CN106772793B - A kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials - Google Patents
A kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials Download PDFInfo
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- CN106772793B CN106772793B CN201710051851.2A CN201710051851A CN106772793B CN 106772793 B CN106772793 B CN 106772793B CN 201710051851 A CN201710051851 A CN 201710051851A CN 106772793 B CN106772793 B CN 106772793B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/1209—Multimode
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12154—Power divider
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12159—Interferometer
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Abstract
The invention discloses a kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials, belongs on piece integrated silicon photonic arts；Including a rectangular silicon waveguide and N number of parallel conical silicon waveguide, the two seamless connection is cascaded；Input port of the rectangular silicon waveguide as light, N number of conical silicon waveguide are and symmetrical about X-axis as output port；The length and height in N number of channel are all the same, and ratio distribution of the width in each channel according to distribution of light intensity in the cross section direction yz determines that symmetrical two channel sizes are identical respectively；With the increase of port number, only the longitudinal size along silicon duct width direction increases；Lateral dimension along silicon waveguide length direction is basically unchanged；According to optical field distribution, the intensity distribution ratio of light field is exactly the width ratio size of N number of silicon waveguide.Structure of the invention is compact, and design is simple, and the insertion loss of device is reduced in smaller size, and realizes the light constant power distribution of any port number.
Description
Technical field
The invention belongs on piece integrated silicon photonic arts, are related to fiber waveguide device, refer specifically to a kind of based on silicon substrate
The on piece integrated-type optical power beam splitter of Meta Materials.
Background technique
In recent years, various Internet services continue to bring out, especially with cloud storage, the novel skill such as cloud computing and big data
Volatile growth is presented in the continuous rise of art, global information interchange.While information interchange is more and more convenient, to communication
The requirement of system high-speed rate large capacity is also higher and higher.In view of the increasingly prominent of electron carrier bottleneck effect, optical interconnection technology by
Gradually become the mainstream technology for overcoming communication network transmission bottleneck.
Integrated opto-electronic chip has attracted more and more concerns as the core of optical interconnection technology, and silicon-based optical device
With Highgrade integration and can will have broad application prospects with the characteristic of CMOS platform compatibility on piece integration field.
Fiber waveguide device is one of the essential elements device in integrated opto-electronic chip, using different integration modes, packet
Include single-chip integration and hybrid integrated；Various different active devices and passive device can be realized effective integration, since it is with body
The advantages that product is small, compact-sized, and performance is stablized, and loss is small and is easily integrated, is widely paid attention to and is studied.
Waveguide type optical power beam splitter has realization system as fiber waveguide device indispensable in integrated photon system
The function of effective integration, plays an important role in systems between middle optical power fluctuation and various other function photonic devices.
Currently, the structure type of waveguide type optical power beam splitter mainly has based on the cascade optical power beam splitting of y branch waveguide
Device, optical power beam splitter and directional coupler (DC) based on multimode interference effect (MMI) etc..
For optical power beam splitter cascade for y branch waveguide, device needs one section of longer mode expansion area, with
Score channel doubles, and constantly cascades, and length, loss and the heterogeneity of device constantly become larger, and the integrated difficulty of technique is big, Er Qiewu
Method realizes the constant power distribution of any port number；
For the optical power beam splitter based on multimode interference effect (MMI), in order to reduce device insertion loss, usually
It needs to be inserted into one section of waveguide in its input/output end port, this is equivalent to increase device size, and the width in MMI multimode area
Wider, length is longer, is not suitable for the design of big port number device；
For directional coupler (DC), due to the characteristic of its structure itself, its size can not accomplish very little, and
Wavelength is poor.
Summary of the invention
The present invention is directed to the defect and Improvement requirement of above-mentioned existing waveguide type optical power beam splitter, provides a kind of based on silicon
The on piece integrated-type optical power beam splitter of base Meta Materials.
Specific structure includes a rectangular silicon waveguide and 8 parallel conical silicon waveguides, and the two seamless connection is connected on one
It rises；The silicon that rectangular silicon waveguide and conical silicon waveguide are selected, refractive index is 3.46；The long * wide * high size of rectangular silicon waveguide are as follows:
10um*12um*0.22um the input port as light；8 parallel conical silicon waveguides are as output port.
