CN106734009A - A kind of heavy caliber minute surface cleaning equipment - Google Patents
A kind of heavy caliber minute surface cleaning equipment Download PDFInfo
- Publication number
- CN106734009A CN106734009A CN201710015710.5A CN201710015710A CN106734009A CN 106734009 A CN106734009 A CN 106734009A CN 201710015710 A CN201710015710 A CN 201710015710A CN 106734009 A CN106734009 A CN 106734009A
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- China
- Prior art keywords
- minute surface
- brush unit
- heavy caliber
- cleaning equipment
- surface cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 75
- 239000007921 spray Substances 0.000 claims abstract description 38
- 238000011010 flushing procedure Methods 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 description 17
- 238000001035 drying Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000012459 cleaning agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002262 irrigation Effects 0.000 description 1
- 238000003973 irrigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B08B1/12—
-
- B08B1/20—
-
- B08B1/32—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
Abstract
The invention discloses a kind of heavy caliber minute surface cleaning equipment, at least including operating desk, brush unit, spray equipment and attachment means;Operating desk is used for horizontal positioned mirror body, may move and rotates;Brush unit is used for by rotating removal minute surface attachment;Spray equipment is used to produce flushing liquid to minute surface;Attachment means are used to connect brush unit and spray equipment, and control brush unit to scan rotation simultaneously in mirror sections.Heavy caliber minute surface cleaning equipment of the present invention, flushing liquid is produced from spray equipment to minute surface, attachment means control brush unit to scan movement in mirror sections, and brush unit rotates the removal of minute surface attachment simultaneously in a scan, and so realization is to the cleaning before filming on mirror surface.Heavy caliber minute surface cleaning equipment of the present invention is applied to the cleaning to heavy caliber minute surface, the effective cleaning before being capable of achieving to heavy caliber filming on mirror surface.
Description
Technical field
The present invention relates to minute surface cleaning treatment technical field, more particularly to a kind of heavy caliber minute surface cleaning equipment.
Background technology
With survey of deep space and the fast development of imaging system, observe and the more bigbore light of imaging system active demand
System, is looked farther, apparent requirement with meeting people.Therefore, worker improves constantly technique, current processing pole is broken through
Limit, makes the optics aperture of mirror prepared constantly increase, and meets this active demand.
The continuous increase of optics aperture of mirror, while the manufacture, processing and plated film to minute surface bring very big technological challenge.For
The speculum applied in optical system, effective cleaning must be carried out before plated film to substrate surface, be used to remove substrate surface
Dust and impurity, improve film quality and firmness.Ensure film layer reflectivity higher and durability.
In traditional handicraft, the minute surface relatively small to bore is using ultrasonic wave immersion cleaning method or by artificial direct
Wiping is processed, and can reach relatively good cleaning performance, disclosure satisfy that follow-up plated film requirement.But it is larger for minute surface bore
When reaching more than 2m, the above method is not applied to simultaneously.Because mirror body lifting upset risk is larger, therefore according to ultrasonic wave cleaning
Should not be operated in method cleaning process, it is difficult to realize effectively cleaning;According to manual wipping mode, due to human body self-condition limit
System, it is impossible to realize the effective observation and wiping to whole minute surface, it is also difficult to reach good cleaning performance.
As can be seen here, it is badly in need of providing a kind of cleaning program suitable for heavy caliber minute surface meeting current application demand.
The content of the invention
It is an object of the invention to provide a kind of heavy caliber minute surface cleaning equipment, it is adaptable to heavy caliber minute surface.It is capable of achieving to big
Effective cleaning of the bore minute surface before plated film.
To achieve the above object, the present invention provides following technical scheme:
A kind of heavy caliber minute surface cleaning equipment, at least including operating desk, brush unit, spray equipment and attachment means;
The operating desk is used for horizontal positioned mirror body, may move and rotates;
The brush unit is used for by rotating removal minute surface attachment;
The spray equipment is used to produce flushing liquid to minute surface;
The attachment means are used to connect the brush unit and the spray equipment, and control the brush unit to exist
Mirror sections scanning rotates simultaneously.
Alternatively, the attachment means include:
First mechanical arm being connected with the brush unit, for driving the brush unit to move in the horizontal direction;
Second mechanical arm being connected with the brush unit, for driving the brush unit vertically to move;
Mechanical arm support for installing the first mechanical arm and the second mechanical arm.
Alternatively, the height of the spray equipment, spray pressure and angle can be adjusted according to curvature mirror.
Alternatively, also including the distance measuring sensor for measuring distance between the brush unit and minute surface.
