CN106706753B - Differential electromagnetic ultrasonic sensor and detection system - Google Patents

Differential electromagnetic ultrasonic sensor and detection system Download PDF

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CN106706753B
CN106706753B CN201611089857.0A CN201611089857A CN106706753B CN 106706753 B CN106706753 B CN 106706753B CN 201611089857 A CN201611089857 A CN 201611089857A CN 106706753 B CN106706753 B CN 106706753B
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signal
differential
excitation
electromagnetic ultrasonic
ultrasonic sensor
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CN106706753A (en
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郑阳
周进节
张宗健
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China Special Equipment Inspection and Research Institute
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China Special Equipment Inspection and Research Institute
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2412Probes using the magnetostrictive properties of the material to be examined, e.g. electromagnetic acoustic transducers [EMAT]

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  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The application discloses a differential electromagnetic ultrasonic sensor and a detection system. The differential electromagnetic ultrasonic sensor comprises a magnet, at least one layer of differential coil and a packaging shell, wherein: the differential coil comprises two signal wires, wherein the two signal wires are coiled in parallel for a plurality of circles in a plane, so that the two signal wires are alternately arranged from inside to outside and the directions of excitation signals transmitted in the two signal wires are the same, and the first end of each signal wire is used for receiving one excitation signal; the second ends of the two signal wires are grounded. The application solves the technical problem of low transduction efficiency of the electromagnetic ultrasonic sensor adopting the coil wound by a single wire.

Description

Differential electromagnetic ultrasonic sensor and detection system
Technical Field
The application relates to the field of ultrasonic nondestructive detection, in particular to a differential electromagnetic ultrasonic sensor and a detection system.
Background
Compared with the traditional ultrasonic detection technology, the electromagnetic ultrasonic detection technology has the advantages of high precision, no need of couplant, non-contact, suitability for on-line rapid detection and high-temperature detection and the like, and is widely applied to high Wen Cehou, on-line detection, rapid flaw detection and the like in industry.
The electromagnetic ultrasonic sensor can realize the excitation and the reception of ultrasonic by utilizing an electromagnetic coupling mode, and has the main defects of lower transduction efficiency, easiness in being influenced by factors such as lift-off (a gap between the electromagnetic ultrasonic sensor and a detected workpiece) and the like. Therefore, designing an electromagnetic ultrasonic sensor with high transduction efficiency is a key point of electromagnetic ultrasonic detection technology.
The current general electromagnetic ultrasonic sensor mainly comprises a magnet, a high-frequency coil and a shell, wherein the high-frequency coil is a key component for realizing transduction of the electromagnetic ultrasonic sensor. The high-frequency coil can be used for electromagnetic ultrasonic excitationTo generate eddy currents and dynamic magnetic fields, which can induce changes in the magnetic field during reception to induce current. In the prior art, a high-frequency coil in an in-service electromagnetic ultrasonic sensor is mostly wound by adopting a single-wire winding mode based on a single-ended signal, as shown in fig. 1a and 1b, wherein fig. 1a is a top view of the high-frequency coil, and fig. 1b is a perspective view of the high-frequency coil shown in fig. 1 a. The excitation mode of the single-wire wound coil is a single-ended signal excitation mode, and as shown in fig. 2, the peak-to-peak voltage upp=2v of the single-ended excitation signal 0 The number of cycles of the signal is N. The transmission directions of the excitation signal in the signal line and the ground line at the time of excitation are shown in fig. 1a, and the transmission directions of the reception signal in the signal line and the ground line at the time of reception are shown in fig. 1 b. The mode of adopting the single wire to wind the coil has the characteristics of simple winding, effective transduction, simple interface with instruments and the like. However, the electromagnetic ultrasonic sensor adopting the coil design has the advantages of limited transduction efficiency, low signal-to-noise ratio of detection signals, poor anti-interference capability and low sensitivity to weak signals.
Aiming at the technical problem of low transduction efficiency of an electromagnetic ultrasonic sensor adopting a coil wound by a single wire, no effective solution is proposed at present.
