surface, and the up-down direction of the paper surface is a direction of non-movement stroke, so that the height of the chute in the up-down direction of the paper surface is substantially the same as the thickness of the movement block 100, thereby playing a role of guiding and limiting.
In fig. 12, the direction and placement position of the electromagnetic coil may be changed as long as electromagnetic driving can be achieved.
Eighth embodiment
As shown in fig. 13, in the eighth embodiment, the movement pattern in which the movement block 100 in the stroke limiting mechanism is driven by the driving mechanism is rotation, and accordingly, the first direction is the circumferential direction. The moving block 100 has a fan-shaped structure, and the sliding groove of the fixed block 200 has a matched fan-shaped structure. The motion block can be hinged with the fixed block. In this way, the motion block is defined within the sector of the chute and the motion stroke is defined as the angle, which is determined by the angular difference between the sector angle of the motion block 100 and the angle of the sector of the chute.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily without conflict.

Claims (10)

1. An open loop controllable precision repeating positioning drive system comprising: a stroke limiting mechanism;
the stroke limiting mechanism includes: a moving block (100), a fixed block (200) and a driving mechanism;
the motion block (100) is provided with a passive piece connecting end;
the driving mechanism can drive the motion block (100) to move;
the movement block (100) is limited in a first direction in a movement stroke defined by a chute of the fixed block (200);
the number of the stroke limiting mechanisms is one or more, wherein the directions of the movement strokes of the movement blocks in the plurality of the stroke limiting mechanisms are different.
2. The open loop controllable, precisely repeatable positioning drive of claim 1, wherein the motion of the motion block (100) in the path defining mechanism is:
-translation, the first direction being accordingly a rectilinear direction; or alternatively
-rotating, accordingly, the first direction is a circumferential direction.
3. The open loop controllable, precisely repeatable positioning drive of claim 1, wherein the drive mechanism comprises any one or more of the following:
-a first magnet (300), a second magnet (400); the first magnet (300) is arranged on the motion block (100); the second magnet (400) is arranged on the fixed block (200); the first magnet comprises an electromagnet, and the second magnet comprises an electromagnet, a magnetizer or a permanent magnet; alternatively, the first magnet comprises an electromagnet, a magnetizer, or a permanent magnet, and the second magnet comprises an electromagnet;
-a thermally induced telescopic drive;
-electrostatic drive means;
-smart material driving means;
-pneumatic drive means; or alternatively
-a mechanical drive.
4. The open loop controllable precisely repeatable positioning drive of claim 1, wherein at least one of said plurality of travel limiting mechanisms is defined in a second direction by a motion block of the travel limiting mechanism being defined in a motion travel defined by a chute of a fixed block of the other travel limiting mechanism by linkage of a driven body (500) connected by a driven member connection.
5. The open loop controllable, precisely repeatable positioning drive of claim 1, wherein the passive member connection is rigidly connected to the passive member or the passive member connection is connected to the passive member by an elastomer.
6. The open loop controllable, precisely repeatable positioning drive of claim 1, further comprising an elastic return mechanism;
the driven piece is connected between the elastic reset mechanism and the driven piece connecting end of the moving block (100).
7. The open loop controllable precisely repeatable positioning drive of claim 1, wherein in said travel limiting mechanism, the moving mass (100) is limited in a third direction to a travel defined by a chute of the fixed mass (200) in addition to the first direction.
8. The open loop controllable precisely repeatable positioning drive system of claim 1, wherein the chute of the fixed block (200) matches the motion spatial configuration constraints of the moving block (100);
the movement stroke is determined by the structural size difference of the sliding grooves of the movement block (100) and the fixed block (200); wherein the size difference is a fixed or adjustable value;
the sliding groove plays a role in guiding and limiting the moving block (200) in the non-moving travel direction of the moving block (200);
the driving mechanism is driven in an open loop control mode.
9. The open loop controllable precisely repeatable positioning drive of claim 7, wherein the moving block (100) is of a cross-shaped configuration, the fixed block (200) having a cross-shaped runner matching the moving block (100);
the two crossed arm directions of the cross structure are the first direction and the third direction respectively.
10. A control method of an open loop controllable accurate positioning driving system according to any one of claims 1 to 9, characterized in that the specified portion of the passive body is made to perform a sweeping motion by driving of the driving mechanism.
CN201611249961.1A 2016-12-29 2016-12-29 Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof Active CN106774150B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611249961.1A CN106774150B (en) 2016-12-29 2016-12-29 Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611249961.1A CN106774150B (en) 2016-12-29 2016-12-29 Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof

Publications (2)

Publication Number Publication Date
CN106774150A CN106774150A (en) 2017-05-31
CN106774150B true CN106774150B (en) 2023-05-26

Family

ID=58928183

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201611249961.1A Active CN106774150B (en) 2016-12-29 2016-12-29 Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof

Country Status (1)

