CN106702186A - Preparation method of aluminum alloy for semiconductor - Google Patents
Preparation method of aluminum alloy for semiconductor Download PDFInfo
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- CN106702186A CN106702186A CN201510419703.2A CN201510419703A CN106702186A CN 106702186 A CN106702186 A CN 106702186A CN 201510419703 A CN201510419703 A CN 201510419703A CN 106702186 A CN106702186 A CN 106702186A
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Abstract
A preparation method of aluminum alloy for a semiconductor comprises the following steps: preparing aluminum and alloy; smelting the aluminum; adding the alloy to the molten aluminum to form aluminum alloy; sequentially performing stirring, slagging off, exhausting and refining; performing vacuum standing and exhausting treatment on the aluminum alloy; sampling the aluminum alloy, and analyzing to determine whether the component ratio of the aluminum alloy meets the design requirement; if the component ratio does not meet the design requirement, adding the alloy or the aluminum again based on the analyzing result until the component ratio of the aluminum alloy meets the design requirement, and performing the steps of stirring, slagging off, exhausting, refining, vacuum standing and exhausting treatment, and sampling and analyzing; and if the component ratio meets the design requirement, casting and forming to obtain the aluminum alloy. The aluminum alloy prepared by the method is uniform in mixing of main elements, and low in impurity content, and meets the requirement on the material components of the semiconductor.
Description
Technical field
The present invention relates to alloy field, more particularly to a kind of preparation method of semiconductor aluminium alloy.
Background technology
Aluminium alloy is most widely used class non-ferrous metal structural material in industry, Aeronautics and Astronautics,
Widely applied in automobile, machine-building, ship and chemical industry.Wherein, with semicon industry
Development, semiconductor manufacturing industry is increasing to the demand of rafifinal product.
At present, China there is no clear and definite standard for the high-end product application of rafifinal, be proposed by client
Corresponding buying technical requirements, specify host element requirement, impurity element and elemental gas requirement, and right
Crystal orientation, crystal grain etc. are distinctly claimed.With advances in technology and development, in customer requirement to rafifinal close
The content of impurity element is more and more lower in gold.
But the impurity content of aluminium alloy is unable to reach design requirement produced in prior art.
The content of the invention
The problem that the present invention is solved is to provide a kind of preparation method of semiconductor aluminium alloy, is partly led with reducing
Impurity content in body aluminium alloy.
To solve the above problems, the present invention provides a kind of preparation method of semiconductor aluminium alloy, including：
Aluminium material and alloy material are provided；
Melt the aluminium material；
Aluminium alloy material is formed to alloy material is added in the aluminium material of melting, and is stirred successively and is skimmed, is vented
Refining；
Vacuum is carried out to the aluminium alloy material and stands pump-down process；
Analysis is sampled to the aluminium alloy material, judges whether the composition proportion of the aluminium alloy material meets
Design requirement；
When the composition proportion does not meet design requirement, added again according to analysis result alloy material or
Aluminium material so that the composition proportion of the aluminium alloy material meets design requirement, and re-execute above-mentioned stirring skim,
The step of exhaust refining, vacuum stand pump-down process and sampling analysis；
When the composition proportion meets design requirement, carry out casting and obtain aluminium alloy.
Optionally, the step of vacuum stands pump-down process is carried out to the aluminium alloy material to be included：Carry out vacuum
Vacuum ranges during standing pump-down process are in the range of 0.01Pa to 0.001Pa.
Optionally, the step of vacuum stands pump-down process is carried out to the aluminium alloy material to be included：Stand exhaust
Time is in the range of 30min to 150min.
Optionally, the chemical purity of the aluminium material is 5N5.
Optionally, the aluminium material is solid block.
Optionally, the credit rating of element is not less than 99.99% in the alloy material.
Optionally, the alloy material is powder material.
Optionally, after the step of melting the aluminium material, aluminium is formed to alloy material is added in the aluminium material of melting
Before the step of alloy material, the preparation method also includes：It is passed through the indifferent gas as refining agent and carrier
Body.
Optionally, the inert gas is argon gas.
Optionally, the step of being passed through the inert gas includes：The flow of the inert gas be 2~20 liters/
Minute, gas pressure is 1~6kg/cm2.
Optionally, include to the step of adding alloy material in the aluminium material of melting：The addition side of the alloy material
Formula is added by several times to be divided into 2~4 batches.
Optionally, the aluminium alloy be al-si-cu alloy, by weight percentage, silicone content be 0.2~
1%；Copper content is 0.1%~0.5%；Sodium, potassium and elemental lithium total amount are not more than 0.1ppm；Uranium and thorium unit
Plain total amount is not more than 1ppm, and other impurities element total amount is not more than 5ppm；The alloy material includes silicon and copper.
Optionally, alloy material shape is added in the step of fusing aluminium material, the aluminium material to melting
Into aluminium alloy material, and be stirred successively skim, be vented refining the step of and it is described to the aluminium alloy
Material carries out the step of vacuum stands pump-down process also to be included：Temperature control is in the range of 680 DEG C to 800 DEG C.
Optionally, to alloy material formation aluminium alloy material is added in the aluminium material of melting, stirring afterwards is skimmed, arranges
The step of gas is refined includes：Add alloy material formed aluminium alloy material the step of with stirring skim the step of it
Between time interval in the range of 20min to 150min.
Optionally, after the step of exhaust refining, vacuum is carried out to the aluminium alloy material and stands pump-down process
The step of before, the preparation method also includes：Add aluminium covering agent for smelting.
Optionally, the step of adding the coverture includes：The thickness of coverture is added in 1mm to 5mm
In the range of.
Optionally, alloy material shape is added in the step of fusing aluminium material and the aluminium material to melting
Into aluminium alloy material, and be stirred successively skim, be vented refining the step of also include：The equipment for being used
It is melting in air stove, intermediate frequency furnace or vacuum resistance furnace.
Optionally, alloy material shape is added in the step of fusing aluminium material, the aluminium material to melting
Into aluminium alloy material, and be stirred successively skim, be vented refining the step of and it is described to the aluminium alloy
Material carries out the step of vacuum stands pump-down process also to be included：The equipment for being used is vacuum resistance furnace.
Compared with prior art, technical scheme has advantages below：
The present invention by after the step of being vented refining, the step of sampling analysis before, make prepared
Aluminium alloy material carries out vacuum and stands pump-down process, makes the abundant melting of aluminium alloy material of molten condition, and discharge
Gaseous impurity, so as to reduce the impurity content remained in aluminium alloy material, improves obtained aluminium alloy
Quality.Additionally, carry out vacuum standing pump-down process to the aluminium alloy material in preparation process can also make
The aluminium material of melting and the alloy material mixing for being added are abundant, so that improve the problem of the component segregation of aluminium alloy,
Raising obtains the quality of aluminium alloy.Therefore, the aluminium alloy host element that the present invention is obtained is well mixed,
Impurity content is low, disclosure satisfy that the requirement of semiconductor material composition.
Optionally, in alternative of the invention, aluminium material and the addition of 5N5 are reached from chemical purity
Alloy material of the credit rating not less than 99.99% carries out aluminium alloy smelting as raw material.Due to impurity in raw material
Content is relatively low, therefore impurity content is relatively low in the final aluminium alloy for obtaining, and can reach semiconductor manufacturing
Design requirement.
Additionally, the aluminium material selected is solid block.Because the density of solid block aluminium material is larger, surface area
Smaller, contained gaseous impurity content is less, can effectively reduce the gas content in aluminium material after melting,
Smelting efficiency can be improved.
Optionally, in alternative of the invention, can select melting in air stove, intermediate frequency furnace or
The plurality of devices such as vacuum resistance furnace realize the preparation of aluminium alloy, and equipment choice scope is big, flexible and changeable, work
Skill is simple.
Brief description of the drawings
Fig. 1 is the flow chart of the embodiment of preparation method one of semiconductor aluminium alloy provided by the present invention.
Specific embodiment
From background technology, there is impurity content and alloy unit in the aluminium alloy produced in prior art
Cellulose content cannot reach the problem of semiconductor manufacturing design requirement.Aluminium alloy mistake is produced in conjunction with prior art
The reason for journey analysis is unable to reach design requirement：
The Aluminum alloy production method of prior art is used to the method for mixing, and it is the addition unit of ordinary purity to use raw material
Plain powder and electrolytic aluminium, melted in common melting in air stove and be incubated and used machinery, electromagnetism or
After artificial stirring, casting.Electrolytic aluminium as raw material contains a large amount of impurity elements in itself, therefore makes
When carrying out aluminium alloy production as raw material with electrolytic aluminium, can there is substantial amounts of impurity unit in the alloy for being formed
Element, impurity content difficulty is larger in reducing alloy.And it is to be melted in atmosphere oven, protected to prepare
The step such as temperature and stirring, can not be such that the gaseous impurity in molten aluminium alloy is fully discharged, so
Using the method obtain aluminium alloy there are problems that impurity content it is high,.
