CN106768389A - One kind is based on current type relaxor ferroelectric monocrystal pyroelectric detector and preparation method thereof - Google Patents
One kind is based on current type relaxor ferroelectric monocrystal pyroelectric detector and preparation method thereof Download PDFInfo
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- CN106768389A CN106768389A CN201710029198.XA CN201710029198A CN106768389A CN 106768389 A CN106768389 A CN 106768389A CN 201710029198 A CN201710029198 A CN 201710029198A CN 106768389 A CN106768389 A CN 106768389A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 19
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 230000003321 amplification Effects 0.000 claims abstract description 21
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 21
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 238000009413 insulation Methods 0.000 claims description 31
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 12
- 239000003292 glue Substances 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 208000003351 Melanosis Diseases 0.000 claims description 9
- 229920006335 epoxy glue Polymers 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 9
- 238000004806 packaging method and process Methods 0.000 claims description 8
- 238000005498 polishing Methods 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000000227 grinding Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 230000004044 response Effects 0.000 abstract description 14
- 230000006641 stabilisation Effects 0.000 abstract description 8
- 238000011105 stabilization Methods 0.000 abstract description 8
- 230000005855 radiation Effects 0.000 abstract description 7
- 230000005616 pyroelectricity Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000009286 beneficial effect Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 230000003071 parasitic effect Effects 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 238000004146 energy storage Methods 0.000 description 4
- 230000004043 responsiveness Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 150000002500 ions Chemical group 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 108010067216 glycyl-glycyl-glycine Proteins 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002048 multi walled nanotube Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- GZXOHHPYODFEGO-UHFFFAOYSA-N triglycine sulfate Chemical compound NCC(O)=O.NCC(O)=O.NCC(O)=O.OS(O)(=O)=O GZXOHHPYODFEGO-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
Abstract
The present invention relates to one kind based on current type relaxor ferroelectric monocrystal pyroelectric detector and preparation method thereof, pyroelectric detector includes encapsulating package, optical filter, the sensitive element chip U of inner hollowpAnd circuit base plate.Encapsulating package includes pipe cap and base, Filter mosaic is arranged in the window that pipe cap upper surface opens up, the lower end of pipe cap is fixedly connected with base, and the sealing structure of inner hollow is formed with base, circuit base plate is arranged on base and is located in sealing structure, circuit base plate is provided with flying shore frame, sensitive element chip UpFlying shore frame upper surface is arranged on, and positioned at the underface of optical filter；Wiring board is provided with amplification feedback circuit, and sensitive element chip UpIt is connected electrically in by flying shore frame between two inputs for amplifying feedback circuit.The present invention uses current type circuit, and the ability of anti-outside noise interference is strong, it is possible to achieve the quick response of infra-red radiation to external world, and start preheating and signal stabilization time shorten.
Description
Technical field
The present invention relates to semiconductor fabrication process technical field, more particularly to one kind is based on current type relaxor ferroelectric monocrystal heat
Release electric explorer and preparation method thereof.
Background technology
In nature, any object higher than absolute temperature (- 273k) will all produce infrared spectrum, the object of different temperatures
The wavelength of the infrared energy of release is different, therefore infrared wavelength is related, and emittance to the height of temperature
Size it is relevant with body surface temperature.Pyroelectric detector be it is a kind of based on infrared emanation principle be made it is red by detecting
Outside line detects the detector of people or object, is widely used for radiation and non-contact type temperature measurement, infrared spectrometry, laser
In parameter measurement, industry automatic control, space technology, infrared photography.
On the one hand, most of commercialization pyroelectric detector is all made of pyroelectric single crystal or ceramic body material, especially
It is middle and high end detector, then mainly based on monocrystal, traditional pyroelectric single crystal material all respectively has its limitation, or heat
Release electrostrictive coefficient small (such as lithium tantalate), or application temperature is low, physical property is unstable (triglycine sulfate TGS), therefore explores and grind
The pyroelectric single crystal material for studying carefully excellent combination property is one of core of pyroelectric detector and infrared detection technique.
On the other hand, wide variety of pyroelectric detector is voltage mode both at home and abroad at present, and voltage mode pyroelectricity is visited
Survey device structure simpler.Sensor main will be by package casing, optical filter, pyroelectricity sensor chip, technotron JFET etc.
Composition.
