CN106757330A - A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot - Google Patents
A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot Download PDFInfo
- Publication number
- CN106757330A CN106757330A CN201611153781.3A CN201611153781A CN106757330A CN 106757330 A CN106757330 A CN 106757330A CN 201611153781 A CN201611153781 A CN 201611153781A CN 106757330 A CN106757330 A CN 106757330A
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- Prior art keywords
- crucible
- graphite
- cover plate
- carbon
- heater
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot, including body of heater, heat-insulation cage is installed in body of heater, directional solidification base is installed in heat-insulation cage, silica crucible is installed on directional solidification base, graphite protective plate is installed in the surrounding of silica crucible, crucible cover plate is installed above graphite protective plate, also include the graphite gas sleeve pipe through body of heater, heat-insulation cage and crucible cover plate, graphite heater above crucible cover plate is installed on graphite gas sleeve pipe, wedge-shaped gas operated device is installed in the crucible cover plate bottom.The present invention below crucible cover plate by installing wedge-shaped gas operated device, eliminate the path of vortex, unimpeded passage can be provided for inert gas, the gases such as carbon monoxide, carbon dioxide and the silicon monoxide that will effectively can be produced in casting process are promptly taken away, the nonmetallic inclusion carbon and the content of oxygen that can be effectively reduced in polycrystalline silicon ingot casting, improve the quality of product.
Description
Technical field
The present invention relates to a kind of improved structure of crucible, a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot is specifically referred to.
Background technology
In recent years, because casting polysilicon has the advantages such as low cost, low energy consumption compared with pulling of silicon single crystal, it is increasingly becoming main
Photovoltaic material, its market share also increasingly increases.But because heater, heat-insulation cage and graphite protective plate etc. are big during ingot casting
The use of carbon material is measured, a large amount of carbon impurities are introduced, under high temperature, graphite member and oxygen, silica crucible etc. occur thermal chemical reaction, produce
The gases such as raw CO and SiO are entered in silicon melt by internal gas flow, are easily melt silicon absorption, so that carbon oxygen impurities are introduced, most
Cause have carbon and oxygen content higher in polysilicon eventually, in conventional foundry ingot the concentration of silicon ingot oxygen be 1 × 1017/cm3~1 ×
1018/cm3, it is in hypersaturated state mainly to exist with gap state.The heat treatment from high temperature to low temperature is experienced due to casting ingot process
Process, if oxygen concentration is too high to be easy for forming Thermal donor or oxygen precipitation, as complex centre or introduce complex centre it is secondary
Defect, causes minority carrier lifetime reduction in silicon materials, directly influences the photoelectric transformation efficiency of solar cell.In addition oxygen with
Boron atom acts on to be formed B-O pairs, also results in the reduction of efficiency of solar cell；Concentration of carbon is up to 1 × 1017/cm3 or even super
Cross solid solubility of the carbon in silicon（4×1017/cm3）.Carbon impurity can produce grown-in oxygen precipitates as the formation core of oxygen precipitation,
And the carbon of high concentration can form SiC particulate in silicon melt, the effective rate of utilization of silicon ingot is influenceed.Therefore low-carbon (LC) low oxygen content is prepared
Casting polycrystal silicon ingot realizes that low-cost high-efficiency has great importance for polycrystalline silicon solar cell.
In the prior art, the silica crucible that the backplate that graphite material is made can be made with silica occurs instead at high temperature
Carbonaceous gas, such as carbon monoxide and carbon monoxide should be produced, the gas that these are produced is in existing silica crucible and backplate, lid
In the structure of plate, the surface of silicon liquid can be flowed through, vortex be produced in the top of silicon melt, when the presence of vortex causes pernicious gas long
Between rest on inside silica crucible, the action time with silicon melt is more long so that carbon and oxygen are adsorbed and dissolve in silicon liquid, from
And cause the content of carbon in the silicon ingot for growing and oxygen high.
The content of the invention
It is an object of the invention to provide a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot, inert gas is solved in silicon melt
Top produce vortex, the presence of vortex causes pernicious gas to rest on inside silica crucible for a long time, causes the silicon for growing
The content of carbon and oxygen in ingot problem high, reaches the purpose of the phosphorus content and oxygen content that reduce product.
