CN106756889A - For the microballoon drive device of microwave plasma environment - Google Patents
For the microballoon drive device of microwave plasma environment Download PDFInfo
- Publication number
- CN106756889A CN106756889A CN201710060502.7A CN201710060502A CN106756889A CN 106756889 A CN106756889 A CN 106756889A CN 201710060502 A CN201710060502 A CN 201710060502A CN 106756889 A CN106756889 A CN 106756889A
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- China
- Prior art keywords
- microballoon
- cavity plate
- disk
- micro
- drive device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4417—Methods specially adapted for coating powder
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
Abstract
The invention discloses a kind of microballoon drive device for microwave plasma environment, being related to the technical scheme of coat preparing technology field, use is：For the microballoon drive device of microwave plasma environment, including driving lever, microballoon disk, vacuum driving motor, copper seat and micro-wave screening cavity plate, driving lever and microballoon disk are quartz glass material, and driving lever is made up of straight-bar and annulus, annulus is used to place microballoon disk, straight-bar connection vacuum driving motor；The top of copper seat sets circular groove, is positioned over the microballoon disk in annulus in circular groove, and the lower section of copper seat is micro-wave screening cavity plate, and copper seat and vacuum driving motor are respectively positioned at the upper and lower sides of micro-wave screening cavity plate.Microballoon drive device is put in microwave plasma CVD system and uses, and vacuum driving motor drives the microballoon random motion in microballoon disk, realizes uniform coating.Microballoon driving device structure is simple, easy to use, it is to avoid interfering between microballoon drive device and microwave electromagnetic field, improves coating quality.
Description
Technical field
The invention belongs to coat preparing technology field, and in particular to one kind can be under microwave plasma environment to microballoon
The microballoon drive device of surface uniform coating.
Background technology
In science or industrial production, particularly, it is necessary to using microwave plasma chemical in inertial confinement fusion research
CVD method the different materials such as the uniform coating diamond in various microballoons (a diameter of grade) surface coating, and to phase
Answering the surface quality of coating has requirement very high.
At present, there is the patent report of the more drive device in microsphere surface coating, such as Authorization Notice No. is
The patent document of CN200998706Y discloses a kind of particle coating vibration apparatus, and fulcrum, the two of swing arm are set on swing arm
End difference connecting eccentric wheel and disk, motor belt motor movable eccentric wheel is rotated makes swing arm be swung back and forth around fulcrum, and band Moving plate swings, real
Existing particle coating.In addition, Authorization Notice No. discloses a kind of three-dimensional tourelle of microballoon for the patent document of CN201030355Y,
Including disk, swing arm, motor, mounting bracket and stepper motor, disk is fixedly connected with the rotary shaft of stepper motor, and motor rotarily drives
Eccentric wheel rotation on electric machine rotational axis, eccentric wheel promotes swing arm to be swung back and forth by axle of pivot pole on mounting bracket, swing arm
Stepper motor is driven to swing back and forth, while stepper motor rotation also drives microballoon rotation, so as to three-dimensional rolling for reaching microballoon applies
Cover.
Although above-mentioned two covering devices for referring to can complete to coat spherical particle outer surface the function of film layer, all because it is tied
Structure feature is incompatible with microwave electromagnetic field, or containing the part to microwave with higher absorption or reflection in device, and cannot
Up to reasons such as more than 700 DEG C of high temperature in tolerance microwave plasma environment, and disturbed strongly between microwave electromagnetic field, so that nothing
Method is applied in microwave plasma environment.
The content of the invention
In order to realize carrying out uniform coating to microsphere surface under microwave plasma environment, coating quality, this hair are improved
A kind of microballoon drive device for microwave plasma environment of bright offer.
