CN106762713A - Vertical compound runoff molecular pump - Google Patents
Vertical compound runoff molecular pump Download PDFInfo
- Publication number
- CN106762713A CN106762713A CN201710137353.XA CN201710137353A CN106762713A CN 106762713 A CN106762713 A CN 106762713A CN 201710137353 A CN201710137353 A CN 201710137353A CN 106762713 A CN106762713 A CN 106762713A
- Authority
- CN
- China
- Prior art keywords
- wheel
- quiet
- runoff
- pumping
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/10—Centrifugal pumps for compressing or evacuating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
A kind of vertical compound runoff molecular pump, including the pump barrel that upper end is open, the side wall of pump barrel offers air inlet and exhaust outlet, and runoff pumping cells are provided with pump barrel, and runoff pumping cells include rotor, quiet wheel and dynamic sealing, the driving wheel of two flat round plate-likes is installed with rotor, two driving wheels are parallel and interval setting, and between two driving wheels, quiet wheel be arranged in parallel quiet wheel with two driving wheels, the lower section of the underlying driving wheel of dynamic sealing, quiet wheel and dynamic sealing are fixedly arranged on the side wall of pump barrel；One group of turbine blade row is provided with the outside of driving wheel above, turbine blade row is evacuated from top to bottom；Quiet wheel is provided with some pumping grooves being made up of spiral blade, and dividing plate is not provided with the middle part of quiet wheel.Because vertical compound runoff molecular pump can simultaneously be evacuated from the top of pump barrel and side wall, and dividing plate is not provided with the middle part of quiet wheel, therefore, the pumping speed of runoff molecular pump is higher by traditional runoff molecular pump about 80%, and compressed capability improves about 50%.
Description
Technical field
The invention belongs to Attained Vacuum Technique field, more particularly to a kind of vertical compound runoff molecular pump.
Background technology
Patent ZL201620118209.2 provides a kind of vertical compound runoff molecular pump（Abbreviation radial flow pump）, the radial flow pump
Have the advantages that simple structure, energy consumption are low and have middle and high vavuum pump duality capability concurrently, however, there is also following shortcoming：
1. the air inlet of the radial flow pump is each provided at the side of pump barrel, causes air inlet open area without increased space, limits runoff
The raising of pumping speed；
2. dividing plate is provided with the middle part of the quiet wheel of the radial flow pump, the pumping speed of gas is influenceed；
3. the pumping slot length of the radial flow pump is shorter, limits the raising of radial flow pump compressed capability.
The content of the invention
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, there is provided a kind of pumping speed and compressed capability of improving
Vertical compound runoff molecular pump.
The present invention is achieved in that a kind of vertical compound runoff molecular pump, including the open pump barrel in upper end, the pump barrel
Side wall offer air inlet and exhaust outlet, be provided with runoff pumping cells in the pump barrel, the runoff pumping cells include turning
Sub, quiet wheel and dynamic sealing, are installed with the driving wheel of two flat round plate-likes on the rotor, driving wheel described in two is parallel and interval setting, institute
Quiet wheel is stated between driving wheel described in two, the quiet wheel be arranged in parallel with driving wheel described in two, the underlying institute of dynamic sealing
The lower section of driving wheel is stated, the quiet wheel and dynamic sealing are fixedly arranged on the side wall of the pump barrel；
One group of turbine blade row is provided with the outside of the driving wheel above, the turbine blade row is evacuated from top to bottom；
The quiet wheel is provided with some pumping grooves being made up of spiral blade, and dividing plate is not provided with the middle part of the quiet wheel.
Further, the pumping groove is made up of three parts, wherein, the part near the air inlet of the pumping groove is the
A part, the center section of the pumping groove is Part II, and the Part II is circular passage, near the pumping groove
The part of gas outlet is Part III.
The vertical compound runoff molecular pump that the present invention is provided has the following advantages that：
1. the pumping speed about 80% of vertical compound runoff molecular pump is improved；
2. the compressed capability about 50% of vertical compound runoff molecular pump is improved.
Brief description of the drawings
In order to illustrate more clearly of technical scheme, letter will be made to the accompanying drawing to be used needed for embodiment below
Singly introduce, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for the common skill in this area
For art personnel, on the premise of not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of the pump barrel of the vertical compound runoff molecular pump that the embodiment of the present invention one is provided.
Fig. 2 is the sectional view along the A-A directions in Fig. 1.
Fig. 3 is the sectional view of the vertical compound runoff molecular pump that the embodiment of the present invention one is provided.
Fig. 4 is the structural representation of the quiet wheel of the vertical compound runoff molecular pump that the embodiment of the present invention one is provided.