The purpose of the present invention is achieved through the following technical solutions：
A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot, including body of heater, are provided with heat-insulation cage in body of heater, are provided with heat-insulation cage
Directional solidification base, silica crucible is provided with directional solidification base, and graphite protective plate is provided with the surrounding of silica crucible,
Graphite protective plate top is provided with crucible cover plate, also including the graphite gas sleeve pipe through body of heater, heat-insulation cage and crucible cover plate,
Graphite heater above crucible cover plate is installed on graphite gas sleeve pipe, wedge is installed in the crucible cover plate bottom
Shape gas operated device.Be incorporated into outside inertia source of the gas in silica crucible by graphite gas sleeve pipe, and inert gas is discharged in silicon melt
And crucible cover plate between, by installing wedge-shaped gas operated device below crucible cover plate, wedge-shaped gas operated device is centered around graphite gas
The surrounding of ferrule openings, eliminates the path of vortex, can provide unimpeded passage for inert gas, can effectively by casting
During the gas such as the carbon monoxide, carbon dioxide and the silicon monoxide that produce promptly take away, so as to substantially reduce above-mentioned gas
The probability that body enters in melt silicon, the nonmetallic inclusion carbon and the content of oxygen that can be effectively reduced in polycrystalline silicon ingot casting is improved
The quality of product, and design simple, with low cost, it is with existing ingot furnace compatible good, it is adapted to product industrialized production
Popularization on a large scale.The structure of wedge-shaped gas operated device generally has two kinds：
The first：The wedge-shaped gas operated device is formed by connecting by the riser and swash plate perpendicular to crucible cover plate, and riser is located at far
From one end of graphite gas sleeve pipe.The wedge-shaped gas operated device cross section of this structure is triangular in shape, on the whole into triangle body, by four
Individual wedge-shaped gas operated device is centered around the surrounding at graphite gas ferrule openings, and according to symmetrical formal distribution, inert gas enters
Slowly moved along swash plate afterwards, it is to avoid inert gas forms vortex at graphite gas ferrule openings.
Second：The wedge-shaped gas operated device includes being arranged on graphite gas ferrule openings end and perpendicular to crucible cover plate
Annular slab, is connected with cone plate on annular slab, and the cone that cone plate is constituted is coaxial with graphite gas sleeve pipe.This kind of wedge of structure
The effect of shape gas operated device is identical with the first, is using the guide function of swash plate, it is to avoid the velocity variations of gas are excessive to be caused
Vortex, effectively blocking vortex approach.
The wedge-shaped gas operated device is made up of High-Purity Molybdenum.Further, wedge-shaped gas operated device is made using High-Purity Molybdenum, is had
Fusing point is high, heat-transfer effect is good, be difficult softening transform and the advantage of volatilization, and will not produce pollution to ingot casting.
The present invention compared with prior art, has the following advantages and advantages：
A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot of 1 present invention, by installing wedge-shaped gas operated device, wedge below crucible cover plate
Shape gas operated device is centered around the surrounding of graphite gas ferrule openings, eliminates the path of vortex, can be provided freely for inert gas
The gases such as logical passage, carbon monoxide, carbon dioxide and the silicon monoxide that will effectively can be produced in casting process are rapid
Take away, so as to substantially reduce above-mentioned gas into the probability in melt silicon, can be effectively reduced non-in polycrystalline silicon ingot casting
The content of metal impurities carbon and oxygen, improves the quality of product；
A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot of 2 present invention, is made wedge-shaped gas operated device, with fusing point using High-Purity Molybdenum
It is high, heat-transfer effect is good, be difficult softening transform and the advantage of volatilization, and will not produce pollution to ingot casting；
A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot of 3 present invention, designs simple, with low cost, simultaneous with existing ingot furnace
Capacitive is good, is adapted to produce the popularization on a large scale of industrialized production.
Brief description of the drawings
Fig. 1 is schematic structural view of the invention；
Fig. 2 is present invention wedge shape gas operated device structure enlarged diagram.
Mark and corresponding parts title in accompanying drawing：
1- bodies of heater, 2- heat-insulation cages, 3- elevating screws, 4- lowering or hoisting gears, 5- graphite gas sleeve pipes, 6- graphite heaters, 7- crucibles
Cover plate, 8- graphite protective plates, 9- silica crucibles, 10- silicon melts, 11- directional solidification bases, 12- heat insulation bottom boards, 13- pillars, 14-
Wedge-shaped gas operated device, 15- inertia sources of the gas.
Specific embodiment
With reference to embodiment, the present invention is described in further detail, but embodiments of the present invention not limited to this.