The signal voltage of voltage mode pyroelectric detector generally comprises the ultralow frequency part as caused by 1/f features
(mHz), the high-pass filtering cut-off frequency part of amplifier should not be too low.The resistance of gate resistance (load resistance) will at least have
10Gohm, then detector performance do very well.The optimal dampproof method for avoiding high-impedance component from leaking electricity is that integrated internal transistor is sealed
Dress.In performance application, the unusable pyroelectric detector without integrated impedance preamplifier.Voltage mode pyroelectricity
The voltage signal of detector is with 1:1 multiplication factor is exported, and signal amplitude is small, easily by various noises, thermal source and light source it is dry
Disturb.Under voltage mode, the electroresponse timeconstantτ of detectorEIt is by the capacitance C of pyroelectricity chipPWith the resistance R of gate resistorG
Calculate and obtain.By the pyroelectricity chip for being used is high dielectric constant material, its electric capacity is larger, and resistance is very high in addition
Gate resistor, its electric time response is generally 1s-10s magnitudes, and the speed of response is slow, and is heated and releases the limitation of battery core chip size, is to ensure
Performance, it is impossible to improved by changing material and circuit parameter.In typical gas analysis or flame detecting application,
Between 1Hz to 10Hz, voltage mode pyroelectric detector is the work outside thermal time constant and electrical time constant to modulating frequency
(signal voltage has the rule of 1/f) made, and the responsiveness of maximum is obtained outside typical modulating frequency, low-frequency disturbance is low
Can be hereby passed to several millihertzs, so detector needs to stand tens seconds to stablize, stabilization time is long.Imitated using junction type
Should pipe voltage mode pyroelectric detector hot environment stable sex expression it is weaker, and voltage-mode circuit used door electricity
Resistance resistance it is very high, thermal shock and temperature fluctuation can cause temperature drift phenomenon, need to using differential concatenation or parallel connection pyroelectricity chip come
Carry out thermal compensation.But the equivalent capacity of input is increased exponentially due to shunt compensation, so as to increase the sound of detector again
Between seasonable, while causing the decay (decay 1/2) of detector output signal, the decline of detectivity performance is caused (to drop to
70% or so).Generally in actual use, small crystal temperature effect fluctuation can produce fA or nA level currents.For example temperature increases
Plus 10 DEG C, the electrostatic potential at the chip two ends of high-insulation can reach hundreds of volts, and technotron can be caused greatly
Electrostatic damage.
In sum, voltage mode due in structure and price on advantage, although occupied in early stage application certain
Advantage, but under the trend of high-tech requirement and application requirement high, voltage mode still suffers from many limitation, and has quick
Response, high stability, the pyroelectric detector of responsiveness characteristic high will turn into new development trend and key object.
For this reason, it may be necessary to develop the detector of new higher performance.
The content of the invention
The technical problems to be solved by the invention are directed to above-mentioned the deficiencies in the prior art, there is provided a kind of to be relaxed based on current type
Henan ferroelectric monocrystal pyroelectric detector and preparation method thereof.
The technical scheme that the present invention solves above-mentioned technical problem is as follows：
According to one aspect of the present invention, there is provided one kind is based on current type relaxor ferroelectric monocrystal pyroelectric detector, bag
Include encapsulating package, optical filter F, the sensitive element chip U of inner hollowpAnd circuit base plate.
The encapsulating package includes the pipe cap and base of upper end closed lower ending opening, and the optical filter F inlays and is arranged on institute
State in the window that pipe cap upper end opens up, the lower end of the pipe cap is fixedly connected with the base, and inside is formed with the base
Hollow sealing structure, the circuit base plate is arranged on the base and is located in the sealing structure, the circuit base plate
It is provided with flying shore frame, the sensitive element chip UpThe flying shore frame upper surface is arranged on, and positioned at the optical filter F
Underface；The circuit base plate is provided with amplification feedback circuit, and the sensitive element chip UpBy the flying shore frame
It is connected electrically between two inputs of the amplification feedback circuit, the output end for amplifying feedback circuit externally exports amplification
Detectable signal.
It is of the invention based on current type relaxor ferroelectric monocrystal pyroelectric detector, using current type circuit, anti-outside noise
The ability of interference is strong, it is possible to achieve the grade quick response of infra-red radiation to external world, start preheating and signal stabilization time contracting
It is short.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement：
Further：The flying shore frame includes conductive pole, multiple fixed columns and heat insulation bottom board, and the heat insulation bottom board is set
On the circuit base plate, and the heat insulation bottom board bottom up cave in setting and between the circuit base plate formed first every
Hot chamber, the sensitive element chip UpThe heat insulation bottom board top is disposed on by multiple fixed columns, and it is described sensitive
Element chip UpThe second heat-insulation chamber is formed between the heat insulation bottom board, the conductive pole is arranged in second heat-insulation chamber, and
The conductive pole and fixed column are highly equal, so that the circuit base plate and the sensitive element chip UpElectrical connection.
