CN106705886B - 一种减小球面镜面形误差测量中机械移相误差的方法 - Google Patents
一种减小球面镜面形误差测量中机械移相误差的方法 Download PDFInfo
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- CN106705886B CN106705886B CN201710102163.4A CN201710102163A CN106705886B CN 106705886 B CN106705886 B CN 106705886B CN 201710102163 A CN201710102163 A CN 201710102163A CN 106705886 B CN106705886 B CN 106705886B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
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CN201710102163.4A CN106705886B (zh) | 2017-02-24 | 2017-02-24 | 一种减小球面镜面形误差测量中机械移相误差的方法 |
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CN201710102163.4A CN106705886B (zh) | 2017-02-24 | 2017-02-24 | 一种减小球面镜面形误差测量中机械移相误差的方法 |
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CN106705886A CN106705886A (zh) | 2017-05-24 |
CN106705886B true CN106705886B (zh) | 2019-02-22 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000180135A (ja) * | 1998-12-15 | 2000-06-30 | Inst Of Physical & Chemical Res | 干渉計測装置 |
CN102519358A (zh) * | 2011-12-26 | 2012-06-27 | 哈尔滨工业大学 | 用于检测微小球面三维形貌的相移式衍射干涉测量仪及测量方法 |
CN102997864A (zh) * | 2012-12-17 | 2013-03-27 | 北京理工大学 | 一种大口径光学非球面镜检测系统 |
CN105318847A (zh) * | 2015-11-12 | 2016-02-10 | 浙江大学 | 基于系统建模的非球面非零位环形子孔径拼接方法 |
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2017
- 2017-02-24 CN CN201710102163.4A patent/CN106705886B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000180135A (ja) * | 1998-12-15 | 2000-06-30 | Inst Of Physical & Chemical Res | 干渉計測装置 |
CN102519358A (zh) * | 2011-12-26 | 2012-06-27 | 哈尔滨工业大学 | 用于检测微小球面三维形貌的相移式衍射干涉测量仪及测量方法 |
CN102997864A (zh) * | 2012-12-17 | 2013-03-27 | 北京理工大学 | 一种大口径光学非球面镜检测系统 |
CN105318847A (zh) * | 2015-11-12 | 2016-02-10 | 浙江大学 | 基于系统建模的非球面非零位环形子孔径拼接方法 |
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Effective date of registration: 20200819 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences Effective date of registration: 20200819 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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