To solve the technical problem, the present invention provides a kind of preparation method of semiconductor aluminium alloy, bag
Include：
Aluminium material and alloy material are provided；Melt the aluminium material；Aluminium is formed to alloy material is added in the aluminium material of melting
Alloy material, and be stirred successively and skim, be vented refining；Vacuum is carried out to the aluminium alloy material and stands row
Gas disposal；Analysis is sampled to the aluminium alloy material, judge the aluminium alloy material composition proportion whether
Meet design requirement；When the composition proportion does not meet design requirement, added again according to analysis result
Alloy material or aluminium material are so that the composition proportion of the aluminium alloy material meets design requirement, and re-executes
State stirring skim, be vented refining, vacuum stand pump-down process and sampling analysis the step of；When it is described into
When distribution ratio meets design requirement, carry out casting and obtain aluminium alloy.
The present invention by after the step of being vented refining, the step of sampling analysis before, make prepared
Aluminium alloy material carries out vacuum and stands pump-down process, makes the abundant melting of aluminium alloy material of molten condition, and discharge
Gaseous impurity, so as to reduce the impurity content remained in aluminium alloy material, improves obtained aluminium alloy
Quality.Additionally, carry out vacuum standing pump-down process to the aluminium alloy material in preparation process can also make
The aluminium material of melting and the alloy material mixing for being added are abundant, so that improve the problem of the component segregation of aluminium alloy,
Raising obtains the quality of aluminium alloy.Therefore, the aluminium alloy host element that the present invention is obtained is well mixed,
Impurity content is low, disclosure satisfy that the requirement of semiconductor material composition.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings
Specific embodiment of the invention is described in detail.
With reference to Fig. 1, the flow chart of the embodiment of preparation method one of semiconductor aluminium alloy of the present invention is shown.
Step S100 is first carried out, there is provided aluminium material and alloy material.
The aluminium material is matrix material, according to design needs, corresponding alloy material is added in aluminium material, is passed through
Cross the aluminium alloy that melting treatment obtains semiconductor.
It should be noted that in the present embodiment, illustrated by taking the preparation of high-purity Al-Si-Cu alloy as an example,
But should not successively limit the present invention.
Specifically, the aluminium alloy is aluminium silicone alloy, by weight percentage, silicone content is 0.2~1%；
Copper content is 0.1%~0.5%；Sodium, potassium and elemental lithium total amount are not more than 0.1ppm；Uranium and thorium element are total
Amount is not more than 1ppm, and other impurities element total amount is not more than 5ppm；The alloy material includes silicon and copper.
By reduce as far as possible the composition of impurity in acquisition alloy, in the present embodiment, the aluminium material it is chemical pure
It is 5N5 to spend, that is to say, that aluminium material uses the high-purity material of the 99.995% ratings above trade mark.
Similar, the credit rating of alloying element is not less than 99.99% in the alloy material.In the present embodiment,
Alloy material of the credit rating for silicon and copper content not less than 99.99% is used as preparing raw material.
It should be noted that in order to reduce the gas componant in obtained alloy, it is described in the present embodiment
Aluminium material is solid block.Because the density of solid block material is larger, surface area is smaller, contained in material
The composition of gas is less, therefore uses the aluminium material of solid block to prepare the aluminium alloy, advantageously reduces system
The gas produced during standby, improves preparation efficiency.
Additionally, in the present embodiment, the alloy material is powder material, in order in preparation process, in batches
Repeatedly add, the composition proportion in obtained aluminium alloy is reached design requirement.
Step S200 is performed afterwards, melts the aluminium material.
Before the step of performing S200, melt the aluminium material, the preparation method also includes：Charging.
Will the aluminium material load in the melting chamber of smelting equipment.
