CN106707411B - A method of spherical concave mirror is prepared in optical waveguide based on laser annular etching - Google Patents
A method of spherical concave mirror is prepared in optical waveguide based on laser annular etching Download PDFInfo
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- CN106707411B CN106707411B CN201710076388.7A CN201710076388A CN106707411B CN 106707411 B CN106707411 B CN 106707411B CN 201710076388 A CN201710076388 A CN 201710076388A CN 106707411 B CN106707411 B CN 106707411B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
Abstract
The present invention proposes a kind of method that spherical concave mirror is prepared in optical waveguide based on laser annular etching, it is intended to reduce the coupling loss caused by optical waveguide-fiber perpendicular coupling factor value aperture mismatches.Its processing flow are as follows: machining area is determined in optical waveguide, according to the reflective spherical concave to be processedRDetermine that laser circle etches path radiusr'=R/ 2, the reflective spherical concave surface center of circle and the round etching path center of circle are overlapped；Laser ablation mask graph is selected, can be circle, ellipse, free curve shape etc.；Mask is along round etching path rotation etching, and the mask center of circle is moved along circle etching path always, and mask perimeter is a little overlapped with the reflective spherical concave surface center of circle always；It is with radiusr i Made circumference each point etching depth is identical, differentr i , etching depth difference；When laser ablation rotates a circle, the spheroidal reflective concave surface of class is formed；Obtained bilateral spherical shape reflective concave surface is handled, unilateral spherical reflective concave surface is obtained.
Description
Technical field
The present invention relates to micro Process manufacturing fields, propose a kind of etch based on laser annular and prepare spherical shape in optical waveguide
The method of concave mirror.
Background technique
In recent years, the requirement with fields such as broadband connections, supercomputer and large data centers to data processing speed
It is constantly promoted, has pushed the research to high speed bandwidth (>=50Gbps) the relevant technologies.Based on printed circuit board (Printed
Circuit Board, PCB) optical backplane technology there are the advantages such as high bandwidth, low energy consumption, low cost, become high in recent years
The research hotspot of end equipment information field of interconnection technologies.
Currently, be the most common optical waveguide with the optical waveguide that polymer is basic material, and vertical coupled technology is that light is mutual
How even one of the key technology of application realizes efficiently vertical coupled have become a hot topic of research.Patent (application publication number: CN
It 105397300A) proposes for optical waveguide to be processed as the tilting mirrors bounce technique with inclined-plane coupling port, " High-coupling-
efficiency optical interconnection using a 90-bent fiber array connector in
Fibre-optical bending is combined into the curved fiber method of coupling module in optical printed circuit boards " text, and
Patent (application publication number: CN 102540349A) proposition prepares waveguide optical grating method of grating etc. in optical waveguide, can be effectively
It realizes vertical coupled.
Realize that vertical coupled method is although varied, but numerical aperture between the optical devices such as light source, optical fiber, optical waveguide
The mismatch of diameter often brings biggish coupling loss.In order to improve vertical coupled efficiency, some propositions are drawn in coupled apparatus
Enter concave mirror (patent No.: US 6529661B2) or convex lens (patent application publication number: CN 101813806A) to realize light beam
The thought of convergence, but face the problem that processing technology precision is lower, later period encapsulation is complicated.As a result, directly in backboard optical waveguide
On prepare concave mirror method it is more simple and effective.
Up to now, more and more methods for preparing concave mirror are exploited, but also all there is respective deficiency.Patent is (public
The number of opening: CN 1272182A) concave mirror prepared using chemical corrosion method, but such preparation method have low precision, complex process,
Only there is the problems such as convergence effect in one direction；Patent (publication number: CN 103395739A) proposes a kind of using hydrone
The not method that invading property prepares concave mirror, this method is to material requirements height, and droplet profile is difficult to control, therefore there are techniques to answer
The not high disadvantage of miscellaneous, precision；"Design and fabrication of embedded micro-mirror inserts
Deep matter is proposed in for out-of-plane coupling in PCB level optical interconnections " text
Son write-in (deep proton writing, DPW) technology processes concave mirror in optical waveguide, but still has complex process, is difficult to
The drawbacks of batch production.The method of above concave mirror preparation, material, preparation process, in terms of ask there are more
Topic, it is difficult to meet the industrial requirement of large batch of light back board.