Conical silicon waveguide is one horizontal trapezoidal in x/y plane, and the width at trapezoidal left side bottom is determined according to distribution of light intensity,
The width at the right bottom is 500nm.Respectively 1~channel of channel 8 is numbered in 8 parallel conical silicon waveguides from top to bottom, entire to bore
Shape part is symmetrical about X-axis, and X-direction is identical as the direction of propagation of light；
The length in 8 channels is identical, is 10um, and it is 0.22um, the width in each channel is according to light that height is also identical
Ratio distribution of the field intensity in the cross section direction yz determines that symmetrical two channel sizes are identical respectively, specifically: 1 He of channel
The width in channel 8 is from 3.68um~0.5um transition, and the width in channel 2 and channel 7 is from 0.92um~0.5um transition, 3 He of channel
The width in channel 6 is from 0.71um~0.5um transition, and the width in channel 4 and channel 5 is from 0.69um~0.5um transition.
Light is propagated in the on piece integrated-type optical power beam splitter, and realizes the mistake distributed incident constant power
Journey is as follows:
In equally distributed light field, a branch of incident light is inputted from the center of rectangular silicon waveguide, in the waveguide according to light
Transmission theory and the distribution map of the electric field of emulation learn intensity distribution of the light in rectangular silicon waveguide are as follows: the distribution of light intensity at center
Then maximum is gradually reduced to both sides；According to distribution map, the width range of each conical silicon waveguide channels is obtained；And pass through cone
The output power transmission spectrum of shape silicon waveguide, finely tunes the width dimensions in each channel, determine channel 1 to 8 different proportion of channel width
Degree realizes the mean allocation of 8 channel optical powers.
The present invention is able to achieve the light constant power distribution of N number of port number, and N is integer；With the increase of port number, only along silicon wave
The longitudinal size for leading width direction increases；Lateral dimension along silicon waveguide length direction is basically unchanged, not with the increase of port number
And increase；According to optical field distribution, the intensity distribution ratio of light field is exactly the width ratio size of N number of silicon waveguide.
The present invention has the advantages that
1) a kind of, on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials, structure is very compact, and design is simple,
The area size of the x/y plane of the super multichannel optical power beam splitter of entire on piece integrated-type is about~N × 20um × 0.5um, is conducive to
On piece is integrated.
2) a kind of, on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials, it is cascade compared to existing y branch waveguide
Optical power beam splitter can only realize that the beam splitting of number of active lanes even-multiple increases, and the lateral dimension and longitudinal size of device are at double
Several increases, constant power beam splitter provided by the invention can realize the light constant power point of any port number in smaller size
Match.
3) a kind of, on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials, is inputted by rectangular silicon waveguide,
Then directly by conical silicon waveguide as output port, the insertion loss of device is reduced in smaller size.
Detailed description of the invention
Fig. 1 is a kind of structure chart of the on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials of the present invention.
Fig. 2 is the schematic diagram that on piece integrated-type optical power beam splitter of the light of the present invention in 8 channels is propagated.
Fig. 3 is that light of the present invention is composed in the power transmission of the on piece integrated-type optical power splitter output port in 8 channels.
Specific embodiment
Below in conjunction with attached drawing and implementation example, the present invention is described in further detail.
A kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials of the present invention, for realizing super multichannel light etc.
Power beam splitting.As shown in Figure 1, including a rectangular silicon waveguide and 8 parallel conical silicon waveguides, specific implementation is by whole section of square
Shape silicon waveguide latter half is cut into the taper of 8 different in width by dimension scale, and the refractive index of whole section of silicon is 3.46；It does not cut
Rectangular silicon waveguide long * wide * high size are as follows: 10um*12um*0.22um, as input port, 8 parallel cones of cutting
Shape silicon waveguide is as output port.
Conical silicon waveguide is one horizontal trapezoidal in x/y plane, and the width at trapezoidal left side bottom is determined according to distribution of light intensity,
The width at the right bottom is 500nm.8 parallel conical silicon waveguides are as shown in Fig. 2, number is respectively channel 1~logical from top to bottom
Road 8, entire conical section is symmetrical about X-axis, and X-direction is identical as the direction of propagation of light；
The length in 8 channels is identical, is 10um, and it is 0.22um, the width in each channel is according to light that height is also identical
Ratio distribution of the field intensity in the cross section direction yz determines that symmetrical two channel sizes are identical respectively, specifically: 1 He of channel
The width in channel 8 is from 3.68um~0.5um transition, and the width in channel 2 and channel 7 is from 0.92um~0.5um transition, 3 He of channel
The width in channel 6 is from 0.71um~0.5um transition, and the width in channel 4 and channel 5 is from 0.69um~0.5um transition.