Alternatively, also including control device, for the distance value measured according to mirror shape parameter, the distance measuring sensor
The brush unit is controlled to be moved in the horizontal direction or vertically in mirror sections.
Alternatively, the setting angle of the distance measuring sensor can adjust.
Alternatively, the limit sensors for limiting mirror body position are provided with the operating desk.
Alternatively, also including air blade device, for producing dry wind to minute surface.
Alternatively, the pressure adjustable section of the height of the air blade device, angle and wind.
As shown from the above technical solution, heavy caliber minute surface cleaning equipment provided by the present invention, at least including operating desk, hair
Brush device, spray equipment and attachment means.Mirror body to be cleaned is lain in a horizontal plane on operating desk, hairbrush is filled by attachment means
Put and spray equipment is placed in mirror sections;Control operation platform rotation in cleaning process, flushing liquor is produced from spray equipment to minute surface
Body, attachment means control brush unit to scan movement in mirror sections, and brush unit rotates and adheres to minute surface simultaneously in a scan
Thing is removed, and so realizes the cleaning to minute surface.As can be seen that invention mirror cleaning equipment is applied to the clear of heavy caliber minute surface
Wash, the effective cleaning before being capable of achieving to heavy caliber filming on mirror surface.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of schematic diagram of heavy caliber minute surface cleaning equipment provided in an embodiment of the present invention.
Specific embodiment
In order that those skilled in the art more fully understand the technical scheme in the present invention, below in conjunction with of the invention real
The accompanying drawing in example is applied, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described implementation
Example is only a part of embodiment of the invention, rather than whole embodiments.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under the premise of creative work is not made, should all belong to protection of the present invention
Scope.
The embodiment of the present invention provides a kind of heavy caliber minute surface cleaning equipment, at least including operating desk, brush unit, spray dress
Put and attachment means;
The operating desk is used for horizontal positioned mirror body, may move and rotates;
The brush unit is used for by rotating removal minute surface attachment;
The spray equipment is used to produce flushing liquid to minute surface;
The attachment means are used to connect the brush unit and the spray equipment, and control the brush unit in mirror
Face sector scanning rotates simultaneously.
As can be seen that the present embodiment heavy caliber minute surface cleaning equipment, at least including operating desk, brush unit, spray equipment
And attachment means.Mirror body to be cleaned is lain in a horizontal plane on operating desk, brush unit and spray equipment is put by attachment means
In mirror sections;Control operation platform rotation in cleaning process, flushing liquid, attachment means control are produced to minute surface from spray equipment
Brush unit is scanned in mirror sections and moved, and brush unit rotates the removal of minute surface attachment simultaneously in a scan, so realizes
Cleaning to minute surface.It is and existing as can be seen that the present embodiment minute surface cleaning equipment is applied to the cleaning before heavy caliber filming on mirror surface
There are method for suppersonic cleaning or manual wipping method in technology to compare, this equipment application can in heavy caliber minute surface cleaning safety
Lean on, and good cleaning performance can be reached, filming on mirror surface requirement can be met.
The present embodiment heavy caliber minute surface cleaning equipment is described in detail below in conjunction with the accompanying drawings.
Fig. 1 is refer to, a kind of schematic diagram of heavy caliber minute surface cleaning equipment that the present embodiment is provided is shown.As seen from the figure,
Minute surface cleaning equipment at least includes operating desk 10, brush unit 11, spray equipment 12 and attachment means.
Wherein, the operating desk 10 is used to place mirror body, may move and rotates.Mirror body is placed horizontally in operation in cleaning
On platform 10, mirror body is moved under the brush unit and spray equipment of cleaning equipment by movable operating platform.
Brush unit 11 and spray equipment 12 are connected and installed by attachment means.
The brush unit 11 is rotatable, by rotating to mirror surface cleaning.Brush unit 11 can use collar plate shape hairbrush, or
Person can also be other types of hairbrush.Spray equipment 12 can use shower, for producing flushing liquid, flushing liquor to minute surface
Body can be water or cleaning agent.
The attachment means can be set as follows, specifically include:It is being connected with the brush unit 11, for driving
The first mechanical arm 13 that the brush unit 11 is moved in the horizontal direction;It is being connected with the brush unit 11, for driving
State the second mechanical arm 14 that brush unit 11 is vertically moved;For installing the first mechanical arm 13 and second machine
The mechanical arm support 15 of tool arm 14.
With reference to shown in Fig. 1, brush unit 11, first mechanical arm 13 are connected by first mechanical arm 13 and second mechanical arm 14
It is connected on mechanical arm support 15.Brush unit 11 is driven to move in the horizontal direction by first mechanical arm 13 and second mechanical arm 14
Move or in vertical direction movement, moved with driving brush unit to be scanned in mirror sections in cleaning process.