Summary of the invention
In view of the defects existing in the prior art, the present invention proposes that a kind of etch based on laser annular prepares ball in optical waveguide
The method of shape concave mirror, it is intended to the larger coupling caused by factor value aperture mismatches when reducing optical waveguide-fiber perpendicular coupling
Loss.Have many advantages, such as that easy to operate, precision is higher, efficiently vertical coupled, is suitable for big industrial production.
In order to achieve the above objectives, design of the invention is as follows:
Determine machining area on optical waveguide top covering surface, according to it is to be processed at reflective spherical concave R determine
Laser circle etches path radius r '=R/2, and the reflective spherical concave surface center of circle and the round etching path center of circle are overlapped, wrap in optical waveguide
Layer plane interception ball is the circle that radius is R；Laser ablation mask graph is selected, masks area each point laser intensity is identical, mask
Figure can be circle, ellipse, free curve shape etc.；By taking circular masks as an example, when etching, circular masks are with a fixed angular speed
Along round etching path rotation etching, the mask graph center of circle is moved along circle etching path always, and circular masks circumference is a bit
Always it is overlapped with the reflective spherical concave surface center of circle；Using the round heart of spherical section as the center of circle, radius riMade circumference each point etching
Depth is identical, and etching depth is the accumulation of the laser ablation depth in certain etch period, if the etching in the unit time is deep
Degree is h0, etch period ti, then etching depth is Hi=h0×ti, different riIts tiAlso different, then HiAlso different, work as riIt is larger
When, tiIt is smaller, HiWith regard to smaller, when laser ablation rotates a circle, the spheroidal reflective concave surface of class is formed.As required, pass through
Laser circle is set and etches path radius, mask graph radius and etching depth, come control spherical reflective concave surface radius size,
The parameters such as concave surface depth and aggregation beam focal location.
According to above-mentioned design, the present invention adopts the following technical scheme:
A method of spherical concave mirror being prepared in optical waveguide based on laser annular etching, operating procedure is as follows:
1) determine machining area on optical waveguide top covering surface, according to it is to be processed at reflective spherical concave determine
Laser circle etches path radius, and the reflective spherical concave surface center of circle and the round etching path center of circle are overlapped；
2) according to the specific spherical concave etched, laser ablation mask graph is selected, mask graph is round, ellipse
Round or free curve shape determines laser power P and its characterizes the moving step length S of laser rotary etching；
3) laser mask is with a fixed angular speed along round etching path rotation etching, and then its etching depth is not or not different points
Together；
4) when laser ablation rotates a circle, spherical reflective concave surface is generally formed；
5) bilateral spherical shape reflective concave surface is handled, selection is by fixed point etching or by not needing region placement gold
Belong to piece in a manner of blocking laser, obtains unilateral spherical reflective concave surface.
The step 1) machining area it is to be processed at reflective spherical concave radius need to be greater than waveguide core layer cross section
Width can all receive the light of sandwich layer transmission with this, and the spherical center of circle is ensured in optical waveguide core layer symmetrically longitudinal sectional plane with this
Spherical reflective concave surface the reflected beams converge at right above concave surface.
The step 2) specifically: select circular masks, oval mask or free curved-surface mask as laser ablation
Shape；Determination for laser parameter, it is first determined laser power P, under this laser power, experiment measures laser ablation one
Secondary depth h0, the moving step length S of characterization laser rotary etching is determined further according to its relational expression.
The specific etching mechanism of step 3): when etching, laser mask is rotated with a fixed angular speed along round etching path
Etching, the mask graph center of circle always along circle etching path move, and mask circumference a little always with the reflective spherical concave surface center of circle
It is overlapped；Using the round heart of spherical section as the center of circle, radius riMade circumference each point etching depth is identical, and etching depth is one
Determine the accumulation of laser ablation depth in etch period, different riIts etching depth is different, works as riWhen larger, etching depth is got over
It is small.
The step 4) etches sample quality: when selecting circular masks, oval mask as laser ablation shape, being carved
Longitudinal reflective concave surface of erosion and non-critical spherical reflective concave surface, but still there is convergence effect, vertical coupling can be effectively improved
Close efficiency；Free curved-surface mask be according to spherical reflective concave surface is counter push away obtained from laser mask figure, the longitudinal direction etched
Reflective concave surface is stringent spherical reflective concave surface, highly beneficial for the position placement for coupling optical fiber, can efficiently be improved vertical
Straight coupling efficiency.