Country Link
CN (1) CN106774150B (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB807672A (en) * 1954-04-09 1959-01-21 Christopher Arthur Henn Collin Improvements in and relating to selective positioning mechanisms
NL7312794A (en) * 1972-09-16 1974-03-19
CN102946164A (en) * 2012-10-17 2013-02-27 上海交通大学 Shift driving device and combination thereof based on interaction of permanent magnet and electromagnet
CN103001392A (en) * 2012-10-17 2013-03-27 上海交通大学 Swinging driving device based on electromagnetic energy and permanent magnetic energy hybrid
CN103955229A (en) * 2014-04-10 2014-07-30 上海交通大学 Precise and controllable sliding table devices and combination thereof
CN104393734A (en) * 2014-11-13 2015-03-04 杨锦堂 Controllable displacement feeding drive system
CN104793564A (en) * 2015-04-03 2015-07-22 上海交通大学 Precision controllable linear driver and its combination
CN104864031A (en) * 2015-05-18 2015-08-26 上海交通大学 Magnetostrictive drive active and passive integrated multi-degree-of-freedom precision vibration isolating device
CN105068505A (en) * 2015-06-05 2015-11-18 杨斌堂 Precision displacement drive feeding mechanism, combination thereof, and cutter
CN206757385U (en) * 2016-12-29 2017-12-15 上海交通大学 Can opened loop control accurately repeat Locating driver system

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB807672A (en) * 1954-04-09 1959-01-21 Christopher Arthur Henn Collin Improvements in and relating to selective positioning mechanisms
NL7312794A (en) * 1972-09-16 1974-03-19
CN102946164A (en) * 2012-10-17 2013-02-27 上海交通大学 Shift driving device and combination thereof based on interaction of permanent magnet and electromagnet
CN103001392A (en) * 2012-10-17 2013-03-27 上海交通大学 Swinging driving device based on electromagnetic energy and permanent magnetic energy hybrid
CN103955229A (en) * 2014-04-10 2014-07-30 上海交通大学 Precise and controllable sliding table devices and combination thereof
CN104393734A (en) * 2014-11-13 2015-03-04 杨锦堂 Controllable displacement feeding drive system
CN104793564A (en) * 2015-04-03 2015-07-22 上海交通大学 Precision controllable linear driver and its combination
CN104864031A (en) * 2015-05-18 2015-08-26 上海交通大学 Magnetostrictive drive active and passive integrated multi-degree-of-freedom precision vibration isolating device
CN105068505A (en) * 2015-06-05 2015-11-18 杨斌堂 Precision displacement drive feeding mechanism, combination thereof, and cutter
CN206757385U (en) * 2016-12-29 2017-12-15 上海交通大学 Can opened loop control accurately repeat Locating driver system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
孙晓芬 等.巨磁致伸缩自适应精密驱动和振动控制.《噪声与振动控制》.2014,第34卷(第5期),16-21. *

Also Published As

Publication number Publication date
CN106774150A (en) 2017-05-31

Similar Documents

Publication Publication Date Title
KR101792390B1 (en) Precise spatial mover
KR20160054049A (en) Parallel kinematic mechanism and bearings and actuators thereof
JP5814543B2 (en) Driving device, lens barrel, and optical apparatus having lens barrel
CN105723608A (en) Piezo ceramic planar motor and driving method thereof
CN105092896B (en) The multidimensional piezo-electric motor and can search for scanning probe microscopy that single sweep pipe drives
CN102922309B (en) Precise micro motion platform based on shape memory material coarse motion driver
CN106774150B (en) Accurate repeated positioning driving system capable of being controlled in open loop and control method thereof
CN103913839A (en) Electromagnetic actuating two-dimensional rapid deflecting mirror system
Mori et al. Ultrasonic linear motor for a high precision XY stage
JP5722145B2 (en) Inertial drive actuator
JP5808000B2 (en) Inertial drive actuator
JP6356903B2 (en) Precision drive device
US10113931B2 (en) Probe measuring force adjuster
RU2548163C1 (en) Three-coordinate movement device
CN209526667U (en) A kind of stick-slip formula piezoelectric inertia linear actuator based on spring reset
Fukada et al. Nanometric positioning over a one-millimeter stroke using a flexure guide and electromagnetic linear motor
JP6535172B2 (en) Vertical shaft slide device incorporating a moving coil type linear motor
CN101947779B (en) Structure of combination drive type micro robot
CN206757385U (en) Can opened loop control accurately repeat Locating driver system
JP2562592B2 (en) One-way moving device in the same plane
CN220664156U (en) Planar double-degree-of-freedom micro-collision driving transportation device based on electromagnetic type
CN103543653B (en) A kind of triple channel switching device shifter and changing method thereof
WO2022198587A1 (en) Six-degree-of-freedom motion mechanism
CN107395045A (en) The two-way creeping motion type miniature linear and control method of ultra-magnetic telescopic driving
CN102195438A (en) Method for achieving device for driving object to move in a linear mode and linear motor

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant