CN106735193A - A kind of preparation method of low potassium content molybdenum plate blank - Google Patents
A kind of preparation method of low potassium content molybdenum plate blank Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
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- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/14—Treatment of metallic powder
- B22F1/142—Thermal or thermo-mechanical treatment
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- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Abstract
The invention discloses a kind of preparation method of low potassium content molybdenum plate blank, the method is:Potassium content is evacuated to vacuum in stove and is less than 3 × 10 loaded in flat-bottomed boat, being subsequently placed in vacuum drying oven for the uniform pine of the molybdenum powder of 30ppm~60ppm‑3Pa; vacuum heat is not less than 2h under conditions of being 1200 DEG C~1400 DEG C in temperature; cool down the molybdenum powder ball mill crushing after coming out of the stove; after being sieved through 200 mesh; the molybdenum powder after sieving is pressed into by slab by isostatic cool pressing again; then the slab is sintered under hydrogen atmosphere protection, obtains molybdenum plate blank of the potassium content less than 10ppm.The method of the present invention is simple, and low to ingredient requirement, raw material is easy to get, and production technology is easily controllable, easy to operate, safe and reliable, is suitable to large-scale production, and potassium content can be controlled in below 10ppm in molybdenum plate blank.
Description
Technical field
The invention belongs to molybdenum plate blank processing technique field, and in particular to a kind of preparation method of low potassium content molybdenum plate blank.
Background technology
Molybdenum is that a kind of preparation method of low potassium content molybdenum plate blank has higher boiling and dystectic refractory metal, in steel work
There is extensive purposes in the fields such as industry, nonferrous metallurgy, electronics, electric light source, chemical industry, agricultural.With scientific and technical constantly progressive, molybdenum
Application field constantly expands.
In electron trade, molybdenum titanium sputtering target is mainly used in the electrode and distribution of flat-panel screens, thin-film solar cells
The barrier material of material and semiconductor.These are based on the high-melting-point of molybdenum, high conductivity, relatively low specific impedance, preferably
Corrosion resistance and good environmental-protecting performance.
Target provides material source as the negative electrode in magnetic control sputtering system to prepare deposition film, its institutional framework with
The difference of performance should also have close ties to the institutional framework and performance of film.Technology of the electronic console industry to target
It is required that the main index such as including chemical purity, consistency, crystallite dimension and Size Distribution, crystal grain orientation and distribution of orientations.Molybdenum belongs to
In refractory metal, typically with powder as raw material, relatively compact block materials are prepared into by steps such as compacting, sintering.Molybdenum plate
Base is the most important raw material of various molybdenum target materials, has vital influence, flat-panel monitor to the capability and performance of molybdenum target material
Industry field is increasing to the demand of molybdenum target material, and is also different from common sheet material to the requirement of the physical and chemical index of molybdenum target material,
Particularly there is tighter requirement to the potassium content in molybdenum target material, it is desirable to which potassium content will reach below 10ppm in the molybdenum target material of preparation.
And it is current, prepare the method for molybdenum powder generally using the method for hydrogen reduction, according to process difference have respectively one section of hydrogen reduction method,
Two sections of hydrogen reduction methods, three sections of hydrogen reduction methods etc., but the molybdenum powder potassium content for generally preparing uses this in 30ppm~50ppm or so
Molybdenum plate blank prepared by molybdenum powder sintering is planted, its potassium content is difficult to meet the requirement of electronics industry.
Domestic some researchs have carried out different discussions and research to low-potassium molybdenum powder production technology.Dongtai peak-to-peak tungsten
Wu Yongben of product limited company et al. using common molybdenum powder is washed or pickling method by the potassium content of molybdenum powder
Be reduced to 22mg/kg~38mg/kg, Jinduicheng Molybdenum Co., Ltd Wu Zhou et al. use is carried out at 1350 DEG C to common molybdenum powder
The potassium content of molybdenum powder is reduced to 23mg/kg or so by the method for restoring treatment;By preparing the potassium content about molybdic acid of 10mg/kg
Ammonium raw material, then the potassium content of molybdenum powder is reduced to 15mg/kg or so in 1000 DEG C of methods for being reduced.Above method raw materials technology
Technical requirements are high, complicated and flow is more long, relatively costly, are unfavorable for batch production.