Disclosure of Invention
The embodiment of the application provides a differential electromagnetic ultrasonic sensor and a detection system, which are used for at least solving the technical problem of low transduction efficiency of the electromagnetic ultrasonic sensor adopting a coil wound by a single wire.
According to an aspect of an embodiment of the present application, there is provided a differential electromagnetic ultrasonic sensor including a magnet, at least one layer of differential coil, and a package case, wherein: the differential coil comprises two signal wires, wherein the two signal wires are coiled in parallel for a plurality of circles in a plane, so that the two signal wires are alternately arranged from inside to outside and the directions of excitation signals transmitted in the two signal wires are the same, and the first end of each signal wire is used for receiving one excitation signal; the second ends of the two signal wires are grounded.
Further, the differential electromagnetic ultrasonic sensor comprises a plurality of layers of differential coils, planes of each layer of differential coil are parallel to each other, and the directions of excitation signals transmitted in each layer of differential coil are the same.
Further, the multi-layer differential coil comprises a first layer differential coil and a second layer differential coil which are adjacent to each other, and two second ends of the first layer differential coil are connected with two first ends of the second layer differential coil in a one-to-one correspondence manner.
Further, each layer of differential coil is positioned in one plane of the PCB, and two second ends of the first layer of differential coil are correspondingly connected with two first ends of the second layer of differential coil one by one through holes on the PCB.
Further, two signal wires in the differential coil are wound in parallel into one of the following shapes: ring, pie, racetrack, turn-back, and butterfly.
According to another aspect of an embodiment of the present application, there is also provided an electromagnetic ultrasonic detection system including: the excitation source is used for generating an excitation signal; the signal conditioner is connected with the excitation source and is used for conditioning the excitation signal into a first excitation signal and a second excitation signal which are identical in frequency and amplitude and opposite in phase; the differential electromagnetic ultrasonic sensor of any one of claims 1-5, coupled to a signal conditioner for receiving the first excitation signal and the second excitation signal to induce eddy currents in the target object.
Further, the differential electromagnetic ultrasonic sensor comprises at least one layer of differential coil, the differential coil comprises two signal wires, and the signal conditioner is further used for generating a differential detection signal by differencing signals output by the two signal wires.
Further, the method further comprises the following steps: and the signal processor is connected with the signal conditioner and is used for carrying out signal processing on the differential detection signals.
Further, the signal processor includes: the pre-amplifier is connected with the signal conditioner and used for amplifying the differential detection signal; the signal collector is connected with the pre-amplifier and is used for collecting amplified differential detection signals, and the excitation source comprises: a signal generator for generating an excitation signal; and the power amplifier is connected with the signal generator and the signal conditioner and is used for amplifying the excitation signal.
Further, the waveform generated by the differential electromagnetic ultrasonic sensor is any one of the following: transverse, longitudinal, guided and surface waves.
In the embodiment of the application, two differential excitation signals which are conditioned by the same excitation signal and have opposite phases are respectively received by two coils which are spaced by a preset distance and wound in parallel, ultrasonic waves are generated according to the two differential excitation signals, and the signals can be respectively received by the two coils, so that the technical problem of low transduction efficiency of the electromagnetic ultrasonic sensor adopting the coil wound by a single wire is solved, and the technical effect of improving the transduction efficiency of the electromagnetic ultrasonic sensor is further realized.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:
FIG. 1a is a top view of an alternative high frequency coil of the prior art;
FIG. 1b is a perspective view of an alternative high frequency coil of the prior art;
FIG. 2 is a schematic diagram of an alternative excitation signal for exciting an electromagnetic ultrasonic sensor of the prior art;
FIG. 3 is a schematic diagram of an alternative differential coil in accordance with an embodiment of the present application;
FIG. 4a is a schematic diagram of another alternative differential coil according to an embodiment of the present application;
FIG. 4b is a schematic diagram of another alternative differential coil according to an embodiment of the present application;
FIG. 5 is a schematic diagram of the excitation principle of an alternative excited differential electromagnetic ultrasonic sensor in accordance with an embodiment of the present application;
FIG. 6 is a schematic diagram of the reception principle of differential signals by an alternative differential electromagnetic ultrasonic sensor according to an embodiment of the present application;
FIG. 7 is a schematic diagram of another alternative differential coil in accordance with an embodiment of the present application;
FIG. 8 is a schematic diagram of another alternative differential coil in accordance with an embodiment of the present application;
FIG. 9 is a schematic diagram of another alternative differential coil in accordance with an embodiment of the present application;
FIG. 10 is a schematic diagram of another alternative differential coil in accordance with an embodiment of the present application;
FIG. 11 is a schematic diagram of an alternative electromagnetic ultrasonic detection system according to an embodiment of the present application;
FIG. 12 is a schematic diagram of another alternative electromagnetic ultrasonic detection system according to an embodiment of the present application;
fig. 13 is a flowchart of an alternative signal processing method according to an embodiment of the application.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the application described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1
According to an embodiment of the present application, an embodiment of a differential electromagnetic ultrasonic sensor is provided. The differential electromagnetic ultrasonic sensor provided by the embodiment can be applied to a differential electromagnetic ultrasonic detection system.