The technical solution adopted for the present invention to solve the technical problems is：Microballoon for microwave plasma environment drives
Device, including driving lever, microballoon disk, vacuum driving motor, copper seat and micro-wave screening cavity plate, the driving lever and microballoon disk are quartz
Glass material, driving lever is made up of straight-bar and annulus, and plane where wherein annulus is connected to one end of straight-bar, annulus is mutual with straight-bar
Vertically, the microballoon disk is placed in annulus, the other end of straight-bar connects the vacuum driving motor, and vacuum driving motor is by solid
Fixed rack is installed and fixed；The top of the copper seat sets circular groove, and circular groove top is the annulus of the driving lever, is positioned in annulus
The bottom of microballoon disk is located in circular groove, and the lower section of copper seat is the micro-wave screening cavity plate, and micro-wave screening cavity plate middle part is set installs
Through hole, sets at least one passage in micro-wave screening cavity plate, passage runs through micro-wave screening cavity plate, micro-wave screening cavity plate up and down
On also set up for installing fixed fastening thread hole, the straight-bar of driving lever through micro-wave screening cavity plate passage, the copper seat
With vacuum driving motor respectively positioned at the upper and lower sides of the micro-wave screening cavity plate.
Microballoon drive device for microwave plasma environment needs to be put in microwave plasma CVD system
Used in system, fixed support is connected with the bottom flange of microwave plasma CVD system inner chamber body, by microwave screen
Cavity plate is covered to be placed in microwave plasma CVD system on water-cooled copper seat by installation through-hole, and it is tight by being installed on
Gu, finally with water-cooled copper seat in microwave plasma CVD system be connected copper seat by the screw fastening in screwed hole.
It is further：The internal radius of the driving lever are at least 1.2 times of microballoon disk disk mouthful diameter.
It is further：The microballoon disk inner surface is in parabolic shape or dome shape.
It is further：The diameter with diameter greater than straight-bar of the passage of the micro-wave screening cavity plate, and passage is straight
Footpath is less than 6mm.
It is further：Two are set in the micro-wave screening cavity plate and encloses passage, two circles that two circle passages are formed
It is in concentric circles relation with installation through-hole.
It is further：The copper seat is made up of cylinder step and the cylindrical drum being fixed on cylinder step, cylinder step
Center line with cylindrical drum is mutually coincided, and fillet is provided with cylinder step, and fillet, the top of cylindrical drum are provided with cylindrical drum
The circular groove is set.
It is further：It is connected by contiguous block between the output shaft and the straight-bar of driving lever of the vacuum driving motor, very
The output shaft of empty motor and the straight-bar of driving lever are connected by screw in the two ends of contiguous block respectively.
The beneficial effects of the invention are as follows：Microballoon drive device for microwave plasma environment uses vacuum driving motor
As power source, the regulation and control reciprocating amplitude of vacuum driving machine shaft and speed can be programmed by controller.Move back and forth
Vacuum driving motor output shaft drive driving lever annulus reciprocally swinging and drive microballoon disk to be reciprocatingly slided in circular groove, so as to drive
Microballoon random motion in dynamic microballoon disk.Microballoon driving device structure for microwave plasma environment is simple, easy to use,
Interfering between microballoon drive device and microwave electromagnetic field is avoided, it is right under microwave plasma environment effectively to realize
Microsphere surface carries out uniform coating.
Brief description of the drawings
Fig. 1 is the structural representation of the microballoon drive device that this practicality is used for microwave plasma environment.
Fig. 2 is the structural representation of the driving lever in Fig. 1.
Fig. 3 is the structural representation of the copper seat in Fig. 1.
Fig. 4 is the cross-sectional view of the micro-wave screening cavity plate in Fig. 1.
Fig. 5 is the structural representation of the contiguous block in Fig. 1.