Fig. 5 is the structural representation of the quiet wheel of the vertical compound runoff molecular pump that the embodiment of the present invention two is provided.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described.
Embodiment one
As shown in Figures 1 to 4, the open pump of the vertical compound runoff molecular pump of one kind provided in an embodiment of the present invention, including upper end
Cylinder 11, the side wall of pump barrel 11 offers air inlet 12 and exhaust outlet（It is not shown）, runoff pumping cells are provided with pump barrel 11, the footpath
Stream pumping cells include rotor 13, quiet wheel 14 and dynamic sealing 15, and the driving wheel 16 of two flat round plate-likes, two driving wheels are installed with rotor 13
16 parallel and interval settings, between two driving wheels 16, quiet wheel 14 be arranged in parallel quiet wheel 14 with two driving wheels 16, and dynamic sealing 15 is located at
The lower section of the driving wheel 16 of lower section, quiet wheel 14 and dynamic sealing 15 are fixedly arranged on the side wall of pump barrel 11；
The outside of driving wheel 16 above is provided with one group of turbine blade row 17, and turbine blade row 17 is evacuated from top to bottom；
Quiet wheel 14 is provided with some pumping grooves 141 being made up of spiral blade, and the middle part of quiet wheel 14 is not provided with dividing plate.Due to quiet
The middle part of wheel 14 is not provided with dividing plate, so as to improve the pumping speed of gas.
The operation principle of the runoff molecular pump of the present embodiment one is as follows：
（1）The air inlet 12 of the present embodiment one is located at the side wall of pump barrel 11, and the gas in the outside of pump barrel 11 is successively through the He of air inlet 12
Pumping groove 141 is evacuated to the lower section of runoff pumping cells.
（2）Simultaneously as the upper end of pump barrel 11 of the present embodiment one is opening, bleed-off passage is added in the top of pump barrel 11,
The gas of the top of pump barrel 11 is evacuated under runoff pumping cells through the opening above it, turbine blade row 17 and pumping groove 141 successively
Side.
In sum, because the runoff molecular pump of the present embodiment one can simultaneously be evacuated from the top of pump barrel 11 and side wall,
And the middle part of quiet wheel 14 is not provided with dividing plate, therefore, the pumping speed of runoff molecular pump is higher by traditional runoff molecular pump about 80%.In addition, this
The runoff molecular pump of embodiment one also has the advantages that simple structure and low cost of manufacture.
Embodiment two
As shown in figure 5, the structure of the present embodiment two is roughly the same with the structure of embodiment one, its difference is：This implementation
The pumping groove 241 of the quiet wheel 24 of example two is made up of three parts, wherein, it is first near the part of the air inlet of pumping groove 241
Divide 2411, the center section for being evacuated groove 241 is Part II 2412, Part II 2412 is circular passage, is close to and is evacuated groove 241
Gas outlet part be Part III 2413.Compared with the pumping slot structure of existing quiet wheel, the quiet wheel 24 of the present embodiment two
Pumping groove 241 increased the Part II 1412 of circular passage, so as to increased the effective length of pumping groove 241, improve
The compressed capability of runoff molecular pump about 50%.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (2)
1. a kind of vertical compound runoff molecular pump, it is characterised in that including the pump barrel that upper end is open, the side wall of the pump barrel is opened up
There are air inlet and exhaust outlet, runoff pumping cells are provided with the pump barrel, the runoff pumping cells include rotor, quiet wheel and move
Sealing, is installed with the driving wheel of two flat round plate-likes on the rotor, driving wheel described in two is parallel and interval setting, and the quiet wheel is located at two
Between the driving wheel, the quiet wheel be arranged in parallel with driving wheel described in two, the lower section of the underlying driving wheel of dynamic sealing,
The quiet wheel and dynamic sealing are fixedly arranged on the side wall of the pump barrel；
One group of turbine blade row is provided with the outside of the driving wheel above, the turbine blade row is evacuated from top to bottom；
The quiet wheel is provided with some pumping grooves being made up of spiral blade, and dividing plate is not provided with the middle part of the quiet wheel.
