CN111025469B - Silicon-based multimode 3dB beam splitter based on multimode interference coupler - Google Patents
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Abstract
The invention discloses a silicon-based multimode 3dB beam splitter based on a multimode interference coupler, which belongs to the field of integrated photonic devices and specifically comprises the following components: the multimode interference waveguide comprises a multimode input waveguide D1, an input region conical coupler E1, a multimode interference waveguide, two output region conical couplers and two multimode output waveguides from left to right in sequence; a multimode input waveguide D1 for receiving an input beam; and exciting a low-order guided mode in the multimode interference waveguide by adjusting the longitudinal spacing between the multimode input waveguide D1 and the transverse central axis of the multimode interference waveguide and the gradual change length and gradual change maximum width of the input-area conical coupler E1, and adjusting the longitudinal spacing between the multimode output waveguides and the gradual change length and gradual change maximum width of the output-area conical coupler to output the output light beams from the two multimode output waveguides. The invention solves the problem of output light spot quality reduction caused by the excitation of a high-order guided mode under the condition of multi-mode input of the multi-mode interference coupler.
Description
Technical Field
The invention belongs to the field of integrated photonic devices, and particularly relates to a silicon-based multimode 3dB beam splitter based on a multimode interference coupler.
Background
With the rise and development of artificial intelligence, big data and cloud computing in recent years, people have explosive growth in the demands for communication capacity, bandwidth and rate, and the optical interconnection technology is the most potential way for overcoming the transmission bottleneck of the communication network nowadays. Among the optical interconnection schemes, silicon-based optical interconnection technology is considered as the most promising scheme. The silicon waveguide has large refractive index difference, and the structural size of the device can be reduced to submicron order, so that the optical device based on the silicon-based micro-nano waveguide has a more compact device structure, and can realize device integration with higher density. The silicon-based micro-nano waveguide-based optical device and the microelectronic circuit can be integrated in a single chip, so that a more complex system can be constructed to complete more complex functions. However, how to transmit higher rates on a single chip has been a significant challenge in the field of silicon-based photonics.
The on-chip mode multiplexing system utilizes orthogonality among a plurality of modes to transmit signals on each mode of the silicon waveguide, can improve transmission bandwidth on a single-chip integrated silicon-based chip, and meets the increasing demand for communication capacity. The multimode optical power beam splitter is used as a basic component in a mode multiplexing system, can realize multi-port distribution of power to input light, and has high requirements on port power consistency, wavelength independence, low loss characteristics and the like.
Among various basic optical power beam splitting devices, the multimode interference coupler has the advantages of small insertion loss, compact structure, good manufacturing tolerance, simple process and the like, and is widely applied to photonic integrated chips. In the multimode waveguide, each order of guided modes excited by input light generate relative phase difference due to different propagation constants, and interfere with each other at a specific position in the propagation direction to generate N-fold images (N is larger than or equal to 1) of an incident field, and the N ports can be uniformly distributed to the input optical power at the position of the N-fold images. Errors can be generated between the theoretical propagation constant and the actual propagation constant of the high-order guided mode in the multimode waveguide, and the excited high-order guided mode has larger propagation constant errors, so that phase errors are generated at the position of N images of interference, and the quality of output light spots at the position of the N images is reduced. The traditional multimode interference coupler can realize low insertion loss for single-mode input, but for multimode input, because the input high-order mode can excite a high-order guided mode, the accumulated phase error reduces the quality of an output light spot, and the application of the multimode interference coupler in an on-chip mode multiplexing system is limited.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a silicon-based multimode 3dB beam splitter based on a multimode interference coupler, and aims to solve the problem that the quality of an output light spot is reduced due to the excitation of a high-order guided mode of the multimode interference coupler under the condition of multimode input.