Parts, position and numbering in figure：Driving lever 1, straight-bar 11, annulus 12, microballoon disk 2, vacuum driving motor 3, fixation
Support 31, copper seat 4, circular groove 41, cylinder step 42, cylindrical drum 43, fillet 44, micro-wave screening cavity plate 5, installation through-hole 51, ventilation
Hole 52, fastening thread hole 53, contiguous block 6；Bottom flange 7, water-cooled copper seat 8.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
As shown in figure 1, the present invention for microwave plasma environment microballoon drive device, including driving lever 1, microballoon disk 2,
Vacuum driving motor 3, copper seat 4 and micro-wave screening cavity plate 5.The material of driving lever 1 is to microwave low absorption, low reflection, resistant to elevated temperatures
Quartz glass.As Fig. 2, driving lever 1 are made up of straight-bar 11 and the two parts of annulus 12, wherein annulus 12 is connected to one end of straight-bar 11,
The place plane of annulus 12 is mutually perpendicular to straight-bar 11.Microballoon disk 2 is placed in annulus 12, microballoon disk 2 is used to accommodate microballoon, straight-bar 11
Other end connection vacuum driving motor 3.The internal diameter of annulus 12 is at least 1.2 times of the disk of microballoon disk 2 mouthful diameter.Such as microballoon disk 2
Disk mouthful diameter 30mm, the internal diameter of annulus 12 is 36mm；Or the disk of microballoon disk 2 mouthful diameter 40mm, the internal diameter of annulus 12 is 52mm.Microballoon disk
2 inner surfaces are in parabolic shape or dome shape, and the material of microballoon disk 2 is to microwave low absorption, low reflection, resistant to elevated temperatures high purity quartz
Glass, microballoon disk 2 is consistent with the material of driving lever 1.The bottom of microballoon disk 2 and the good surface contact of circular groove 41.
Specifically, it is connected by contiguous block 6 between the straight-bar 11 of the output shaft of vacuum driving motor 3 and driving lever 1.Such as Fig. 1
And Fig. 3, contiguous block 6 is in cylinder, and the axially arranged radial direction for having through hole, the two ends of contiguous block 6 of contiguous block 6 is respectively arranged with fastening
Screwed hole, fixes the output shaft and straight-bar 11 of vacuum driving motor 3 by screw respectively.Vacuum driving motor 3 is by fixed branch
Frame 31 is installed and fixed.Such as Fig. 1, a round shape ring is set, vacuum driving motor 3 is placed in round shape ring on fixed support 31.
Such as Fig. 1 and Fig. 4, copper seat 4 is made up of cylinder step 42 and the cylindrical drum 43 being fixed on cylinder step 42, cylinder table
The center line of rank 42 and cylindrical drum 43 mutually coincides, and the edge of cylinder step 42 is provided with the fillet 44 for suppressing electric discharge sparking, circle
The edge of column casing 43 is provided with the fillet 44 for suppressing electric discharge sparking, and the circular groove 41 for laying microballoon disk 2 is formed on the top of cylindrical drum 43.
The top of circular groove 41 is the annulus 12 of driving lever 1, and the microballoon disk 2 being positioned in annulus 12 is located at the position of circular groove 41, microballoon disk 2
Top edge is higher than annulus 12, the top of the bottom less than copper seat 4 of microballoon disk 2, it is ensured that the bottom of the microballoon disk 2 being positioned in annulus 12
Portion is located in circular groove 41.
The lower section of copper seat 4 is micro-wave screening cavity plate 5.Such as Fig. 1 and Fig. 5, the middle part of micro-wave screening cavity plate 5 sets installation through-hole
51, installation through-hole 51 is used to install micro-wave screening cavity plate 5 itself.At least one passage 52 is set in micro-wave screening cavity plate 5, is led to
Stomata runs through micro-wave screening cavity plate 5 about 52, to adapt to use requirement of this microballoon drive device in vacuum environment.Such as Fig. 5, micro-
Wave screen is covered and set in cavity plate 5 two circle passages 52, and two circles that two circle passages 52 are formed, i.e., one annulus is logical with installing
Hole 51 is in that the diameter of concentric circles relation, the diameter with diameter greater than straight-bar 11 of passage 52, and passage 52 is less than 6mm.Microwave
Also set up for installing fixed fastening thread hole 53 in shielding cavity plate 5.Passage 52 is except for ventilating, being additionally operable to wear and dialling
Bar 1, the straight-bar 11 of driving lever 1 passes through a passage 52 of micro-wave screening cavity plate 5, copper seat 4 and vacuum driving motor 3 to be located at respectively
The upper and lower sides of micro-wave screening cavity plate 5.