Fig. 3 is a schematic diagram of an alternative differential coil in accordance with an embodiment of the present application. The differential electromagnetic ultrasonic sensor provided in this embodiment includes a magnet, at least one layer of differential coil as shown in fig. 3, and a package housing, wherein: the differential coil comprises two signal lines, a first signal line 11 and a second signal line 12, respectively, each signal line having a first end for receiving an excitation signal.
The two excitation signals have the same frequency and amplitude and opposite phases.
The first signal line is wound into a first coil on a first plane for receiving a first excitation signal through a first end of the first signal line. The coil wound by the first signal wire may be wound outside-in as shown in fig. 3, i.e. the first end (also the excitation signal receiving end) of the first signal wire is outside the differential electromagnetic ultrasonic sensor. The coil wound by the first signal wire can also be a coil wound from inside to outside.
The second signal line is wound in parallel with the first signal line by a first predetermined distance on the first plane to form a second coil so as to be sleeved with the first coil (as shown in fig. 3), and is used for receiving a second excitation signal through a first end of the second signal line.
The two signal lines are wound in parallel in one plane for a plurality of turns so that the two signal lines are alternately arranged from inside to outside, that is, the first signal lines and the second signal lines are alternately arranged in turn when seen from the inside of the coil to the outside of the coil, and likewise, the first signal lines and the second signal lines are alternately arranged when seen from the outside of the coil to the inside of the coil. Meanwhile, the coils formed by the two signal coils also enable the directions of excitation signals transmitted in the two signal wires to be the same.
The second ends of the two signal lines are grounded, as shown in fig. 3 as ground line 13.
The ground wire is connected with the second end of the first signal wire and the second end of the second signal wire and is used for grounding. The first signal line and the second signal line form two differential signal lines, and form a loop with a common ground line.
Alternatively, the ground line may be disposed on the first plane: for example, the second end of the first signal line and the second end of the second signal line are joined to the lead-out ground line; or, the ground wires can be divided into two, the first ground wire is led out through the coil with the direction opposite to the first signal wire extending out from the second end of the first signal wire, the second ground wire is led out through the coil with the direction opposite to the second signal wire extending out from the second end of the second signal wire, and then the tail ends of the first ground wire and the second ground wire are connected for grounding.
Alternatively, the ground line may also be disposed on the second plane, as in the embodiment shown in fig. 3, with the second end of the first signal line and the second end of the second signal line being routed through a via on the PCB circuit board and joined together.
The differential electromagnetic ultrasonic sensor provided by the embodiment receives two differential excitation signals which are conditioned by the same excitation signal and have opposite phases through the two coils which are spaced by a preset distance and wound in parallel, generates ultrasonic waves according to the two differential excitation signals, and can also receive the signals through the two coils respectively, so that the technical problem of low transduction efficiency of the electromagnetic ultrasonic sensor adopting the coil wound by a single wire is solved, and the technical effect of improving the transduction efficiency of the electromagnetic ultrasonic sensor is further realized.
As a preferable mode of the above-mentioned scheme, the differential electromagnetic ultrasonic sensor may include a plurality of differential coils, planes of each differential coil being parallel to each other, and directions of excitation signals transmitted in each differential coil being the same.