The beneficial effect of above-mentioned further scheme is：The heat insulation bottom board can be caused with the circuit through the above way
Between substrate and the sensitive element chip UpForm the first heat-insulation chamber and the second heat-insulation chamber respectively with heat insulation bottom board, further carry
Flying height high, reduce carries out heat transfer by the flying shore frame and the circuit base plate, and raising absorbs infra-red radiation
The utilization rate of energy and the precision of detector.
Further：The amplification feedback circuit includes operational amplifier A, feedback resistance Rf, feedback capacity Cf, clamp resistance
RaAnd Rb, the positive supply input of the operational amplifier A electrically connects with external power source positive pole V+, negative supply input end grounding, institute
State pyroelectric sensing to be electrically connected between the in-phase input end of the operational amplifier A and inverting input, the feedback electricity
Resistance RfWith feedback capacity CfIt is connected in parallel between the inverting input of the operational amplifier A and output end, the clamp resistance RaWith
RbIt is connected between external power source positive pole V+ and ground, and the common port of the two is electric with the in-phase input end of the operational amplifier A
Connection, the output end of the operational amplifier A externally exports the detectable signal of amplification.
The beneficial effect of above-mentioned further scheme is：By the operational amplifier A it is possible to prevente effectively from parasitic capacitance is led
The Electro Magnetic Compatibility reduction of cause, permanent pyroelectricity chip voltage skew caused by the gate-source pinch-off voltage of technotron,
And current noise is to the dependence of temperature, and because operational amplifier A has larger multiplication factor in itself, backend application
Second amplifying circuit can to a certain extent be omitted or lowered the requirement.Additionally by clamp resistance RaAnd RbElectric current can be realized
The single supply of pattern detector is powered so that the encapsulating package specification of current type detector can be detected with traditional voltage mode
Device is compatible, so as to may be implemented in the direct replacement on original circuit.
According to another aspect of the present invention, there is provided a kind of based on current type relaxor ferroelectric monocrystal pyroelectric detector
Preparation method, comprises the following steps：
Step 1：Sensitive element chip U is prepared using relaxor ferroelectric monocrystal piecep；
Step 2：Flying shore frame is fixed on the circuit base plate for being set in advance in base upper surface, then will be described sensitive
Element chip UpThe flying shore frame upper surface is fixed on, so that the sensitive element chip UpBy the flying shore frame and institute
State circuit base plate electrical connection；
Step 3：Feedback circuit will be amplified and be mounted on the circuit base plate surface, and the sensitive element chip UpIt is connected electrically in
Between two inputs for amplifying feedback circuit；
Step 4：Optical filter F is packaged in the window that pipe cap upper end opens up, then will be packaged with described in the optical filter F
The lower end of pipe cap carries out air-tight packaging with the base for being loaded with the circuit base plate.
Preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector of the invention, using current type circuit,
The ability of anti-outside noise interference is strong, it is possible to achieve the Millisecond quick response of infra-red radiation to external world, start preheating and signal
Stabilization time shortens；Flying shore frame is led using low-heat, with signal-to-noise characteristic higher, is amplified by low noise operational and fed back
Circuit ensure that the responsiveness high of detector, is suitable for single supply and powers and various circuit-modes such as dual power supply, with low
Power consumption, stability advantage high.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement：
Further：The step 1 includes：
Step 11：Relaxor ferroelectric monocrystal piece is carried out into the high temperature anneal under oxygen-enriched atmosphere, in the relaxor ferroelectric list
Chip two sides plated electrode, then carry out high voltage polarization treatment；
Step 12：By the relaxor ferroelectric monocrystal piece positive and negative be ground with chemically mechanical polishing, then grinding with change
Learn the true reverse side vacuum evaporation metallic diaphragm of the single-chip after mechanical polishing；
Step 13：Melanism thing is prepared, the melanism thing is sprayed on the single-chip reverse side after plated film, and in the list
Crystal wafer back face forms mask blackening layer, forms sensitive element chip Up。
The beneficial effect of above-mentioned further scheme is：Using new chemical mechanical lapping and polishing technology, vacuum evaporation gold
The mode of category film layer and ultrasonic sprayed-on polymer mask blackening layer technology, reaches effectively subtracting for large scale pyroelectric single crystal material
It is thin, it is ensured that the firmness of metal-plated film layer, and the uniformity of melanism absorbed layer, high adhesion force and high IR absorptivity, for batch
Quantify to make high-performance, the new pyroelectricity relaxor ferroelectric monocrystal sensor chip of high uniformity there is provided new direction.