The mechanical arm support 15 is a horizontal shape support, and its two ends is connected with vertical shape support respectively, is supported by vertical shape support
And fixation, more than the diameter of heavy caliber mirror body, mirror body is placed on operating desk 10 can move for the distance between two edge-on shape supports
Move under horizontal shape support.
Spray equipment 12 is connected on mechanical arm support 15 by telescopic arm, is existed by the controllable spray equipment 12 of telescopic arm
Vertical direction is moved, and adjusts its height and position.
Preferably, the spray angles of the spray equipment 11, spray pressure can adjust, and such as use shower, shower
Tilt adjustable section, in use can according to curvature mirror adjust spray equipment 11 spray angles, with mirror shape
Match.
It is further preferred that the present embodiment minute surface cleaning equipment also can be set air blade device 16, it is dry for being produced to minute surface
Dry wind.After the completion of minute surface cleaning, hot blast can be produced to minute surface by air blade device 16, minute surface purging is air-dried.The air knife
Device 16 can be connected on mechanical arm support 15 by telescopic arm, be can control air blade device 16 and moved in vertical direction, adjust it
Height and position.
Preferably, the angle of the air blade device 16, the pressure adjustable section of generation wind, can be according to actual minute surface when using
Face shape adjusts its angle, to match mirror shape, it is ensured that effectively dry minute surface.
Further, on the basis of the above, the present embodiment heavy caliber minute surface cleaning equipment is also included for measuring
The distance measuring sensor of distance between the brush unit 11 and minute surface.
The large caliber reflecting mirror processing cost used in optical system is very high, it is therefore necessary to ensure that the safety of cleaning can
Lean on.To prevent the rotating brushes in cleaning process from causing to damage to minute surface, the present embodiment equipment sets distance measuring sensor, specifically may be used
It is arranged on brush unit 11, can be measured in real time between brush unit 11 and minute surface by distance measuring sensor in cleaning process
Distance, control brush plate and minute surface keep certain distance, it is to avoid itself and minute surface occur frictional impact.
Specifically, the distance measuring sensor can use laser range sensor.
In the present embodiment, the setting angle of the distance measuring sensor can adjust, and before to minute surface scanning cleaning, can first control
First mechanical arm 13 radially makes a round trip at a slow speed along minute surface, is used to determine that can distance measuring sensor in the shape of minute surface different curvature face
Normal work.If in reciprocatory movement, the fed back values of distance measuring sensor are normal always, then it represents that distance measuring sensor
Setting angle can match current minute surface;Otherwise, the setting angle of distance measuring sensor need to be adjusted, until aforementioned feedback numerical value is always just
Often.
The present embodiment heavy caliber minute surface cleaning equipment also includes control device, for according to mirror shape parameter, the survey
The distance value measured away from sensor controls the brush unit 11 to be moved in the horizontal direction or vertically in mirror sections.
There is certain surface shape in view of minute surface, hair can be set in control device control software according to mirror mirror Surface Parameters
The boundary for declining is brushed, brush plate is only lifted in safe distance, prevent maloperation from the situation for damaging minute surface occurring.
The present embodiment equipment is using the control brush unit movement in the horizontal direction of precision optical machinery arm and the shifting of vertical direction
It is dynamic, and combine distance measuring sensor, it is ensured that the precision control to brush unit displacement, prevent from damaging minute surface.
In the present embodiment, the operating desk 10 is rotatable, and control operation platform 10 rotates in minute surface cleaning process, same to time control
Brush unit processed 11 is scanned in mirror sections and moved, and eyeglass is cleaned, and can reach good cleaning performance.
Preferably, limit sensors can be set on operating desk 10, for limiting position of the eyeglass on operating desk, clear
During washing when lens position is moved, limit sensors sense that lens position is moved, and can point out staff.
The application method to the present embodiment minute surface cleaning equipment is illustrated below, specifically includes following steps:
S1:Lens orientation
Mirror body to be cleaned is lifted to operating desk 10 using driving, it is ensured that mirror body is placed on the center of operating desk 10, with
Ensure eyeglass whole machine balancing during rotation.Then operating desk is moved into cleaning equipment, until triggering limit sensors.
