CN106735642A - A kind of electric jet mask system of processing and its shower nozzle - Google Patents
A kind of electric jet mask system of processing and its shower nozzle Download PDFInfo
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- CN106735642A CN106735642A CN201710153935.7A CN201710153935A CN106735642A CN 106735642 A CN106735642 A CN 106735642A CN 201710153935 A CN201710153935 A CN 201710153935A CN 106735642 A CN106735642 A CN 106735642A
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- shower nozzle
- water inlet
- electric jet
- processing
- delivery port
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/10—Supply or regeneration of working media
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The invention discloses a kind of electric jet mask processing shower nozzle, including tubular nozzle body, direction is extended along on the side wall of nozzle body be uniformly provided with N number of water inlet, direction is extended along on the opposite side wall of nozzle body be uniformly provided with 2N delivery port, the bearing of trend of delivery port can be perpendicular to region to be processed, and each water inlet projectable is in the middle of corresponding two delivery ports.Electric jet mask processing shower nozzle provided by the present invention, can ensure while the micro-structural for processing has preferable uniformity, ensure that there is the micro-structural for processing simultaneously identical to process pattern, reduce detection difficulty, and, the shower nozzle can simultaneously process multiple regions, can effectively improve processing efficiency.The invention also discloses a kind of electric jet mask system of processing including above-mentioned electric jet mask processing shower nozzle.
Description
Technical field
The present invention relates to electric jet mask manufacture field, more particularly to a kind of electric jet mask processing shower nozzle.Additionally,
The invention further relates to a kind of electric jet mask system of processing including above-mentioned electric jet mask processing shower nozzle.
Background technology
Electric jet mask processing is that one kind occurs " anodic solution " principle in the electrolytic solution based on metal, for printing table
The new technology of the micro- texture of face function, electric jet mask processing has without machining stress, without tool electrode loss, it is high in machining efficiency,
Body structure surface is smooth, workpiece surface will not be deformed and the advantages of heat affected area, material are removed with ion yardstick, therefore non-
The often processing of suitable fine structure, and be increasingly widely applied in fields such as Aero-Space, automobile, machineries.
Electric jet mask system of processing is mainly included:Negative electrode nozzle subsystem, anode clamp subsystem, electrolyte circulation
System and simple digital control platform.From unlike common Electrolyzed Processing:Electric jet mask processing combines photoetching process with electricity
Liquid beam technique, by the way that in workpiece to be processed plated surface last layer mask, the region being covered by the mask on workpiece surface will not be added
Work, exposed part will be processed, and the high accuracy for realizing figure is replicated.
In electric jet mask processing platform, anode clamp system, electrolyte circulation system and numerical control motion platform
Build all relatively easy and to processing effect influence simultaneously little.But, the appearance of negative electrode nozzle system avoids traditional electricity
In solution processing, microelectrode manufacture, the difficulty of assembling make it possible the extensive intensive Surface Texture of manufacture, and electric jet mask adds
Work is excellent without machining stress, without tool electrode loss, high in machining efficiency, energy done with high accuracy graph copying etc. to processing workpiece with it
Point, has vast potential for future development in terms of large-scale surface texture is manufactured.
In the prior art, negative electrode nozzle system generally comprises following several, capillary electrode, and capillary is arranged electrode and is based on
The single injector shower nozzle of electric jet mask processing.
The negative electrode nozzle system of above-mentioned several forms, to a certain extent and under conditions of processing efficiency is less demanding,
Electrolyzed Processing can be effectively completed.However, for capillary electrode, it is resistance to that capillary makees additional one of tool cathode needs
The fixture and capillary of corrosion are more crisp to be not easy clamping, also is difficult to ensure capillary end and workpiece anode in clamping process
Surface is vertical, influences processing effect, additionally, being influenceed by the manufacture of fine capillary, assembling difficulty, is carried out using capillary electrode
Electro-stream machining, it is impossible to process fine Surface Texture and processing efficiency is relatively low;Set simultaneously for capillary row's electrode holder
Meter is complicated and is not easy clamping, it is more difficult to ensure the end of row's electrode in same horizontal line and vertical workpiece anode surface;In addition, by
It is more crisp in capillary, the easy fragmentation of stress, therefore assemble, clamp difficulty and be relatively difficult to ensure card capillary end vertical workpiece anode
Surface and multiple capillary ends are maintained on same horizontal plane, influence processing effect;List based on the processing of electric jet mask
The method that spray-nozzle type sprinkler head is combined using photoetching process with electro-hydraulic beam technique, electrolyte is injected directly on the workpiece for having plated mask
Anode surface, using numerical control motion platform, is swept using a point multichannel, and the processing method swept every time all the way carrys out flyback workpiece surface.
Meanwhile, it is processed using single injector shower nozzle, exist to knife inconvenience, easily influenceed by line, make to walk cutter track
Footpath shifts, cause with micro-pits machining state all the way it is inconsistent, processing efficiency is low and exists at the two ends of machining path
Commutating period is poor so that with the micro- hole for processing all the way, have larger fluctuation on depth, width and processing pattern, it is impossible to
Ensure the uniformity of processing, reduce machining accuracy.
Negative electrode nozzle system of the prior art, jig Design is complicated, and manufacture, clamping are difficult, and processing efficiency is low, processing one
Cause property is poor, it is difficult to extensive to produce the micro- texture in the preferable surface of uniformity, and is unfavorable for carrying out on-line checking to processing structure.
Therefore, the efficiency of electric jet mask processing how is improved, crudy is improved, is that those skilled in the art need at present
The technical problem to be solved.
The content of the invention
It is an object of the invention to provide a kind of electric jet mask processing shower nozzle, the electric jet mask processing shower nozzle can be protected
There is the micro-structural that card is processed simultaneously identical to process pattern, and, it is high in machining efficiency.It is a further object of the present invention to provide
A kind of electric jet mask system of processing including above-mentioned electric jet mask processing shower nozzle.
To achieve the above object, the present invention provides following technical scheme:
A kind of electric jet mask processing shower nozzle, including tubular nozzle body, along it on the side wall of the nozzle body
Bearing of trend is uniformly provided with N number of water inlet, direction is extended along on the opposite side wall of the nozzle body and is uniformly provided with 2N
The mouth of a river, the bearing of trend of the delivery port can be perpendicular to region to be processed, and each described water inlet projectable is in correspondence
Two delivery ports in the middle of.
Preferably, the inner chamber of the nozzle body be in cylindrical type, and the water inlet and the delivery port respectively with institute
State the inner chamber radial direction two ends connection of nozzle body.
Preferably, the water inlet and the delivery port are in cylinder type, and the diameter of each delivery port is identical.
Preferably, the number of the water inlet is at least 2, and the internal diameter of each water inlet is identical.
Preferably, 1.4-1.6 times of the diameter of a diameter of described delivery port of the water inlet.
Preferably, the water inlet is parallel with the bearing of trend of the delivery port.
Preferably, length of the length of the delivery port more than the water inlet.
The present invention also provides a kind of electric jet mask system of processing, including anode clamp subsystem, electrolyte circulation subsystem
System, digital control platform and negative electrode nozzle subsystem, the negative electrode nozzle subsystem include that the electricity described in above-mentioned any one is penetrated
Stream mask processing shower nozzle.
Electric jet mask processing shower nozzle provided by the present invention, including tubular nozzle body, the one of the nozzle body
Direction is extended along on the wall of side and is uniformly provided with N number of water inlet, it is uniform to extend along direction on the opposite side wall of the nozzle body
2N delivery port is provided with, the bearing of trend of the delivery port can be perpendicular to region to be processed, and each described water inlet can
It is projected in the middle of corresponding two delivery ports.The electric jet mask processing shower nozzle, sets by the nozzle body
Put the delivery port of water inlet quantity described in the water inlet and twice, form hole device to hole nozzle structure, also, by by institute
The position for stating water inlet is set to just to two centre positions of the delivery port, it is ensured that the shower nozzle operationally, each institute
State delivery port and just treat machining area so that while the micro-structural for processing has preferable uniformity, it is ensured that at the same processing and
Into micro-structural there is identical to process pattern, also, the shower nozzle can simultaneously process multiple regions, can effectively improve
Processing efficiency.
Electric jet mask system of processing provided by the present invention, is provided with above-mentioned electric jet mask processing shower nozzle, by institute
Stating electric jet mask processing shower nozzle has above-mentioned technique effect, therefore, the electricity for being provided with the electric jet mask processing shower nozzle is penetrated
Stream mask system of processing should also be as with corresponding technique effect.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is electric a kind of structural representation of specific embodiment of jet mask processing shower nozzle provided by the present invention;
Wherein:1- nozzle bodies, 2- water inlets, 3- delivery ports.
Specific embodiment
Core of the invention is to provide a kind of electric jet mask processing shower nozzle, and the electric jet mask processing shower nozzle can be protected
There is the micro-structural of card processing simultaneously identical to process pattern, and, it is high in machining efficiency.Another core of the invention is to provide one
Planting includes the electric jet mask system of processing of above-mentioned electric jet mask processing shower nozzle.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 1 is refer to, Fig. 1 is electric a kind of knot of specific embodiment of jet mask processing shower nozzle provided by the present invention
Structure schematic diagram.
In this embodiment, electric jet mask processing includes nozzle body 1, water inlet 2 and delivery port 3 with shower nozzle.
Wherein, nozzle body 1 is cylindrical in shape, and is internally provided with the cavity of electrolysis liquid flowing, wherein, nozzle body 1
On the side wall of side, N number of water inlet 2, the opposite side of nozzle body 1 are evenly arranged with along the side wall bearing of trend of nozzle body 1
Side wall on be uniformly provided with 2N delivery port 3, the bearing of trend of delivery port 3, the i.e. spray of delivery port 3 along the bearing of trend of the side wall
Water direction can be perpendicular to region to be processed, and each projectable of water inlet 2 is in the middle of corresponding two delivery ports 3, i.e., often
One water inlet 2 corresponds to two delivery ports 3, also, in order to ensure the uniformity in flow field at delivery port 3, each water inlet 2
Projectable is in two centre positions of delivery port 3.
The electric jet mask processing shower nozzle, by setting water inlet 2 and the quantity of twice water inlet 2 in nozzle body 1
Delivery port 3, form hole device to hole nozzle structure, it is only necessary to sealing and a small amount of position of water inlet 2 of fixation, just can obtain twice
The delivery port 3 of quantity, i.e. nozzle, also, be set to just to two centre positions of delivery port 3 by by the position of water inlet 2,
The shower nozzle can be ensured operationally, each delivery port 3 just treats machining area so that while the micro-structural for processing has preferably
Uniformity, it is ensured that while there is the micro-structural for processing identical to process pattern, also, the shower nozzle can process simultaneously
Multiple regions, can effectively improve processing efficiency.
Specifically, the shower nozzle is when in use, as a example by extending by axis direction horizontal positioned and along left and right, water inlet 2 is located at
The top of nozzle body 1, and left and right directions arrangement, delivery port 3 are located at the lower section of nozzle body 1, and left and right directions is arranged,
In the vertical direction, each water inlet 2 two delivery ports 3 of correspondence, also, in the vertical direction, each equal position of water inlet 2
In the centre position of corresponding two delivery ports 3.
The position relationship of above-mentioned shower nozzle, is sprayed water downwards in delivery port 3, and the zone level to be processed of product is placed as
Premise, it is therefore an objective to so that the electrolyte that delivery port 3 is just spraying to the region to be processed of product, i.e. delivery port 3 is perpendicular to product
Region to be processed, certainly, when machine direction changes, the arranged direction of the shower nozzle various pieces can change therewith, but
It is mutual position relationship.
Further, the inner chamber of nozzle body 1 be in cylindrical type, and water inlet 2 and delivery port 3 respectively with nozzle body 1
Inner chamber radial direction two ends connect.Above-mentioned setting, circular cylindrical cavity is most beneficial for the uniformity for ensureing flow field.Need exist for explanation
It is that the cavity shape of nozzle body 1 directly affects the stability in electrolyte flow field, for the outer shape of nozzle body 1, energy
Enough convenient clampings, further restriction is not done herein.
On the basis of the respective embodiments described above, water inlet 2 and delivery port 3 are in cylinder type, and each delivery port 3 is straight
Footpath is identical.Specifically, water inlet 2 is in cylinder type, it is easy to the connection with pipeline, and convenient sealing, delivery port 3 can in cylinder type
To ensure the uniformity of electrolyte, and, it is in order that the processing for obtaining each machining area is consistent that the diameter of each delivery port 3 is identical
Property.
On the basis of the respective embodiments described above, the number of water inlet 2 is at least 2, and each water inlet 2 internal diameter phase
Together, likewise, the diameter of water inlet 2 it is identical be to ensure the uniformity in flow field in the internal cavity of nozzle body 1.
On the basis of the respective embodiments described above, the diameter of water inlet 2 is preferably 1.4-1.6 times of the diameter of delivery port 3,
So that the amount of electrolyte of the amount more than outflow cavity into the electrolyte in cavity, and then cause the cavity in nozzle body 1
Middle formation hyperbaric environment.Most preferably, the diameter of water inlet 2 is set to 1.5 times of the diameter of delivery port 3, certainly, nozzle body
The pressure in cavity in 1 can also be adjusted by installing relief valve, it is to avoid the excessive influence processing effect of pressure at nozzle.
On the basis of the respective embodiments described above, in order to be further ensured that the uniformity of cavity flow field, water inlet 2 and go out
The bearing of trend at the mouth of a river 3 be arranged in parallel, meanwhile, being arranged such can also facilitate opening up for water inlet 2 and delivery port 3.
On the basis of the respective embodiments described above, the length of the length more than water inlet 2 of delivery port 3, i.e., for being formed out
The height of the outlet part at the mouth of a river 3, higher than the height of the water entering section for forming water inlet 2.It is arranged such, delivery port 3 is than water inlet
It is, in order to improve the locality of electrolyte line, electrolyte is more intensively ejected into the surface of anode workpiece that mouth 2 is higher,
Be conducive to reducing lateral erosion.
In the processing of electric jet mask, power cathode is connected on electric jet mask processing shower nozzle, positive source is connected on
On workpiece to be processed, the electric field of stabilization is just formd between the hole device to hole bar shaped shower nozzle and workpiece to be processed, electrolyte is in pump
Driving effect under by water inlet 2 enter nozzle body 1 cavity in, specifically, the cavity of nozzle body 1, water inlet 2 with
And the diameter of delivery port 3 should be equal to outflow nozzle body 1 according to the liquid volume that nozzle body 1 is flowed into guarantor unit's time
Liquid volume and design, the flow field of liquid and electric field stabilization in nozzle body 1 can be kept all the time, while reach high pressure will
Ask.
Specifically, the present embodiment with the number of water inlet 2 be 5, the number of delivery port 3 to be introduced as a example by 10,
As shown in Figure 1.
10 delivery ports 3 form 10 nozzles, 10 diameters of delivery port 3 it is consistent and in the middle of each two delivery port 3 just
5 diameters of water inlet 2 of top are also consistent, the delivery port 3 of shower nozzle vertical workpiece to be processed surface all the time, so in workpiece anode
The preferable and stable flow field of uniformity and electric field can be formed on 10 regions to be processed on surface, it is ensured that while process 10
There is individual micro-structural identical to process pattern, is connected by with numerical control motion platform, make the hole pair based on electric jet mask processing
Bar shaped shower nozzle in hole is realized moving back and forth in process, expands machining area, greatly increases processing efficiency.
Specifically, the shower nozzle is the position by increasing the quantity of delivery port 3 and reasonable Arrangement delivery port 3 so that each
Delivery port 3 just treats machining area, and because the surface in the middle of each two delivery port 3 is provided with a water inlet 2, so that
The line of electro-hydraulic beam by remaining to form preferable uniformity and electric field of stabilization and flow field in 10 delivery ports 3 after the shower nozzle,
10 preferable micro-structurals of uniformity can be simultaneously processed, the manufacture of negative electrode nozzle, assembling difficulty, processing is efficiently solved
The problem that uniformity is poor, processing efficiency is low, promotes electric jet mask to process to manufacture large-scale surface texture and realize online inspection
Processing construction applications direction is surveyed to develop.
The shower nozzle is high in machining efficiency without the complicated fixture of design and convenient mounting and clamping, can be used for manufacture large-scale surface and knits
Structure, and, 10 preferable micro-structurals of uniformity can be simultaneously processed, meanwhile, it is easy to detection processing structure.
The shower nozzle only needs to be completed by using the simple sealing for connecting guarantee shower nozzle the clamping of shower nozzle, meanwhile, lead to
The quantity of delivery port 3 for increasing shower nozzle is crossed, processing efficiency is exponentially improved, simultaneously as carry out electro-hydraulic beam using the shower nozzle adding
Work can guarantee that and meanwhile 10 micro-structurals for processing have identical process pattern, so only needing to measure in detection process
Any one processing pattern in 10 micro-structurals, it is possible to illustrate the processing effect under this machined parameters, effectively drop
The difficulty of low detection, promotes electric jet mask to process to the extensive manufacture micro- texture in surface and realize on-line checking field direction
Development.
In addition to above-mentioned electric jet mask processing shower nozzle, present invention also offers a kind of electric jet mask processing system
System, the electric jet mask system of processing includes anode clamp subsystem, electrolysis liquid cycle subsystem, digital control platform and negative electrode spray
Mouthpiece system, negative electrode nozzle subsystem includes the electric jet mask processing shower nozzle described in the respective embodiments described above, electricity
The other structures of jet mask system of processing refer to prior art, will not be repeated here.
Each embodiment is described by the way of progressive in this specification, and what each embodiment was stressed is and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
Electric jet mask processing provided by the present invention is described in detail with shower nozzle above.Tool used herein
Body example is set forth to principle of the invention and implementation method, and the explanation of above example is only intended to help and understands this hair
Bright method and its core concept.It should be pointed out that for those skilled in the art, not departing from the present invention
On the premise of principle, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into right of the present invention
It is required that protection domain in.
Claims (8)
1. a kind of electric jet mask processing shower nozzle, it is characterised in that including tubular nozzle body (1), the nozzle body (1)
Side wall on extend along direction and be uniformly provided with N number of water inlet (2), prolong along it on the opposite side wall of the nozzle body (1)
Stretch direction and be uniformly provided with 2N delivery port (3), the bearing of trend of the delivery port (3) can be perpendicular to region to be processed, and often
One water inlet (2) projectable is in the middle of corresponding two delivery ports (3).
2. electric jet mask processing shower nozzle according to claim 1, it is characterised in that the nozzle body (1) it is interior
Chamber is in cylindrical type, and the water inlet (2) and the delivery port (3) respectively with the inner chamber of the nozzle body (1) radial direction two
End connection.
3. electric jet mask processing shower nozzle according to claim 1, it is characterised in that the water inlet (2) and described
Delivery port (3) is in cylinder type, and the diameter of each delivery port (3) is identical.
4. electric jet mask processing shower nozzle according to claim 3, it is characterised in that the number of the water inlet (2)
It is at least 2, and the internal diameter of each water inlet (2) is identical.
5. electric jet mask processing shower nozzle according to claim 3, it is characterised in that the diameter of the water inlet (2)
It is 1.4-1.6 times of the diameter of the delivery port (3).
6. electric jet mask processing shower nozzle according to claim 1, it is characterised in that the water inlet (2) and described
The bearing of trend of delivery port (3) is parallel.
7. the electric jet mask processing shower nozzle according to claim 1 to 6 any one, it is characterised in that the water outlet
Length of the length of mouth (3) more than the water inlet (2).
8. a kind of electric jet mask system of processing, including anode clamp subsystem, electrolysis liquid cycle subsystem, digital control platform and
Negative electrode nozzle subsystem, the negative electrode nozzle subsystem includes electric jet mask processing shower nozzle, it is characterised in that the electricity
Jet mask processing shower nozzle is the electric jet mask processing shower nozzle described in claim 1 to 7 any one.
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CN201710153935.7A CN106735642A (en) | 2017-03-15 | 2017-03-15 | A kind of electric jet mask system of processing and its shower nozzle |
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CN201710153935.7A CN106735642A (en) | 2017-03-15 | 2017-03-15 | A kind of electric jet mask system of processing and its shower nozzle |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107052485A (en) * | 2017-06-22 | 2017-08-18 | 广东工业大学 | A kind of cascade shower nozzle processed based on electric jet mask |
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CN204397104U (en) * | 2015-02-02 | 2015-06-17 | 广东工业大学 | Orifice electrode scan-type mask electrolytic machining device |
CN105798407A (en) * | 2016-05-25 | 2016-07-27 | 哈尔滨理工大学 | Wire-electrode cutting machine tool spray nozzle for a plurality of media |
CN106001806A (en) * | 2016-06-12 | 2016-10-12 | 南京航空航天大学 | System and method applied to high-accuracy electrolytic machining of large-area micro-pit arrays |
CN206550456U (en) * | 2017-03-15 | 2017-10-13 | 广东工业大学 | A kind of electric jet mask system of processing and its shower nozzle |
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS52127014U (en) * | 1976-03-24 | 1977-09-27 | ||
US20030140851A1 (en) * | 2002-01-25 | 2003-07-31 | Applied Materials, Inc. | Gas distribution showerhead |
CN102527578A (en) * | 2012-01-11 | 2012-07-04 | 深圳市信宇人科技有限公司 | Novel slit type spray head and spray coating machine head |
CN104191053A (en) * | 2014-07-31 | 2014-12-10 | 广东工业大学 | Method for manufacturing micro-electrolysis cathode movable template |
CN204397104U (en) * | 2015-02-02 | 2015-06-17 | 广东工业大学 | Orifice electrode scan-type mask electrolytic machining device |
CN105798407A (en) * | 2016-05-25 | 2016-07-27 | 哈尔滨理工大学 | Wire-electrode cutting machine tool spray nozzle for a plurality of media |
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CN107052485A (en) * | 2017-06-22 | 2017-08-18 | 广东工业大学 | A kind of cascade shower nozzle processed based on electric jet mask |
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