For the step 5) to the processing method of bilateral spherical shape reflective concave surface, there are two types of methods to remove unwanted side spherical shape
Reflective concave surface:
First is that bilateral spherical shape reflective concave surface pinpoints the unwanted side of etching again after processing is completed；
Second is that before processing, in advance close to placing a metal block at sub- machining area external position to block laser,
Obtain unilateral spherical reflective concave surface.
Compared with prior art, beneficial outcomes of the invention are:
The method proposed by the present invention that spherical reflective concave surface is prepared in optical waveguide based on laser annular etching, may be implemented
The light beam convergence of two vertical direction, major advantage is that manufacture craft is simple, and machining accuracy is high, and preparation cost is low, is hung down realizing
The coupling loss caused by mismatching due to numerical aperture is largely reduced while straight coupling, further increases vertical coupling
Close efficiency.In addition, such as utilizing chemical corrosion method and the hydrone method that invading property does not prepare concave mirror, side of the present invention compared to other
Method do not need it is additional prepare material, reduce preparation process and a possibility that additional drawback occur, be suitble to high-volume light back board work
The requirement of industry production, advances the application of light back board interconnection technique.
Detailed description of the invention
Fig. 1 is 3 dimension schematic perspective views of spherical reflective concave surface to be processed in optical waveguide proposed by the present invention.
Fig. 2 is the structural schematic diagram for processing spherical reflective concave surface in present embodiment one using circular masks.Fig. 2A is to add
The setting schematic diagram of each parameter before work, Fig. 2 B are circular masks rotation etching machining sketch chart, and Fig. 2 C is each point etching depth point
Schematic diagram is analysed, Fig. 2 D is determining laser processing parameter and made spherical concave surface cross-sectional analysis schematic diagram, Fig. 2 E are bilateral ball
Shape reflective concave surface pinpoints the spherical reflective concave surface structural schematic diagram in unilateral side that etching removes side and formed, Fig. 2 F again after processing is completed
It is formed to process preceding one metal block of placement at the spherical reflective concave surface external position in unilateral side close to needs to block laser
The spherical reflective concave surface in unilateral side.
Fig. 3 is the structural schematic diagram for processing spherical reflective concave surface in present embodiment two using oval mask.Fig. 3 A is
Each point etching depth analyzes schematic diagram, and Fig. 3 B is determining laser processing parameter and made spherical concave surface cross-sectional analysis is illustrated
Figure.
Fig. 4 is the structural schematic diagram for processing spherical reflective concave surface in present embodiment three using free curved-surface mask.Figure
4A is that each point etching depth analyzes schematic diagram, and Fig. 4 B is determining laser processing parameter and made spherical concave surface cross-sectional analysis shows
It is intended to, Fig. 4 B illustration is the functional image for the free curved-surface mask being back-calculated to obtain according to standard spherical shape concave surface.
Fig. 5 is the processing flow block diagram proposed by the invention that spherical reflective concave surface method is processed in optical waveguide.
Fig. 6 be spherical concave mirror will be formed after the spherical reflective concave surface inner surface metal-coated membrane that process, and by its
Applied to optical fiber-optical waveguide perpendicular coupling structure schematic diagram.
Specific embodiment
The present invention proposes a kind of method that spherical concave mirror is prepared in optical waveguide based on laser annular etching, it is intended to reduce
Larger coupling loss caused by factor value aperture mismatches when the coupling of optical waveguide-fiber perpendicular, Fig. 1 be it is proposed by the present invention
3 dimension schematic perspective views of spherical reflective concave surface to be processed in optical waveguide.Below with reference to specific embodiment and attached
Figure is described in further details the present invention.
Embodiment one
The present embodiment shows in particular the ArF excimer laser based on OPTEC production and processes spherical shape in optical waveguide instead
Penetrate the processing flow of concave surface, optical maser wavelength 193nm, machined parameters such as laser power, moving step length, mask graph be optional.
The present embodiment carries out laser ablation using circular masks 11 (shown in Fig. 2A), and preparation flow is as follows.
Firstly, determining that machining area, spherical concave radius to be processed need to be greater than light wave on optical waveguide top covering surface
Sandwich layer cross-sectional width is led, can all receive the transmission light of sandwich layer with this, spherical center of circle O is in the symmetrical longitudinal sectional plane of optical waveguide core layer
On, ensure that spherical reflective concave surface the reflected beams converge at right above concave surface with this, is received convenient for fiber coupling.According to required processing
At reflective spherical concave R determine that laser circle etches 12 radius r'=R/2 of path, the reflective spherical concave surface center of circle and circle
It etches the path center of circle to be overlapped, optical waveguide top covering plane interception spherical shape is the circle 13 that radius is R, each parameter setting such as Fig. 2A institute
Show.