Further：The relaxor ferroelectric monocrystal piece is ion doping PIMNT sosoloid monocrystals, and its Curie temperature is higher than 150
DEG C, dielectric constant is less than 600.
Further：The step 2 includes：
Step 21：The lower end of flying shore frame is bonded in the right of the circuit base plate upper surface that is pre-printed with circuit
Answer at position, so that the circuit base plate is electrically connected with the flying shore frame；
Step 22：By the sensitive element chip UpThe flying shore frame upper surface is bonded in, so that sensitive first core
Piece UpElectrically connected with the flying shore frame.
The beneficial effect of above-mentioned further scheme is：By above-mentioned steps, on the one hand can be by the flying shore frame
By the sensitive element chip UpIt is suspended vacantly above the circuit base plate so that the circuit base plate and the sensitive element chip
UpBetween form heat-insulation chamber, reduce carries out heat transfer by the flying shore frame and the circuit base plate；On the other hand can
The sensitive element chip U is caused with by the flying shore framepElectrically connected with the circuit base plate, be easy to output response letter
Number.
Further：The flying shore frame is bonded in the circuit base plate upper surface, the sensitive unit by conductive silver glue
Chip UpBy conductive silver glue and insulating epoxy glue sticking in the flying shore frame upper surface.
The beneficial effect of above-mentioned further scheme is：The flying shore frame can be firmly fixed by conductive silver glue
In the circuit base plate upper surface, can be by sensitive element chip U by the conductive silver glue and insulating epoxy stickerpFirm branch
Support is on the circuit base plate, and the sensitive element chip UpBetween flying shore frame and flying shore frame and circuit base plate
Between by conductive silver glue connect, be easy to output response signal.
Further：In the step 3, the amplification feedback circuit is mounted on the line using gold ball bonding wire-bonding technique
Roadbed plate surface.
The beneficial effect of above-mentioned further scheme is：By using gold ball bonding wire-bonding technique, can reduce as far as possible
The area of contact point during welding, to reduce the parasitic capacitance in circuit and stray capacitance.
Further：In the step 4, optical filter is encapsulated in by the window that the pipe cap upper surface opens up using black epoxy glue
It is intraoral, then will be packaged with the optical filter the pipe cap lower end be loaded with the base of the circuit base plate in nitrogen environment
Air-tight packaging is carried out by energy storage Welding.
The beneficial effect of above-mentioned further scheme is：The optical filter is encapsulated on the pipe cap using black epoxy glue
In the window that surface opens up, it is ensured that the non-light transmittance of air-tightness and adhesive spots, using energy storage Welding by the lower end of pipe cap
Air-tight packaging is carried out with base, the influence of temperature is reduced, welding quality is improved, it is ensured that air-tightness requirement.
Further：The circuit base plate is made up of alumina ceramic material.
The beneficial effect of above-mentioned further scheme is：Using insulating ceramics circuit board high, eliminate due to circuit board
The introduced parasitic capacitance of material difference and noise, improve the electrical stability of electronic component carrier.
Brief description of the drawings
Fig. 1 is of the invention a kind of based on current type relaxor ferroelectric monocrystal pyroelectric detector structural representation；
Fig. 2 is that a kind of flying shore frame structure based on current type relaxor ferroelectric monocrystal pyroelectric detector of the invention is shown
It is intended to；
Fig. 3 is of the invention a kind of based on current type relaxor ferroelectric monocrystal pyroelectric detector amplification feedback circuit schematic diagram
One；
Fig. 4 is of the invention a kind of based on current type relaxor ferroelectric monocrystal pyroelectric detector amplification feedback circuit schematic diagram
Two；
Fig. 5 is that a kind of preparation method flow based on current type relaxor ferroelectric monocrystal pyroelectric detector of the invention is illustrated
Figure.
In accompanying drawing, the list of parts representated by each label is as follows：
1st, pipe cap, 2, base, 3, circuit base plate, 4, flying shore frame.
Specific embodiment
Principle of the invention and feature are described below in conjunction with accompanying drawing, example is served only for explaining the present invention, and
It is non-for limiting the scope of the present invention.
Embodiment one, one kind are based on current type relaxor ferroelectric monocrystal pyroelectric detector.Below in conjunction with Fig. 1 to the present invention
One kind introduced in detail based on current type relaxor ferroelectric monocrystal pyroelectric detector.
Be based on current type relaxor ferroelectric monocrystal pyroelectric detector as shown in figure 1, a kind of, including inner hollow package tube
Shell, optical filter F, sensitive element chip UpWith circuit base plate 3.