S2:Distance measuring sensor is verified
The step be used for determine distance measuring sensor can on different curvature minute surface normal work.When operating desk and mirror body are fixed
Behind position, radially made a round trip along minute surface at a slow speed in the horizontal direction by controlling first mechanical arm, speed is not more than 50mm/s.If
In reciprocatory movement, the fed back values of distance measuring sensor are normal always, then it represents that the setting angle energy of distance measuring sensor
With current minute surface;The setting angle of regulation distance measuring sensor is otherwise needed, until aforementioned feedback numerical value is normal always.
S3:Cleaning agent is sprayed and scrubbed
After ready, operating desk rotation is first opened, hairbrush is then controlled by first mechanical arm 13 and second mechanical arm 14
In mirror sections progressive scan, while start brush unit 11 rotating, spray equipment 12 produces flushing liquid to device 11 to minute surface,
Realize the cleaning to minute surface;After hairbrush has cleaned whole minute surface, hairbrush rises and removes minute surface automatically.
S4:Pure water is sprayed and scrubbed
After (with step S3) is ready, first opens operating desk 10 and rotate, then by the machinery of first mechanical arm 13 and second
Arm 14 controls brush unit 11 in mirror sections progressive scan, while start brush unit 11 rotating, spray equipment 12 is to minute surface
Water is produced, the cleaning to minute surface is realized;After hairbrush has cleaned whole minute surface, hairbrush rises and removes minute surface automatically.
S5:Final spray
The step is used to do significantly cleaning showers to mirror body surface.Shower is drop to lens surface near zone,
Final spray irrigation is done to minute surface pure water, while still keeping mirror body to rotate.After the completion of shower is risen into go back to original position again.Different mirrors
Face need to adjust height and the angle of inclination of shower, to match the minute surface of actual cleaning using preceding.
S6:Air knife drying
The step is used to do rapid draing to mirror body surface.Air blade device 16 is drop to lens surface near zone, it is right
Mirror body surface hot blast does purging and air-dries, after the completion of 16 liters of air blade device is gone back into original position again.Different eyeglasses need to adjust wind using preceding
The height of knife system 16 and angle of inclination, to match the minute surface of actual tilt.
S7:Hand inspection
Operating desk is removed, mirror body surface is checked comprehensively by operating personnel, if it is necessary, can also carry out local wiping
Work, cleaning process is terminated after confirmation is qualified.
The present embodiment minute surface cleaning equipment, is capable of achieving to more than 2m magnitudes large caliber reflecting mirror particularly SiC mirrors
Automatic cleaning and drying before the plated film of face, while the whole cleaning of guarantee of taking the necessary measures has security higher and can
By property, the related needs in practical engineering application are met.
The present embodiment heavy caliber minute surface cleaning equipment, substitutes Traditional Man and wipes using reasonable effective mechanical cleaning mode
Wipe, realize the safe and reliable effective cleaning and drying to heavy caliber, complex curvatures minute surface, meet domestic heavy caliber eyeglass
Active demand of the plated film to related application, has filled up the technological gap of domestic association area, is the application of China's heavy caliber minute surface
There is provided strong technical support.
A kind of heavy caliber minute surface cleaning equipment provided by the present invention is described in detail above.It is used herein
Specific case is set forth to principle of the invention and implementation method, and the explanation of above example is only intended to help and understands this
The method and its core concept of invention.It should be pointed out that for those skilled in the art, not departing from this hair
On the premise of bright principle, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into power of the present invention
In the protection domain that profit is required.
Claims (9)
1. a kind of heavy caliber minute surface cleaning equipment, it is characterised in that at least including operating desk, brush unit, spray equipment and company
Connection device;
The operating desk is used for horizontal positioned mirror body, may move and rotates;
The brush unit is used for by rotating removal minute surface attachment;
The spray equipment is used to produce flushing liquid to minute surface;
The attachment means are used to connect the brush unit and the spray equipment, and control the brush unit in minute surface
Sector scanning rotates simultaneously.
2. heavy caliber minute surface cleaning equipment according to claim 1, it is characterised in that the attachment means include:
First mechanical arm being connected with the brush unit, for driving the brush unit to move in the horizontal direction;
Second mechanical arm being connected with the brush unit, for driving the brush unit vertically to move;
Mechanical arm support for installing the first mechanical arm and the second mechanical arm.
3. heavy caliber minute surface cleaning equipment according to claim 1, it is characterised in that the height of the spray equipment, spray
Drenching pressure and angle can be adjusted according to curvature mirror.
4. heavy caliber minute surface cleaning equipment according to claim 1, it is characterised in that also including for measuring the hairbrush
The distance measuring sensor of distance between device and minute surface.
5. heavy caliber minute surface cleaning equipment according to claim 4, it is characterised in that also including control device, for root
The distance value measured according to mirror shape parameter, the distance measuring sensor control the brush unit in mirror sections in the horizontal direction
Or vertically move.