For example, the differential electromagnetic ultrasonic sensor may include a two-layer differential coil arrangement as shown in fig. 4a and 4b, where fig. 4a is a top view of the differential coil provided by this embodiment and fig. 4b is a perspective view of the differential coil shown in fig. 4 a. The planes of the differential coils of each layer are parallel, and in the upper and lower layers of differential coils, the transmission directions of the excitation signals are the same, and the transmission directions of the detection signals are also the same.
Preferably, adjacent first-layer differential coils and second-layer differential coils of the multi-layer differential coils are connected, specifically, two second ends of the first-layer differential coils are connected in one-to-one correspondence with two first ends of the second-layer differential coils, as shown in fig. 4a and 4 b. When connected in this manner, if the first layer of coils is wound outside-in, the second layer of coils is wound inside-out and vice versa. When the excitation signal is generated, the two second ends of the first-layer differential coil are output ends, the excitation signal is output to the two first ends of the second-layer differential coil, when the echo signal is detected, the differential coil receives the echo signal, the two second ends of the first-layer differential coil are input ends, and the current direction in the coil is that the two first ends of the second-layer differential coil are connected to the two second ends of the first-layer differential coil.
As shown in fig. 4a, the shape of the first ground line mapped on the first plane may partially coincide with the first signal line, and the shape of the second ground line mapped on the second plane may partially coincide with the second signal line. The shape of the first ground line mapped on the first plane is symmetrical to the first signal line, and the shape of the second ground line mapped on the second plane is symmetrical to the second signal line. As shown in fig. 4b, the first via and the second via may be vias that vertically penetrate the PCB.
The signal transmission direction shown in fig. 4a is the transmission direction of the excitation signal of the differential coil during the excitation process, the first signal line receives the signal+, the second signal line receives the signal-, and the signal+ and the signal-are two excitation signals with opposite phases. When the differential electromagnetic ultrasonic sensor of this embodiment receives an excitation signal to generate ultrasonic waves, the transmission directions of the excitation signals in the first signal line and the second signal line are as shown in fig. 4 a. The excitation principle is shown in fig. 5, the first signal line receives a signal+, and the peak-to-peak voltage U' pp=2v 0 The signal has a period of N, the second signal line receives the signal-, peak-to-peak voltage U' pp=2V 0 The number of cycles of the signal is N, and the signal-phase is opposite to the signal+.
The signal transmission direction shown in fig. 4b is the signal transmission direction of the differential coil when receiving the detection signal, and the direction of the reception signal after the induction of the differential coil is shown in fig. 4 b. The principle of detecting the induction signals is shown in fig. 6, and the differential signal conditioning process is performed on the two induction signals received by the differential coil, so as to obtain a peak-to-peak value of upp=4v 0 Is provided.
Compared with single-ended signal excitation, the differential electromagnetic ultrasonic sensor provided by the embodiment of the application can obtain a detection signal with stronger intensity under the condition of not changing excitation voltage. In addition, because the interference signals exist in the detection process and the two paths of received induction signals at the same time, common-mode interference signals in the induction signals can be eliminated through difference processing, and the anti-interference capability of the electromagnetic ultrasonic sensor is improved.
Preferably, the coils in the differential electromagnetic ultrasonic sensor provided in this embodiment may use a PCB circuit board as a carrier, each layer of differential coils is located in a plane of the PCB circuit board, and two second ends of the first layer of differential coils are connected to two first ends of the second layer of differential coils in a one-to-one correspondence manner through vias on the PCB circuit board.
Alternatively, the coils in the differential electromagnetic ultrasonic sensor provided by the application can be designed into patterns as shown in fig. 7-10.
FIG. 7 is a differential racetrack differential coil; fig. 8 is a differential pancake-type differential coil, fig. 4 is a differential annular differential coil, the pancake-type coil is different from the annular coil in that the signal line of the pancake-type coil has a certain width, and the annular signal line is a thinner thread; FIG. 9 is a differential return coil; fig. 10 is a differential butterfly coil.
Among them, pancake coils, toroidal coils, racetrack coils, butterfly coils are generally used to generate either a straight incident transverse wave or a longitudinal wave, while return coils are generally used to generate oblique incident sound waves. In addition, the differential electromagnetic ultrasonic sensor can also be applied to an electromagnetic ultrasonic guided wave sensor for exciting and receiving guided waves.