2. vertical compound runoff molecular pump according to claim 1, it is characterised in that：The pumping groove is by three part groups
Into, wherein, it is Part I near the part of the air inlet of the pumping groove, the center section of the pumping groove is second
Point, the Part II is circular passage, and the part near the gas outlet of the pumping groove is Part III.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710137353.XA CN106762713B (en) | 2017-03-09 | 2017-03-09 | Vertical compound runoff molecular pump |
| PCT/CN2018/078511 WO2018161948A1 (en) | 2017-03-09 | 2018-03-09 | Vertical composite radial flow molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710137353.XA CN106762713B (en) | 2017-03-09 | 2017-03-09 | Vertical compound runoff molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106762713A true CN106762713A (en) | 2017-05-31 |
| CN106762713B CN106762713B (en) | 2018-12-14 |
Family
ID=58961948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710137353.XA Expired - Fee Related CN106762713B (en) | 2017-03-09 | 2017-03-09 | Vertical compound runoff molecular pump |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106762713B (en) |
| WO (1) | WO2018161948A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107400857A (en) * | 2017-09-18 | 2017-11-28 | 储琦 | Low-carbon, oil-free evaporating and coating equipment |
| CN107489605A (en) * | 2017-09-18 | 2017-12-19 | 储昕 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
| WO2018161948A1 (en) * | 2017-03-09 | 2018-09-13 | 储继国 | Vertical composite radial flow molecular pump |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009287573A (en) * | 2009-09-09 | 2009-12-10 | Shimadzu Corp | Turbo molecular pump and method for predicting breakdown thereof |
| CN101852199A (en) * | 2009-03-31 | 2010-10-06 | 储继国 | Composite vacuum pump |
| CN202417970U (en) * | 2012-01-04 | 2012-09-05 | 李晨 | Vertical squirrel-cage molecular pump |
| CN104806535A (en) * | 2015-03-26 | 2015-07-29 | 储继国 | Complex radial flow pump, combined radial flow pump and air extraction system |
| CN105545767A (en) * | 2016-02-08 | 2016-05-04 | 储继国 | Vertical runoff vacuum pump |
| CN105765231A (en) * | 2013-11-12 | 2016-07-13 | 厄利孔莱博尔德真空有限责任公司 | Rotor device for a vacuum pump, and vacuum pump |
| CN205401171U (en) * | 2016-02-08 | 2016-07-27 | 储继国 | Vertical runoff vacuum pump |
| EP3088745A1 (en) * | 2015-04-27 | 2016-11-02 | Pfeiffer Vacuum Gmbh | Rotor assembly for a vacuum pump and vacuum pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090081031A1 (en) * | 2007-09-26 | 2009-03-26 | Koopman Dennis E | Vertical vapor compressor |
| CN106762713B (en) * | 2017-03-09 | 2018-12-14 | 苏州摩星真空科技有限公司 | Vertical compound runoff molecular pump |
-
2017
- 2017-03-09 CN CN201710137353.XA patent/CN106762713B/en not_active Expired - Fee Related
-
2018
- 2018-03-09 WO PCT/CN2018/078511 patent/WO2018161948A1/en active Application Filing
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101852199A (en) * | 2009-03-31 | 2010-10-06 | 储继国 | Composite vacuum pump |
| JP2009287573A (en) * | 2009-09-09 | 2009-12-10 | Shimadzu Corp | Turbo molecular pump and method for predicting breakdown thereof |
| CN202417970U (en) * | 2012-01-04 | 2012-09-05 | 李晨 | Vertical squirrel-cage molecular pump |
| CN105765231A (en) * | 2013-11-12 | 2016-07-13 | 厄利孔莱博尔德真空有限责任公司 | Rotor device for a vacuum pump, and vacuum pump |
| CN104806535A (en) * | 2015-03-26 | 2015-07-29 | 储继国 | Complex radial flow pump, combined radial flow pump and air extraction system |
| EP3088745A1 (en) * | 2015-04-27 | 2016-11-02 | Pfeiffer Vacuum Gmbh | Rotor assembly for a vacuum pump and vacuum pump |
| CN105545767A (en) * | 2016-02-08 | 2016-05-04 | 储继国 | Vertical runoff vacuum pump |
| CN205401171U (en) * | 2016-02-08 | 2016-07-27 | 储继国 | Vertical runoff vacuum pump |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018161948A1 (en) * | 2017-03-09 | 2018-09-13 | 储继国 | Vertical composite radial flow molecular pump |
| CN107400857A (en) * | 2017-09-18 | 2017-11-28 | 储琦 | Low-carbon, oil-free evaporating and coating equipment |
| CN107489605A (en) * | 2017-09-18 | 2017-12-19 | 储昕 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
| WO2019052131A1 (en) * | 2017-09-18 | 2019-03-21 | 储昕 | Low-carbon oil-free vacuum air pump unit with high pumping speed |
| CN107489605B (en) * | 2017-09-18 | 2019-07-12 | 储昕 | Low-carbon, oil-free big pumping speed vacuum suction unit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106762713B (en) | 2018-12-14 |
| WO2018161948A1 (en) | 2018-09-13 |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181214 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |