CN106735199A - For the PMS of laser accurate forming technique - Google Patents
For the PMS of laser accurate forming technique Download PDFInfo
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- CN106735199A CN106735199A CN201611064146.8A CN201611064146A CN106735199A CN 106735199 A CN106735199 A CN 106735199A CN 201611064146 A CN201611064146 A CN 201611064146A CN 106735199 A CN106735199 A CN 106735199A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
- B22F10/32—Process control of the atmosphere, e.g. composition or pressure in a building chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
- B22F10/36—Process control of energy beam parameters
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/80—Data acquisition or data processing
- B22F10/85—Data acquisition or data processing for controlling or regulating additive manufacturing processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/90—Means for process control, e.g. cameras or sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/003—Apparatus, e.g. furnaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
- B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a kind of PMS for laser accurate forming technique, it includes:Oxygen sensor monitoring module, temperature monitoring module, optical monitoring module, powder bed monitoring modular and central control system;Compared with prior art, the present invention has following beneficial effect:1st, the information of more processes is obtained, for being better understood from the phenomenon of laser accurate shaping process;2nd, improving laser precise forming part quality, advantageously reduces inside parts defect;3rd, the closed-loop control of laser accurate forming process is set up, the intellectuality of laser accurate shaping is realized.
Description
Technical field
The present invention relates to a kind of PMS for laser accurate forming technique, belong to laser 3D printing technology neck
Domain.
Background technology
Laser 3D printing Precision Forming Technology is based on three-dimensional CAD model, using special-purpose software to model according to one
Fixed thickness slicing delamination, by slicing delamination data input to precision form printing device.Precision form printing device is understood
After slice of data, using laser beam by powdery metal or plastics etc. can jointing material successively melt printing pile up, it is ultimately constructed
Go out 3D solid product.
Due to being to melt layer by layer and rapid solidification in laser accurate forming process, so part experienced
It is related to orient the complicated thermal evolution course of heat transfer.Some alloy parts can possibly even run into solid-state phase changes repeatedly.This
A little factors cause the analysis to finished product microstructure attribute, with respect to for those parts using traditional approach manufacture, become more
It is complexity, this requires to set up the Process Control System of online, closed loop to ensure the quality of precision form.And current laser
It is as follows to there is shortcoming in precision form equipment prior art:
(1)Current system does not form good closing mainly including aspects such as forming platform temperature, the oxygen contents for shaping cabin
Ring control, when shape platform temperature it is too high, shaping cabin oxygen content it is exceeded go beyond the limit of when, equipment can only automatic pause, do not have
To form closed loop, it is impossible to accomplish effectively control, quality and stability to part cause strong influence;
(2)Before laser accurate shaping, laser power value solidifies and sets.But used or cigarette due to long-time
The problems such as dustiness contaminates, causes laser power weak and hot spot fluctuation is larger, due to that without monitoring and control measure, can make powder
Can not be completely melt, cause inside parts to there is lack of fusion and gas hole defect, so as to have impact on part quality and performance.
(3)Powder bed powder laying flatness after each layer of powdering and whether complete powdering, parts locally high point region is complete
Running down partially lacks at powder thanks to meat, and causing normally smoothly to shape down, so as to have impact on part quality and performance.
The content of the invention
For defect of the prior art, it is an object of the invention to provide a kind of process for laser accurate forming technique
Monitoring system.