In order to achieve the aim, the invention provides a silicon-based multimode 3dB beam splitter based on a multimode interference coupler, which sequentially comprises a multimode input waveguide D1, an input region conical coupler E1, a multimode interference waveguide, two output region conical couplers and two multimode output waveguides from left to right;
the two output area conical couplers and the two multimode output waveguides are distributed in an up-and-down symmetrical mode about a transverse central axis of the multimode interference waveguide;
the sum of the maximum gradual widths of the two output-area conical couplers is less than the width of the multimode interference waveguide; the length of the multimode interference waveguide is determined by the double-image position of the input field, so that multimode 3dB beam splitting is realized, namely:
wherein L is the length of the multimode interference waveguide; w is the width of the multimode interference waveguide; λ is the central wavelength of the working band; n iseffIs the effective refractive index of the waveguide layer in the multi-mode interference waveguide.
A multimode input waveguide D1 for receiving an input beam; exciting a low-order guided mode in the multimode interference waveguide by adjusting the longitudinal distance between the multimode input waveguide D1 and the transverse central axis of the multimode interference waveguide and the gradual change length and gradual change maximum width of the input area conical coupler E1, and adjusting the longitudinal distance between the two multimode output waveguides and the gradual change length and gradual change maximum width of the two output area conical couplers to output light beams from the two multimode output waveguides, thereby realizing low-loss multimode 3dB beam splitting; and the order of the low-order guided mode is smaller than the threshold value.
Preferably, the silicon-based multimode 3dB splitter further comprises a multimode input waveguide D2, an input-region tapered coupler E2, which is vertically symmetric with the input waveguide D1 and the input-region tapered coupler E1 about a transverse central axis of the multimode interference waveguide, and a sum of tapered maximum widths of the input-region tapered coupler E1 and the input-region tapered coupler E2 is smaller than a width of the multimode interference waveguide.
Preferably, the multimode input waveguide D1, the multimode input waveguide D2, the input-region tapered coupler E1, the input-region tapered coupler E2, the multimode interference waveguide, the output-region tapered coupler and the multimode output waveguide are of equal height and each comprises an upper cladding of silica, a waveguide layer of silicon and a lower cladding of silica.
Preferably, the multimode input waveguide D1, the multimode input waveguide D2 and both multimode output waveguides are 1 μm wide.
Preferably, the taper length of the input region taper coupler and the taper length of the output region taper coupler are equal and the taper maximum width is equal; the longitudinal spacing between the multimode input waveguide D1 and the multimode input waveguide D2 is equal to the longitudinal spacing between the multimode output waveguides.
Preferably, the longitudinal spacing between the multimode input waveguide D1 and the multimode input waveguide D2, and the longitudinal spacing between the two multimode output waveguides are both greater than or equal to 2 μm; the interval is too small, so that crosstalk between the multimode output waveguide and the multimode input waveguide is easily introduced, the performance of the integral multimode 3dB beam splitter is degraded, meanwhile, the longitudinal interval between the mode input waveguides and the longitudinal interval between the multimode output waveguides are reasonably selected, the excitation of a plurality of modes to a high-order guided mode is reduced, and the loss of a device is reduced.
Preferably, the maximum width of the gradual change of the two input area conical couplers and the two output area conical couplers is more than or equal to 1.5 μm; increasing the maximum width of the taper can reduce the excitation of higher order guided modes and reduce the loss of the multimode 3dB splitter, but the maximum width of the taper of the tapered coupler should be smaller than the width of the multimode interference waveguide, so that the tapered coupler does not exceed the boundary range of the multimode interference waveguide.
Preferably, the tapered lengths of the two input-area tapered couplers and the two output-area tapered couplers are greater than or equal to 3 μm and less than or equal to 10 μm; too small a tapered length of the tapered coupler easily results in too low mode conversion efficiency, resulting in increased loss of the multimode 3dB splitter, and too large a tapered coupler easily results in too large a multimode 3dB splitter, which is not favorable for integration.
Preferably, the width of the multimode interference waveguide is greater than or equal to 4 μm and less than or equal to 10 μm; too large a width tends to make the size of the multimode 3dB splitter too large, and too small a width tends to result in a reduced spacing between the multimode output waveguides, causing crosstalk between the output modes.
