CN106684083B - Display bottom plate of full-color scanning display device and manufacturing method thereof - Google Patents
Display bottom plate of full-color scanning display device and manufacturing method thereof Download PDFInfo
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- CN106684083B CN106684083B CN201710115409.1A CN201710115409A CN106684083B CN 106684083 B CN106684083 B CN 106684083B CN 201710115409 A CN201710115409 A CN 201710115409A CN 106684083 B CN106684083 B CN 106684083B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 71
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 60
- 239000000741 silica gel Substances 0.000 claims abstract description 60
- 239000000843 powder Substances 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 239000003086 colorant Substances 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 10
- 108010043121 Green Fluorescent Proteins Proteins 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000005234 chemical deposition Methods 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 3
- 230000002708 enhancing effect Effects 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 11
- 239000004033 plastic Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Images
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The invention discloses a display bottom plate of a full-color scanning display device and a manufacturing method thereof, wherein the display bottom plate comprises a substrate and a cavity which is arranged on the substrate and is packaged with silica gel; the cavity is a plurality of unit grooves which are vertically and horizontally spaced and distributed in an array manner, or a plurality of rows of long grooves which are horizontally spaced and parallel; every four adjacent unit grooves are provided with a pixel and respectively package fluorescent powder and silica gel with different colors; or the fluorescent powder and the silica gel with different colors are packaged in every four rows or three adjacent rows of the long grooves. According to the invention, a plurality of cavities for encapsulating fluorescent powder are formed on the substrate to simulate display pixels, and fluorescent powder with different colors is encapsulated in each cavity, so that colorful display is obtained.
Description
Technical Field
The invention relates to a display bottom plate of a full-color scanning display device and a manufacturing method thereof.
Background
A Head-Up Display (HUD), which is a flying auxiliary instrument commonly used in aircrafts at present, projects information such as flight parameters, aiming attacks, self-detection and the like in the form of images and characters on an optical/electric Display device on a combined glass right in front of a cockpit through an optical component. When the pilot sees the scenery outside the cabin through the combined glass, the pilot can see information such as characters and images superposed on the scenery outside the cabin simultaneously, and the projection focal length is located the imaging combined glass and is located the place ahead, so that the pilot can conveniently view flight parameters at any time without changing the focal length of eyes, and the visibility can not be influenced by sunlight irradiation. With the rapid development of science and technology, the head-up display technology has been applied to high-end cars. However, the existing head-up display and scanning projector have the defects of single color, complex structure and larger volume.
Disclosure of Invention
A first object of the present invention is to provide a display backplane of a full color scanning display device capable of displaying rich colors.
The technical scheme for realizing the first purpose of the invention is that the display bottom plate of the full-color scanning display device comprises a substrate and a cavity which is arranged on the substrate and is packaged with silica gel; the cavity is a plurality of unit grooves which are vertically and horizontally spaced and distributed in an array manner, or a plurality of rows of long grooves which are horizontally spaced and parallel; every four adjacent unit grooves are provided with a pixel and respectively package fluorescent powder and silica gel with different colors; or the fluorescent powder and the silica gel with different colors are packaged in every four rows or three adjacent rows of the long grooves.
Silica gel containing red fluorescent powder, silica gel containing yellow fluorescent powder, silica gel containing green fluorescent powder and silica gel not containing fluorescent powder and used for reflecting blue light are respectively packaged in every four adjacent unit grooves; the elongated slots adjacent to each four rows are respectively packaged with silica gel containing red fluorescent powder, silica gel containing yellow fluorescent powder, silica gel containing green fluorescent powder and silica gel which is used for reflecting blue light and does not contain fluorescent powder; and each three adjacent rows of the long grooves are respectively packaged with silica gel containing red fluorescent powder, silica gel containing green fluorescent powder and silica gel containing yellow fluorescent powder.
The cross section of each unit groove is in a trapezoid shape with a wide upper part and a narrow lower part, or is in an inverted triangle shape or is in an arc shape; the cross section of the long groove is rectangular or circular arc or triangular or trapezoid with wide upper part and narrow lower part.
A plating layer is arranged on the inner wall of each cavity; the coating is a metal or inorganic substance coating reflective film for enhancing visible light reflection.
The plating layer is an aluminum plating layer.
Each cavity is consistent in size and shape, and the size is determined by the requirement of a display pixel.
The substrate is a glass substrate, and the cavity is a unit groove with an arc-shaped section or a long groove with an arc-shaped section.
The substrate is a silicon substrate, the cavity is a unit groove with a trapezoidal or inverted triangular cross section with a wide upper part and a narrow lower part or a long groove with a rectangular cross section, and the cavity is formed on the silicon substrate through etching.