The content of the invention
The technical problems to be solved by the invention are for above-mentioned the deficiencies in the prior art, there is provided a kind of low potassium content
The preparation method of molybdenum plate blank.The preparation method is simple, and low to ingredient requirement, raw material is easy to get, and the technique for producing slab is easily controllable,
It is easy to operate, safe and reliable, it is suitable to large-scale production, potassium content can be controlled in below 10ppm in molybdenum plate blank.
In order to solve the above technical problems, the technical solution adopted by the present invention is:A kind of preparation side of low potassium content molybdenum plate blank
Method, it is characterised in that the method is:By potassium content for the uniform pine of the molybdenum powder of 30ppm~60ppm is loaded in flat-bottomed boat, then
It is placed in vacuum drying oven and is evacuated in stove vacuum and is less than 3 × 10-3Pa, vacuum under conditions of being 1200 DEG C~1400 DEG C in temperature
Heat treatment is not less than 2h, cooling come out of the stove after by the molybdenum powder ball mill crushing, after being sieved through 200 mesh, then by isostatic cool pressing incited somebody to action
Molybdenum powder after sieve is pressed into slab, and the slab is sintered under hydrogen atmosphere protection then, obtains potassium content not
Molybdenum plate blank more than 10ppm.
A kind of preparation method of above-mentioned low potassium content molybdenum plate blank, it is characterised in that the average Fisher particle size of the molybdenum powder
It is 1.5 μm~5.0 μm.
The preparation method of above-mentioned a kind of low potassium content molybdenum plate blank, it is characterised in that in the vacuum heat treatment process
The thickness of pine dress molybdenum powder is 10mm~30mm.
The preparation method of above-mentioned a kind of low potassium content molybdenum plate blank, it is characterised in that the temperature of the vacuum heat is
1300 DEG C, the time is 2h~4h.
The preparation method of above-mentioned a kind of low potassium content molybdenum plate blank, it is characterised in that through the pine of the molybdenum powder after ball mill crushing
Dress density is less than 3.0g/cm3。
The preparation method of above-mentioned a kind of low potassium content molybdenum plate blank, it is characterised in that the ratio of grinding media to material of the ball milling is 2:1,
The time of ball milling is 1h.
The preparation method of above-mentioned a kind of low potassium content molybdenum plate blank, it is characterised in that the pressure of the isostatic cool pressing is
200MPa。
A kind of preparation method of above-mentioned low potassium content molybdenum plate blank, it is characterised in that the detailed process of the sintering processes
For:First be warming up to the heating rate of 4 DEG C/min~5 DEG C/min and 1h be incubated after 1200 DEG C, then with 1.67 DEG C/min~5 DEG C/
The heating rate of min is incubated 2h after being warming up to 1500 DEG C, then is incubated after being warming up to 1700 DEG C with the heating rate of 1.67 DEG C/min
2h, 6h is incubated after being finally warming up to 2000 DEG C~2100 DEG C with the heating rate of 1.67 DEG C/min.
The present invention has advantages below compared with prior art:
1st, the present invention prepare low potassium content molybdenum plate blank method it is simple, low to ingredient requirement, be easy to get, production technology is easy to control
System, it is easy to operate, safe and reliable, it is suitable to large-scale production, potassium content can be controlled in below 10ppm in molybdenum plate blank.
2nd, the present invention with by potassium content as 30ppm~50ppm molybdenum powder for raw material prepare potassium content less than 10ppm molybdenum
Slab, the molybdenum plate blank disclosure satisfy that requirement of the electronics industry to Mo.
3rd, raw material molybdenum powder of the invention using sintered at high temperature potassium content after vacuum reduction by being directly less than 10ppm
Molybdenum plate blank, the operation of whole preparation process reduced, and potassium content can be reduced in vacuum reduction and sintering process, and both mutually tie
Close, can obtain meeting the preparation of the special molybdenum plate blank of electronics industry, and the molybdenum plate blank for preparing also meets national standard.