Microballoon drive device needs to be put in microwave plasma CVD system and uses.Such as Fig. 1, microwave etc. from
Daughter chemical gas-phase deposition system includes bottom flange 7 and water-cooled copper seat 8.Wherein, fixed support 31 is connected with bottom flange 7.Microwave
Shielding cavity plate 5 is placed in microwave plasma CVD system on water-cooled copper seat 8 by installation through-hole 51, installation through-hole
51 with diameter greater than water-cooled copper 8 diameter 0.1mm of seat, micro-wave screening cavity plate 5 is tight by the screw being installed in fastening thread hole 53
Gu.Copper seat 4 is connected with water-cooled copper seat 8 in microwave plasma CVD system.
By taking 2mm diameter Mo mandrel microsphere surface deposition of diamond coatings as an example, above-mentioned for microwave plasma environment
Microballoon drive device microballoon disk 2 in be put into five mandrel microballoons, while opening vacuum driving motor 3.Now, mandrel microballoon
Microballoon disk 2 is brought away from the presence of oscillatory forces in certain in a flash a direction tries to get to the heart of a matter and scroll up toward Pan Bi side, then under
Moved with the Pan Bi in another direction toward trying to get to the heart of a matter again in the presence of oscillatory forces and mandrel microballoon self gravitation on one direction, with
The continuity of time, be achieved that mandrel microballoon it is multi-direction in the microballoon disk 2 on random rolling.Because driving lever 1 and microballoon disk 2 are adopted
Made of pure quartz glass, the high temperature up to more than 1100 DEG C can be tolerated, and avoid the reflection and suction to microwave electromagnetic field
Receive.The structure of copper seat 4 it also avoid the interference to microwave electromagnetic field, and vacuum driving motor 3 is located under micro-wave screening cavity plate 5
Side, can be prevented effectively from interfering between microwave electromagnetic field, it is achieved thereby that microwave plasma is steady in microballoon disk 2
Determine, be uniformly distributed, and finally realize the uniform deposition of the microsphere surface coating under microwave plasma environment.
The size according to micro-sphere material, size and quantity adjustment microballoon disk 2 is needed in actual use, adjusts driving lever
The size of 1 annulus 12, and the reciprocating speed of vacuum driving motor 3 and amplitude so that different characteristic in microballoon disk 2
Microballoon can effectively random motion without flying away from microballoon disk 2 because driving force is excessive, it is to avoid microballoon disk 2 is because of motion amplitude mistake
Circular groove 41 that is big and flying away from copper seat 4.During using this microballoon drive device, microwave plasma CVD system need to be installed on
In system.
Claims (7)
1. the microballoon drive device of microwave plasma environment is used for, it is characterised in that：Including driving lever (1), microballoon disk (2), true
Empty motor (3), copper seat (4) and micro-wave screening cavity plate (5), the driving lever (1) and microballoon disk (2) are quartz glass material
Matter, driving lever (1) is made up of straight-bar (11) and annulus (12), and wherein annulus (12) is connected to one end of straight-bar (11), annulus (12)
Place plane is mutually perpendicular to straight-bar (11), and the microballoon disk (2), the other end connection institute of straight-bar (11) are placed in annulus (12)
Vacuum driving motor (3) is stated, vacuum driving motor (3) is installed by fixed support (31) and fixed；Set at the top of copper seat (4)
Circular groove (41) is put, circular groove (41) top is the annulus (12) of the driving lever (1), the microballoon disk (2) being positioned in annulus (12)
Bottom is located in circular groove (41), and the lower section of copper seat (4) is the micro-wave screening cavity plate (5), and micro-wave screening cavity plate (5) middle part is set
Installation through-hole (51), sets at least one passage (52) in micro-wave screening cavity plate (5), passage (52) runs through microwave screen up and down
Cavity plate (5) is covered, is also set up in micro-wave screening cavity plate (5) for installing fixed fastening thread hole (53), the straight-bar of driving lever (1)
(11) through the passage (52) of micro-wave screening cavity plate (5), copper seat (4) and vacuum driving motor (3) are respectively positioned at described
The upper and lower sides of micro-wave screening cavity plate (5).