The substrate is a plastic substrate, and the cavity is formed by nano-printing on the plastic substrate.
The second purpose of the invention is to provide a method for manufacturing a display backplane of a full-color scanning display device.
The technical scheme for realizing the second purpose of the invention is a manufacturing method of a display bottom plate of a full-color scanning display device, which comprises the following steps:
the method comprises the following steps: preparing a substrate;
step two: forming a cavity on a substrate; the cavity is a plurality of unit grooves which are vertically and horizontally spaced and distributed in an array manner, or a plurality of rows of long grooves which are horizontally spaced and parallel;
step three: encapsulating fluorescent powder and silica gel in each cavity, wherein each four adjacent unit grooves are provided with a pixel and respectively encapsulate the fluorescent powder and the silica gel with different colors; or the fluorescent powder and the silica gel with different colors are packaged in every four rows or three adjacent rows of the long grooves.
In the first step, the substrate is a silicon substrate;
in the second step, a cavity is formed by adopting an etching method; the cavity is a unit groove with a trapezoidal or inverted triangular cross section with a wide upper part and a narrow lower part, or an elongated groove with a rectangular cross section.
In the second step, a silicon nitride or silicon oxide film is covered on the surface of the silicon substrate by adopting a chemical deposition CVD method, after a silicon oxide or silicon nitride protective film is etched by adopting a wet method or a plasma dry etching method, alkaline solvent TMAH or KOH wet etching is adopted, and a trapezoid or inverted triangle inclined plane unit groove with a wide upper section and a narrow lower section is etched along 100 surfaces of silicon; or an elongated slot with a rectangular cross section etched along the 110 sides of the silicon.
In the first step, the substrate is a thermoplastic substrate;
in the second step, a roller with trapezoidal or arc or triangular bulges with cross sections arranged transversely and longitudinally at intervals or with rectangular or arc or triangular bulges with cross sections arranged transversely and parallelly at intervals is used for obtaining the required cavity on the plastic substrate through a nano printing technology.
In the first step, the substrate is a glass substrate;
in the second step, a cavity is etched on the glass substrate by adopting buffered hydrofluoric acid BHF or hydrofluoric acid HF; the cross section of the cavity is arc unit grooves arranged at intervals transversely and longitudinally, or semicircular or arc long grooves arranged at intervals transversely and parallelly.
In the third step, firstly, a coating is formed on the inner wall of each cavity; the coating is a metal or inorganic substance coating reflective film for enhancing visible light reflection; silica gel containing red fluorescent powder, silica gel containing yellow fluorescent powder, silica gel containing green fluorescent powder and silica gel not containing fluorescent powder and used for reflecting blue light are respectively packaged in every four adjacent unit grooves; the elongated slots adjacent to each four rows are respectively packaged with silica gel containing red fluorescent powder, silica gel containing yellow fluorescent powder, silica gel containing green fluorescent powder and silica gel which is used for reflecting blue light and does not contain fluorescent powder; and each three adjacent rows of the long grooves are respectively packaged with silica gel containing red fluorescent powder, silica gel containing green fluorescent powder and silica gel containing yellow fluorescent powder.
After the technical scheme is adopted, the invention has the following positive effects: (1) the invention adopts the mode that unit grooves which are distributed in an array mode and are transversely and vertically arranged at intervals are arranged on a substrate or long grooves which are arranged in parallel at intervals in a transverse direction and a longitudinal direction, four adjacent or four adjacent rows or three adjacent rows are used as a pixel, silica gel or pure silica gel containing fluorescent powder with different colors is packaged, the mode of scanning blue laser with short wavelength to deactivate the fluorescent powder with other colors such as red, green, yellow and the like is adopted, the power of scanning the blue laser and the staying and exciting time of each fluorescent powder unit determines the brightness and color mixing of each pixel point, and therefore, the colorful display effect is achieved.
(2) The shape of the cavity of the invention has various choices, the silicon substrate has the best effect, and can be made to be the smallest and exquisite, but the cost of the plastic substrate and the glass substrate is lower, and the cavity can be selected according to the actually adopted process condition.
(3) The fluorescent powder with three colors of red, yellow and green is placed in the tank body, when full-color scanning display is carried out, only blue laser with shorter wavelength in visible light and capable of being modulated is required to be scanned and irradiated on the display bottom plate of the invention through the micro-electromechanical scanning micro-mirror and other optical auxiliary systems, the blue laser is irradiated on the three fluorescent powder of red, yellow and green, light with other wavelengths (longer than that of blue light) can be excited, the required color can be mixed by controlling the power and the stay time of the blue laser, the blue laser is irradiated on silica gel without the fluorescent powder, or the blue laser stays at a place without the fluorescent powder, and blue can be reflected; if the laser is turned off when a certain pixel point is scanned, the pixel point is black or dark.