In the present embodiment, perform step S200, melt the aluminium material the step of include：By the solid metal block
The aluminium material of shape loads in the melting chamber of smelting equipment.Vacuumize process is carried out afterwards, is made molten residing for aluminium material
Refining reaches vacuum state in chamber, to avoid aluminium material from being reacted shape with the gas in air in the fusion process
Into impurity, alloy mass is influenceed.
After the vacuum in the smelting furnace melting chamber reaches technological requirement, the aluminium material is heated,
Melt it.
After the aluminium material of solid block all melts, step S300 is performed, closed to being added in the aluminium material of fusing
Gold material forms aluminium alloy material.
It should be noted that after performing the step of step S200 melts the aluminium material, performing step S300
Before the step of addition alloy material forms aluminium alloy material, the preparation method also includes：It is passed through as refining
Agent and the inert gas of carrier, so that the aluminium material of melting is in the atmosphere of inert gas.
Specifically, in the present embodiment, by graphite swivel nozzle to being passed through inert gas in melting chamber, with
The aluminium material of melting is set to be in the atmosphere of inert gas.Inert gas is used as refining agent and carrier, Neng Gouqing
Except the gas in the aluminium material of melting.And the inert gas is discharged in rear extended meeting, the gas in aluminium material is miscellaneous
Matter can be removed with the discharge of inert gas.
In the present embodiment, the inert gas includes argon gas.Argon gas is stable in properties, will not be with aluminium in high temperature
It is lower reaction and form impurity.Specifically, according to the size and seal degree in smelting equipment melting chamber, institute
It is 2~20L/ minutes to state the flow of inert gas, and gas pressure is 1~6kg/cm2。
After alloy material is added, the aluminium material and the alloy material are stood, to treat that the alloy material melts,
And mix with the aluminium material of melting.
It should be noted that to make the alloy material be sufficiently mixed with the aluminium material of fusing, improving final acquisition
Aluminium alloy component segregation problem, in the present embodiment, to melting aluminium material in add alloy material the step of
Including：The addition manner of the alloy material is added by several times to be divided into 2~4 batches.
Afterwards, step S400 is performed, is stirred successively and is skimmed, is vented refining.
To make the alloy material of fusing and the mixing of aluminium material abundant, improve the component segregation problem of aluminium alloy, in shape
Into after aluminium alloy material, mechanical agitation is carried out to the aluminium alloy material.
It should be noted that between the step of the step of adding alloy material to form aluminium alloy material and stirring are skimmed
Time interval in the range of 20min to 150min so that the alloy material fully melts, and with melting
The aluminium material tentatively mix.
In fusion process, the less solid impurity of density can swim in the aluminium alloy material surface of molten condition,
Therefore after mechanical agitation is carried out to the aluminium alloy material to enable aluminum alloy to material mixing fully, the place that skims is carried out
Reason, the solid impurity on aluminium alloy material surface is swum in remove, and prevents from being returned in the solid impurity described
In aluminium alloy material, and influence obtained aluminium alloy quality.
After rabbling hoe Slag treatment, the preparation method also includes that exhaust is refined.
Because in melting preparation process, elemental gas can form foreign gas, and (mainly hydrogen gas and water is steamed
Gas etc.) discharged from the raw material, the gas content in aluminium alloy can excessively influence finally to obtain alloy
Purity and quality, therefore after the step of skimming removal solid impurity, it is exhausted refining.
Specifically, discharging the inert gas in smelting equipment melting chamber in the present embodiment.With the indifferent gas
Body is carrier, the foreign gas that fusion process discharges from aluminium alloy material while inert gas is excluded,
Also it is discharged in the lump, so as to the content of the elemental gas in the aluminium alloy material for reducing fusing, improves institute
The purity of aluminium alloy material is stated, the final quality for obtaining aluminium alloy is improve.
It should be noted that added in the step of fusing aluminium material and the aluminium material to melting closing
Gold material form aluminium alloy material, and be stirred successively skim, be vented refine the step of also include：Used
Equipment be melting in air stove, intermediate frequency furnace or vacuum resistance furnace.In the present embodiment, corresponding melting step
The rapid equipment for using is vacuum resistance furnace.
After being vented refining treatment, step S500 is performed, vacuum is carried out to the aluminium alloy material and stands row
Gas disposal.