The encapsulating package includes the pipe cap 1 and base 2 of upper end closed lower ending opening, and the optical filter F inlays and is arranged on
In the window that the upper end of the pipe cap 1 opens up, the lower end of the pipe cap 1 is fixedly connected with the base 2, and with the shape of the base 2
Into the sealing structure of inner hollow, the circuit base plate 3 is arranged on the base 2 and is located in the sealing structure, described
Circuit base plate 3 is provided with flying shore frame 4, the sensitive element chip UpThe upper surface of flying shore frame 4 is arranged on, and is located at
The underface of the optical filter F；The circuit base plate 3 is provided with amplification feedback circuit, and the sensitive element chip UpBy institute
State flying shore frame 4 to be connected electrically between two inputs of the amplification feedback circuit, the output for amplifying feedback circuit
The end detectable signal that externally output is amplified.
It is of the invention based on current type relaxor ferroelectric monocrystal pyroelectric detector, using current type circuit, anti-outside noise
The ability of interference is strong, it is possible to achieve the Millisecond quick response of infra-red radiation to external world, start preheating and signal stabilization time contracting
It is short.
As shown in Fig. 2 in the present embodiment, the flying shore frame 4 includes conductive pole 401, multiple fixed columns 402 and heat-insulated
Base plate 403, the heat insulation bottom board 403 is arranged on the circuit base plate 3, and the bottom up of the heat insulation bottom board 403 is caved in and set
Put and the first heat-insulation chamber is formed between the circuit base plate 3, the sensitive element chip UpBy between multiple fixed columns 402
Every being arranged on the top of the heat insulation bottom board 403, and the sensitive element chip UpBetween the heat insulation bottom board 403 formed second every
Hot chamber, the conductive pole 401 is arranged in second heat-insulation chamber, and the conductive pole 401 and fixed column 402 are highly equal,
So that the circuit base plate 3 and the sensitive element chip UpElectrical connection.The heat insulation bottom board 403 can be caused through the above way
Between the circuit base plate 3 and the sensitive element chip UpThe first heat-insulation chamber and second are formed respectively with heat insulation bottom board 403
Heat-insulation chamber, further improves flying height, and reduce carries out heat transfer by the flying shore frame 4 and the circuit base plate 3, carries
Height absorbs the utilization rate of infrared energy and the precision of detector.
As shown in figure 3, in the present embodiment, the amplification feedback circuit includes operational amplifier A, feedback resistance Rf, feedback
Electric capacity Cf, clamp resistance RaAnd Rb, the positive supply input of the operational amplifier A electrically connects with external power source positive pole V+, negative electricity
Source input end grounding, the sensitive element chip UpBe connected to the operational amplifier A in-phase input end and inverting input it
Between, the feedback resistance RfWith feedback capacity CfIt is connected in parallel between the inverting input of the operational amplifier A and output end, institute
State clamp resistance RaAnd RbIt is connected between external power source positive pole V+ and ground, and the common port of the two and the operational amplifier A
In-phase input end is electrically connected, and the output end of the operational amplifier A externally exports the detectable signal of amplification.Put by the computing
Big device A it is possible to prevente effectively from Electro Magnetic Compatibility reduction caused by parasitic capacitance, lead by the gate-source pinch-off voltage of technotron
The permanent pyroelectricity chip voltage skew for causing, and current noise is to the dependence of temperature, and because operational amplifier A has in itself
The second amplifying circuit for having larger multiplication factor, backend application can to a certain extent be omitted or lowered the requirement.Additionally by
Clamp resistance RaAnd RbThe single supply that current-mode detector can be realized is powered so that the encapsulating package of current type detector
Specification can be compatible with traditional voltage mode detector, so as to may be implemented in the direct replacement on original circuit.
Preferably as one embodiment of the present of invention, the operational amplifier A uses unencapsulated operational amplifier core
Piece, the feedback resistance RfUsing insulating pad resistance, the feedback capacity CfUsing NPO ceramic condensers；Wherein, the feedback
Resistance RfTemperature coefficient be less than or equal to 1000PPM/K, Standard resistance range be 5-100G Ω.Unencapsulated operational amplifier chip
Small volume, is easy to be integrated in inside the shell, and using high value Low Drift Temperature insulating pad resistance, temperature drift is very small, and error is small；
Using Low Drift Temperature NPO ceramic condensers, with temperature stabilization characteristic very high, temperature drift is very small, and capacitor's capacity is minimum, is far below
Pyroelectricity chip capacity, to reduce the response time of detector, improves the speed of response.
Explanation is needed exist for, current type relaxor ferroelectric monocrystal pyroelectric detector of the invention can be multichannel.