Embodiment
As shown in Fig. 1 to 2, a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot of the present invention, including body of heater 1, the peace in body of heater 1
Equipped with heat-insulation cage 2, lowering or hoisting gear 4 is connected with heat-insulation cage 2, lowering or hoisting gear 4 realizes the liter of heat-insulation cage 2 by elevating screw 3
Drop, the bottom of heat-insulation cage 2 is to be provided with directional solidification base 11, the bottom of directional solidification base 11 in heat insulation bottom board 12, heat-insulation cage 2
Portion is supported by the pillar 13 through heat insulation bottom board 12, silica crucible 9 is provided with directional solidification base 11, in silica crucible 9
What portion took up is silicon melt 10, and graphite protective plate 8 is provided with the surrounding of silica crucible 9, and the height of graphite protective plate 8 is more than quartzy earthenware
The height of crucible 9, crucible cover plate 7 is provided with the top of graphite protective plate 8, and crucible cover plate 7 is fixed on graphite gas sleeve pipe 5, graphite
Gas sleeve pipe 5 passes through body of heater 1, heat-insulation cage 2 and crucible cover plate 7, and graphite gas sleeve pipe 5 is by outside inertia source of the gas 15 and stone
The connection of the inside of English crucible 9, is provided with the graphite heater 6 positioned at the top of crucible cover plate 7, in crucible on graphite gas sleeve pipe 5
The bottom of cover plate 7 is provided with wedge-shaped gas operated device 14, and wedge-shaped gas operated device 14 is connected by the riser perpendicular to crucible cover plate 7 and swash plate
Form, and riser is located remotely from one end of graphite gas sleeve pipe 5, used as the structure replaced, wedge-shaped gas operated device 14 includes installing
In the openend of graphite gas sleeve pipe 5 and perpendicular to the annular slab of crucible cover plate 7, cone plate, cone plate are connected with annular slab
The cone of composition is coaxial with graphite gas sleeve pipe 5.
The above, is only presently preferred embodiments of the present invention, not does any formal limitation to the present invention, it is every according to
According to any simple modification, the equivalent variations made to above example in technical spirit of the invention, guarantor of the invention is each fallen within
Within the scope of shield.
Claims (4)
1. a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot, including body of heater（1）, in body of heater（1）Heat-insulation cage is inside installed（2）, every
Hot cage（2）Directional solidification base is inside installed（11）, in directional solidification base（11）On silica crucible is installed（9）,
Silica crucible（9）Surrounding graphite protective plate is installed（8）, in graphite protective plate（8）Top is provided with crucible cover plate（7）, also include
Through body of heater（1）, heat-insulation cage（2）And crucible cover plate（7）Graphite gas sleeve pipe（5）, in graphite gas sleeve pipe（5）Upper peace
Equipped with positioned at crucible cover plate（7）The graphite heater of top（6）, it is characterised in that：In the crucible cover plate（7）Bottom is provided with
Wedge-shaped gas operated device（14）.
2. a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot according to claim 1, it is characterised in that：The wedge-shaped air guide
Device（14）By perpendicular to crucible cover plate（7）Riser and swash plate be formed by connecting, and riser is located remotely from graphite gas sleeve pipe（5）
One end.
3. a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot according to claim 1, it is characterised in that：The wedge-shaped air guide
Device（14）Including installed in graphite gas sleeve pipe（5）Openend and perpendicular to crucible cover plate（7）Annular slab, on annular slab
It is connected with cone plate, the cone that cone plate is constituted and graphite gas sleeve pipe（5）Coaxially.
4. a kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot as claimed in any of claims 1 to 3, its feature exists
In：The wedge-shaped gas operated device（14）It is made up of High-Purity Molybdenum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611153781.3A CN106757330A (en) | 2016-12-14 | 2016-12-14 | A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611153781.3A CN106757330A (en) | 2016-12-14 | 2016-12-14 | A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot |
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| Publication Number | Publication Date |
|---|---|
| CN106757330A true CN106757330A (en) | 2017-05-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611153781.3A Pending CN106757330A (en) | 2016-12-14 | 2016-12-14 | A kind of crucible furnace for preparing low-carbon (LC) hypoxemia silicon ingot |
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| CN (1) | CN106757330A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111850673A (en) * | 2020-07-27 | 2020-10-30 | 江苏协鑫硅材料科技发展有限公司 | Gas stirring device, ingot furnace and using method thereof |
-
2016
- 2016-12-14 CN CN201611153781.3A patent/CN106757330A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111850673A (en) * | 2020-07-27 | 2020-10-30 | 江苏协鑫硅材料科技发展有限公司 | Gas stirring device, ingot furnace and using method thereof |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170531 |