It should be noted that after the step of being exhausted refining, carrying out the treatment that vacuum stands exhaust
Before, in the present embodiment, the preparation method also includes being stirred again taking off Slag treatment, with further
The impurity in the aluminium alloy material is removed, impurity content is reduced.
After discharge is mixed with the inert gas of magazine gas, further the melting chamber to the smelting equipment is entered
Row pumping process, so that air pressure reduction in the melting chamber, vacuum environment is formed in the melting chamber,
Make the aluminium alloy material that vacuum is carried out in the melting chamber and stand exhaust.
When the aluminium alloy material is in vacuum environment, material outer air pressure is smaller, can effectively promote
Gaseous impurity release inside the aluminium alloy material, so as to further reduce the impurity in the aluminium alloy material
Content, improves the purity of obtained aluminium alloy.
In carrying out the step of vacuum stands discharge treatment to the aluminium alloy material, if to vacuum level requirements
It is too low, it is difficult to reach the purpose for promoting gaseous impurity to discharge；If too high to vacuum level requirements, can be right
The requirement of process equipment, particularly vacuum equipment is too high, is unfavorable for reducing the cost for preparing the aluminium alloy.
In the present embodiment, in being carried out to the aluminium alloy material the step of vacuum stands pump-down process, vacuum is carried out quiet
Vacuum ranges when putting pump-down process are in the range of 0.01Pa to 0.001Pa.
Additionally, in carrying out the step of vacuum stands discharge treatment to the aluminium alloy material, if left standing for mistake
Short, the foreign gas being unfavorable in the aluminium alloy material fully discharges；If left standing for overlong time, can make
Smelting time is long, be unfavorable for control fusion process in evaporation capacity, be unfavorable for improve smelting efficiency and into
Product rate.It is quiet in carrying out the step of vacuum stands discharge treatment to the aluminium alloy material in the present embodiment
Evacuation time is put in 30min to 150min scopes.
It should be noted that after the step of being vented refining, vacuum standing is carried out to the aluminium alloy material
Before the step of pump-down process, the preparation method also includes：Add aluminium covering agent for smelting.
For prevent vacuum stand exhaust process in, in aluminium alloy material discharge gaseous impurity be again introduced into melting
Aluminium material in, in the present embodiment, carry out vacuum stand exhaust treatment before, also melting described in
Coverture is added in aluminium alloy material, to cover the surface of the aluminium alloy material, it is isolated with extraneous gas.
Specifically, being sprinkled into the aluminium covering agent for smelting of 1mm to 5mm on the aluminium alloy material surface.
Also, it should be noted that the equipment used in the present embodiment is vacuum resistance furnace, the equipment can
Vacuum condition is provided, therefore the aluminium alloy material is carried out to prepare step with foregoing the step of vacuum stands exhaust
Suddenly can be carried out in same equipment.But when melting cannot provide vacuum condition using equipment, can
The step of queuing up is stood independently to carry out vacuum using vacuum equipment.In other embodiments of the present invention, when
Using melting in air stove or general intermediate frequency furnace, because equipment cannot provide vacuum condition, then need by
The aluminium alloy material carries out the treatment that vacuum stands exhaust in moving to other vacuum equipments.
Explanation is needed further exist for, the fusing point of metallic aluminium is at 660 DEG C, so if temperature is too low, aluminium material
Cannot be kept molten by；If temperature is too high, it is unfavorable for controlling evaporation capacity of the raw material in fusion process,
Improve lumber recovery.In the present embodiment, according to the design requirement of the Al-Si-Cu alloy, described in the fusing
Alloy material is added in the step of aluminium material, the aluminium material to melting and forms aluminium alloy material, and stirred successively
The step of mixing the step of skimming, be vented refining and vacuum standing pump-down process carried out to the aluminium alloy material
Also include：Temperature control is in the range of 680 DEG C to 800 DEG C.
After carrying out vacuum and standing pump-down process, step S600 is performed, the aluminium alloy material is taken
Sample is analyzed, and judges whether the composition proportion of the aluminium alloy material meets design requirement.
In fusion process, due to the reason such as skimming, evaporating, a certain amount of aluminium material can be lost and alloy enters
Material, so that the composition proportion off-design requirement of final aluminium alloy material.Additionally, in the present embodiment,
The alloy material is added batch-wise, will to make the composition proportion of aluminium alloy material of final acquisition meet design
Ask, pump-down process is stood vacuum is carried out, it is necessary to enter to the aluminium alloy material after removal gaseous impurity
Whether row sampling analysis, design requirement is met with the composition proportion for judging the aluminium alloy material.
