CN106757335A - A kind of polysilicon crystal technique - Google Patents

A kind of polysilicon crystal technique Download PDF

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Publication number
CN106757335A
CN106757335A CN201611083415.5A CN201611083415A CN106757335A CN 106757335 A CN106757335 A CN 106757335A CN 201611083415 A CN201611083415 A CN 201611083415A CN 106757335 A CN106757335 A CN 106757335A
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Prior art keywords
silicon
polysilicon
state
liquid
mass fraction
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CN201611083415.5A
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Chinese (zh)
Inventor
赵建军
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Anhui Electric Group Shares Co ltd
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Anhui Electric Group Shares Co ltd
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Priority to CN201611083415.5A priority Critical patent/CN106757335A/en
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B28/00Production of homogeneous polycrystalline material with defined structure
    • C30B28/04Production of homogeneous polycrystalline material with defined structure from liquids
    • C30B28/06Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

The present invention relates to field of polysilicon technology, especially a kind of polysilicon crystal technique;The crystallization processes include:When the silicon material in ingot furnace is in the state of the concurrent of solid-state silicon and liquid-state silicon, maintain the temperature of ingot furnace inner top, after after solid-state silicon fine melt, temperature to room temperature is gradually reduced with the speed of 5 10 DEG C/min, so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, 60 mesh are crushed to, carry out pickling, dried after cleaning, obtain product polysilicon;Due to just carrying out crystallization treatment to liquid-state silicon when silicon material is in solidliquid mixture state in the present invention, hereby it is ensured that the temperature of the liquid-state silicon in every ingot furnace is basically identical, also ensure that the latent heat contained by liquid-state silicon is consistent, so that the crystallization rate of liquid-state silicon is stable, improve the crystalline stability of liquid-state silicon.Meanwhile, the crystallization processes of the polysilicon in the present invention have process is simple, the characteristics of production efficiency is high.