Specially：The window of the upper surface of the pipe cap 1, optical filter F, amplification feedback circuit and sensitive element chip UpQuantity be two
And more than, and three's quantity is equal, the optical filter F is embedded in the window correspondingly, the sensitive element chip Up
It is arranged on the circuit base plate 3, and immediately below the corresponding optical filter F.
In addition, as shown in Figure 4, multiple amplification feedback circuits share clamp resistance R described in a groupaAnd Rb.For many
The pyroelectric detector of individual detection channels, multiple amplification feedback circuits preferably share clamp resistance R described in a groupaAnd Rb, this
On the one hand sample can simplify circuit structure, on the other hand can also be by sharing clamp resistance R described in a groupaAnd RbRealize multiple
The current type element circuit is powered by a single supply, reduces circuit cost.
Embodiment two, a kind of preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector.Below in conjunction with
Fig. 5 is introduced a kind of preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector of the invention in detail.
As shown in figure 5, a kind of preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector, including following step
Suddenly：
Step 1：Sensitive element chip U is prepared using relaxor ferroelectric monocrystal piecep；
Step 2：Flying shore frame 4 is fixed on and is set in advance on the circuit base plate 3 of the upper surface of base 2, then will be described
Sensitive element chip UpThe upper surface of flying shore frame 4 is fixed on, so that the sensitive element chip UpBy the flying shore frame
4 electrically connect with the circuit base plate 3；
Step 3：Feedback circuit will be amplified and be mounted on the surface of the circuit base plate 3, and the sensitive element chip UpElectrical connection
Between two inputs of the amplification feedback circuit；
Step 4：Optical filter F is packaged in the window that the upper end of pipe cap 1 opens up, then the institute that the optical filter F will be packaged with
The lower end for stating pipe cap 1 carries out air-tight packaging with the base 2 for being loaded with the circuit base plate 3.
Preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector of the invention, using current type circuit,
The ability of anti-outside noise interference is strong, it is possible to achieve the Millisecond quick response of infra-red radiation to external world, start preheating and signal
Stabilization time shortens；Flying shore frame 4 is led using low-heat, with signal-to-noise characteristic higher, amplifies anti-by low noise operational
Current feed circuit ensure that the responsiveness high of detector, is suitable for single supply and powers and various circuit-modes such as dual power supply, have
Low-power consumption, stability advantage high.
In the present embodiment, the step 1 includes：
Step 11：Relaxor ferroelectric monocrystal piece is carried out into the high temperature anneal by relaxor ferroelectric monocrystal piece under oxygen-enriched atmosphere,
In the relaxor ferroelectric monocrystal piece two sides plated electrode, then carry out high voltage polarization treatment；；
Step 12：By the relaxor ferroelectric monocrystal piece positive and negative be ground with chemically mechanical polishing, then grinding with change
Learn the true reverse side vacuum evaporation metallic diaphragm of the single-chip after mechanical polishing；
Step 13：Melanism thing is prepared, the melanism thing is sprayed on the single-chip reverse side after plated film, and in the list
Crystal wafer back face forms mask blackening layer, forms sensitive element chip Up。
Using new chemical mechanical lapping and polishing technology, vacuum evaporation metallic diaphragm and ultrasonic sprayed-on polymer mask
The mode of blackening layer technology, reaches the effective thinning of large scale pyroelectric single crystal material, it is ensured that the firmness of metal-plated film layer, with
And the uniformity of melanism absorbed layer, high adhesion force and high IR absorptivity, it is that mass makes high-performance, high uniformity Novel hot
Electric relaxor ferroelectric monocrystal sensor chip is released there is provided new direction.
In above-mentioned steps 11, the relaxor ferroelectric monocrystal piece is entered in oxygen volume ratio is the eutrophic environment more than 95%
Row steps back 5 hours high temperature above annealings, and annealing temperature is more than 400 degrees Celsius, then again in the relaxor ferroelectric monocrystal
, finally be placed in the relaxor ferroelectric monocrystal piece in 140 degrees Celsius of silicone oil by the tow sides plated electrode of piece, adds 2KV/mm straight
Stream electric field high pressure plan 15 minutes.
Specifically, melanism thing is prepared by following steps：Aqueous epoxy resins and multi-walled carbon nano-tubes dispersion liquid are pressed into volume
Than less than 1：5 are well mixed, and add distilled water to be diluted, be well mixed, and obtain mixed liquor.
Preferably, the relaxor ferroelectric monocrystal piece is ion doping PIMNT sosoloid monocrystals, and its Curie temperature is higher than 150
DEG C, dielectric constant is less than 600.