Specifically, being sampled to the aluminium alloy material, and composition proportion therein is analyzed, to judge
State whether aluminium alloy material meets design requirement.
When the composition proportion does not meet design requirement, according to analysis result, added in aluminium alloy material
Alloy material or aluminium material, so that the composition proportion of the aluminium alloy material meets design requirement, and re-execute
The step of stating stirring and skim, be vented refining, vacuum exhaust treatment and sampling analysis.
Specifically, when the alloy material composition is too low, alloy material is added again, and re-execute stirring
The step of skimming, be vented refining, vacuum exhaust treatment and sampling analysis, to go the removal of impurity；When described
When alloy material composition is too high, aluminium material is added again, be used to dilute the alloy material, re-execute rabbling hoe
It is the step of slag, exhaust refining, vacuum exhaust treatment and sampling analysis, miscellaneous in aluminium alloy material to reduce
Matter composition.Stirring is performed again to skim, be vented the specific of refining, vacuum exhaust treatment and sampling analysis
Process is as it was previously stated, the present invention will not be repeated here.
When the composition proportion of the alloy material meets design requirement, casting is carried out, to obtain aluminium conjunction
Gold.
Specifically, being transported for the ease of storage, after the aluminium alloy material for meeting design requirement is obtained, use
The aluminium alloy material carries out ingot casting, forms aluminium ingot.Form aluminium ingot process same as the prior art, the present invention
Will not be described here.
To sum up, the present invention is by after the step of being vented refining, the step of sampling analysis before, make institute
The aluminium alloy material of preparation carries out vacuum and stands pump-down process, makes the abundant melting of aluminium alloy material of molten condition,
And gaseous impurity is discharged, so as to reduce the impurity content remained in aluminium alloy material, improve what is obtained
The quality of aluminium alloy.Additionally, carrying out vacuum to the aluminium alloy material in preparation process stands pump-down process also
The aluminium material that melting can be made and the alloy material mixing for being added are abundant, so as to improve the component segregation of aluminium alloy
Problem, raising obtains the quality of aluminium alloy.Therefore, the aluminium alloy host element that the present invention is obtained contains
Amount is uniform, and impurity content is low, disclosure satisfy that the requirement of semiconductor material composition.Additionally, of the invention can
Select in scheme, reach the aluminium material of 5N5 from chemical purity and add credit rating to be not less than 99.99%
Alloy material carries out aluminium alloy smelting as raw material.Because impurity content is relatively low in raw material, therefore final acquisition
Aluminium alloy in impurity content it is relatively low, the design requirement of semiconductor manufacturing can be reached.Additionally, select
Aluminium material is solid block.Because the density of solid block aluminium material is larger, surface area is smaller, contained gas
Impurity content is less, can effectively reduce the gas content in aluminium material after melting, it is possible to increase melting is imitated
Rate.And, in alternative of the invention, melting in air stove, intermediate frequency furnace or true can be selected
The plurality of devices such as empty resistance furnace realize the preparation of aluminium alloy, and equipment choice scope is big, flexible and changeable, technique
Simply.
Although present disclosure is as above, the present invention is not limited to this.Any those skilled in the art,
Without departing from the spirit and scope of the present invention, can make various changes or modifications, therefore guarantor of the invention
Shield scope should be defined by claim limited range.
Claims (18)
1. a kind of preparation method of semiconductor aluminium alloy, it is characterised in that including：
Aluminium material and alloy material are provided；
Melt the aluminium material；
Aluminium alloy material is formed to alloy material is added in the aluminium material of melting, and is stirred successively and is skimmed, is vented
Refining；
Vacuum is carried out to the aluminium alloy material and stands pump-down process；
Analysis is sampled to the aluminium alloy material, judges whether the composition proportion of the aluminium alloy material meets
Design requirement；
When the composition proportion does not meet design requirement, added again according to analysis result alloy material or
Aluminium material so that the composition proportion of the aluminium alloy material meets design requirement, and re-execute above-mentioned stirring skim,
The step of exhaust refining, vacuum stand pump-down process and sampling analysis；
When the composition proportion meets design requirement, carry out casting and obtain aluminium alloy.