The differential electromagnetic ultrasonic sensor provided in the above embodiment further includes a magnet, a package case, and the like, and the package case is used for packaging the magnet and the differential coil.
Example 2
There is also provided in accordance with an embodiment of the present application an electromagnetic ultrasonic detection system.
FIG. 11 is a schematic diagram of an alternative electromagnetic ultrasonic detection system according to an embodiment of the present application. As shown in fig. 11, the system includes an excitation source 10, a signal conditioner 20, and a differential electromagnetic ultrasonic sensor 30.
The excitation source is used for generating an excitation signal; the signal conditioner is connected with the excitation source and is used for conditioning the excitation signal into a first excitation signal and a second excitation signal which are identical in frequency and amplitude and opposite in phase; the differential electromagnetic ultrasonic sensor is connected with a signal conditioner and is used for receiving a first excitation signal and a second excitation signal to induce eddy currents in a target object.
The target object is an object which is close to the differential electromagnetic ultrasonic sensor to generate induction phenomenon, and specifically, may be a detected workpiece.
Preferably, the two signal lines of the differential coil are further configured to receive the first received signal and the second received signal, respectively, and the signal conditioner is further configured to perform a difference between the first received signal and the second received signal to generate the differential received signal.
Preferably, the differential electromagnetic ultrasonic sensor comprises a differential coil, the differential coil comprises two signal wires, and the signal conditioner is further used for generating a differential detection signal by differencing according to signals output by the two signal wires.
Preferably, the method further comprises: and the signal processor is connected with the signal conditioner and is used for carrying out signal processing on the differential detection signals.
Preferably, the signal processor comprises: the pre-amplifier is connected with the signal conditioner and used for amplifying the differential detection signal; and the signal collector is connected with the pre-amplifier and is used for collecting the amplified differential detection signals.
When the pre-amplifier amplifies the differential detection signals, the pre-amplifier may amplify the signals after the differential, or may amplify the two signals before the two detection signals are differential, and then input the signals to the signal conditioner for differential.
Preferably, the excitation source includes: a signal generator for generating an excitation signal; and the power amplifier is connected with the signal generator and the signal conditioner and is used for amplifying the excitation signal.
Preferably, the waveform generated by the differential electromagnetic ultrasonic sensor is any one of the following: transverse, longitudinal, guided and surface waves.
FIG. 12 is a schematic diagram of another alternative electromagnetic ultrasonic detection system according to an embodiment of the present application. As shown in fig. 12, the electromagnetic ultrasonic detection system includes:
the excitation source comprises a signal generator and a power amplifier. The signal generator is used for generating an excitation signal, and the power amplifier is used for amplifying the excitation signal. The excitation source is connected with a signal conditioner, and the signal conditioner divides an excitation signal into two differential excitation signals: the first excitation signal and the second excitation signal are transmitted through two signal wires, namely a signal+ signal wire and a signal-signal wire, and form a loop with the ground wire, wherein the two differential excitation signals have the same frequency and amplitude but opposite phases.
The differential electromagnetic ultrasonic detection system comprises the differential electromagnetic ultrasonic sensor provided by the embodiment of the application, the first signal wire and the second signal wire of the differential coil in the differential electromagnetic ultrasonic sensor are used for receiving the induced signals, then the two differential signals are subjected to difference solving processing through the signal conditioner and sent to the preamplifier, and finally the signals are sent to the signal collector for signal collection and processing.
Example 3
An embodiment of a signal processing method is also provided according to the present application. The signal processing method provided by the embodiment is applied to an electromagnetic ultrasonic detection system, and the electromagnetic ultrasonic detection system comprises: the device comprises an excitation source, a signal conditioner connected with the excitation source and a differential electromagnetic ultrasonic sensor connected with the signal conditioner.