Through the technical scheme, compared with the prior art, the invention has the following beneficial effects:
(1) the multimode 3dB beam splitter based on the multimode interference coupler provided by the invention selectively excites a low-order mode in the multimode interference waveguide by utilizing the tapered coupler between the input multimode waveguide and the multimode interference waveguide, thereby solving the problem of the quality reduction of an output light spot caused by the excitation of a high-order guided mode of the multimode interference coupler under the condition of multimode input.
(2) The multimode 3dB beam splitter based on the multimode interference coupler has the advantages of simple structure, easiness in expansion, capability of simultaneously carrying out 3dB beam splitting on a plurality of modes by a single structure, capability of reducing the complexity of a device and improving the integration level of a chip compared with the traditional mode on-chip multiplexing system demultiplexing-single mode 3dB beam splitting-multiplexing mode, good manufacturing tolerance, simple process and the like, the working bandwidth of the device is 1500-1600 nm, and the device can support C-band communication transmission.
Drawings
FIG. 1 is a schematic structural diagram of a silicon-based multimode 3dB beam splitter based on a multimode interference coupler according to the present invention;
FIG. 2 is a schematic cross-sectional view at two multimode input waveguides provided by the present invention;
FIG. 3 is a graph showing the excitation profile of a guided mode in a multimode interference waveguide by a multimode input waveguide as provided in example 1;
FIG. 4 is TE of the multimode 3dB splitter provided in example 10Output insertion loss of the die and TE1Crosstalk of modes;
FIG. 5 is TE of the multimode 3dB splitter provided in example 11Output insertion loss of the die and TE0Crosstalk of the mode.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
FIG. 1 is a silicon-based multimode 3dB beam splitter based on a multimode interference coupler, which sequentially comprises a multimode input waveguide D1, an input-region tapered coupler E1, a multimode interference waveguide, two output-region tapered couplers and two multimode output waveguides from left to right;
the two output area conical couplers and the two multimode output waveguides are distributed in an up-and-down symmetrical mode about a transverse central axis of the multimode interference waveguide;
the sum of the maximum gradual widths of the two output-area conical couplers is less than the width of the multimode interference waveguide; the length of the multimode interference waveguide is determined by the double-image position of the input field, so that multimode 3dB beam splitting is realized, namely:
wherein L is the length of the multimode interference waveguide; w is the width of the multimode interference waveguide; λ is the central wavelength of the working band; n iseffIs the effective refractive index of the waveguide layer in the multi-mode interference waveguide.
A multimode input waveguide D1 for receiving an input beam; exciting a low-order guided mode in the multimode interference waveguide by adjusting the longitudinal distance between the multimode input waveguide D1 and the transverse central axis of the multimode interference waveguide and the gradual change length and gradual change maximum width of the input area conical coupler E1, adjusting the longitudinal distance between the two multimode output waveguides and the gradual change length and gradual change maximum width of the two output area conical couplers, and outputting from the two multimode output waveguides to realize low-loss multimode 3dB beam splitting; and the order of the low-order guided mode is smaller than the threshold value.
Preferably, the silicon-based multimode 3dB splitter further comprises a multimode input waveguide D2, an input-region tapered coupler E2, which is vertically symmetric with the input waveguide D1 and the input-region tapered coupler E1 about a transverse central axis of the multimode interference waveguide, and a sum of tapered maximum widths of the input-region tapered coupler E1 and the input-region tapered coupler E2 is smaller than a width of the multimode interference waveguide.
Preferably, as shown in fig. 2, the multimode input waveguide D1, the multimode input waveguide D2, the input-region tapered coupler E1, the input-region tapered coupler E2, the multimode interference waveguide, the output-region tapered coupler and the multimode output waveguide are of equal height and each comprise an upper cladding of silica, a waveguide layer of silica and a lower cladding of silica.
Preferably, the multimode input waveguide D1, the multimode input waveguide D2 and both multimode output waveguides are 1 μm wide.
Preferably, the taper length of the input region taper coupler and the taper length of the output region taper coupler are equal and the taper maximum width is equal; the longitudinal spacing between the multimode input waveguide D1 and the multimode input waveguide D2 is equal to the longitudinal spacing between the multimode output waveguides.
Preferably, the longitudinal spacing between the multimode input waveguide D1 and the multimode input waveguide D2, and the longitudinal spacing between the two multimode output waveguides are both greater than or equal to 2 μm; the interval is too small, so that crosstalk between the multimode output waveguide and the multimode input waveguide is easily introduced, the performance of the integral multimode 3dB beam splitter is degraded, meanwhile, the longitudinal interval between the mode input waveguides and the longitudinal interval between the multimode output waveguides are reasonably selected, the excitation of a plurality of modes to a high-order guided mode is reduced, and the loss of a device is reduced.
Preferably, the maximum width of the gradual change of the two input area conical couplers and the two output area conical couplers is more than or equal to 1.5 μm; increasing the maximum width of the taper can reduce the excitation of higher order guided modes and reduce the loss of the multimode 3dB splitter, but the maximum width of the taper of the tapered coupler should be smaller than the width of the multimode interference waveguide, so that the tapered coupler does not exceed the boundary range of the multimode interference waveguide.
Preferably, the tapered lengths of the two input-area tapered couplers and the two output-area tapered couplers are greater than or equal to 3 μm and less than or equal to 10 μm; too small a tapered length of the tapered coupler easily results in too low mode conversion efficiency, resulting in increased loss of the multimode 3dB splitter, and too large a tapered coupler easily results in too large a multimode 3dB splitter, which is not favorable for integration.
Preferably, the width of the multimode interference waveguide is greater than or equal to 4 μm and less than or equal to 10 μm; too large a width tends to make the size of the multimode 3dB splitter too large, and too small a width tends to result in a reduced spacing between the multimode output waveguides, causing crosstalk between the output modes.
Example 1
The waveguide in example 1 is a buried waveguide structure, and the height of the waveguide layer is 220 nm; the width of the multimode input waveguide and the multimode output waveguide is 1 μm, which is a value supporting twoSingle mode TE0And TE1Typical values of waveguide width of (a); the multimode input waveguides include multimode input waveguide D1 and multimode input waveguide D2;
in embodiment 1, the longitudinal spacing between the multimode input waveguides of the input region and the longitudinal spacing yin between the multimode output waveguides of the output region are equal, the taper lengths ltap of the two input region tapered couplers and the two output region tapered couplers are the same, and the taper maximum widths wtap are equal; the two input region tapered couplers are an input region tapered coupler E1 and an input region tapered coupler E2;
specifically, in example 1, the pitch yin is 2.76 μm, the taper coupler taper length (including the input area and the output area) ltap is 5.2 μm, the maximum taper width wtap is 2.24 μm, the multimode interference waveguide width W is 5 μm, and the multimode interference waveguide length L is 86.5 μm.
In example 1, TE is inputted0And TE1The excitation distribution diagram of the mode to the guided mode in the multi-mode interference waveguide is shown in fig. 3, and the lowest 5-order guided mode can be mainly excited by the input multi-mode by reasonably selecting the longitudinal distance yin of the multi-mode input waveguide, the gradual change length ltap and the gradual change maximum width wtap of the tapered gradual change waveguide, so that the high-order phase error is reduced, and the quality of an output light spot is improved.
In example 1, TE is inputted0And TE1Output insertion loss and crosstalk of modes in upper and lower multimode output waveguides as shown in fig. 4 and 5, the transmission curve "TE1-TE0Upper' represents inputting TE at multimode input waveguide1Mode, output TE at an upper output waveguide (multimode output waveguide including upper and lower output waveguides)0The mode power, the insertion loss of each mode of the multimode 3dB beam splitter in the wave band of 1500 nm-1600 nm is less than 1.6dB, and the crosstalk is less than-17.5 dB.