Then, laser power P is selected；Laser ablation circular masks are selected, masks area each point laser intensity is identical, round
Mask radius r=R/2；(the ArF excimer laser operation of OPTEC production is soft for the angular speed of selection circular masks rotation etching
Part has machined parameters S, S to determine that the mobile distance of laser ablation, i.e. laser fixed point move after etching once along direction initialization
Distance is equal to R/S, and being equivalent to circular masks rotation angle is Δ θ, therefore can control angular speed size by the way that S is arranged).
Then, circular masks press direction initialization 14 with a fixed angular speed along 12 rotation etching of circular path, as shown in Figure 2 B.
The mask graph center of circle is moved along circular path always when rotation etching, and circular masks circumference a little always with reflective spherical concave surface
Center of circle O is overlapped.Using O point as the center of circle, radius riMade circumference each point etching depth is identical, and etching depth is centainly to etch
The accumulation of laser ablation depth in time.Two point analysis of A, B in selective etching region, as shown in Figure 2 C, for A point,
With center of circle O, radius rACircumference 151 pass through A point, the total depth of A point is the inswept A point specific time t of laser circular arc line 161AIt is interior
Etching depth accumulation, if etching depth in the unit time is h, then the etching depth of A point is HA=h × tA, similarly, B point
Etching depth is HB=h × tB.The angular speed of circular masks each point is identical, and the etching depth of machining area each point is represented by Hi
=(2h/ π) × arccos (ri/ R), HiWith riFor anticosine relationship, work as riWhen larger, HiWith regard to smaller.
Secondly, forming the spheroidal bilateral spherical shape reflective concave surface of class, as shown in Figure 2 D when laser ablation rotates a circle.
Finally, handling bilateral spherical shape reflective concave surface, can choose through fixed point etching or by not needing area
Sheet metal is arranged in a manner of blocking laser in domain, unilateral spherical reflective concave surface 17 is obtained, as shown in Fig. 2 E and Fig. 2 F.
Suitable machined parameters (laser power P and S) how is obtained in conjunction with Fig. 2 C and Fig. 2 D concrete analysis.Select reflection sphere
Shape concave R, round etching path radius r'=R/2, circular masks radius r=R/2.When laser fixed point etches the primary moment
Erosion depth is h0, then circular masks rotation angle etches again after being Δ θ, for A point, laser circular arc line is inswept A point
Total etching depth is HA, etching number is N, there is relational expression N=HA/h0.Corresponding laser circular arc line lAEtching number is N, according to
The definition of S can obtain relational expression lA/ N=R/S obtains S=RH after simplifyingA/(lAh0), it the etching circumference locating for the A point and round etches
When path is overlapped, there is lA=(π/3) × R, then S=3HA/(πh0).It, can be in the hope of H according to designASpecific value, in laser
It can be tested under power P and measure h0Specific value.
In an embodiment of the present invention, the spherical reflective concave surface processed is stringent circular curve in one direction
Shape, and be not stringent circular curve shape on another perpendicular direction, but have in two directions to collimated light beam
There is convergence effect, better than the light beam convergence that the concave surface (application publication number: CN104503024A) of patent proposition only has a direction
Effect can be further improved coupling efficiency.
Embodiment two
The present embodiment processes spherical reflective concave surface using oval mask graph 18 (as shown in Figure 3A) in optical waveguide.
The processing thought of the present embodiment and etching process are almost the same with embodiment one, the difference is that the spherical shape being processed into
Reflective concave surface shape difference.If elliptic equation isOval mask is with a fixed angular speed along round road
Diameter rotation etching, the oval center of circle always along circle etching path 153 move, an endpoint of ellipse short shaft always with reflective spherical
Concave surface center of circle O is overlapped.Using O point as the center of circle, radius riMade circumference each point etching depth is identical.The A in selective etching region,
B two o'clock is as analysis, for A point, with center of circle O, radius rAMade circumference passes through A point, and the total depth of A point is laser circle
The inswept A point specific time t of camber line 163AInterior etching depth accumulation, is expressed as HA=h × tA, the etching depth of B point is HB=h
×tB.The angular speed of oval mask each point is identical, then to the time t of any point etchingiDepending on θi, θiWith the point to center of circle O
Distance riIt is related, therefore for oval mask, the etching depth H of machining area each pointiIt is represented by and riRelated letter
Number, i.e. Hi=f (ri), H is obtained by emulationiWith riFunctional image side profile as shown in Figure 3B, concave surface quality compares
Circular masks have better convergence effect.Equally the bilateral spherical shape reflective concave surface of acquisition is handled, obtain unilateral ball
Shape reflective concave surface, processing method are identical with embodiment one.