As shown in fig. 13, the signal processing method provided in this embodiment includes:
step S101, an excitation source generates an excitation signal; step S102, a signal conditioner conditions excitation signals to obtain a first excitation signal and a second excitation signal which are the same in frequency and amplitude and opposite in phase; in step S103, the differential electromagnetic ultrasonic sensor receives the first excitation signal and the second excitation signal to induce eddy currents in the target object. Wherein the target object is an object, such as a workpiece to be inspected, which is brought close to the differential electromagnetic ultrasonic sensor to generate an induction phenomenon.
Preferably, the method may further comprise: the differential electromagnetic ultrasonic sensor generates two detection signals; the signal conditioner performs a difference processing on the two detection signals to obtain a differential detection signal.
It should be noted that although a logical order of steps is illustrated in the flowchart, in some cases the steps illustrated or described may be performed in a different order than what is depicted.
The foregoing embodiment numbers of the present application are merely for the purpose of description, and do not represent the advantages or disadvantages of the embodiments.
In the foregoing embodiments of the present application, the descriptions of the embodiments are emphasized, and for a portion of this disclosure that is not described in detail in this embodiment, reference is made to the related descriptions of other embodiments.
The foregoing is merely a preferred embodiment of the present application and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present application, which are intended to be comprehended within the scope of the present application.

Claims (10)

1. The utility model provides a differential electromagnetic ultrasonic sensor which characterized in that, differential electromagnetic ultrasonic sensor includes magnet, at least one deck differential coil and encapsulation shell, wherein:
the differential coil comprises two signal wires which are coiled in parallel for a plurality of circles in a plane, so that the two signal wires are alternately arranged from inside to outside and the directions of excitation signals transmitted in the two signal wires are the same, wherein the first end of each signal wire is used for receiving one excitation signal; the frequency and amplitude of the excitation signals received by the two signal lines are the same and the phases are opposite;
the second ends of the two signal wires are grounded.
2. The differential electromagnetic ultrasonic sensor according to claim 1, wherein the differential electromagnetic ultrasonic sensor comprises a plurality of layers of the differential coils, planes of each layer of the differential coils are parallel to each other, and excitation signals transmitted in each layer of the differential coils have the same direction.
3. The differential electromagnetic ultrasonic sensor according to claim 2, wherein the plurality of differential coils comprises a first layer of differential coils and a second layer of differential coils adjacent to each other, and two second ends of the first layer of differential coils are connected in one-to-one correspondence with two first ends of the second layer of differential coils.
4. A differential electromagnetic ultrasonic sensor according to claim 3 wherein each layer of differential coils is located in a plane of a PCB circuit board, and the two second ends of the first layer of differential coils are connected in one-to-one correspondence with the two first ends of the second layer of differential coils through vias on the PCB circuit board.
5. The differential electromagnetic ultrasonic sensor of claim 1, wherein two signal wires in the differential coil are coiled in parallel into one of the following shapes: ring, pie, racetrack, turn-back, and butterfly.
6. An electromagnetic ultrasonic detection system, comprising:
the excitation source is used for generating an excitation signal;
the signal conditioner is connected with the excitation source and is used for conditioning the excitation signal into a first excitation signal and a second excitation signal which are identical in frequency and amplitude and opposite in phase;
the differential electromagnetic ultrasonic sensor of any one of claims 1-5, coupled to the signal conditioner, for receiving the first excitation signal and the second excitation signal to induce eddy currents in a target object.
7. The system of claim 6, wherein the differential electromagnetic ultrasonic sensor comprises at least one layer of differential coil, the differential coil comprising two signal lines, the signal conditioner further configured to difference from signals output from the two signal lines to generate a differential detection signal.
8. The system of claim 7, further comprising:
and the signal processor is connected with the signal conditioner and is used for carrying out signal processing on the differential detection signals.
9. The system of claim 8, wherein the signal processor comprises: the pre-amplifier is connected with the signal conditioner and used for amplifying the differential detection signal; the signal collector is connected with the pre-amplifier and is used for collecting the amplified differential detection signals;
the excitation source includes: a signal generator for generating the excitation signal; and the power amplifier is connected with the signal generator and the signal conditioner and is used for amplifying the excitation signal.
10. The system of claim 6, wherein the waveform generated by the differential electromagnetic ultrasonic sensor is any one of:
transverse, longitudinal, guided and surface waves.
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