6. heavy caliber minute surface cleaning equipment according to claim 4, it is characterised in that the established angle of the distance measuring sensor
Degree is adjustable.
7. heavy caliber minute surface cleaning equipment according to claim 1, it is characterised in that be provided with use on the operating desk
In the limit sensors for limiting mirror body position.
8. heavy caliber minute surface cleaning equipment according to claim 1, it is characterised in that also including air blade device, for
Minute surface produces dry wind.
9. heavy caliber minute surface cleaning equipment according to claim 8, it is characterised in that the height of the air blade device, angle
The pressure adjustable section of degree and wind.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710015710.5A CN106734009A (en) | 2017-01-10 | 2017-01-10 | A kind of heavy caliber minute surface cleaning equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710015710.5A CN106734009A (en) | 2017-01-10 | 2017-01-10 | A kind of heavy caliber minute surface cleaning equipment |
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Publication Number | Publication Date |
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CN106734009A true CN106734009A (en) | 2017-05-31 |
Family
ID=58948789
Family Applications (1)
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CN201710015710.5A Pending CN106734009A (en) | 2017-01-10 | 2017-01-10 | A kind of heavy caliber minute surface cleaning equipment |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107030051A (en) * | 2017-06-09 | 2017-08-11 | 中国科学院长春光学精密机械与物理研究所 | Heavy caliber silicon carbide mirror plated film mirror body automatic cleaning process method |
CN107159606A (en) * | 2017-06-09 | 2017-09-15 | 中国科学院长春光学精密机械与物理研究所 | Heavy caliber silicon carbide mirror plated film minute surface automatic cleaning process method |
CN108469831A (en) * | 2018-03-19 | 2018-08-31 | 中国计量大学 | The attitude-control device and control method of mirror surface cleaning degree detection device |
CN109008228A (en) * | 2018-09-12 | 2018-12-18 | 嘉善县姚庄中心学校 | A kind of automatic cleaning table |
CN109131428A (en) * | 2017-06-16 | 2019-01-04 | 上海铁路局 | A kind of train scanning detection apparatus and Ku Jian robot |
CN112974340A (en) * | 2021-02-01 | 2021-06-18 | 深圳市无限动力发展有限公司 | Top cover cleaning mechanism and external cleaning device of sweeper |
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CN102343344A (en) * | 2011-11-01 | 2012-02-08 | 南京烨拓自动化设备有限公司 | Deep-curvature glass cleaning machine |
CN103447264A (en) * | 2013-09-04 | 2013-12-18 | 上海正帆科技有限公司 | Device and method for cleaning large concave mirror |
CN203599153U (en) * | 2013-11-22 | 2014-05-21 | 武汉圣普太阳能科技有限公司 | Solar light condensing lens surface plasma automatic cleaning device |
CN105127150A (en) * | 2015-08-14 | 2015-12-09 | 四川大学 | Laser cleaning system based on robot control and cleaning method thereof |
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CN102319686A (en) * | 2011-08-26 | 2012-01-18 | 上海宏力半导体制造有限公司 | Wafer cleaning device and wafer cleaning method |
CN102343344A (en) * | 2011-11-01 | 2012-02-08 | 南京烨拓自动化设备有限公司 | Deep-curvature glass cleaning machine |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN107030051A (en) * | 2017-06-09 | 2017-08-11 | 中国科学院长春光学精密机械与物理研究所 | Heavy caliber silicon carbide mirror plated film mirror body automatic cleaning process method |
CN107159606A (en) * | 2017-06-09 | 2017-09-15 | 中国科学院长春光学精密机械与物理研究所 | Heavy caliber silicon carbide mirror plated film minute surface automatic cleaning process method |
CN109131428A (en) * | 2017-06-16 | 2019-01-04 | 上海铁路局 | A kind of train scanning detection apparatus and Ku Jian robot |
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CN108469831A (en) * | 2018-03-19 | 2018-08-31 | 中国计量大学 | The attitude-control device and control method of mirror surface cleaning degree detection device |
CN108469831B (en) * | 2018-03-19 | 2024-03-15 | 中国计量大学 | Attitude control device and control method of mirror surface cleanliness detection equipment |
CN109008228A (en) * | 2018-09-12 | 2018-12-18 | 嘉善县姚庄中心学校 | A kind of automatic cleaning table |
CN112974340A (en) * | 2021-02-01 | 2021-06-18 | 深圳市无限动力发展有限公司 | Top cover cleaning mechanism and external cleaning device of sweeper |
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Application publication date: 20170531 |