It can analyze machined parameters used by obtaining embodiment two (laser power P and S) in conjunction with Fig. 3 A and Fig. 3 B, swashing
Under optical power P is determined, S=RH is obtainedA/(lAh0), the etching circumference locating for the A point be overlapped with circle etching path constantly, according to
Design can be in the hope of HASpecific value, by experiment test h can be obtained0Specific value, finally obtain S value.
The sample that the present embodiment is processed also is not stringent spherical reflective concave surface on cross section, but better than real
The processed sample in example one is applied, equally there is convergence effect in two perpendicular direction to collimated light beam.
Embodiment three
The present embodiment etches spherical reflective concave surface using free curved-surface mask graph in optical waveguide, can be obtained stringent
Spherical reflective concave surface, etching process are similar with embodiment one.19 figure of free curved-surface mask is stringent by what is obtained
Spherical reflective concave surface function be back-calculated to obtain, as shown in Figure 4 A.
Fig. 4 A can be combined into the function expression for determining free curved-surface with Fig. 4 B.By the view in transverse section processed
Shape is the semicircle that radius is R, and the etching depth of note A point is HA, needing the laser circular arc line length of inswept A point is lA, swashing
It is h that optical power P, which determines that lower fixed point etches primary etching depth,0, distance of each point to spherical reflective concave surface O point in mask graph
For r.It is by the function expression that analysis obtains free curved-surfaceIts functional arrangement
As shown in the illustration in Fig. 4 B.Machined parameters S=RH used by the present embodiment further can be obtainedA/(lAh0), when A point
It, can be in the hope of H according to design when locating etching circumference is overlapped with circle etching pathASpecific value, thus obtain S=31 /2R2/(2lAh0)。
Equally the bilateral spherical shape reflective concave surface of acquisition is handled, obtain unilateral spherical reflective concave surface, processing method
It is identical with embodiment one.
The sample that the present embodiment is processed is stringent spherical reflective concave surface, is had in two perpendicular direction to collimated light beam
There is convergence effect, can efficiently improve vertical coupled efficiency.
Layer of metal film is plated to the spherical female reflecting surface that processing obtains, spherical female reflecting mirror is formed, this reflecting mirror application
It is vertical coupled in optical fiber-optical waveguide, as shown in fig. 6, spherical female reflecting mirror converges light beam, further improve vertical coupling
Close efficiency.
The above is is described in detail further combined with made by implementation thought and embodiment of the invention, not thereby
The scope of the patents of the invention is limited, it is all using equivalent structure or Equivalent Thought made by description of the invention and attached drawing, make letter
Single deduction or replace, all should belong to protection scope of the present invention.
Claims (3)
1. a kind of prepare spherical or spherical concave mirror method based on laser annular etching in optical waveguide, which is characterized in that
Operating procedure is as follows:
1) determine machining area on optical waveguide top covering surface, according to it is to be processed at reflective spherical concave determine laser
Circle etching path radius, the reflective spherical concave surface center of circle and the round etching path center of circle are overlapped；It is to be processed at reflective spherical
Concave radius need to be greater than optical waveguide core layer cross-sectional width, the light of sandwich layer transmission can all be received with this, the spherical center of circle is in light wave
Sandwich layer is led symmetrically in longitudinal sectional plane, ensures that spherical reflective concave surface the reflected beams converge at right above concave surface with this；
2) according to the specific spherical concave etched, laser ablation mask graph is selected, mask graph is round, ellipse
Or free curve shape, it determines laser power P and its characterizes the moving step length S of laser rotary etching；
3) laser mask is with a fixed angular speed along round etching path rotation etching, and then its etching depth is different for different points；Tool
Body lithographic method are as follows: when etching, laser mask with a fixed angular speed along round etching path rotation etching, begin by the mask graph center of circle
It is moved eventually along circle etching path, and mask circumference is a little overlapped with the reflective spherical concave surface center of circle always；It is round with spherical section
The heart is the center of circle, radius riMade circumference each point etching depth is identical, and etching depth is the laser incising in certain etch period
Lose the accumulation of depth, different riIts etching depth is different, works as riWhen larger, etching depth is with regard to smaller；
4) when laser ablation rotates a circle, the spheroidal bilateral spherical shape reflective concave surface of class is generally formed；The etching sample matter
Amount control method are as follows: when selecting circular masks, oval mask as laser ablation shape, the longitudinal reflective concave surface etched is simultaneously
Non-critical spherical reflective concave surface, but still there is convergence effect, vertical coupled efficiency can be effectively improved；Free curved-surface is covered
Mould be according to spherical reflective concave surface is counter push away obtained from laser mask figure, the longitudinal reflective concave surface etched is stringent spherical shape
Reflective concave surface, the position for coupling optical fiber are placed favorably, can be improved vertical coupled efficiency；
5) bilateral spherical shape reflective concave surface is handled, selection is etched by fixed point, or by not needing region placement metal
Piece obtains unilateral spherical reflective concave surface in a manner of blocking laser.
