CN106768338A - A kind of THz wave spectrometry device and measuring method based on filter effect - Google Patents
A kind of THz wave spectrometry device and measuring method based on filter effect Download PDFInfo
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- G—PHYSICS
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
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Abstract
The present invention relates to a kind of THz wave spectrometry device based on filter effect and measuring method, avoid using the method for Fourier transformation, therefore the Time Domain Spectrum of THz wave to be measured need not first be obtained, also without using mechanical delay arrangement, its structure and light path are relatively simple, therefore the cost of whole device is relatively low；And for the filter unit corresponding to various default filtering conditions, THz wave is in all directions of each outgoing position of filter unit and outgoing, wave spectrum is transmitted with identical, they are all by identical filter action, the stability of spectral measurement can be improved, and the designed THz wave spectrometry device based on filter effect, the method that Terahertz wave spectrum is restored by solving equations, so that spectrum recovering scope and resolution ratio are no longer limited by mechanical device moving range and femto-second laser repetition rate, therefore resolution ratio is higher, spectrum recovering wider range.
Description
Technical field
The present invention relates to a kind of THz wave spectrometry device based on filter effect and measuring method, belong to wave spectrum detection
Technical field.
Background technology
THz wave technology development in recent years is swift and violent, in astronomical remote sensing, public safety, high-speed communication and biomedicine etc.
Numerous scientific domains all cause extensive concern and study.Terahertz (THz) ripple typically refers to frequency in 0.1~10THz
(1THz=1012Hz electromagnetic wave), its wavelength is between microwave and near-infrared.Because THz wave photon has relatively low energy
Amount, and many materials have characteristic absorption in terahertz wave band, many nonmetallic and non-polar material is in terahertz wave band
Bright, Terahertz wave spectrum has huge application potential in Non-Destructive Testing.But terahertz wave band is located at electronics and photon
Intersection, is difficult to produce and detect THz wave with traditional electronics and optical means.After the nineties in 20th century,
The development of the technologies such as laser technology, SQW technology and compound semiconductor, stablizes for terahertz emission is provided, reliably swashs
Light emitting source, has promoted the further development of Terahertz correlation technique and research, wherein also including THz wave spectrometry technology.
The terahertz time-domain spectroscopic technology (THz-TDS) that be developed by ultrafast laser technique is the Terahertz of current main flow
Wave spectrum measuring system.It obtains broadband THz pulse and can measure the THz wave electric field of generation using femtosecond laser technology
Intensity changes with time, and is obtained in that THz wave frequency domain spectra by Fourier transformation, and then obtain the spectrum of testing sample
Information.But, typical terahertz time-domain spectroscopy instrument uses monolock mould femto-second laser and mechanical time deferred mount, and it is frequently
Spectral resolution is higher, and sweep speed is slower.Because the width of the resolution sizes of the spectrometer and time delay window into
Inverse ratio, and to obtain larger time delay window width then needs more sweep times, for example：Translation stage can provide hundreds of skins
The time delay window width of second, but need time-consuming several minutes；And the sweep speed of vibrating mirror can reach 100Hz, but its time
Window width can only be limited within 100 psecs.Therefore, traditional terahertz time-domain spectroscopy instrument can not simultaneously provide resolution higher
Rate and faster sweep speed.
Document (T.Yasui, E.Saneyoshi, and T.Araki, Asynchronous optical sampling
terahertz time-domain spectroscopy for ultrahigh spectral resolution and
Rapid data acquisition.Appl.Phys.Lett, 87,061101-1~061101-3 (2005)) propose it is asynchronous
Optical Sampling time-domain spectroscopy instrument (ASOPS THz-TDS) is solving the problems, such as above-mentioned terahertz time-domain spectroscopy instrument.The Terahertz
Spectrometer has the mode-locked laser of consistent difference respectively as pump light and detection light using two repetition rates.Two beam laser
Relative delay between pulse from 0 to pumping pulse repetition rate inverse it is linear increase, and when repetition rate is reciprocal
Between interval in complete a time sampling for THz pulse.The frequency domain spectra of THz wave can be obtained again by Fourier transformation.
The use of mechanical delay arrangement is avoided due to the spectrometer, can be provided while high-resolution is obtained and be scanned speed faster
Degree.However, using the Terahertz waveform that ASOPS terahertz light spectrometers are measured there is serious afterbody to shake, this is probably by each
What the multipath reflection between individual optical component caused.Because the concussion is beyond the scope of ambient noise, to THz wave
The measurement performance of spectrum causes serious influence.
Therefore, for THz wave spectral measurement system, it is desirable to which it improves scanning speed while high-resolution is obtained
Degree, and the problem in other performances is not brought, and wish that it is more difficult to reduce volume and cost of manufacture.
The content of the invention
The technical problems to be solved by the invention be the volume for overcoming traditional THz wave spectrometry technology to exist it is excessive,
A kind of deficiency such as resolution ratio is high, relatively costly, there is provided THz wave spectrometry device based on filter effect.
In order to solve the above-mentioned technical problem the present invention uses following technical scheme：The present invention devises a kind of based on filtering effect
The THz wave spectrometry device answered, including wave filter, filtering parameter controller, detector and calculation processing unit；It is to be measured too
Hertz wave is received by a detector after being filtered effect via wave filter；Wherein, filtering parameter controller is carried out for wave filter
Various default filtering condition controls, are filtered under various default filtering conditions for THz wave to be measured respectively by wave filter
Effect so that different from the wave spectrum of the THz wave of wave filter outgoing under the default filtering condition of difference；Detector is used to visit
From the power of wave filter outgoing THz wave under the different default filtering conditions of survey acquisition；Calculation processing unit is used for pick-up probe
Result of detection, and carry out data analysis and process.
As a preferred technical solution of the present invention：Also include THz wave collimator apparatus, the THz wave to be measured
After being converted into parallel beam via THz wave collimator apparatus, it is again incident in the wave filter, wherein, the THz wave is accurate
Straight device includes two confocal THz wave lens, and is arranged at small at common focus between two THz wave lens
Hole diaphragm.
As a preferred technical solution of the present invention：The filtering parameter controller is regulated and controled by electric-field intensity, magnetic field
The combination of intensity modulation, sound field intensity regulation and control, mechanical strength regulation and control, or above control measures, is carried out for the wave filter
Various default filtering condition controls, are filtered under various default filtering conditions for THz wave to be measured respectively by wave filter
Ripple, obtains and corresponds to various default filtering conditions, each other mutually different each THz wave of wave spectrum respectively.
As a preferred technical solution of the present invention：The wave filter includes each with different filtering transmissison characteristics
Filter unit, the filtering parameter controller carries out electric-controlled mechanical modulation for wave filter, switches each filter unit difference position
In on the propagation path of THz wave to be measured, realizing wave filter respectively under various default filtering conditions to THz wave to be measured
Different filter actions, obtain and correspond to various default filtering conditions, each other mutually different each THz wave of wave spectrum respectively.
As a preferred technical solution of the present invention：The filtering parameter controller includes optical translation platform, the filter
Ripple device also includes substrate, and each filter unit distribution is arranged in substrate, and substrate is arranged on optical translation platform, and optics is put down
Moving stage carries out electric-controlled mechanical modulation for substrate, switches each filter unit respectively positioned at the propagation path of THz wave to be measured
On, wave filter is realized respectively under various default filtering conditions to the different filter actions of THz wave to be measured, it is right respectively to obtain
Answer various default filtering conditions, each other mutually different each THz wave of wave spectrum.
As a preferred technical solution of the present invention：The filtering parameter controller includes stepper motor and wheel disc base
Bottom, described each filter unit is distributed centered on the axle center of wheel disc substrate and is arranged in wheel disc substrate, the driving of stepper motor
End is connected with wheel disc substrate, and stepper motor carries out electric-controlled mechanical modulation for wheel disc substrate, and control wheel disc substrate is with its axle center
For axle is rotated, switch each filter unit and be located on the propagation path of THz wave to be measured respectively, realize that wave filter is distinguished
To the different filter actions of THz wave to be measured under various default filtering conditions, obtain and correspond to various default filtering bars respectively
Mutually different each THz wave of part, each other wave spectrum.
As a preferred technical solution of the present invention：Described each filter unit is for each other with the suction of different THz waves
Receive each filtering film of characteristic；Or described each filter unit is each with different Terahertz wave spectrum transmissison characteristics each other
Individual resonant frequency selects face, and the resonant element of periodic distribution is respectively provided with each resonant frequency selection face.
As a preferred technical solution of the present invention：The wave filter is Terahertz magnetic control wave filter, the filtering ginseng
Number controller is magnetic field modulator, and magnetic field modulator carries out magnetic field intensity modulation for Terahertz magnetic control wave filter, realizes filtering
Device is filtered effect under various default filtering conditions for THz wave to be measured respectively, obtains and corresponds to various default filters respectively
Mutually different each THz wave of ripple condition, each other wave spectrum.
A kind of THz wave spectrometry device based on filter effect of the present invention using above technical scheme with it is existing
Technology is compared, with following technique effect：In THz wave spectrometry device application based on filter effect of the present invention, keep away
The method of exploitation Fourier transformation, therefore without first obtaining the Time Domain Spectrum of THz wave to be measured, it is not required that prolonged using machinery
Slow device, its structure and light path are relatively simple, and whole design structure is easy to make, and selectable material category is various,
Therefore the cost of whole device is relatively low；And for the filter unit corresponding to various default filtering conditions, THz wave
In all directions of each outgoing position of filter unit and outgoing, wave spectrum is transmitted with identical, they are all by identical
Filter action, it is possible to increase the stability of spectral measurement；Moreover, the designed Terahertz wave spectrum based on filter effect is surveyed
Amount device, compared to existing terahertz time-domain wave spectrum measurement apparatus small volume, portability is greatly improved.
Correspondingly, the technical problem also to be solved of the invention is to overcome what traditional THz wave spectrometry technology was present
Volume is excessive, resolution ratio is not high, the deficiency such as relatively costly, there is provided a kind of THz wave spectrometry device based on filter effect
Measuring method.
In order to solve the above-mentioned technical problem the present invention uses following technical scheme：The present invention devises a kind of based on filtering effect
The measuring method of the THz wave spectrometry device answered, comprises the following steps：
The frequency range that the detector to be detected is divided into step 1. frequency range that n frequency range is Δ f, each frequency range
Respectively with its centre frequency f1,…,fnIt is marked；
Filtering parameter controller described in step 2. carries out n kinds for the filter action of wave filter correspondence THz wave to be measured
Default filtering condition control so that detector separately detects acquisition wave filter under the default filtering condition control of n kinds, for be measured
THz wave is filtered the power of THz wave after effect, i.e., detection obtains n THz wave power, then is individually subtracted environment
Noise, updates the n THz wave power P obtained under the default filtering condition control of n kinds1,…,Pn；
Step 3. obtains each frequency range f in THz wave to be measured by solution matrix equation (1)1,…,fnWatt level P
(f1),…,P(fn)：
In formula, i ∈ { 1 ..., n }, j ∈ { 1 ..., n }, CijRepresent and carry out i-th kind in advance for wave filter in parameter controller
If under filtering condition control, fjWhen by with the wave filter is not passed through, detector detects power to the THz wave of frequency range
Value is individually subtracted the ratio after ambient noise；
Step 4. is directed to P (f1),…,P(fn) carry out curve fitting, and calibrated through wave spectrum, obtain the ripple of THz wave to be measured
Spectral curve.
As a preferred technical solution of the present invention：In the step 3, using Tikhonov regularization method, minimum
Mathematics Optimization Method solution matrix equation (1) of mean square algorithm, simulated annealing or alternating direction multiplier method, and in institute
Addition is smooth in stating Tikhonov regularization method, least mean square algorithm, simulated annealing, the equation of alternating direction multiplier method
The factor, by controlling the distance between two adjacent solutions so that resulting THz wave spectral curve is more smoothed.
A kind of measuring method of THz wave spectrometry device based on filter effect of the present invention uses above technology
Scheme compared with prior art, with following technique effect：THz wave spectrometry dress based on filter effect of the present invention
The measuring method put, is surveyed by the THz wave spectrometry device of institute's specific design of the present invention for THz wave to be measured
Amount, avoids using the method for Fourier transformation, therefore without first obtaining the Time Domain Spectrum of THz wave to be measured, and test application
In, for the filter unit corresponding to various default filtering conditions, THz wave at each outgoing position of filter unit and
In all directions of outgoing, wave spectrum is transmitted with identical, they are all by identical filter action, it is possible to increase spectrum is surveyed
The stability of amount；Moreover, the measuring method of the designed THz wave spectrometry device based on filter effect, by solution side
The method that journey group restores Terahertz wave spectrum so that spectrum recovering scope and resolution ratio no longer receive mechanical device moving range and femtosecond
The limitation of laser repetition rate, therefore resolution ratio is higher, spectrum recovering wider range.
Brief description of the drawings
Fig. 1 is THz wave spectral frequency division schematic diagram in present invention design；
Fig. 2 is the THz wave spectrometry apparatus structure schematic diagram of embodiment 1 in present invention design；
Fig. 3 is the THz wave spectrometry apparatus structure schematic diagram of embodiment 2 in present invention design；
Fig. 4 is the THz wave spectrometry apparatus structure schematic diagram of embodiment 3 in present invention design；
Fig. 5 is the THz wave spectrometry apparatus structure schematic diagram of embodiment 4 in present invention design；
Fig. 6 is document (Carelli P, Chiarello F, Cibella S, et al.A Fast Terahertz
Spectrometer Based on Frequency Selective Surface Filters,Journal of Infrared
Millimeter＆Terahertz Waves, Vol.33, No.5, pp.505-512 (2012)) in resonant frequency selection face it is saturating
Ejected wave composes schematic diagram；
Wherein, 1. THz wave to be measured, 2. THz wave lens, 3. aperture, 4. detector, 5. different filtering films
The wave filter of composition, 6. filters film, 7. the wave filter of different resonant frequency selection face compositions, 8. resonant frequency selection face, 9.
Wheel disc substrate, 10. filter unit, 11. magnetic field modulators, 12. terahertz polarization pieces, 13. liquid crystal cells.
Specific embodiment
Specific embodiment of the invention is described in further detail with reference to Figure of description.
Thinking of the invention is to change filter action of the wave filter to incident THz wave by parameter controller, and measurement is not
, by the overall strength after wave filter, substitute into and solve system of linear equations and obtain with incident each frequency component of THz wave under control condition
Obtain the value of each frequency component intensity and be fitted the frequency spectrum for obtaining incident THz wave.
Wave filter is commonly used to the performance of raising system, is widely used in practical application, in Terahertz field equally such as
This.The wave filter that the present invention is used is tunable wideband terahertz filter, in the various default filter of filtering parameter controller
There are different filter actions to incident THz wave to be measured under the conditions of ripple.When incident THz wave to be measured device after filtering
And when being received by a detector, the numerical value that detector is detected is that the THz wave component of each frequency is strong after after filtering
The linear superposition of degree.And when the default filtering condition of filtering parameter controller changes, transmitted by the THz wave of wave filter
Spectral line changes, and each frequency component overall strength of the THz wave that detector is detected also constantly changes, therefore by measurement
These data can obtain the spectrum information of THz wave to be measured with inverting, be explained in detail below：
First, the look-in frequency scope of the terahertz detector is divided into the frequency range that n frequency range is Δ f, after division
Terahertz frequency domain spectra as shown in figure 1, each of which frequency component centre frequency be fi(i=1 ..., n), when division part
When number is sufficiently large, the amplitude of each frequency range can be by its centre frequency fiAmplitude represent that is, each frequency range is respectively with its center
Frequency f1,…,fnIt is marked.The amplitude of each frequency range is carried out into the frequency spectrum letter that linear fit can be obtained by THz wave to be measured
Breath.Because the frequency range of each frequency range is identical, it is also possible to obtained by solving the area of the corresponding small rectangle of each frequency component in Fig. 1
It is taken into the frequency spectrum for penetrating THz wave.According to the principle of calculus, total incident power of THz wave can be approximated to be curve in Fig. 1
Many summations of small rectangular areas below.Under certain control condition of filtering parameter controller, incident Terahertz to be measured
Ripple is received by a detector after device after filtering.Now, the THz wave performance number that detector is detected should be passed through equal to THz wave
The superposition of each frequency component power value after wave filter.Due to the filter action of wave filter, each frequency range of THz wave being superimposed
Power have each small rectangle in a certain degree of change, i.e. Fig. 1 in Terahertz wave spectrum compared with each frequency band power when incidence
Area there occurs change after the filtering of device after filtering, and this ratio for changing for each frequency range of THz wave not
It is identical to the greatest extent.When the position and structure of each part are fixed, these change the spy of ratio, i.e. detector for each frequency range of THz wave
Survey rate is fixed value, can in advance by by the THz wave of each frequency after after filtering with it is non-filtered when detector institute
Measured value is individually subtracted to be calculated after the intrinsic noise of detector is compared and measures.If using the power of THz wave each frequency range when incident as
Unknown number, the detectivity using detector for each frequency range of THz wave can be obtained on these unknown numbers as each term coefficient
A linear equation, be Terahertz performance number that detector is measured on the right of equation, the left side of equation group be it is to be measured too
The power of each frequency range is multiplied by detector to being added resulting calculated value after the detectivity of each frequency range of THz wave again in Hertz wave.
Hereafter, filter action of the wave filter to incident THz wave to be measured is changed by filtering parameter controller, that is, changes detector pair
The detectivity of each frequency range of THz wave to be measured, then when the defeated different control conditions of filtering parameter controller, in detector position
Place will measure a series of different THz wave power.The system of linear equations that filtering parameter is controlled to be obtained under different control conditions
Conjunction obtains a system of linear equations, solves the normalization spectrum that this equation group can be obtained by THz wave to be measured.
Based on above-mentioned analysis, the present invention devises a kind of THz wave spectrometry device based on filter effect, in,
Specifically include THz wave collimator apparatus, wave filter, filtering parameter controller, detector and calculation processing unit；Terahertz to be measured
After hereby ripple is converted into parallel beam via THz wave collimator apparatus, incide in wave filter, work is filtered via wave filter
It is received by a detector after；Wherein, THz wave collimator apparatus includes two confocal THz wave lens, and is arranged at two
Aperture between individual THz wave lens at common focus；Filtering parameter controller is regulated and controled by electric-field intensity, magnetic field is strong
The combination of degree regulation and control, sound field intensity regulation and control, mechanical strength regulation and control, or above control measures, is carried out respectively for the wave filter
Default filtering condition control is planted, work is filtered for THz wave to be measured under various default filtering conditions by wave filter respectively
With so that it is different from the wave spectrum of the THz wave of wave filter outgoing under the default filtering condition of difference, i.e., corresponded to respectively
Mutually different each THz wave of various default filtering conditions, each other wave spectrum；Detector is used to detect the different default filters of acquisition
From the power of wave filter outgoing THz wave under the conditions of ripple；Calculation processing unit is used for the result of detection of pick-up probe, goes forward side by side
Row data analysis and process；Based on said structure design, further specific design is as follows for the present invention.
First, for wave filter, this patent design wave filter includes each filtering with different filtering transmissison characteristics
Unit, filtering parameter controller carries out electric-controlled mechanical modulation for wave filter, switch each filter unit respectively be located at it is to be measured too
On the propagation path of Hertz wave, realize wave filter respectively under various default filtering conditions to the difference filtering of THz wave to be measured
Effect, obtains and corresponds to various default filtering conditions, each other mutually different each THz wave of wave spectrum respectively.Here for filtering
For unit, the present invention further design, each filter unit is each filter with different THz wave absorption characteristics each other
Ripple film；Or described each filter unit is that each resonant frequency with different Terahertz wave spectrum transmissison characteristics is selected each other
Face, is respectively provided with the resonant element of periodic distribution on each resonant frequency selection face；In practical application, just filtered for each
The electric-controlled mechanical modulation of unit, the present invention divides two kinds, and one kind is that the filtering parameter controller includes optical translation platform, described
Wave filter also includes substrate, and the distribution of each filter unit is arranged in substrate, and substrate is arranged on optical translation platform, optical translation
Platform carries out electric-controlled mechanical modulation for substrate；Another kind is that the filtering parameter controller includes stepper motor and wheel disc substrate 9,
Described each filter unit is distributed centered on the axle center of wheel disc substrate and is arranged in wheel disc substrate, the drive end of stepper motor with
Wheel disc substrate is connected, and stepper motor carries out electric-controlled mechanical modulation for wheel disc substrate, controls wheel disc substrate with its axle center as axle
Rotated, switch each filter unit and be located on the propagation path of THz wave to be measured respectively, realize wave filter respectively each
Different filter actions under kind default filtering condition to THz wave to be measured, obtain correspond to respectively various default filtering conditions, that
Mutually different each THz wave of this wave spectrum.
With regard to above-mentioned design structure, in practical application, following each embodiment of this patent specific design.
Embodiment 1
The structure chart of the THz wave spectrometry device based on filter effect is as shown in Fig. 2 including terahertz in the present embodiment
Hereby ripple collimator apparatus, filtered wave filter 5, detector 4 that films 6 constitute, position control carried out to wave filter 5 by multiple different
Optical translation platform (not shown), in order to be automatically obtained the numerical value collection during spectrum recovering and calculate, in the present embodiment
Also include the calculation processing unit (not shown) being connected with the signal of detector 4.In the present embodiment, incident terahertz to be measured
Hereby ripple 1 first passes around THz wave collimator apparatus, the THz wave collimator apparatus include 2 confocal THz wave lens 2 with
And the aperture 3 at its common focus is arranged at, it is used to correct the depth of parallelism and width of light beam of incident THz wave.After shaping
The wave filters 5 that are made up of different filtering films 6 of THz wave to be measured 1, the wave filter 5 is thin by the different types of filtering of n
Film 6 is combined, and in order to reduce the manufacture difficulty of wave filter, n filtering film 6 on wave filter 5 also shares one to terahertz
The hereby transparent substrate of ripple, preferably PTFE (polytetrafluoroethylene (PTFE), Polytetrafluoroethylene or teflon) or TPX (poly- 4-
Methylpentene-Isosorbide-5-Nitrae-methylpentene-1 or methyl pentene copolymer) etc. material.Filtering on wave filter 5
Film 6 can select various biological or chemical films to THz wave with characteristic absorpting spectrum, using various in the present embodiment
The film that amino acid molecular material is made, such as L-, D-, DL-Alanine, different crystal forms glycine, phenylalanine, arginine etc..
Wave filter can make by the following method：Required amino acid material not of the same race is dissolved in into distilled water respectively and is configured to amino acid
Solution, drops in the diverse location in substrate and 30 minutes film forming of drying at a temperature of 300K, constantly weight by different aminoacids solution
Multiple above-mentioned steps are until the thickness of film reaches 40-100 μm.Due to amino acid molecular weak interaction, (configuration is curved for skeletal vibration
It is bent), the rotation of dipole and vibrational transition and the low-frequency vibration of lattice absorb all in terahertz wave band, THz wave is to difference
Small difference is very sensitive between the amino acid structure of matter, and different aminoacids material all has different absorptions in terahertz wave band
Spectrum.Therefore transmission spectral line of the n filtering film 6 on the present embodiment median filter 5 in the range of the look-in frequency of detector 4 is mutual not
It is identical., just to the center of a certain filtering film on wave filter 5, THz wave to be measured 1 after wave filter 5 by being visited for detector 4
Survey device 4 to receive, detector 4 can use Golay Cell or Bolometer.Parameter controller is in the present embodiment for optics is flat
Moving stage, it can control wave filter 5 relative to the position of detector 4, i.e., make under different control conditions by mobile filter device 5
Detector 4 is obtained just to different filtering film 6 positions on wave filter 5.
Embodiment 2
The structure chart of the THz wave spectrometry device based on filter effect is as shown in figure 3, including terahertz in the present embodiment
Hereby ripple collimator apparatus, be made up of multiple difference resonant frequencies selection faces 8 wave filter 7, detector 4, position is carried out to wave filter
The optical translation platform (not shown in Fig. 3) of control.Described each resonant frequency selection face 8 can using same metal plate or
Person's metallic film is used as substrate.The resonant element of periodic distribution is both provided with each resonant frequency selection face 8, it is different humorous
Resonant element on vibration frequency selection face 8 has different shape or different physical dimensions.Wherein, using metal plate as
The wave filter 7 of substrate can be made by the method being machined, and can be led to using the wave filter 7 on metallic film as substrate
The method for crossing ion etching or photoetching makes；Filtering parameter controller is in the present embodiment optical translation platform, and it can
To control the relative position of wave filter 7 and detector 4 by mobile filter device 7 so that detector 4 is received under different control conditions
To the THz wave that the different resonant frequency selection faces 8 from wave filter 7 transmit.The resonant frequency selection that the present embodiment is used
Face 8 is similar to a spatial filter in principle, when the relatively low THz wave of frequency is irradiated on resonant frequency selection face 8,
Large-scale electronics will be excited to move so that Electron absorption major part energy, and along the induced-current very little in resonant element gap,
Cause transmission coefficient smaller.With the continuous rising of incident THz wave frequency, the electric current flowed along resonant element gap is not
Disconnected increase, so that transmission coefficient is improved, when the frequency of incident THz wave reaches certain value, the electricity of resonant element both sides
Son just moves back and forth under the driving of incidence wave electric field vector, larger induced-current is formed, because Electron absorption largely enters
The energy of ejected wave, at the same the electronics of motion through resonant element gap to transmission direction radiated electric field, now transmissivity reaches
Peak value, the frequency is exactly resonant frequency point.When the frequency of incidence wave continues to raise, the range of movement of electronics will be caused to reduce, and
And the motion for limiting electronics of the field changing period of high frequency incidence wave, emittance is limited, therefore transmitance again will gradually
Reduce.The resonant frequency in resonant frequency selection face 8 depends on the structure and shape of its resonant element, because working as spatial electromagnetic
Ripple can produce frequency response characteristic when being irradiated to the periodic array plane of each resonant frequency selection face 8 composition, and this response is special
Property can be explained that, for common loop configuration or solid construction, its resonant frequency point can with the thought of equivalent circuit
With reference to following formula：
In formula：LeIt is the equivalent inductance of resonant element, C on resonant frequency selection face 8eIt is resonance on resonant frequency selection face 8
The equivalent electric capacity of spaced slot between unit.Because each resonant frequency selects the resonant element shape size in face 8 on wave filter 7
Difference, their resonant frequencies to incident THz wave are also different.Therefore, resonant frequency selection faces 8 different in the present embodiment
Played the same tune on different musical instruments from the filtering film 6 that different biochemical films are provided with the median filter 5 of embodiment 1：Can be right
Incident THz wave plays different filter effects.In order to make it easy to understand, we are with document 2 (Carelli P, Chiarello
F,Cibella S,et al.A Fast Terahertz Spectrometer Based on Frequency Selective
Surface Filters, Journal of Infrared Millimeter＆Terahertz Waves, Vol.33, No.5,
Pp.505-512 (2012)) in propose a kind of structure be illustrated as wave filter.Included in the structure 18 it is humorous
Vibration frequency selects face, and they have different resonance center frequeHs respectively, and scope is 0.74-4.76THz, and Fig. 6 shows wherein
Lattice parameter is the transmission spectral line in 20 μm of resonant frequency selection face.We can make wave filter using the parameter in the document
On n resonant frequency selection face, then each resonant frequency selection face resonant frequency differ, they are to incident THz wave
Frequency response it is also different, we can measure the frequency that this n resonant frequency selects in face of incidence THz wave by experiment
Response, i.e., the coefficient matrix of required system of linear equations.In this way, measuring certain resonant frequency on device 7 after filtering by detector 4
THz wave intensity behind selection face 8, and by optical translation platform mobile filter device 7, it is possible to obtain from wave filter 7 each
The THz wave intensity of the resonant frequency selection transmission of face 8, substitution Solving Linear can just restore and obtain Terahertz wave spectrum.
Embodiment 3
Embodiment 1 and embodiment 2 are all to adjust wave filter 5 as filtering parameter controller using optical translation platform and visit
The relative position of device 4 is surveyed, so that THz wave to be measured is respectively by each difference filtering film 6 or filter on wave filter 5
Received by detector 4 behind each different resonant frequency selection face 8 on ripple device 7.In addition to this structure, embodiment 1 and implement
Wave filter in example 2 can also use filtering wheel-type structure.As shown in figure 4, now the filter unit 10 in wheel disc substrate 9 can be with
Face 8 is selected using the filtering film 6 in embodiment 1 and embodiment 2 or resonant frequency, filter unit 10 is around wheel disc substrate 9
Axle center is distributed.Filtering parameter controller can select stepper motor, and it can control wheel disc substrate 9 to be rotated around axle center, various
Under default filtering condition, wheel disc substrate 9 rotates through different angles, and causes different filter units 10 just to detector 4.It is logical
Cross and test the coefficient matrix that the detectivity for measuring each filter unit 10 is assured that the structure, by step motor control wheel disc
Substrate 9 rotates the THz wave that can just detect varying strength.Therefore said structure and control mode can also realize this hair
Bright technical scheme.
In practical application, for wave filter, the present invention have also been devised following structure：The filtering parameter controller includes
Stepper motor and wheel disc substrate, described each filter unit are distributed centered on the axle center of wheel disc substrate and are arranged on wheel disc substrate
On, drive end and the wheel disc substrate of stepper motor are connected, and stepper motor carries out electric-controlled mechanical modulation for wheel disc substrate, control
Wheel disc substrate is rotated by axle of its axle center, switches each filter unit respectively positioned at the propagation path of THz wave to be measured
On, wave filter is realized respectively under various default filtering conditions to the different filter actions of THz wave to be measured, it is right respectively to obtain
Answer various default filtering conditions, each other mutually different each THz wave of wave spectrum, specific design following examples.
Embodiment 4
The structure chart of the THz wave spectrometry device based on filter effect is as shown in figure 5, in the present apparatus in the present embodiment
Including THz wave collimator apparatus, THz wave magnetic control wave filter, magnetic field modulator 11, detector 4.Terahertz in the present embodiment
Hereby ripple magnetic control wave filter includes nematic crystal box 13 and two parallel terahertz polarizations for being attached to liquid crystal cell rear and front end face
Piece 12, the magnetic field modulator 11 in the present embodiment is made up of (represented by a pair of magnetic poles in figure) spiral winding and driving power supply, visits
Survey device and use Golay Cell or Bolometer detectors.For the numerical value collection being automatically obtained during spectrum recovering and meter
Calculate, the calculation processing unit (not shown) being connected with the signal of detector 4 is also included in the present embodiment.Due to liquid crystal molecule tool
There are optical activity and birefringence effect, nematic liquid is being entered by the linear polarization THz wave after first terahertz polarization piece 12
Two beam polarized lights are formed during brilliant box 13, due in magnetic field have different phase delay, two beam polarized lights merge outgoing when with
Originally compared to have rotated certain angle, then by being received by detector 4 after second terahertz polarization piece 12, now detector 4
The Terahertz intensity for receiving and magnetic field and the frequency dependence of THz wave.Change magnetic field intensity by controlling driving power supply, can
To control the birefringent characteristic of nematic liquid crystal material, so as to change the THz wave intensity that detector 4 is received.Work as magnetic field modulation
When device 11 realizes various default filtering conditions, the wave filter can produce different filter effects so that what detector 4 was received
THz wave intensity is continually changing, by detector 4 pairs under each the default filtering condition for testing measurement magnetic field modulator 11
In the detectivity of each frequency component of THz wave to be measured, you can the coefficient matrix required for obtaining wave spectrum measurement, by measuring magnetic
The intensity of THz wave and solve system of linear equations and can just realize THz wave under various default filtering conditions of modulator 11
Recovery of spectrum.
As the above analysis, when by optical translation platform mobile filter device so that filter unit is relative with detector
When position constantly changes, by detector each time just to transmission spectrum of the filtering film in detector measurement frequency range
Line is all different, and the THz wave intensity that detector is detected each time is also different.If thin according to being filtered on wave filter
The number n of film, n equal portions are divided into by terahertz wave detector look-in frequency scope, per the frequency range of portion centre frequency to be measured
Intensity size in THz wave is used as unknown number；The value removal that optical translation platform is detected by detector after n secondary controls
As augmented matrix after ambient noise；Each filtering film is measured on wave filter to the detectivity of each frequency range of THz wave/thoroughly
Rate is crossed as coefficient matrix, by lucky flood promise husband (Tikhonov) regularization method solution matrix equation, and acquired results is entered
Row linear fit, frequency spectrum calibration can be obtained by the wave spectrum of THz wave to be measured.It is that can obtain ripple of the invention based on the principle
Spectrometry (wave spectrum recovery) method, it is specific as follows：
Based on the THz wave spectrometry device based on filter effect designed by the present invention, above-mentioned each specific implementation of correspondence
Example structure, the present invention further devises the measuring method of the THz wave spectrometry device based on filter effect, specifically includes
Following steps：
The frequency range that the detector to be detected is divided into step 1. frequency range that n frequency range is Δ f, each frequency range
Respectively with its centre frequency f1,…,fnIt is marked, n is the integer more than 3.
As shown in figure 1, in the range of the measurement frequency of detector, THz wave spectral curve to be measured is evenly dividing into n sections.
Whole wave spectrum area is just approximately divided into multiple elongated rectangles, it is assumed that be respectively f per a centre frequency1,f2,…fn,
Frequency interval is Δ f, P (fi) (i=1 ..., n) it is frequency fiThe corresponding watt level of THz wave frequency component, it is to be measured too
The power of the THz wave component in Hertz wave corresponding to each frequency band is the area of each small rectangle, former according to calculus
Reason, the general power P of incident THz wave0Can be approximated to be the summation of each small rectangular area below curve in figure, i.e., each frequency
The superposition of component power.If represented with mathematical formulae, it is represented by：
Filtering parameter controller described in step 2. carries out n kinds for the filter action of wave filter correspondence THz wave to be measured
Default filtering condition control so that detector separately detects acquisition wave filter under the default filtering condition control of n kinds, for be measured
THz wave is filtered the power of THz wave after effect, i.e., detection obtains n THz wave power, then is individually subtracted environment
Noise, updates the n THz wave power P obtained under the default filtering condition control of n kinds1,…,Pn。
Due to can more or less there is influence of noise in measuring environment, the present invention is in order to improve THz wave spectrometry result
Accuracy, actual measurement is obtained into THz wave power data and is calibrated, that is, subtract the power of ambient noise.For specific survey
Amount environment, the performance number produced by ambient noise is the definite value for uniquely determining, i.e., under the conditions of without incidence THz wave, detection
Power data in the measuring environment that device is detected.The Terahertz that detector corresponding to n position of wave filter is detected
After wave power is individually subtracted ambient noise, P is designated as respectively1,…,Pn。
When detector position is just to i-th filtering film on wave filter, the performance number that detector is measured subtracts noise again
After power, should be：
Wherein, Cij(i=1,2 ... n) (j=1,2 ... n) represents detector position just to i-th filtering film on wave filter
When, frequency is fjTHz wave by with without filtering film in the case of, the value that terahertz wave detector is detected
It is individually subtracted both ratio after ambient noise.