(4) According to the invention, the inner wall of the cavity is plated with a metal film such as aluminum, silver or gold or other inorganic substance coatings, so that the reflection effect can be enhanced, and the heat dissipation performance can be improved.
(5) The size of the cavity is determined by the pixel requirement of an image to be displayed, and the method is widely applicable.
(6) The mode of obtaining the cavity can be etching, nano printing or corrosion, and can be selected according to the process condition.
Drawings
In order that the present disclosure may be more readily and clearly understood, reference is now made to the following detailed description of the present disclosure taken in conjunction with the accompanying drawings, in which
FIG. 1 is a schematic structural diagram of the present invention.
FIG. 2 is a schematic diagram of a pixel according to the present invention.
Fig. 3 is a side view of the structure of fig. 1.
Fig. 4 is another schematic structural diagram of the present invention.
Fig. 5 is a side view of the structure of fig. 4.
Fig. 6 is a side view schematic of another configuration.
Fig. 7 is a side view schematic of another configuration.
The reference numbers in the drawings are as follows:
the device comprises a substrate 1, a cavity 2, a chute 21, a straight chute 22, a plating layer 23, fluorescent powder and silica gel 3.
Detailed Description
(example 1)
Referring to fig. 1 to 3 and fig. 6, the display backplane of the full-color scanning display device of the present embodiment includes a substrate 1 made of a silicon substrate and tapered slots etched on the silicon substrate and having a trapezoidal cross section with a wide top and a narrow bottom, where the tapered slots are used as a cavity 2 for encapsulating phosphor; silica gel is sealed in each cavity 2; as shown in fig. 2, every four adjacent cavities 2 are used as a display pixel, and respectively encapsulate silica gel containing red phosphor, silica gel containing yellow phosphor, silica gel containing green phosphor, and silica gel not containing phosphor for reflecting blue light. For better reflection, a plating layer 23 is provided on the inner wall of each cavity 2. The plating layer 23 is the most suitable choice for aluminum plating, and the cost is controllable. Each cavity is of uniform size and shape, and the size is determined by the display pixel requirements, for example, a 400um x 400um pixel frame can be formed by four 200um x 200um cavities 2.
The manufacturing method comprises the following steps:
the method comprises the following steps: preparing a silicon substrate; the silicon substrate adopts an SOI wafer or a monocrystalline silicon wafer;
step two: covering a layer of silicon nitride or silicon oxide film on the surface of a silicon substrate by adopting a chemical deposition CVD method, etching the silicon oxide or silicon nitride protective film by adopting a wet method or a plasma dry etching method, and etching the silicon oxide or silicon nitride protective film into a trapezoidal unit groove with a wide upper part and a narrow lower part along 100 surfaces of silicon by adopting alkaline solvent TMAH or KOH wet etching; of course, the inverted triangular cell slots 21 shown in FIG. 6 may also be etched;
step three: the inner wall of each silicon cup is plated with aluminum or other metal or inorganic substance to form a plating layer 23, and then the fluorescent powder and the silica gel 3 are packaged in the silicon cup. With four adjacent cavities 2 as a unit, silica gel containing red phosphor, silica gel containing yellow phosphor, green phosphor containing silica gel, and silica gel not containing phosphor for reflecting blue light are respectively packaged in the four cavities 2 in a dispensing manner.
This structure of this embodiment can also be obtained by nano-printing on a plastic substrate with a special (according to the desired pattern) roller, such as the inverted triangular unit cell 21 of fig. 6. Or the required cavity is etched on the glass substrate by using buffered hydrofluoric acid BHF and hydrofluoric acid HF, but the etching of the hydrofluoric acid is isotropic, so that the cross section of the cavity is arc-shaped unit grooves arranged at intervals transversely and longitudinally (as shown in FIG. 7), or the cross section of the cavity is a semicircular or arc-shaped long groove arranged at intervals transversely and parallelly. By adopting the structure of the embodiment, since the cavity is in a trapezoid shape with a large upper part and a small lower part (the included angle between the inclined plane and the horizontal plane is generally 72 degrees), the phosphor is easy to deposit when being spotted, that is, the packaging process of the phosphor is easy to operate, but the requirement on the etching process is high if a very high pixel is required due to a large opening.
