CN106735869A - For the contactless localization method of laser vision of numerically controlled processing equipment - Google Patents

For the contactless localization method of laser vision of numerically controlled processing equipment Download PDF

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Publication number
CN106735869A
CN106735869A CN201611190614.6A CN201611190614A CN106735869A CN 106735869 A CN106735869 A CN 106735869A CN 201611190614 A CN201611190614 A CN 201611190614A CN 106735869 A CN106735869 A CN 106735869A
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China
Prior art keywords
numerically controlled
processing equipment
controlled processing
anchor point
video camera
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CN201611190614.6A
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CN106735869B (en
Inventor
杨建平
周晖
曹生珠
陈学康
吴敢
王瑞
尚凯文
张凯锋
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Lanzhou Institute of Physics of Chinese Academy of Space Technology
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Lanzhou Institute of Physics of Chinese Academy of Space Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Numerical Control (AREA)

Abstract

The invention discloses the contactless localization method of laser vision for numerically controlled processing equipment, due to mainly including:The picture signal of workpiece to be processed in field range is obtained by the travel mechanism of multiaxis NC maching equipment and the capturing function of ccd video camera and image collecting function, and coordinate value of the software direct access workpiece anchor point in coordinate system of machine is operated by numerically controlled processing equipment, the positional information of workpiece to be processed is provided for follow-up digital control processing;So as to realize that positioning precision is high, the fast advantage of locating speed.