When optical translation platform control wave filter constantly changes with the relative position of detector, detector can just be surveyed
A series of power data is obtained, these power are expressed as system of linear equations：
P1=C11P(f1)+C12P(f2)+…+C1nP(fn),
P2=C21P(f1)+C22P(f2)+…+C2nP(fn),
…
Pn=Cn1P(f1)+Cn2P(f2)+…+CnnP(fn),
Wherein, C11,C12,…C1nIt is respectively that frequency is f1,f2,…fnTHz wave by with without on wave filter
During first filtering film, the value that terahertz wave detector is detected is individually subtracted both ratio after ambient noise.Work as ripple
After the position of each part of spectrometry device and optical translation platform control wave filter determine with each relative position of detector, can
Think CijIt is one group of definite value, and can be measured by experiment, for example, can adopts with the following method：First with the Terahertz wavelength-division of wideband
Not Tong Guo central homology frequency be f1,f2,…fnTHz wave super narrow bandpass filter plate (for example Thorlabs companies of Germany life
The FB19M series filter plates of product, filter plate herein is used for obtaining the THz wave of single-frequency, rather than the filtering in this example
Device), it is f that n frequency is generated respectively1,f2,…fnFrequency range, the wave filter in light path is removed, allow this n frequency range without
Its intensity of detector measurement is used in the case of wave filter respectively；Then wave filter is reapposed, is moved by optical translation platform
Dynamic wave filter makes detector just to a certain filtering film position on wave filter, and now this n centre frequency is f for measurement1,f2,…fn
Frequency range in the intensity detected by detector after wave filter, the intensity point with detector measurement when being not provided with wave filter
Compared after not subtracting noise intensity, it is possible to obtain under the relative position of the wave filter and detector detector to this n frequently
The detectivity C of the THz wave of sectioni1,Ci2,…Cin(i=1,2 ... n).Wave filter is changed with detector by optical translation platform
Relative position so that detector just to the position of different filtering films on wave filter, repeats the above steps, you can obtain one respectively
Group data Cij(i=1,2 ... n) (j=1,2 ... n).This group of data can constitute coefficient matrix C, as follows：
Above-mentioned coefficient matrix C is intrinsic parameter after optical translation platform controls each position of wave filter to determine, that is, filter
After the various default filtering conditions of output of parameter controller, the THz wave spectrometry device has corresponded to a constant coefficient square
Battle array C.
Step 3. is multiplied using Tikhonov regularization method, least mean square algorithm, simulated annealing or alternating direction
Mathematics Optimization Method solution matrix equation (1) of sub- method, and the Tikhonov regularization method, least mean square algorithm,
Smoothing factor is added in simulated annealing, the equation of alternating direction multiplier method, by control between two adjacent solutions away from
From so that resulting THz wave spectral curve is more smoothed, and thus by the solution for matrix equation (1), is obtained to be measured
Each frequency range f in THz wave1,…,fnWatt level P (f1),…,P(fn)：
In formula, i ∈ { 1 ..., n }, j ∈ { 1 ..., n }, CijRepresent and carry out i-th kind in advance for wave filter in parameter controller
If under filtering condition control, fjWhen by with the wave filter is not passed through, detector detects power to the THz wave of frequency range
Value is individually subtracted the ratio after ambient noise.
Using lucky flood promise husband (Tikhonov) regularization method, least mean square algorithm, simulated annealing or alternating side
To Mathematics Optimization Method solution matrix equation (1) of multiplier method, and described lucky flood promise husband (Tikhonov) regularization method,
Smoothing factor is added in least mean square algorithm, simulated annealing, the equation of alternating direction multiplier method, by controlling two phases
The distance between neighbour's solution so that resulting THz wave spectral curve is more smoothed.
Step 4. is directed to P (f1),…,P(fn) carry out curve fitting, and calibrated through wave spectrum, obtain the ripple of THz wave to be measured
Spectral curve.
In practical devices building process, in device the position of each element, size, shape, material property etc. may with most
First design requirement has certain deviation, but after device is carried out, in the case that the control of filtering parameter controller is constant, detection
Device is a fixed value for the detectivity of the THz wave of certain frequency, can in advance be measured the detectivity and be obtained by experiment
Obtain the coefficient matrix of device.In addition, during equation group is solved, THz wave intensity that detector is collected and to not
The detectivity of the THz wave of same frequency is all measured value.Due to reasons such as measurement errors, equation group actually ill-conditioned linear systems,
Quantity along with equation in equation group is more, with commonsense method solution more hard to find, and lucky flood promise husband (Tikhonov) canonical of use
The Mathematics Optimization Methods such as change method, least mean square algorithm, simulated annealing, alternating direction multiplier method solve the system of linear equations
Obvious distortion can be eliminated and solving speed is fast, equation group can be obtained corresponding to each frequency range of THz wave to be measured after solving
Normalization wave spectrum intensity, finally carries out the spectral profile that wave spectrum calibration is just restored.Calculating process above can be using meter
Calculate processing unit is carried out automatically, and parameter controller can be automatically controlled simultaneously further with calculation processing unit, from
And realize automatic quickly THz wave spectrometry.
Above-mentioned THz wave spectrometry device application and measuring method based on filter effect, avoid using Fourier transformation
Method, therefore without first obtain the Time Domain Spectrum of THz wave to be measured, it is not required that use mechanical delay arrangement, its structure and light
Road is relatively simple, and whole design structure is easy to make, and selectable material category is various, thus whole device cost
It is relatively low；And for the filter unit corresponding to various default filtering conditions, THz wave is in each outgoing of filter unit
In all directions of position and outgoing, wave spectrum is transmitted with identical, they are all by identical filter action, it is possible to increase
The stability of spectral measurement, and if using scattering, interference, diffraction method, due to different frequencies electromagnetic wave through dissipating
Penetrate, interfere, after diffraction, with different scatterings, interference, the distribution of diffraction wave angle, even if a parameter controller wherein
Under output condition, in the different parts and the different angles of outgoing of light-splitting device, the THz wave for being transmitted all has difference
Wave spectrum；Moreover, the designed THz wave spectrometry device based on filter effect, compared to existing terahertz time-domain ripple
Spectrometry device volume is smaller, and portability is greatly improved.In addition, the designed THz wave spectrometry based on filter effect
The measuring method of device, the method that Terahertz wave spectrum is restored by solving equations so that spectrum recovering scope and resolution ratio are no longer
Limited by mechanical device moving range and femto-second laser repetition rate, therefore resolution ratio is higher, spectrum recovering wider range.
Embodiments of the present invention are explained in detail above in conjunction with accompanying drawing, but the present invention is not limited to above-mentioned implementation
Mode, in the ken that those of ordinary skill in the art possess, can also be on the premise of present inventive concept not be departed from
Make a variety of changes.
Claims (10)
1. a kind of THz wave spectrometry device based on filter effect, it is characterised in that：Controlled including wave filter, filtering parameter
Device, detector and calculation processing unit；THz wave to be measured is received by a detector after being filtered effect via wave filter；Its
In, filtering parameter controller carries out various default filtering condition controls for wave filter, by wave filter respectively in various default filters
Effect is filtered for THz wave to be measured so that under the conditions of ripple from the terahertz of wave filter outgoing under the default filtering condition of difference
Hereby the wave spectrum of ripple is different；Detector is used to detect and obtains under different default filtering conditions from wave filter outgoing THz wave
Power；Calculation processing unit is used for the result of detection of pick-up probe, and carries out data analysis and process.