In the present embodiment, the step 2 includes：
Step 21：The lower end of flying shore frame 4 is bonded in the upper surface of the circuit base plate 3 that is pre-printed with circuit
Corresponding position, so that the circuit base plate 3 is electrically connected with the flying shore frame 4；
Step 22：By the sensitive element chip UpThe upper surface of flying shore frame 4 is bonded in, so that sensitive first core
Piece UpElectrically connected with the flying shore frame 4.
By above-mentioned steps, on the one hand can be by the flying shore frame 4 by the sensitive element chip UpIt is suspended vacantly
In the top of the circuit base plate 3 so that the circuit base plate 3 and the sensitive element chip UpBetween form heat-insulation chamber, reduce
Heat transfer is carried out by the flying shore frame 4 and the circuit base plate 3；On the other hand can be by the flying shore frame 4
So that the sensitive element chip UpElectrically connected with the circuit base plate 3, be easy to output response signal.
Preferably, the flying shore frame 4 is bonded in the upper surface of the circuit base plate 3 by conductive silver glue, described sensitive
Element chip UpBy conductive silver glue and insulating epoxy glue sticking in the upper surface of flying shore frame 4.Can be with by conductive silver glue
The flying shore frame 4 is firmly fixed to the upper surface of the circuit base plate 3, by the conductive silver glue and insulating epoxy glue
Can be by sensitive element chip UpFirm is supported on the circuit base plate 3, and the sensitive element chip UpWith flying shore frame
Connected by conductive silver glue and flying shore frame 4 and circuit base plate 3 between 4, conductive stability is good, be easy to stabilization output
Response signal.
Preferably, in the step 3, the amplification feedback circuit is mounted on the line using gold ball bonding wire-bonding technique
The surface of base board 3.By using gold ball bonding wire-bonding technique, the area of contact point when can as far as possible reduce welding, to drop
Parasitic capacitance and stray capacitance in low circuit.
In the present embodiment, in the step 4, optical filter is encapsulated in by the upper surface of the pipe cap 1 using black epoxy glue and is opened
If window in, then the lower end of the pipe cap 1 of the optical filter will be packaged with exist with the base 2 for being loaded with the circuit base plate 3
Air-tight packaging is carried out by energy storage Welding in nitrogen environment.The optical filter is encapsulated in by the pipe using black epoxy glue
In the window that the upper surface of cap 1 opens up, it is ensured that the non-light transmittance of air-tightness and adhesive spots, using energy storage Welding by pipe cap 1
Lower end and base 2 carry out air-tight packaging, reduce the influence of temperature, improve welding quality, it is ensured that air-tightness requirement.
Preferably, the circuit base plate 3 is made up of alumina ceramic material.Using insulating ceramics circuit board high, eliminate
Due to the introduced parasitic capacitance of circuit board material difference and noise, the electrical stability of electronic component carrier is improved.
The foregoing is only presently preferred embodiments of the present invention, be not intended to limit the invention, it is all it is of the invention spirit and
Within principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (10)
- It is 1. a kind of to be based on current type relaxor ferroelectric monocrystal pyroelectric detector, it is characterised in that：Package tube including inner hollow Shell, optical filter F, sensitive element chip UpWith circuit base plate (3)；The encapsulating package includes the pipe cap (1) and base (2) of upper end closed lower ending opening, and the optical filter F inlays and is arranged on In the window that pipe cap (1) upper end opens up, the lower end of the pipe cap (1) is fixedly connected with the base (2), and with the bottom Seat (2) forms the sealing structure of inner hollow, and the circuit base plate (3) is arranged on the base (2) and positioned at the sealing In structure, the circuit base plate (3) is provided with flying shore frame (4), the sensitive element chip UpIt is arranged on the flying shore Frame (4) upper surface, and positioned at the underface of the optical filter F；The circuit base plate (3) is provided with amplification feedback circuit, and the sensitive element chip UpBy the flying shore frame (4) It is connected electrically between two inputs of the amplification feedback circuit, the output end for amplifying feedback circuit externally exports detection Signal.
- 2. according to claim 1 based on current type relaxor ferroelectric monocrystal pyroelectric detector, it is characterised in that：It is described outstanding Empty support frame (4) includes conductive pole (401), multiple fixed columns (402) and heat insulation bottom board (403), and the heat insulation bottom board (403) sets Put on the circuit base plate (3), and the heat insulation bottom board (403) bottom up cave in setting and with the circuit base plate (3) Between form the first heat-insulation chamber, the sensitive element chip UpIt is disposed on by multiple fixed columns (402) described heat-insulated Base plate (403) top, and the sensitive element chip UpThe second heat-insulation chamber is formed between the heat insulation bottom board (403), it is described to lead Electric post (401) is arranged in second heat-insulation chamber, and the conductive pole (401) and fixed column (402) are highly equal, so that institute Circuit base plate (3) is stated with sensitive element chip UpElectrical connection.