Description

A kind of polysilicon crystal technique
Technical field
The present invention relates to field of polysilicon technology, especially a kind of polysilicon crystal technique.
Background technology
With developing rapidly for photovoltaic industry, polycrystalline silicon ingot or purifying furnace is because its production capacity is high, the product quality stability of production is high The features such as, it is used widely in photovoltaic generation industry.
When producing polycrystal silicon ingot in the prior art, when silicon material is in the melting stage, it is necessary to when silicon material is completely melt into After liquid-state silicon, then the processing step for being crystallized.When the bulk temperature of the liquid-state silicon in ingot furnace is higher, there is more diving Heat, so that the crystallization rate of polycrystal silicon ingot is slow, and in the presence of the phenomenon melted again after receiving a crime report.Simultaneously as every casting Latent heat in ingot stove contained by liquid-state silicon is inconsistent, and the crystallization rate for thus resulting in liquid-state silicon is unstable, crystalline stability is poor so that The performance of the solar battery sheet that polycrystal silicon ingot is made has differences.
The content of the invention
The purpose of the present invention is:Overcome deficiency of the prior art, there is provided a kind of crystallization rate stabilization, crystalline stability are good Polysilicon crystal technique.
To achieve the above object, the technical solution adopted by the present invention is as follows:
A kind of polysilicon crystal technique, the crystallization processes include:When the silicon material in ingot furnace is in solid-state silicon and liquid-state silicon During the state of concurrent, the temperature of ingot furnace inner top is maintained, after after solid-state silicon fine melt, progressively dropped with the speed of 5-10 DEG C/min Low temperature is to room temperature so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, is crushed to 60 mesh, carries out pickling, is dried after cleaning It is dry, obtain product polysilicon.
Preferably, the acid during the pickling operation is 2% hydrofluoric acid from mass fraction and mass fraction is 5% The mixture of hydrochloric acid, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:1.5-3.
Preferably, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:1.8- 2.8。
Preferably, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:2.4.
Preferably, the pickling operation is to be sprayed at after acid mist on pending polysilicon.
Preferably, the drying temperature during drying operation is 180-240 DEG C.
Preferably, the drying temperature is 190-220 DEG C.
Preferably, the drying temperature is 200 DEG C.
Beneficial effect using technical scheme is:
Due to just carrying out crystallization treatment to liquid-state silicon when silicon material is in solidliquid mixture state in the present invention, hereby it is ensured that every The temperature of the liquid-state silicon in ingot furnace is basically identical, also ensures that the latent heat contained by liquid-state silicon is consistent, so that liquid-state silicon Crystallization rate stabilization, the crystalline stability that improve liquid-state silicon.Meanwhile, the crystallization processes of the polysilicon in the present invention have technique Simply, the characteristics of production efficiency is high.
Specific embodiment
With reference to specific embodiment, the invention will be further described.
Embodiment 1
A kind of polysilicon crystal technique, including:When the silicon material in ingot furnace is in the state of the concurrent of solid-state silicon and liquid-state silicon When, the temperature of ingot furnace inner top is maintained, after after solid-state silicon fine melt, temperature to room is gradually reduced with the speed of 5-10 DEG C/min Temperature so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, is crushed to 60 mesh, carries out pickling, dries after cleaning, obtains product Polysilicon.
Wherein, the hydrochloric acid that the acid during pickling operation is 2% hydrofluoric acid from mass fraction and mass fraction is 5% Mixture, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:1.5.
Wherein, pickling operation is to be sprayed at after acid mist on pending polysilicon.
Wherein, drying temperature during drying operation is 180 DEG C.
By purity analysis, Boron contents are 0.1ppm to the polysilicon that the present embodiment is obtained, and phosphorus content is 0.1ppm, and calcium contains Amount is less than 0.03, and iron content is less than 0.03, reaches the requirement of solar energy level silicon.The conversion ratio of polycrystal silicon cell reaches 17.2%.
Embodiment 2
A kind of polysilicon crystal technique, including:When the silicon material in ingot furnace is in the state of the concurrent of solid-state silicon and liquid-state silicon When, the temperature of ingot furnace inner top is maintained, after after solid-state silicon fine melt, temperature to room is gradually reduced with the speed of 5-10 DEG C/min Temperature so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, is crushed to 60 mesh, carries out pickling, dries after cleaning, obtains product Polysilicon.
Wherein, the hydrochloric acid that the acid during pickling operation is 2% hydrofluoric acid from mass fraction and mass fraction is 5% Mixture, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:1.8.
Wherein, pickling operation is to be sprayed at after acid mist on pending polysilicon.
Wherein, drying temperature during drying operation is 190 DEG C.
By purity analysis, Boron contents are 0.1ppm to the polysilicon that the present embodiment is obtained, and phosphorus content is 0.1ppm, and calcium contains Amount is less than 0.03, and iron content is less than 0.03, reaches the requirement of solar energy level silicon.The conversion ratio of polycrystal silicon cell reaches 17.4%.
Embodiment 3
A kind of polysilicon crystal technique, including:When the silicon material in ingot furnace is in the state of the concurrent of solid-state silicon and liquid-state silicon When, the temperature of ingot furnace inner top is maintained, after after solid-state silicon fine melt, temperature to room is gradually reduced with the speed of 5-10 DEG C/min Temperature so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, is crushed to 60 mesh, carries out pickling, dries after cleaning, obtains product Polysilicon.
Wherein, the hydrochloric acid that the acid during pickling operation is 2% hydrofluoric acid from mass fraction and mass fraction is 5% Mixture, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:2.4.
Wherein, pickling operation is to be sprayed at after acid mist on pending polysilicon.
Wherein, drying temperature during drying operation is 200 DEG C.
By purity analysis, Boron contents are 0.1ppm to the polysilicon that the present embodiment is obtained, and phosphorus content is 0.1ppm, and calcium contains Amount is less than 0.03, and iron content is less than 0.03, reaches the requirement of solar energy level silicon.The conversion ratio of polycrystal silicon cell reaches 17.6%.
Embodiment 4
A kind of polysilicon crystal technique, including:When the silicon material in ingot furnace is in the state of the concurrent of solid-state silicon and liquid-state silicon When, the temperature of ingot furnace inner top is maintained, after after solid-state silicon fine melt, temperature to room is gradually reduced with the speed of 5-10 DEG C/min Temperature so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, is crushed to 60 mesh, carries out pickling, dries after cleaning, obtains product Polysilicon.
Wherein, the hydrochloric acid that the acid during pickling operation is 2% hydrofluoric acid from mass fraction and mass fraction is 5% Mixture, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:2.8.
Wherein, pickling operation is to be sprayed at after acid mist on pending polysilicon.
Wherein, drying temperature during drying operation is 220 DEG C.
By purity analysis, Boron contents are 0.1ppm to the polysilicon that the present embodiment is obtained, and phosphorus content is 0.1ppm, and calcium contains Amount is less than 0.03, and iron content is less than 0.03, reaches the requirement of solar energy level silicon.The conversion ratio of polycrystal silicon cell reaches 17.3%.
Embodiment 5
A kind of polysilicon crystal technique, including:When the silicon material in ingot furnace is in the state of the concurrent of solid-state silicon and liquid-state silicon When, the temperature of ingot furnace inner top is maintained, after after solid-state silicon fine melt, temperature to room is gradually reduced with the speed of 5-10 DEG C/min Temperature so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, is crushed to 60 mesh, carries out pickling, dries after cleaning, obtains product Polysilicon.
Wherein, the hydrochloric acid that the acid during pickling operation is 2% hydrofluoric acid from mass fraction and mass fraction is 5% Mixture, the volume ratio of the hydrochloric acid that the mass fraction is 2% hydrofluoric acid and mass fraction is 5% is 1:3.
Wherein, pickling operation is to be sprayed at after acid mist on pending polysilicon.
Wherein, drying temperature during drying operation is 240 DEG C.
By purity analysis, Boron contents are 0.1ppm to the polysilicon that the present embodiment is obtained, and phosphorus content is 0.1ppm, and calcium contains Amount is less than 0.03, and iron content is less than 0.03, reaches the requirement of solar energy level silicon.The conversion ratio of polycrystal silicon cell reaches 17.2%.
Embodiment 3 is preferred embodiment.
With above-mentioned according to desirable embodiment of the invention as enlightenment, by above-mentioned description, relevant staff completely may be used Without departing from the scope of the technological thought of the present invention', to carry out various changes and amendments.The technical model of this invention Enclose the content being not limited on specification, it is necessary to its technical scope is determined according to right.