Technical scheme is described in further detail below by embodiment.
Specific embodiment
Embodiment 1
By 50kg potassium contents for the uniform pine of the molybdenum powder of 35ppm is loaded in flat-bottomed boat, the thickness of molybdenum powder is filled in flat-bottomed boat
In 12mm, the average Fisher particle size of molybdenum powder is 2.5 μm, is subsequently placed in the heating zone of vacuum drying oven, and be evacuated to stove for degree control
Interior vacuum is less than 1 × 10-3Pa, vacuum heat 2h under conditions of being 1200 DEG C in temperature, then shifts flat-bottomed boat onto cold
But come out of the stove after area's cooling 1h;The molybdenum powder after cooling is placed in again carry out ball milling in three-dimensional ball vacuum ball mill, ratio of grinding media to material be (ball material
Mass ratio) it is 2:1, Ball-milling Time 1h, through the apparent density 2.1g/cm of the molybdenum powder after ball mill crushing3;Most sieved through 200 mesh afterwards
Afterwards, the molybdenum powder after sieving is placed in cold isostatic press carries out isostatic cool pressing and is pressed into slab, and the pressure of the isostatic cool pressing is
200MPa, the dwell time is 5min, is placed in induction type Intermediate frequency sintering furnace after obtaining slab, to described under hydrogen atmosphere protection
Slab is sintered, and the detailed process of the sintering processes is:First 1200 DEG C are warming up to the heating rate of 4.5 DEG C/min
After be incubated 1h, be then warming up to the heating rate of 3.5 DEG C/min and 2h be incubated after 1500 DEG C, then with the intensification of 1.67 DEG C/min speed
Rate is incubated 2h after being warming up to 1700 DEG C, 6h is incubated after being finally warming up to 2050 DEG C with the heating rate of 1.67 DEG C/min;Naturally it is cold
But come out of the stove afterwards, obtain molybdenum plate blank, detection is sampled to the molybdenum plate blank, measure potassium (K) content for 8ppm, Al is 1.6ppm,
Si is 4.1ppm, and S is 1.5ppm, and P is 0.9ppm, and Ca is 8.6ppm, and Cr is 16ppm, and Mn is 3ppm, and Fe is 54ppm, and Ni is
7ppm, Cu are 1.9ppm, and Cd is 1.4ppm, and Ba is 1.5ppm, and Ta < 10ppm, Hf are 2.4ppm, and W is 77ppm.The present embodiment
The number of die of the molybdenum plate blank of preparation is 1354/mm2, density is 9.9g/cm3, meets national standard, also fully meets electronics work
The requirement of ultra-large type integrated circuit, liquid crystal display target to Mo in industry.
Embodiment 2
By 50kg potassium contents for the uniform pine of the molybdenum powder of 55ppm is loaded in flat-bottomed boat, the thickness of molybdenum powder is filled in flat-bottomed boat
In 12mm, the average Fisher particle size of molybdenum powder is 4.5 μm, is subsequently placed in the heating zone of vacuum drying oven, and be evacuated to stove for degree control
Interior vacuum is less than 1 × 10-3Pa, vacuum heat 2h under conditions of being 1400 DEG C in temperature, then shifts flat-bottomed boat onto cold
But come out of the stove after area's cooling 1h;The molybdenum powder after cooling is placed in again carry out ball milling in three-dimensional ball vacuum ball mill, ratio of grinding media to material is 2:1,
Ball-milling Time 1h, through the apparent density 2.3g/cm of the molybdenum powder after ball mill crushing3;After most being sieved through 200 mesh afterwards, after sieving
Molybdenum powder is placed in cold isostatic press and carries out isostatic cool pressing and be pressed into slab, and the pressure of the isostatic cool pressing is 200MPa, during pressurize