2. a kind of THz wave spectrometry device based on filter effect according to claim 1, it is characterised in that：Also include
THz wave collimator apparatus, after the THz wave to be measured is converted into parallel beam via THz wave collimator apparatus, re-incident
To in the wave filter, wherein, the THz wave collimator apparatus includes two confocal THz wave lens, and is arranged at
Aperture between two THz wave lens at common focus.
3. a kind of THz wave spectrometry device based on filter effect according to any one in claim 1 to 2, it is special
Levy and be：The filtering parameter controller is regulated and controled by electric-field intensity, magnetic field intensity regulates and controls, sound field intensity regulates and controls, mechanical strength
Regulation and control, or above control measures combination, various default filtering conditions controls are carried out for the wave filter, by wave filter point
Be not filtered for THz wave to be measured under various default filtering conditions, obtain respectively correspond to various default filtering conditions,
Mutually different each THz wave of wave spectrum each other.
4. a kind of THz wave spectrometry device based on filter effect according to claim 3, it is characterised in that：The filter
Ripple device includes each filter unit with different filtering transmissison characteristics, and the filtering parameter controller carries out electricity for wave filter
Control machinery modulation, switches each filter unit and is located on the propagation path of THz wave to be measured respectively, realizes that wave filter exists respectively
To the different filter actions of THz wave to be measured under various default filtering conditions, obtain respectively correspond to various default filtering conditions,
Mutually different each THz wave of wave spectrum each other.
5. a kind of THz wave spectrometry device based on filter effect according to claim 4, it is characterised in that：The filter
Wave parameter controller includes optical translation platform, and the wave filter also includes substrate, and each filter unit distribution is arranged on base
On bottom, substrate is arranged on optical translation platform, and optical translation platform carries out electric-controlled mechanical modulation for substrate, switches each filtering single
Unit respectively positioned at THz wave to be measured propagation path on, realize wave filter respectively under various default filtering conditions to it is to be measured too
The different filter actions of Hertz wave, obtain and correspond to various default filtering conditions, each other mutually different each terahertz of wave spectrum respectively
Hereby ripple.
6. a kind of THz wave spectrometry device based on filter effect according to claim 4, it is characterised in that：The filter
Wave parameter controller includes stepper motor and wheel disc substrate, and described each filter unit is distributed centered on the axle center of wheel disc substrate
It is arranged in wheel disc substrate, drive end and the wheel disc substrate of stepper motor are connected, and stepper motor carries out electricity for wheel disc substrate
Control machinery modulation, controls wheel disc substrate with its axle center as axle is rotated, and switches each filter unit and is located at terahertz to be measured respectively
Hereby on the propagation path of ripple, realize that different filtering of the wave filter respectively to THz wave to be measured under various default filtering conditions are made
With acquisition corresponds to various default filtering conditions, each other mutually different each THz wave of wave spectrum respectively.
7. a kind of THz wave spectrometry device based on filter effect according to claim 4, it is characterised in that：It is described each
Individual filter unit is each filtering film each other with different THz wave absorption characteristics；Or described each filter unit is
Each resonant frequency selection face with different Terahertz wave spectrum transmissison characteristics, sets respectively on each resonant frequency selection face each other
Put the resonant element of periodic distribution.
8. a kind of THz wave spectrometry device based on filter effect according to claim 3, it is characterised in that：The filter
Ripple device is Terahertz magnetic control wave filter, and the filtering parameter controller is magnetic field modulator, and magnetic field modulator is directed to Terahertz magnetic
Control wave filter carries out magnetic field intensity modulation, realizes that wave filter enters under various default filtering conditions for THz wave to be measured respectively
Row filter action, obtains and corresponds to various default filtering conditions, each other mutually different each THz wave of wave spectrum respectively.
9. the measurement of the THz wave spectrometry device of filter effect is based in a kind of 1-8 based on claim described in any one
Method, it is characterised in that comprise the following steps：
The frequency range that the detector to be detected is divided into step 1. frequency range that n frequency range is Δ f, each frequency range difference
With its centre frequency f1,…,fnIt is marked；
Filtering parameter controller described in step 2. carries out n kinds and presets for the filter action of wave filter correspondence THz wave to be measured
Filtering condition is controlled so that detector separately detects acquisition wave filter under the default filtering condition control of n kinds, for terahertz to be measured
Hereby ripple is filtered the power of THz wave after effect, that is, detect and obtain n THz wave power, then be individually subtracted environment and make an uproar
Sound, updates the n THz wave power P obtained under the default filtering condition control of n kinds1,…,Pn；
Step 3. obtains each frequency range f in THz wave to be measured by solution matrix equation (1)1,…,fnWatt level P
(f1),…,P(fn)：
In formula, i ∈ { 1 ..., n }, j ∈ { 1 ..., n }, CijRepresent and carry out i-th kind of default filter for wave filter in parameter controller
Under the control of ripple condition, fjWhen by with the wave filter is not passed through, detector detects performance number point to the THz wave of frequency range
The ratio after ambient noise is not subtracted；
Step 4. is directed to P (f1),…,P(fn) carry out curve fitting, and calibrated through wave spectrum, the wave spectrum for obtaining THz wave to be measured is bent
Line.
10. a kind of measuring method of the THz wave spectrometry device based on filter effect, its feature according to claim 9
It is：In the step 3, using Tikhonov regularization method, least mean square algorithm, simulated annealing or alternating direction
Mathematics Optimization Method solution matrix equation (1) of multiplier method, and calculated in the Tikhonov regularization method, lowest mean square
Smoothing factor is added in method, simulated annealing, the equation of alternating direction multiplier method, by between two adjacent solutions of control
Distance so that resulting THz wave spectral curve is more smoothed.
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Cited By (7)
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| CN114355463B (en) * | 2021-12-30 | 2024-04-26 | 中国科学院沈阳自动化研究所 | Method and system for detecting and sensing sound by using terahertz waves |
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