The present invention is achieved by the following technical solutions:
The invention provides a kind of PMS for laser accurate forming technique, it includes:
Oxygen sensor monitoring module for monitoring the oxygen content concentration of laser accurate former shaping cabin interior, works as oxygen content
When deviation oversteps the extreme limit, closed-loop control is formed, system can immediately cut off laser, prevent formation of parts from aoxidizing, it is automatic to adjust
Section atmosphere control system regulation shaping cabin interior oxygen content, when oxygen content is less than requiring, system can automatically turn on laser simultaneously
Continue print job;
Temperature monitoring module for detecting forming platform temperature, forming platform can be heated to the temperature of demand before forming,
Platform temperature can be raised when going beyond the limit of in forming process, and central control system can control temperature control module, reduce platform
Temperature, it is ensured that equipment continues to shape and forming quality;
Optical monitoring module for detecting every layer of power situation for reaching powder bed and spot diameter size, central control unit root
Factually actual value is contrasted with setting value, and when deviation goes beyond the limit of deviation, central control unit is by controlled output power and light
Spot is compensated, and is realized in next layer of forming process, it is ensured that every layer of metal dust can be fully melted, so as to ensure that in part
Portion's quality and performance;
Powder bed monitoring modular for shooting the bed situation photo of the powder after each layer of powdering, shoots the powder bed after each layer of powdering
Photo, by the picture data of comparison system Plays, monitoring flatness and whether complete powdering.If flatness is beyond inclined
Powder is not paved with difference or part, central control system control forming platform is motionless, material cylinder lifts one layer of powder highly, powdering
Scraper powdering again, regulation and control flatness is in the range of requiring, or powder will be paved with part, so as to ensure formation of parts
Quality;
And for control the oxygen sensor monitoring module, temperature monitoring module, optical monitoring module, powder bed monitoring modular in
Centre control unit.
Preferably, the oxygen sensor monitoring module includes lambda sensor, purge valve and aeration valve.In metal powder
During last laser fast shaping, the oxygen content in lambda sensor monitoring shaping cabin, it is ensured that oxygen content is less than in cabin
0.05%;When oxygen content is more than 0.05%, central control system can immediately open aeration valve and purge valve, by replacing in cabin
Gas procedure, oxygen content is adjusted to less than 0.05%, it is ensured that forming process safety and forming quality.
Preferably, the temperature monitoring module is to include temperature sensor, cold and hot and air cooling annex.Swashing
Before light precision form, forming platform need to be preheating to demand temperature, during demand temperature to be achieved, can just start shaping, into
During shape, due to heat input effect, forming platform temperature is caused to raise, when temperature sensor monitors forming platform temperature exceedes
During limit deviation ± 5%, central control system starts air cooling annex, gradually by the temperature of forming platform in the range of requiring, no
Influence can be produced on laser accurate shaping.
Preferably, the optical monitoring module is used to monitor the realtime power and light in laser accurate forming process
Learn diameter situation, when power deviation overstep the extreme limit deviation ± 2% or spot diameter deviation exceed ± 3% when, central control system meter
Control adjustment laser power or spot diameter compensation are calculated, and is applied to next layer of printing, it is ensured that at laser power and spot diameter
In in claimed range, being further ensured that powder fully melts the forming quality with part.
Preferably, the powder bed monitoring modular includes ccd video camera and image contrast system.Using CCD at a high speed
Video camera, shoots the photo of the powder bed after each layer of powdering, and the picture data of comparison system Plays is monitored flatness and is
No complete powdering.If flatness is not paved with powder in deviation or part, central control system control forming platform is not
Dynamic, material cylinder lifts one layer of powder highly, powdering scraper powdering again, regulation and control flatness in the range of requiring, or by part
On be paved with powder, so as to ensure the quality of formation of parts.
A kind of monitoring method of the PMS for being as previously described for laser accurate forming technique, it includes following step
Suddenly:
In laser accurate forming process, using the oxygen content in lambda sensor monitoring shaping cabin, when oxygen content is low in cabin
When 0.05%, laser accurate former normal work;When the oxygen content for causing to shape cabin interior for some reason exceedes
When 0.05%, central control system can immediately open aeration valve and purge valve, by substitute mode, by oxygen content quick regulation extremely
Less than 0.05%, be then shut off aeration valve and purge valve, in the process maintenance shaping, it is ensured that forming process safety and
Forming quality.
Before laser accurate shaping, be preheating to for forming platform by central control system temperature, cold and hot of unlatching as requested
It is to be achieved to close cold and hot when requiring temperature it is required that temperature, shaping can be started;In forming process, due to laser heat input
Effect, may cause forming platform temperature constantly to raise, and when platform temperature exceedes requires temperature ± 5%, central control system is opened
Take offence cold annex, quickly the temperature of forming platform is cooled in the range of requirement, reduce platform temperature and laser accurate is shaped
Process and part quality have undesirable effect.