Between be 5min, be placed in induction type Intermediate frequency sintering furnace after obtaining slab, the slab is sintered under hydrogen atmosphere protection
Process, the detailed process of the sintering processes is:First it is warming up to after 1200 DEG C with the heating rate of 4 DEG C/min and is incubated 1h, then
It is warming up to the heating rate of 1.67 DEG C/min and 2h is incubated after 1500 DEG C, then 1700 is warming up to the heating rate of 1.67 DEG C/min
2h is incubated after DEG C, 6h is incubated after being finally warming up to 2050 DEG C with the heating rate of 1.67 DEG C/min;Come out of the stove after natural cooling, obtained
Molybdenum plate blank, detection is sampled to the molybdenum plate blank, measures potassium (K) content for 9ppm, and Al is 2ppm, and Si is 4.5ppm, and S is
1.8ppm, P are 0.8ppm, and Ca is 8.9ppm, and Cr is 14ppm, and Mn is 3ppm, and Fe is 50ppm, and Ni is 7ppm, and Cu is 1.5ppm,
Cd is 1.4ppm, and Ba is 1.5ppm, and Ta < 10ppm, Hf are 2.1ppm, and W is 80ppm.The crystalline substance of molybdenum plate blank manufactured in the present embodiment
Grain number is 1310/mm2, density is 9.8g/cm3, meet national standard, also fully meet the integrated electricity of ultra-large type in electronics industry
The requirement of road, liquid crystal display target to Mo.
Embodiment 3
By 50kg potassium contents for the uniform pine of the molybdenum powder of 30ppm is loaded in flat-bottomed boat, the thickness of molybdenum powder is filled in flat-bottomed boat
In 15mm, the average Fisher particle size of molybdenum powder is 1.5 μm, is subsequently placed in the heating zone of vacuum drying oven, and be evacuated to stove for degree control
Interior vacuum is less than 3 × 10-3Pa, vacuum heat 2.5h under conditions of being 1300 DEG C in temperature, then shifts flat-bottomed boat onto
Come out of the stove after cooling zone cooling 1h;The molybdenum powder after cooling is placed in again carry out ball milling in three-dimensional ball vacuum ball mill, ratio of grinding media to material is 2:
1, Ball-milling Time 1h, through the apparent density 1.8g/cm of the molybdenum powder after ball mill crushing3;After most being sieved through 200 mesh afterwards, after sieving
Molybdenum powder be placed in cold isostatic press and carry out isostatic cool pressing and be pressed into slab, the pressure of the isostatic cool pressing is 200MPa, pressurize
Time is 5min, is placed in induction type Intermediate frequency sintering furnace after obtaining slab, and the slab is burnt under hydrogen atmosphere protection
Knot is processed, and the detailed process of the sintering processes is:First it is warming up to after 1200 DEG C with the heating rate of 5 DEG C/min and is incubated 1h, so
It is warming up to the heating rate of 5 DEG C/min afterwards and 2h is incubated after 1500 DEG C, then 1700 is warming up to the heating rate of 1.67 DEG C/min
2h is incubated after DEG C, 6h is incubated after being finally warming up to 2050 DEG C with the heating rate of 1.67 DEG C/min;Come out of the stove after natural cooling, obtained
Molybdenum plate blank, detection is sampled to the molybdenum plate blank, measures potassium content for 8.7ppm, and Al is 2ppm, and Si is 4.5ppm, and S is
1.8ppm, P are 0.8ppm, and Ca is 8.9ppm, and Cr is 14ppm, and Mn is 3ppm, and Fe is 50ppm, and Ni is 7ppm, and Cu is 1.5ppm,
Cd is 1.4ppm, and Ba is 1.5ppm, and Ta < 10ppm, Hf are 2.1ppm, and W is 80ppm.The crystalline substance of molybdenum plate blank manufactured in the present embodiment
Grain number is 1390/mm2,Density is 9.87g/cm3, meet national standard, also fully meet the integrated electricity of ultra-large type in electronics industry
The requirement of road, liquid crystal display target to Mo.