2. the microballoon drive device of microwave plasma environment is used for as claimed in claim 1, it is characterised in that：The driving lever
(1) annulus (12) internal diameter is at least 1.2 times of microballoon disk (2) disk mouthful diameter.
3. the microballoon drive device of microwave plasma environment is used for as claimed in claim 1, it is characterised in that：The microballoon
Disk (2) inner surface is in parabolic shape or dome shape.
4. the microballoon drive device of microwave plasma environment is used for as claimed in claim 1, it is characterised in that：The microwave
The diameter with diameter greater than straight-bar (11) of the passage (52) of shielding cavity plate (5), and the diameter of passage (52) is less than 6mm.
5. the microballoon drive device for microwave plasma environment as described in claim 1 or 4, it is characterised in that：It is described
Two are set in micro-wave screening cavity plate (5) and encloses passage (52), two circles and installation through-hole that two circles passage (52) are formed
(51) it is in concentric circles relation.
6. the microballoon drive device of microwave plasma environment is used for as claimed in claim 1, it is characterised in that：The copper seat
(4) it is made up of cylinder step (42) and the cylindrical drum (43) being fixed on cylinder step (42), cylinder step (42) and cylindrical drum
(43) center line is mutually coincided, and fillet (44) is provided with cylinder step (42), and fillet (44) is provided with cylindrical drum (43),
The top of cylindrical drum (43) sets the circular groove (41).
7. the microballoon drive device of microwave plasma environment is used for as claimed in claim 1, it is characterised in that：The vacuum
It is connected by contiguous block (6) between the output shaft of motor (3) and the straight-bar (11) of driving lever (1), vacuum driving motor (3)
The straight-bar (11) of output shaft and driving lever (1) is connected by screw in the two ends of contiguous block (6) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710060502.7A CN106756889B (en) | 2017-01-25 | 2017-01-25 | Microballoon driving device for microwave plasma environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710060502.7A CN106756889B (en) | 2017-01-25 | 2017-01-25 | Microballoon driving device for microwave plasma environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106756889A true CN106756889A (en) | 2017-05-31 |
| CN106756889B CN106756889B (en) | 2019-06-18 |
Family
ID=58942008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710060502.7A Active CN106756889B (en) | 2017-01-25 | 2017-01-25 | Microballoon driving device for microwave plasma environment |
Country Status (1)
| Country | Link |
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| CN (1) | CN106756889B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4859493A (en) * | 1987-03-31 | 1989-08-22 | Lemelson Jerome H | Methods of forming synthetic diamond coatings on particles using microwaves |
| CN205635767U (en) * | 2016-04-25 | 2016-10-12 | 昆明理工大学 | A remove sample platform for microwave plasma chemical vapor deposition equipment |
| CN206418197U (en) * | 2017-01-25 | 2017-08-18 | 中国工程物理研究院激光聚变研究中心 | Microballoon drive device for microwave plasma environment |
-
2017
- 2017-01-25 CN CN201710060502.7A patent/CN106756889B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4859493A (en) * | 1987-03-31 | 1989-08-22 | Lemelson Jerome H | Methods of forming synthetic diamond coatings on particles using microwaves |
| CN205635767U (en) * | 2016-04-25 | 2016-10-12 | 昆明理工大学 | A remove sample platform for microwave plasma chemical vapor deposition equipment |
| CN206418197U (en) * | 2017-01-25 | 2017-08-18 | 中国工程物理研究院激光聚变研究中心 | Microballoon drive device for microwave plasma environment |
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| Publication number | Publication date |
|---|---|
| CN106756889B (en) | 2019-06-18 |
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