In summary, the present invention has the following advantages:
the multimode 3dB beam splitter based on the multimode interference coupler provided by the invention selectively excites a low-order mode in the multimode interference waveguide by utilizing the tapered coupler between the input multimode waveguide and the multimode interference waveguide, thereby solving the problem of output light spot quality reduction caused by excitation of a high-order guided mode of the multimode interference coupler under the condition of multimode input.
The multimode 3dB beam splitter based on the multimode interference coupler has the advantages of simple structure, easiness in expansion, capability of simultaneously carrying out 3dB beam splitting on a plurality of modes by a single structure, capability of reducing the complexity of a device and improving the integration level of a chip compared with the traditional mode on-chip multiplexing system demultiplexing-single mode 3dB beam splitting-multiplexing mode, good manufacturing tolerance, simple process and the like, the working bandwidth of the device is 1500-1600 nm, and the device can support C-band communication transmission.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A silicon-based multimode 3dB beam splitter based on a multimode interference coupler is characterized by sequentially comprising a multimode input waveguide D1, a multimode input waveguide D2, an input region conical coupler E1, an input region conical coupler E2, a multimode interference waveguide, two output region conical couplers and two multimode output waveguides from left to right;
the multimode input waveguide D1 and D2, the input-zone tapered coupler E1 and E2, the two output-zone tapered couplers, and the two multimode output waveguides are all distributed in an up-and-down symmetrical manner about a transverse central axis of the multimode interference waveguide;
the sum of the tapered maximum widths of the input-zone tapered coupler E1 and the input-zone tapered coupler E2, the two output-zone tapered couplers are all less than the width of the multimode interference waveguide; the length of the multimode interference waveguide is determined by the double-image position of the input field, so that multimode 3dB beam splitting is realized;
the multimode input waveguide D1 is used for receiving an input light beam; exciting a low-order guided mode in the multimode interference waveguide by adjusting the longitudinal spacing between the multimode input waveguide D1 and the transverse central axis of the multimode interference waveguide and the gradual change length and gradual change maximum width of the input-region tapered coupler E1, and adjusting the longitudinal spacing between the multimode output waveguides and the gradual change length and gradual change maximum width of the output-region tapered coupler to output light beams from the two multimode output waveguides, thereby realizing low-loss multimode 3dB beam splitting; the order of the low-order guided mode is smaller than a threshold value;
the longitudinal spacing between the multimode input waveguide D1 and the multimode input waveguide D2 and the longitudinal spacing between the two multimode output waveguides are both greater than or equal to 2 μm; the tapered maximum widths of the input-region tapered coupler E1 and the two output-region tapered couplers are both greater than or equal to 1.5 μm; the taper lengths of the input-region taper coupler E1 and the two output-region taper couplers are equal to or greater than 3 μm and equal to or less than 10 μm.
2. The silicon-based multimode 3dB splitter according to claim 1, wherein the multimode input waveguide D1, the multimode input waveguide D2, the input region tapered coupler E1, the input region tapered coupler E2, the multimode interference waveguide, the output region tapered coupler and the multimode output waveguide are of equal height and each comprise an upper cladding of silica, a waveguide layer of silicon and a lower cladding of silica.
3. The silicon-based multimode 3dB splitter according to claim 1, wherein the multimode input waveguide D1, multimode input waveguide D2 and the two multimode output waveguides are each 1 μm wide.
4. The silicon-based multimode 3dB splitter according to claim 1, wherein the taper length of the input region tapered coupler and the taper length of the output region tapered coupler are equal and the taper maximum width is equal; the longitudinal spacing between the multimode input waveguide D1 and the multimode input waveguide D2 is equal to the longitudinal spacing between the multimode output waveguides.
5. The silicon-based multimode 3dB splitter according to claim 1 or 2, wherein the width of the multimode interference waveguide is equal to or greater than 4 μ ι η and equal to or less than 10 μ ι η.
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