Embodiment 4
By 50kg potassium contents for the uniform pine of the molybdenum powder of 60ppm is loaded in flat-bottomed boat, the thickness of molybdenum powder is filled in flat-bottomed boat
In 20mm, the average Fisher particle size of molybdenum powder is 5 μm, is subsequently placed in the heating zone of vacuum drying oven, and be evacuated in stove for degree control
Vacuum is less than 3 × 10-3Pa, vacuum heat 4h under conditions of being 1300 DEG C in temperature, then shifts flat-bottomed boat onto cooling
Come out of the stove after area's cooling 1h;The molybdenum powder after cooling is placed in again carry out ball milling in three-dimensional ball vacuum ball mill, ratio of grinding media to material is 2:1, ball
Time consuming 1h, through the apparent density 2.3g/cm of the molybdenum powder after ball mill crushing3;After most being sieved through 200 mesh afterwards, by the molybdenum after sieving
Powder is placed in cold isostatic press and carries out isostatic cool pressing and be pressed into slab, and the pressure of the isostatic cool pressing is 200MPa, dwell time
It is 5min, is placed in induction type Intermediate frequency sintering furnace after obtaining slab, place is sintered to the slab under hydrogen atmosphere protection
Manage, the detailed process of the sintering processes is:First it is warming up to after 1200 DEG C with the heating rate of 5 DEG C/min and is incubated 1h, then with 4
DEG C/heating rate of min is incubated 2h after being warming up to 1500 DEG C, then protect after being warming up to 1700 DEG C with the heating rate of 1.67 DEG C/min
Warm 2h, 6h is incubated after being finally warming up to 2100 DEG C with the heating rate of 1.67 DEG C/min;Come out of the stove after natural cooling, obtain molybdenum plate
Base, detection is sampled to the molybdenum plate blank, measures potassium content for 9.3ppm, and Al is 1.9ppm, and Si is 4.3ppm, and S is
1.2ppm, P are 0.9ppm, and Ca is 7.6ppm, and Cr is 16ppm, and Mn is 3ppm, and Fe is 51ppm, and Ni is 7ppm, and Cu is 1.7ppm,
Cd is 1.4ppm, and Ba is 1.7ppm, and Ta < 10ppm, Hf are 2.6ppm, and W is 79ppm.The crystalline substance of molybdenum plate blank manufactured in the present embodiment
Grain number is 1400/mm2, density is 9.9g/cm3, meet national standard, also fully meet the integrated electricity of ultra-large type in electronics industry
The requirement of road, liquid crystal display target to Mo.
Embodiment 5
By 50kg potassium contents for the uniform pine of the molybdenum powder of 60ppm is loaded in flat-bottomed boat, the thickness of molybdenum powder is filled in flat-bottomed boat
In 30mm, the average Fisher particle size of molybdenum powder is 3.5 μm, is subsequently placed in the heating zone of vacuum drying oven, and be evacuated to stove for degree control
Interior vacuum is less than 1 × 10-3Pa, vacuum heat 5h under conditions of being 1200 DEG C in temperature, then shifts flat-bottomed boat onto cold
But come out of the stove after area's cooling 1h;The molybdenum powder after cooling is placed in again carry out ball milling in three-dimensional ball vacuum ball mill, ratio of grinding media to material is 2:1,
Ball-milling Time 1h, through the apparent density 1.8g/cm of the molybdenum powder after ball mill crushing3;After most being sieved through 200 mesh afterwards, after sieving
Molybdenum powder is placed in cold isostatic press and carries out isostatic cool pressing and be pressed into slab, and the pressure of the isostatic cool pressing is 200MPa, during pressurize
Between be 5min, be placed in induction type Intermediate frequency sintering furnace after obtaining slab, the slab is sintered under hydrogen atmosphere protection
Process, the detailed process of the sintering processes is:First it is warming up to after 1200 DEG C with the heating rate of 4 DEG C/min and is incubated 1h, then
It is warming up to the heating rate of 2 DEG C/min and 2h is incubated after 1500 DEG C, then 1700 DEG C is warming up to the heating rate of 1.67 DEG C/min
After be incubated 2h, be incubated 6h after being finally warming up to 2000 DEG C with the heating rate of 1.67 DEG C/min;Come out of the stove after natural cooling, obtain molybdenum
Slab, detection is sampled to the molybdenum plate blank, measures potassium content for 8.6ppm, and Al is 1.5ppm, and Si is 4.0ppm, and S is
1.5ppm, P are 1.1ppm, and Ca is 7.6ppm, and Cr is 17ppm, and Mn is 3ppm, and Fe is 53ppm, and Ni is 8ppm, and Cu is 1.9ppm,
Cd is 1.4ppm, and Ba is 1.3ppm, and Ta < 10ppm, Hf are 2.6ppm, and W is 73ppm.The crystalline substance of molybdenum plate blank manufactured in the present embodiment
Grain number is 1370/mm2, density is 9.8g/cm3, meet national standard, also fully meet the integrated electricity of ultra-large type in electronics industry
The requirement of road, liquid crystal display target to Mo.