2. preparation method as claimed in claim 1, it is characterised in that vacuum is carried out to the aluminium alloy material quiet
The step of putting pump-down process includes：Carry out vacuum stand pump-down process when vacuum ranges in 0.01Pa
To in the range of 0.001Pa.
3. preparation method as claimed in claim 1, it is characterised in that vacuum is carried out to the aluminium alloy material quiet
The step of putting pump-down process includes：Standing evacuation time is in the range of 30min to 150min.
4. preparation method as claimed in claim 1, it is characterised in that the chemical purity of the aluminium material is 5N5.
5. preparation method as claimed in claim 1, it is characterised in that the aluminium material is solid block.
6. preparation method as claimed in claim 1, it is characterised in that quality of element etc. in the alloy material
Level is not less than 99.99%.
7. preparation method as claimed in claim 1, it is characterised in that the alloy material is powder material.
8. preparation method as claimed in claim 1, it is characterised in that after the step of melting the aluminium material,
To before being added the step of alloy material forms aluminium alloy material in the aluminium material of melting, the preparation method is also wrapped
Include：It is passed through the inert gas as refining agent and carrier.
9. preparation method as claimed in claim 8, it is characterised in that the inert gas is argon gas.
10. preparation method as claimed in claim 8, it is characterised in that the step of being passed through the inert gas is wrapped
Include：The flow of the inert gas is 2~20 liters/min, and gas pressure is 1~6kg/cm2。
11. preparation methods as claimed in claim 1, it is characterised in that add alloy material in the aluminium material to melting
The step of include：The addition manner of the alloy material is added by several times to be divided into 2~4 batches.
12. preparation methods as claimed in claim 1, it is characterised in that the aluminium alloy is al-si-cu alloy,
By weight percentage, silicone content is 0.2~1%；Copper content is 0.1%~0.5%；Sodium, potassium and
Elemental lithium total amount is not more than 0.1ppm；Uranium and thorium element total amount are not more than 1ppm, other impurities element total amount
No more than 5ppm；The alloy material includes silicon and copper.
13. preparation methods as claimed in claim 12, it is characterised in that the step of the fusing aluminium material,
Alloy material is added in the aluminium material to melting and forms aluminium alloy material, and be stirred successively and skim, arrange
The step of gas is refined and it is described the aluminium alloy material is carried out vacuum stand pump-down process the step of also wrap
Include：Temperature control is in the range of 680 DEG C to 800 DEG C.
14. preparation methods as claimed in claim 12, it is characterised in that add alloy material in the aluminium material to melting
Aluminium alloy material is formed, the step of skimming, be vented refining is stirred afterwards to be included：Formed alloy material is added
Time interval between the step of the step of aluminium alloy material and stirring are skimmed is in 20min to 150min scopes
It is interior.
15. preparation methods as claimed in claim 12, it is characterised in that after the step of exhaust is refined, to institute
Before aluminium alloy material is stated the step of carrying out vacuum standing pump-down process, the preparation method also includes：Plus
Enter aluminium covering agent for smelting.
16. preparation methods as claimed in claim 15, it is characterised in that the step of adding the coverture includes：
The thickness of addition coverture is in the range of 1mm to 5mm.
17. preparation methods as claimed in claim 1, it is characterised in that the step of the fusing aluminium material and
Alloy material is added in the aluminium material to melting and forms aluminium alloy material, and be stirred successively and skim, arrange
The step of gas is refined also includes：The equipment for being used is melting in air stove, intermediate frequency furnace or vacuum electric
Resistance stove.
18. preparation methods as claimed in claim 1, it is characterised in that the step of the fusing aluminium material,
Alloy material is added in the aluminium material to melting and forms aluminium alloy material, and be stirred successively and skim, arrange
The step of gas is refined and it is described the aluminium alloy material is carried out vacuum stand pump-down process the step of also wrap
Include：The equipment for being used is vacuum resistance furnace.
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| CN201510419703.2A CN106702186A (en) | 2015-07-16 | 2015-07-16 | Preparation method of aluminum alloy for semiconductor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109536723A (en) * | 2018-12-27 | 2019-03-29 | 西南铝业（集团）有限责任公司 | A kind of recovery method of aluminium lithium alloy processing bit |
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