Using the laser power situation in optical detecting module monitoring laser accurate forming process, it is desirable to power swing deviation
It is ± 2%.Power detecting instrument can real-time detection laser accurate shape each layer of power situation, and real time data is passed to
Centre control system, central control system can calculate this layer of average deviation of laser power, when deviation exceedes ± 2%, center control
System processed can adjust next layer of laser power offset, and be applied to next layer of shaping, it is ensured that laser power is in normal model
In enclosing, so as to ensure the stability of laser accurate forming process and part quality;Powder is reached using optical monitoring module simultaneously
Spot diameter size on bed, can pass to central control system by each layer of detection data, and central control system can be calculated
Go out this layer of average deviation of spot diameter, when deviation exceedes ± 3%, central control system can adjust next layer of laser facula
Diameter Equalize value, and it is applied to next layer of shaping, it is ensured that laser spot diameter is in normal range (NR), so as to ensure laser accurate
The stability of forming process and part quality.
Powder bed monitoring modular includes ccd video camera and image contrast system.Using CCD high-speed cameras, each layer is shot
After powdering powder bed photo, the picture data of comparison system Plays, monitoring flatness and whether complete powdering.If flat
Whole degree is not paved with powder in deviation or part, and central control system control forming platform is motionless, and material cylinder lifts one layer of powder
Last height, powdering scraper powdering again, in the range of regulation and control flatness to desired ± 0.02mm, or will be paved with powder on part
End, so as to ensure the quality of formation of parts.
Compared with prior art, the present invention has following beneficial effect:
1st, the information of more processes is obtained, for being better understood from the phenomenon of laser accurate shaping process;
2nd, improving laser precise forming part quality, advantageously reduces inside parts defect;
3rd, the closed-loop control of laser accurate forming process is set up, the intellectuality of laser accurate shaping is realized;
4th, can be with the change of monitor closely process status, for real-time regulation technological parameter provides foundation, it is ensured that technique it is repeatable
The stability of property and quality.
Brief description of the drawings
The detailed description made to non-limiting example with reference to the following drawings by reading, further feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the theory diagram of monitoring system of the invention.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following examples will be helpful to the technology of this area
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that to the ordinary skill of this area
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection domain.
The invention provides a kind of PMS for laser accurate forming technique, it includes:
Oxygen sensor monitoring module for monitoring the oxygen content concentration of laser accurate former shaping cabin interior, manufacturer
It is Beijing Xian Ta nanograms electromechanical technology co., Ltd, model XT0012;
Temperature monitoring module for detecting forming platform temperature, manufacturer is Shanghai Heng Shang precision instruments Co., Ltd, type
Number be HCS410;
The optical monitoring module of every layer of power situation for reaching powder bed and spot diameter size, factory are detected for detection module
Family is Guangzhou Gu Run Electro-optical Technology, INC. (US) 62 Martin Road, Concord, Massachusetts 017, model customization;
Powder bed monitoring modular for shooting the bed situation photo of the powder after each layer of powdering, manufacturer is Nantong Jin Yuan intelligence skills
Art Co., Ltd, the module mainly includes ccd video camera and image contrast system;
And for controlling the oxygen sensor monitoring module, temperature monitoring module, optical monitoring module and powder bed monitoring modular
Central control system.
Preferably, the oxygen sensor monitoring module includes lambda sensor, purge valve and aeration valve.In titanium alloy
During laser fast shaping, it is desirable to shape cabin interior oxygen content less than 0.05%, laser accurate former could start to beat
It is printed as shape.And the oxygen content in lambda sensor module monitors shaping cabin is used, central control system can contain according to real-time oxygen
Amount data are judged, when cabin interior oxygen content is shaped more than 0.05%, can immediately open aeration valve and purge valve, are passed through
The mode of cabin indoor gas is replaced, is quickly adjusted to less than 0.05% oxygen content, it is ensured that forming process safety and morphoplasm
Amount.
Preferably, the temperature monitoring module is to include temperature sensor, cold and hot and air cooling annex.In titanium
Before Alloy by Laser precision form, forming platform need to be preheating to 40 DEG C+5%, central control system starts cold and hot by forming platform
After being heated to require temperature, shaping can be started.In titanium alloy laser accurate forming process, due to the heat that laser is repeatedly scanned with
Input action, may result in forming platform temperature and increases to over requirement, when temperature sensor monitors forming platform temperature exceedes
During limit deviation+5%, central control system starts air cooling annex, and cooling medium is liquid argon, gradually that the temperature of forming platform is cold
But arrive within the temperature range of requiring, influence will not be produced on laser accurate shaping.
Preferably, the optical monitoring module includes power detecting instrument and spectrometer, for monitoring laser accurate
Realtime power situation and spot diameter size in forming process, when power deviation exceed ± 2% or spot diameter deviation exceed ±
When 3%, central control system calculates control adjustment laser power compensation or spot diameter compensation, and is applied to next layer of printing, directly
It is in normal range (NR) to laser power or spot diameter, laser power density is met laser accurate forming requirements, so that really
Powder is protected fully to melt and part forming quality.
Preferably, the powder bed monitoring modular includes ccd video camera and image contrast system.Using CCD at a high speed
Video camera, shoots the photo of the powder bed after each layer of powdering, and the picture data of comparison system Plays is monitored flatness and is
No complete powdering.If flatness is not paved with powder in deviation or part, central control system control forming platform is not
Dynamic, material cylinder lifts one layer of powder highly, powdering scraper powdering again, regulation and control flatness in the range of requiring, or by part
On be paved with powder, so as to ensure the quality of formation of parts.
A kind of monitoring method of the PMS for being as previously described for laser accurate forming technique, as shown in figure 1, its
Comprise the following steps:
First, in laser accurate forming process, using the oxygen content in lambda sensor monitoring shaping cabin, when oxygen content in cabin
During less than 0.05%, laser accurate former normal work;Surpass when the oxygen content for shaping cabin interior is caused for some reason
When 0.05%, central control system can immediately open aeration valve and purge valve, by substitute mode, by oxygen content quick regulation
To less than 0.05%, be then shut off aeration valve and purge valve, in the process maintenance shaping, it is ensured that forming process safety with
And forming quality.
2nd, before laser accurate shaping, central control system temperature as requested opens cold and hot, and forming platform is pre-
Heat is to be achieved to close cold and hot when requiring temperature to requiring temperature, can start to shape;In forming process, due to LASER HEAT
Input action, may cause forming platform temperature constantly to raise, when platform temperature exceedes requires temperature ± 5%, center control system
System starts air cooling annex, and quickly the temperature of forming platform is cooled in the range of requirement, reduces platform temperature to laser accurate
Forming process and part quality have undesirable effect.
3rd, using the laser power situation in optical detecting module monitoring laser accurate forming process, it is desirable to power swing
Deviation is ± 2%.Power detecting instrument meeting real-time detection laser accurate shapes each layer of power situation, and real time data is transmitted
To central control system, central control system can calculate this layer of average deviation of laser power, when deviation exceedes ± 2%, in
Centre control system can adjust next layer of laser power offset, and be applied to next layer of shaping, it is ensured that laser power is in just
In normal scope, so as to ensure the stability of laser accurate forming process and part quality;Arrived using optical monitoring module simultaneously
Spot diameter size up on powder bed, can pass to central control system, central control system meeting by each layer of detection data
This layer of average deviation of spot diameter is calculated, when deviation exceedes ± 3%, central control system can adjust next layer of laser
Spot diameter offset, and it is applied to next layer of shaping, it is ensured that laser spot diameter is in normal range (NR), so as to ensure laser
The stability of precision form process and part quality.
4th, powder bed monitoring modular includes ccd video camera and image contrast system.Using CCD high-speed cameras, shoot each
Layer powdering after powder bed photo, the picture data of comparison system Plays, monitoring flatness and whether complete powdering.If
Flatness is not paved with powder in deviation or part, and central control system control forming platform is motionless, and material cylinder lifts one layer
Highly, powdering scraper powdering again in the range of regulation and control flatness to desired ± 0.02mm, or will be paved with powder to powder on part
End, so as to ensure the quality of formation of parts.
Specific embodiment of the invention is described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can within the scope of the claims make various deformations or amendments, this not shadow
Sound substance of the invention.
Claims (5)
1. a kind of PMS for laser accurate forming technique, it is characterised in that including:
Oxygen sensor monitoring module for monitoring the oxygen content concentration of laser accurate former shaping cabin interior;
Temperature monitoring module for detecting forming platform temperature;
The optical monitoring module of every layer of power situation for reaching powder bed and spot diameter size is detected for detection module;
Powder bed monitoring modular for shooting the bed situation photo of the powder after each layer of powdering;
And for controlling the oxygen sensor monitoring module, temperature monitoring module, optical monitoring module and powder bed monitoring modular
Central control system.
2. the PMS for laser accurate forming technique as described in power requires 1, it is characterised in that oxygen sensing
Monitoring modular, including lambda sensor, purge valve and aeration valve;In metal powder laser Rapid Prototyping Process, lambda sensor
Oxygen content in monitoring shaping cabin, oxygen content is less than 0.05% in cabin;When oxygen content is more than 0.05%, central control system
Aeration valve and purge valve can be immediately opened, by replacing gas procedure in cabin, oxygen content is adjusted to less than 0.05%, it is ensured that
Forming process safety and forming quality.
3. the PMS for laser accurate forming technique as described in power requires 1, it is characterised in that temperature prison
Surveying module includes temperature sensor, cold and hot and air cooling annex;Before laser accurate shaping, need to be preheating to forming platform needs
Temperature is sought, during demand temperature to be achieved, can just start shaping, in forming process, due to heat input effect, cause shaping flat
Platform temperature is raised, and when temperature sensor monitors forming platform temperature oversteps the extreme limit deviation ± 5%, central control system starts gas
Cold annex, gradually by the temperature of forming platform in the range of requiring, will not produce influence to laser accurate shaping.
4. power require 1 as described in the PMS for laser accurate forming technique, it is characterised in that the smooth school superintendent
Surveying module is used to monitor realtime power situation and spot diameter size in laser accurate forming process, exceed when power deviation ±
2% or spot diameter deviation exceed ± 3% when, central control system calculate control adjustment laser power compensation or spot diameter mend
Repay, and be applied to next layer of printing, until laser power or spot diameter are in normal range (NR), meet laser power density
Laser accurate forming requirements, so that it is guaranteed that powder fully melts and part forming quality.
5. the PMS for laser accurate forming technique as described in power requires 1, it is characterised in that powder bed prison
Surveying module includes ccd video camera and image contrast system;Using CCD high-speed cameras, the powder bed after each layer of powdering is shot
Photo, the picture data of comparison system Plays, monitoring flatness and whether complete powdering;If flatness beyond deviation or
Powder is not paved with person's part, central control system control forming platform is motionless, material cylinder lifts one layer of powder highly, powdering scraper
Again powdering, regulates and controls flatness in the range of requiring, or powder will be paved with part, so as to ensure the matter of formation of parts
Amount.
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CN106513677A (en) * | 2016-11-28 | 2017-03-22 | 南通金源智能技术有限公司 | Process monitoring system for laser precision forming technology and monitoring method thereof |
CN112566773A (en) * | 2018-06-13 | 2021-03-26 | 株式会社尼康 | Calculation device, detection system, molding device, calculation method, detection method, molding method, calculation program, detection program, and molding program |
EP3808541A4 (en) * | 2018-06-13 | 2022-05-11 | Nikon Corporation | Computation device, detection system, molding device, computation method, detection method, molding method, computation program, detection program, and molding program |
CN112566773B (en) * | 2018-06-13 | 2024-02-20 | 株式会社尼康 | Computing device, modeling device, computing method, modeling method, and storage medium |
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