- 3. according to claim 1 based on current type relaxor ferroelectric monocrystal pyroelectric detector, it is characterised in that：It is described to put Big feedback circuit includes operational amplifier A, feedback resistance Rf, feedback capacity Cf, clamp resistance RaAnd Rb, the operational amplifier A Positive supply input electrically connected with external power source positive pole V+, negative supply input end grounding, pyroelectric sensing circuit connection Between the in-phase input end and inverting input of the operational amplifier A, the feedback resistance RfWith feedback capacity CfIt is connected in parallel on Between the inverting input and output end of the operational amplifier A, the clamp resistance RaAnd RbIt is connected on external power source positive pole V+ Between ground, and the common port of the two is electrically connected with the in-phase input end of the operational amplifier A, the operational amplifier A Output end externally exports detectable signal.
- 4. it is a kind of as described in any one of claims 1 to 3 based on current type relaxor ferroelectric monocrystal pyroelectric detector preparation side Method, it is characterised in that comprise the following steps：Step 1：Sensitive element chip U is prepared using relaxor ferroelectric monocrystal piecep；Step 2：Flying shore frame (4) is fixed on and is set in advance on the circuit base plate (3) of base (2) upper surface, then by institute State sensitive element chip UpFlying shore frame (4) upper surface is fixed on, so that the sensitive element chip UpBy the hanging branch Support (4) is electrically connected with the circuit base plate (3)；Step 3：Feedback circuit will be amplified and be mounted on the circuit base plate (3) surface, and the sensitive element chip UpIt is connected electrically in institute State amplify feedback circuit two inputs between；Step 4：Optical filter F is packaged in the window that pipe cap (1) upper end opens up, then will be packaged with described in the optical filter F The lower end of pipe cap (1) carries out air-tight packaging with the base (2) for being loaded with the circuit base plate (3).
- 5. the preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector according to claim 4, its feature It is that the step 1 includes：Step 11：Relaxor ferroelectric monocrystal piece is carried out into the high temperature anneal under oxygen-enriched atmosphere, in the relaxor ferroelectric monocrystal piece Two sides plated electrode, then carry out high voltage polarization treatment；Step 12：By the relaxor ferroelectric monocrystal piece positive and negative be ground with chemically mechanical polishing, then in grinding and chemical machine The true reverse side vacuum evaporation metallic diaphragm of the single-chip after tool polishing；Step 13：Melanism thing is prepared, the melanism thing is sprayed on the single-chip reverse side after plated film, and in the single-chip Reverse side forms mask blackening layer, forms sensitive element chip Up。
- 6. the preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector according to claim 4, its feature It is：In the step 1, the relaxor ferroelectric monocrystal piece is ion doping PIMNT sosoloid monocrystals, and its Curie temperature is higher than 150 DEG C, dielectric constant is less than 600.
- 7. the preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector according to claim 4, its feature It is that the step 2 includes：Step 21：The lower end of flying shore frame (4) is bonded in the circuit base plate (3) upper surface for being pre-printed with circuit Corresponding position, so that the circuit base plate (3) is electrically connected with the flying shore frame (4)；Step 22：By the sensitive element chip UpFlying shore frame (4) upper surface is bonded in, so that the sensitive element chip UpElectrically connected with the flying shore frame (4).
- 8. the preparation method based on current type relaxor ferroelectric monocrystal pyroelectric detector according to claim 7, its feature It is：The flying shore frame (4) is bonded in the circuit base plate (3) upper surface, the sensitive element chip by conductive silver glue UpBy conductive silver glue and insulating epoxy glue sticking in flying shore frame (4) upper surface.
- 9. the preparation side based on current type relaxor ferroelectric monocrystal pyroelectric detector according to any one of claim 4 to 8 Method, it is characterised in that：In the step 3, the amplification feedback circuit is mounted on the line using gold ball bonding wire-bonding technique Base board (3) surface.
- 10. the preparation side based on current type relaxor ferroelectric monocrystal pyroelectric detector according to any one of claim 4 to 8 Method, it is characterised in that：In the step 4, optical filter F is encapsulated in by the pipe cap (1) upper surface using black epoxy glue and is opened up Window in, then the lower end of the pipe cap (1) of the optical filter F and the base for being loaded with the circuit base plate (3) will be packaged with (2) air-tight packaging is carried out by stored energy welding in nitrogen environment.
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