Light is propagated in the on piece integrated-type optical power beam splitter, and realizes the mistake distributed incident constant power
Journey is as follows:
As shown in Fig. 2, a branch of incident light source is inputted from the center of rectangular silicon waveguide in equally distributed light field, utilize
Three-D limited FD―TD method (3D-FDTD), by business software Lumerical analogue simulation optical field distribution, according to light in wave
The optical field distribution figure of transmission theory and emulation in leading learns intensity distribution of the light in rectangular silicon waveguide are as follows: the light at center
Field intensity is maximum, is then gradually reduced to both sides；After light transmits 10um or so in rectangular silicon waveguide, the cone parallel into 8
In shape silicon waveguide, according to simulated light field pattern, the width range of each conical silicon waveguide channels is obtained；And it is bored by 8 channels
The power transmission of the output port of shape silicon waveguide is composed, so that it is determined that the width at trapezoidal left side bottom, as shown in figure 3, its abscissa is
Wavelength, ordinate are transmission spectrum；The width dimensions for finely tuning each channel determine suitable cutting ratio, arrive channel 8 according to channel 1
The width of different cutting ratios realizes the optical power beam splitting in 8 channels, and Cong Tuzhong obtains the mean allocation of incident optical power, then
It is exported from 8 conical silicon waveguide constant powers.
The present invention is able to achieve the light constant power distribution of N number of symmetric channel number, and N is integer；With the increase of port number, only edge
The direction longitudinal size increase of Y direction i.e. silicon duct width；Lateral dimension along the x axis is basically unchanged,
Exactly N number of conical silicon waveguide length is fixed as 10um, and thickness is fixed as 220nm, does not increase with the increase of port number, only
The width at trapezoidal left side bottom is redefined according to optical field distribution, width increases with the increase of port number；According to optical field distribution,
The intensity distribution ratio of light field is exactly the width ratio size of N number of silicon waveguide.
Claims (4)
1. a kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials, which is characterized in that including a rectangular silicon wave
The conical silicon waveguide parallel with 8 is led, the two seamless connection is cascaded；Input port of the rectangular silicon waveguide as light；8
Parallel conical silicon waveguide is as output port；
Respectively 1~channel of channel 8 is numbered in 8 parallel conical silicon waveguides from top to bottom, and entire conical section is about X-axis pair
Claim, X-direction is identical as the direction of propagation of light；
The length in 8 channels is identical, is 10um, and it is 0.22um, the width in each channel is strong according to light field that height is also identical
It spends the ratio distribution in the cross section direction yz and determines that symmetrical two channel sizes are identical respectively, specifically: channel 1 and channel 8
Width from 3.68um~0.5um transition, the width in channel 2 and channel 7 is from 0.92um~0.5um transition, channel 3 and channel 6
Width from 0.71um~0.5um transition, the width in channel 4 and channel 5 is from 0.69um~0.5um transition；
The process that the beam splitter carries out constant power distribution to light is as follows: in equally distributed light field, a branch of incident light is from rectangle
The center of silicon waveguide inputs, and according to light transmission theory in the waveguide and the distribution map of the electric field of emulation, learns light in rectangular silicon
Intensity distribution in waveguide are as follows: the distribution of light intensity at center is maximum, is then gradually reduced to both sides；According to distribution map, obtain each
The width range of conical silicon waveguide channels；And pass through the output power transmission spectrum of conical silicon waveguide, finely tune the width in each channel
Size determines that the mean allocation of 8 channel optical powers to the width of 8 different proportion of channel, is realized in channel 1；
The on piece integrated-type optical power beam splitter is able to achieve the light constant power distribution of 8 port numbers；With the increasing of port number
Add, only the longitudinal size along silicon duct width direction increases；Lateral dimension along silicon waveguide length direction is basically unchanged, not with logical
The increase of road number and increase；According to optical field distribution, the intensity distribution ratio of light field is exactly the width ratio size of 8 silicon waveguides.
2. a kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials as described in claim 1, which is characterized in that
The silicon that the rectangular silicon waveguide and conical silicon waveguide are selected, refractive index is 3.46.
3. a kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials as described in claim 1, which is characterized in that
The long * wide * high size of the rectangular silicon waveguide are as follows: 10um*12um*0.22um.
4. a kind of on piece integrated-type optical power beam splitter based on silicon substrate Meta Materials as described in claim 1, which is characterized in that
The conical silicon waveguide is one horizontal trapezoidal in x/y plane, and the width at trapezoidal left side bottom is determined according to distribution of light intensity, right
The width at side bottom is fixed value.
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