2. a kind of etched based on laser annular according to claim 1 prepares spherical or spherical concave mirror in optical waveguide
Method, which is characterized in that the step 2) specifically: selection circular masks, oval mask or free curved-surface mask are made
For laser ablation shape；Determination for laser parameter, it is first determined laser power P, under this laser power, experiment is measured
The primary depth h of laser ablation0, the moving step length S of characterization laser rotary etching is determined further according to its relational expression.
3. a kind of etched based on laser annular according to claim 1 prepares spherical or spherical concave mirror in optical waveguide
Method, which is characterized in that for the step 5) to the processing method of bilateral spherical shape reflective concave surface, there are two types of method removals not to need
Side spherical shape reflective concave surface:
First is that bilateral spherical shape reflective concave surface pinpoints the unwanted side of etching again after processing is completed；
Second is that before processing, to block laser, being obtained close to one metal block of placement at sub- machining area external position in advance
Unilateral spherical shape reflective concave surface.
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| CN107037536A (en) * | 2017-02-15 | 2017-08-11 | 上海大学 | A kind of method that recessed reflecting surface is processed in fiber waveguide side based on laser ladder etching method |
| CN108169841B (en) * | 2017-12-28 | 2019-12-24 | 中国电子科技集团公司第五十四研究所 | Mask, optical waveguide reflecting surface and optical waveguide preparation method |
| CN108303767B (en) * | 2018-02-09 | 2019-12-31 | 苏州德睿电力科技有限公司 | Method for preparing concave mirror on optical waveguide |
| CN110216383B (en) * | 2019-03-27 | 2021-08-10 | 上海大学 | Method for preparing spherical concave mirror on optical waveguide based on laser cold machining |
| CN110673261B (en) | 2019-09-06 | 2021-01-22 | 上海大学 | Method for preparing optical waveguide spherical concave mirror based on ultraviolet gray scale photoetching |
| CN111468832B (en) * | 2020-04-02 | 2022-05-24 | 大族激光科技产业集团股份有限公司 | Metal surface pit processing method |
| CN112453692B (en) * | 2020-12-01 | 2022-03-29 | 强一半导体（苏州）有限公司 | MEMS probe laser etching method |
| CN115032741A (en) * | 2022-05-22 | 2022-09-09 | 上海图灵智算量子科技有限公司 | Waveguide and optical chip comprising same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001141965A (en) * | 1999-11-15 | 2001-05-25 | Canon Inc | Photo-coupler, its manufacturing method, and optical transmitter-receiver and optical interconnection device using the same |
| CN105051581A (en) * | 2013-03-29 | 2015-11-11 | 住友电木株式会社 | Optical waveguide and electronic device |
| CN105397300A (en) * | 2014-08-22 | 2016-03-16 | 中兴通讯股份有限公司 | Optical waveguide reflector machining method and system and optical waveguide |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1019637C2 (en) * | 2001-12-21 | 2003-07-09 | Lionix B V | Device and method for coupling light into a flat waveguide, device and method for coupling light from a flat waveguide, and methods for manufacturing such devices. |
-
2017
- 2017-02-13 CN CN201710076388.7A patent/CN106707411B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001141965A (en) * | 1999-11-15 | 2001-05-25 | Canon Inc | Photo-coupler, its manufacturing method, and optical transmitter-receiver and optical interconnection device using the same |
| CN105051581A (en) * | 2013-03-29 | 2015-11-11 | 住友电木株式会社 | Optical waveguide and electronic device |
| CN105397300A (en) * | 2014-08-22 | 2016-03-16 | 中兴通讯股份有限公司 | Optical waveguide reflector machining method and system and optical waveguide |
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