Claims (8)

1. a kind of polysilicon crystal technique, it is characterised in that:The crystallization processes include:When the silicon material in ingot furnace is in solid-state During the state of the concurrent of silicon and liquid-state silicon, the temperature of ingot furnace inner top is maintained, after after solid-state silicon fine melt, with 5-10 DEG C/min Speed gradually reduce temperature to room temperature so that the liquid-state silicon crystallizes to form polycrystal silicon ingot again, is crushed to 60 mesh, carries out acid Wash, dried after cleaning, obtain product polysilicon.
2. a kind of polysilicon crystal technique according to claim 1, it is characterised in that:Acid during the pickling operation From the hydrofluoric acid that mass fraction is 2% and the mixture of hydrochloric acid that mass fraction is 5%, the mass fraction is 2% hydrofluoric acid It is 1 with the volume ratio of the hydrochloric acid that mass fraction is 5%:1.5-3.
3. a kind of polysilicon crystal technique according to claim 2, it is characterised in that:The mass fraction is 2% hydrogen fluorine Acid is 1 with the volume ratio of the hydrochloric acid that mass fraction is 5%:1.8-2.8.
4. a kind of polysilicon crystal technique according to claim 3, it is characterised in that:The mass fraction is 2% hydrogen fluorine Acid is 1 with the volume ratio of the hydrochloric acid that mass fraction is 5%:2.4.
5. a kind of polysilicon crystal technique according to claim 1, it is characterised in that:The pickling operation is by acid mist It is sprayed at afterwards on pending polysilicon.
6. a kind of polysilicon crystal technique according to claim 1, it is characterised in that:Drying temperature during the drying operation Spend is 180-240 DEG C.
7. a kind of polysilicon crystal technique according to claim 6, it is characterised in that:The drying temperature is 190-220 ℃。
8. a kind of polysilicon crystal technique according to claim 7, it is characterised in that:The drying temperature is 200 DEG C.
CN201611083415.5A 2016-11-30 2016-11-30 A kind of polysilicon crystal technique Pending CN106757335A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101671026A (en) * 2009-09-29 2010-03-17 包头市山晟新能源有限责任公司 Pickling impurity removal method and equipment and method and system for purifying polysilicon
CN101844768A (en) * 2010-05-20 2010-09-29 厦门大学 Method for removing phosphorus and boron from metallurgical-grade silicon
CN101935041A (en) * 2010-09-13 2011-01-05 大连隆田科技有限公司 Method for extracting polysilicon through electron beams and acid washing
CN102134075A (en) * 2011-01-24 2011-07-27 云南乾元光能产业有限公司 Novel method for producing solar-grade polysilicon
CN102701212A (en) * 2012-05-17 2012-10-03 华南师范大学 Method for removing boron and phosphorus and purifying industrial silicon by using metallurgic method
CN102757050A (en) * 2011-04-27 2012-10-31 日鑫(永安)硅材料有限公司 Acid cleaning purification method of metallic silicon
CN103693648A (en) * 2013-12-03 2014-04-02 中国科学院过程工程研究所 Method for enhancing wet-process chemical impurity removal of industrial silicon

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101671026A (en) * 2009-09-29 2010-03-17 包头市山晟新能源有限责任公司 Pickling impurity removal method and equipment and method and system for purifying polysilicon
CN101844768A (en) * 2010-05-20 2010-09-29 厦门大学 Method for removing phosphorus and boron from metallurgical-grade silicon
CN101935041A (en) * 2010-09-13 2011-01-05 大连隆田科技有限公司 Method for extracting polysilicon through electron beams and acid washing
CN102134075A (en) * 2011-01-24 2011-07-27 云南乾元光能产业有限公司 Novel method for producing solar-grade polysilicon
CN102757050A (en) * 2011-04-27 2012-10-31 日鑫(永安)硅材料有限公司 Acid cleaning purification method of metallic silicon
CN102701212A (en) * 2012-05-17 2012-10-03 华南师范大学 Method for removing boron and phosphorus and purifying industrial silicon by using metallurgic method
CN103693648A (en) * 2013-12-03 2014-04-02 中国科学院过程工程研究所 Method for enhancing wet-process chemical impurity removal of industrial silicon

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