The above, is only presently preferred embodiments of the present invention, and not the present invention is imposed any restrictions.It is every according to invention skill
Any simple modification, change and equivalence change that art is substantially made to above example, still fall within technical solution of the present invention
Protection domain in.
Claims (8)
1. a kind of preparation method of low potassium content molybdenum plate blank, it is characterised in that the method is:It is 30ppm~60ppm by potassium content
The uniform pine of molybdenum powder be evacuated to vacuum in stove and be less than 3 × 10 loaded in flat-bottomed boat, being subsequently placed in vacuum drying oven-3Pa,
Temperature be 1200 DEG C~1400 DEG C under conditions of vacuum heat be not less than 2h, cooling come out of the stove after by the molybdenum powder ball mill crushing,
After being sieved through 200 mesh, then the molybdenum powder after sieving is pressed into by slab by isostatic cool pressing, then to institute under hydrogen atmosphere protection
State slab to be sintered, obtain the potassium content no more than molybdenum plate blank of 10ppm.
2. the preparation method of a kind of low potassium content molybdenum plate blank according to claim 1, it is characterised in that the molybdenum powder it is flat
Equal Fisher particle size is 1.5 μm~5.0 μm.
3. the preparation method of a kind of low potassium content molybdenum plate blank according to claim 1, it is characterised in that in the Vacuum Heat
The thickness of pine dress molybdenum powder is 10mm~30mm in processing procedure.
4. the preparation method of a kind of low potassium content molybdenum plate blank according to claim 1, it is characterised in that at the Vacuum Heat
The temperature of reason is 1300 DEG C, and the time is 2h~4h.
5. the preparation method of a kind of low potassium content molybdenum plate blank according to claim 1, it is characterised in that after ball mill crushing
Molybdenum powder apparent density be less than 3.0g/cm3。
6. a kind of preparation method of low potassium content molybdenum plate blank according to claim 1, it is characterised in that the ball of the ball milling
Material is than being 2:1, the time of ball milling is 1h.
7. a kind of preparation method of low potassium content molybdenum plate blank according to claim 1, it is characterised in that the isostatic cool pressing
Pressure be 200MPa.
8. a kind of preparation method of low potassium content molybdenum plate blank according to claim 1, it is characterised in that the sintering processes
Detailed process be:First be warming up to the heating rate of 4 DEG C/min~5 DEG C/min and 1h be incubated after 1200 DEG C, then with 1.67 DEG C/
The heating rate of min~5 DEG C/min is incubated 2h after being warming up to 1500 DEG C, then is warming up to 1700 with the heating rate of 1.67 DEG C/min
2h is incubated after DEG C, 6h is incubated after being finally warming up to 2000 DEG C~2100 DEG C with the heating rate of 1.67 DEG C/min.
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CN115261634A (en) * | 2022-07-25 | 2022-11-01 | 金堆城钼业股份有限公司 | Low-potassium molybdenum substrate, preparation method and application |
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CN115261634A (en) * | 2022-07-25 | 2022-11-01 | 金堆城钼业股份有限公司 | Low-potassium molybdenum substrate, preparation method and application |
CN115261634B (en) * | 2022-07-25 | 2024-02-06 | 金堆城钼业股份有限公司 | Low-potassium molybdenum matrix, preparation method and application |
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