Description

For the contactless localization method of laser vision of numerically controlled processing equipment
Technical field
The present invention relates to multiaxis NC maching field of locating technology, in particular it relates to be used for the laser of numerically controlled processing equipment Vision non-contact type localization method.
Background technology
Computerized Numerical Control processing technology is increasingly widely used in industry-by-industry, and its basic point is using Digital Control skill The various accurate travel mechanisms of art control, treating rapidoprint with energy beams such as cutter or laser carries out digital control processing. It is important that to carry out position determination to workpiece to be processed in NC Machining Process, essence is to allow numerical control device to determine to treat Processing accurate location and state of the workpiece in the numerically controlled processing equipment range of work, with ensure process safety reliably carry out and The precision of processing.Such as:Before carrying out curved surface pattern etching processing with laser three-D lithography equipment, workpiece need to be determined first Position, the accurate location of workpiece is determined so as to process equipment, determines original position direction of etched features etc..For workpiece to be processed Positioning, have many technologies and method, but the workpiece that pollutes or damage is easier for some, it is necessary to take special Method carries out contactless positioning.
The content of the invention
It is an object of the present invention to regarding to the issue above, propose contactless for the laser vision of numerically controlled processing equipment Localization method, with the advantage realized.
To achieve the above object, the technical solution adopted by the present invention is:Laser vision for numerically controlled processing equipment non-connects Touch localization method, mainly includes:
Step 1:Ccd video camera is moved to by workpiece to be processed anchor point top by the travel mechanism of multiaxis NC maching equipment, Witness marker is set to be located within ccd video camera field range, adjustment X, Y-axis moving mechanism determine the anchor point in digital control processing X, Y-axis coordinate in equipment machine coordinate system;
Step 2:Using the image of the acquisition anchor point of ccd video camera, the picture signal that will be obtained by image pick-up card is converted It is data signal, passes to computer;
Step 3:By computer software module, regulation laser ablation processing is DST values apart from deviation value, adjusts ccd video camera With anchor point in the distance of Z-direction, finally determine that the anchor point is sat in the Z axis in the coordinate system of machine of numerically controlled processing equipment Mark;
Step 4:X, Y, Z coordinate of the direct access anchor point in coordinate system of machine in the operation software of numerically controlled processing equipment Value.
Further, the travel mechanism of the numerically controlled processing equipment is specially the mobile control machine of three-dimensional laser etching apparatus Structure.
Further, the multiaxis NC maching equipment is five-shaft numerical control process equipment.
Further, DST values described in step 3 is the numerical value close to 0, when DST values are close to 0, the bias of anchor point Also close to 0, the image in ccd video camera field range is also most clear.
The contactless localization method of laser vision for numerically controlled processing equipment of various embodiments of the present invention, due to main bag Include:Regarded by the travel mechanism of multiaxis NC maching equipment and the capturing function of ccd video camera and image collecting function The picture signal of workpiece to be processed in the range of, and obtain workpiece to be processed surface positioning using numerically controlled processing equipment operation software Coordinate value of the point in coordinate system of machine, the positional information of workpiece is provided for follow-up digital control processing;So as to realize that positioning precision is high, The fast advantage of locating speed.
Other features and advantages of the present invention will be illustrated in the following description, also, the partly change from specification Obtain it is clear that or being understood by implementing the present invention.
Below by drawings and Examples, technical scheme is described in further detail.
Brief description of the drawings
Accompanying drawing is used for providing a further understanding of the present invention, and constitutes a part for specification, with reality of the invention Applying example is used to explain the present invention together, is not construed as limiting the invention.In the accompanying drawings:
Fig. 1 is that CCD gathers image visual window and DST values calculate schematic diagram;
Fig. 2 is the relation of DST values and laser ablation processing apart from deviation value;
Fig. 3 a are oscillator figure interlayer relative position schematic diagram in multilayer FSS;
Fig. 3 b are the double-deck FSS for completing laser ablation processing;
Fig. 4 be accurately positioned using laser vision alignment system and double-sided laser etching+chemical attack Compound Machining electricity Propulsion grid assembly.
Specific embodiment
The preferred embodiments of the present invention are illustrated below in conjunction with accompanying drawing, it will be appreciated that preferred reality described herein Apply example to be merely to illustrate and explain the present invention, be not intended to limit the present invention.
Specifically, for the contactless localization method of laser vision of numerically controlled processing equipment, its basic point is using visible Laser beam and video capture device, the numerically controlled processing equipment travel mechanism for coordinating precision, workpiece features are carried out under software cooperation The non-contact measurement positioning of point or anchor point, in order to follow-up digital control processing.
Obtained by the travel mechanism of multiaxis NC maching equipment and the capturing function of ccd video camera and image collecting function The picture signal of workpiece to be processed in field range is obtained, and using software function acquisition workpiece anchor point and the characteristic point of computer Coordinate value in coordinate system of machine, the positional information of workpiece is provided for follow-up digital control processing.
X, Y-axis of the anchor point in coordinate system of machine are determined by X, Y Liang Zhou travel mechanisms of multiaxis NC maching equipment Coordinate, by CCD camera gather indicate laser workpiece to be processed anchor point surface picture signal, regulation ccd video camera with The Z axis distance of workpiece surface anchor point makes DST close to 0(Such as ± 0.02, ± 0.05, ± 0.07 etc.), finally determine anchor point Z axis coordinate in coordinate system of machine;When CCD capture workpiece surfaces indicate laser by amplifying collection image in real time(Amplify Multiple 10 ×), and the cross mark for calculating current DST values is provided with the video window of operation software module.Hot, Blue, green three cross marks represent that the position is the laser ablation processing distance for having set when being completely superposed, now DST values are approached 0, as shown in Figure 1;It is last to directly read the anchor point in numerically controlled processing equipment machine in numerically controlled processing equipment operation software interface X in device coordinate system, Y, Z coordinate.
The non-cpntact measurement localization method of digital control processing is carried out using laser vision alignment system, mainly including following step Suddenly:
(1)First by numerically controlled processing equipment moving control mechanism is by ccd video camera and moves on workpiece to be processed anchor point Side, makes witness marker be located within field range, and adjustment X, Y-axis moving mechanism determine the anchor point in numerically controlled processing equipment X, Y-axis coordinate in coordinate system of machine;
(2)The image for indicating laser on workpiece to be processed anchor point surface is obtained using the capturing function of ccd video camera, and is led to Cross image pick-up card and the picture signal of acquisition is converted into data signal, while passing to computer;
(3)In the contactless positioning system application module of laser vision, by adjusting DST values, adjustment ccd video camera and positioning Point finally determines Z axis coordinate of the anchor point in the coordinate system of machine of numerically controlled processing equipment in the distance of Z-direction(Such as Fig. 2 Shown, when DST values are close to 0, laser ablation processes the bias of distance also close to 0 at anchor point, now in field range Image it is also most clear);
(4)The direct access anchor point is in the coordinate system of machine of data mart modeling equipment in numerically controlled processing equipment operation software X, Y, Z coordinate value.
Compared with the prior art, the invention has the advantages that:
(1)Compared with manual positioning system before, using the precision of laser vision alignment system is higher, speed faster;
(2)Laser vision alignment system is made up of the part such as illumination optical, optical imagery and IMAQ, with reference to image procossing And identification technology, coordinate vision positioning software, image automatic data collection is realized, the purpose being automatically positioned;
(3)The invention belongs to contactless measurement and positioning method, is particularly suited for some works for being easier to pollute or damage Part, with science and the practical potentiality of industry;
(4)Using the accurate positioning function of vision positioning system, multilayer FSS processing, having between each single screen FSS of completion can be carried out Effect cascade.
Embodiment 1:
Multilayer FSS is processed(Fig. 3 a multilayer FSS oscillator figure interlayer relative position schematic diagrames;Fig. 3 b add to complete positioning and etching The double-deck FSS of work):It is fixed by laser vision alignment system before Al/PI film surfaces carry out FSS frequency-selective surfaces processing Position and the method for reserved positioning pin/hole, determine position of the every layer of Al/PI film in coordinate system of machine, it is ensured that by multilayer Al/PI The multilayer FSS oscillator figure interlayers relative position of processing film is accurate, to reach effective cascade of each individual layer FSS, is formed as schemed Hybrid frequency selection surface shown in 3a and Fig. 3 b(Multilayer FSS).By test, multilayer FSS oscillators figure entirety positioning precision And interlayer relative positional accuracy error is within 50 μ ms.
Embodiment 2
In the double-sided laser etching+chemical attack composite manufacturing process of electric propulsion grid assembly surface gate hole, also use sharp Light vision positioning system:By some anchor points of grid assembly surfaces externally and internally, with reference to laser vision alignment system, it is sequentially completed Positioning and grid assembly surfaces externally and internally light of the grid assembly surfaces externally and internally in the coordinate system of machine of laser ablation process equipment The laser ablation processing of resist mask, grid assembly surface gate hole array as shown in Figure 4 is produced finally by chemical attack. By test, gate surface gate hole entirety positioning precision is better than 50 μm, while each gate hole hole wall is steep, smooth, top and bottom grid Hole site dislocation-free, gate hole center line is each perpendicular to gate planar.Innovative point of the present invention is:
1. the invention belongs to contactless measurement and positioning method.By illumination optical, imaging, IMAQ, treatment, laser video Feel that the technologies such as positioning software are combined, realize the automatic data collection of image, automatic positioning function;
2. visual amplifying technique is used, digital control processing focal length and work to be processed are accurately determined by the regulation of software interface DST values The position of part surface anchor point or characteristic point in coordinate system of machine.
Finally it should be noted that:The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, Although being described in detail to the present invention with reference to the foregoing embodiments, for a person skilled in the art, it still may be used Modified with to the technical scheme described in foregoing embodiments, or equivalent is carried out to which part technical characteristic. All any modification, equivalent substitution and improvements within the spirit and principles in the present invention, made etc., should be included in of the invention Within protection domain.

Claims (4)

1. the contactless localization method of laser vision of numerically controlled processing equipment is used for, it is characterised in that comprised the following steps:
Step 1:Ccd video camera is moved to by workpiece to be processed anchor point top by the travel mechanism of multiaxis NC maching equipment, Witness marker is set to be located within ccd video camera field range, adjustment X, Y-axis moving mechanism determine the anchor point in digital control processing X, Y-axis coordinate in equipment machine coordinate system;
Step 2:Using the image of the acquisition anchor point of ccd video camera, the picture signal that will be obtained by image pick-up card is converted It is data signal, passes to computer;
Step 3:By computer software module, regulation laser ablation processing is DST values apart from deviation value, adjusts ccd video camera With anchor point in the distance of Z-direction, finally determine that the anchor point is sat in the Z axis in the coordinate system of machine of numerically controlled processing equipment Mark;
Step 4:X, Y, Z coordinate of the direct access anchor point in coordinate system of machine in the operation software of numerically controlled processing equipment Value.
2. the contactless localization method of the laser vision for numerically controlled processing equipment according to claim 1, its feature exists In the travel mechanism of the numerically controlled processing equipment is specially the moving control mechanism of three-dimensional laser etching apparatus.
3. the laser vision localization method for numerically controlled processing equipment according to claim 2, it is characterised in that described many Shaft and NC Machining Test process equipment is five-shaft numerical control process equipment.
4. the laser vision localization method for numerically controlled processing equipment according to claim 3, it is characterised in that step 3 Described in DST values be numerical value close to 0, when DST values are close to 0, the bias of anchor point is also close to 0, ccd video camera visual field In the range of image it is also most clear.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109848138A (en) * 2018-12-10 2019-06-07 北京电子工程总体研究所 A kind of aiming point Calibration Method of power grid foreign matter laser cleaning plant
CN112599638A (en) * 2020-12-15 2021-04-02 华能新能源股份有限公司 Laser scribing positioning system and method
CN112736477A (en) * 2020-12-14 2021-04-30 兰州空间技术物理研究所 Method for accurately positioning whole double-sided metal film graph of antenna reflector
CN113093650A (en) * 2021-04-14 2021-07-09 曹智军 Data communication method for workpiece visual positioning of numerical control machine tool

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CN101624259A (en) * 2008-07-12 2010-01-13 第一机械股份有限公司 On-line cutting system of display panel and method for manufacturing the display panel by using the system
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CN204818433U (en) * 2015-06-17 2015-12-02 苏州迅镭激光科技有限公司 Take laser -beam welding machine of mirror that shakes
CN105445773A (en) * 2015-11-13 2016-03-30 上海华测导航技术股份有限公司 Non-contact locating method based on multi-sensor assisted RTK

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EP0432912A2 (en) * 1989-12-15 1991-06-19 General Electric Company Injecting a beam into an optical fiber
US20020109775A1 (en) * 2001-02-09 2002-08-15 Excellon Automation Co. Back-lighted fiducial recognition system and method of use
CN101624259A (en) * 2008-07-12 2010-01-13 第一机械股份有限公司 On-line cutting system of display panel and method for manufacturing the display panel by using the system
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109848138A (en) * 2018-12-10 2019-06-07 北京电子工程总体研究所 A kind of aiming point Calibration Method of power grid foreign matter laser cleaning plant
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CN112736477A (en) * 2020-12-14 2021-04-30 兰州空间技术物理研究所 Method for accurately positioning whole double-sided metal film graph of antenna reflector
CN112599638A (en) * 2020-12-15 2021-04-02 华能新能源股份有限公司 Laser scribing positioning system and method
CN113093650A (en) * 2021-04-14 2021-07-09 曹智军 Data communication method for workpiece visual positioning of numerical control machine tool
CN113093650B (en) * 2021-04-14 2023-08-11 曹智军 Data communication method for visual positioning of workpiece of numerical control machine tool

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