When full-color scanning display is performed, blue laser is irradiated onto the display substrate of the present embodiment, a desired color can be mixed by controlling the power and the dwell time of the blue laser, and a stereoscopic display effect can be obtained when the blue laser is rotated.
(example 2)
Referring to fig. 4 and 5, the difference from embodiment 1 is that: the cavity 2 is shaped by adopting transverse parallel spaced straight grooves 23, etching is carried out along the 110 faces of silicon, and silica gel containing red fluorescent powder, silica gel containing yellow fluorescent powder, silica gel containing green fluorescent powder and pure silicon which is used for reflecting blue light and does not contain fluorescent powder are respectively packaged in four adjacent straight grooves 23. The benefits of this are: according to the structure of silicon atoms, grooves with the same size can be etched along the 110 surfaces, so that the advantages that the opening can be smaller, the pixel can be very high, and the display bottom plate can be made smaller, thereby being convenient for being used in occasions needing smaller volume.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (1)
1. The manufacturing method of the display bottom plate of the full-color scanning display device is characterized by comprising the following steps of:
the method comprises the following steps: preparing a substrate (1);
step two: forming a cavity (2) on a substrate (1); the cavity (2) is provided with a plurality of unit grooves (21) which are vertically and horizontally spaced and distributed in an array manner, or a plurality of rows of long grooves (22) which are horizontally spaced and parallel;
step three: fluorescent powder and silica gel (3) are packaged in each cavity (2), and each four adjacent unit grooves (21) are pixels and respectively package the fluorescent powder and the silica gel (3) with different colors; or fluorescent powder and silica gel (3) with different colors are packaged in every four adjacent rows of the long grooves (22); the fluorescent powder and the silica gel (3) with different colors comprise red, yellow and green;
in the first step, the substrate (1) is a silicon substrate;
in the second step, a cavity (2) is formed by adopting an etching method; the cavity (2) is a unit groove (21) with an inverted triangular section; covering a layer of silicon nitride or silicon oxide film on the surface of a silicon substrate by adopting a chemical deposition CVD method, etching the silicon oxide or silicon nitride protective film by adopting a wet method or a plasma dry etching method, and etching into a bevel unit groove (21) with an inverted triangle section along 100 surfaces of silicon by adopting alkaline solvent TMAH or KOH wet etching;
or in the first step, the substrate (1) is a glass substrate;
in the second step, a cavity (2) is etched on the glass substrate by adopting buffered hydrofluoric acid BHF or hydrofluoric acid HF; the cross section of the cavity (2) is arc unit grooves (21) which are arranged at intervals in the transverse and longitudinal directions, or semicircular or arc long grooves (22) which are arranged at intervals in the transverse and parallel directions;
in the third step, a plating layer (23) is formed on the inner wall of each cavity (2); the coating (23) is a metal or inorganic substance coating reflective film for enhancing visible light reflection; every four adjacent unit grooves (21) are respectively packaged with silica gel containing red fluorescent powder, silica gel containing yellow fluorescent powder, silica gel containing green fluorescent powder and silica gel not containing fluorescent powder and used for reflecting blue light; the elongated grooves (22) adjacent to each four rows are respectively packaged with silica gel containing red fluorescent powder, silica gel containing yellow fluorescent powder, silica gel containing green fluorescent powder and silica gel not containing fluorescent powder and used for reflecting blue light; the display bottom plate of the panchromatic scanning display device is used for scanning short-wavelength blue laser to excite red, green and yellow fluorescent powder, and the brightness and color mixture of each pixel point are determined by the power of the scanning blue laser and the unit stay excitation time of each color fluorescent powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710115409.1A CN106684083B (en) | 2017-02-28 | 2017-02-28 | Display bottom plate of full-color scanning display device and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710115409.1A CN106684083B (en) | 2017-02-28 | 2017-02-28 | Display bottom plate of full-color scanning display device and manufacturing method thereof |
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| CN106684083A CN106684083A (en) | 2017-05-17 |
| CN106684083B true CN106684083B (en) | 2020-06-09 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1454009A (en) * | 2002-04-22 | 2003-11-05 | 奚登贵 | Light-scanning color image display screen |
| CN1735917A (en) * | 2003-01-14 | 2006-02-15 | 拉贾·图利 | Laser guided display with persistence |
| CN103681978A (en) * | 2012-09-13 | 2014-03-26 | 深圳市斯迈得光电子有限公司 | White LED package method and white LED using package method |
| CN204758919U (en) * | 2015-07-07 | 2015-11-11 | 吉林大学 | Novel new line display instrument |
| CN106274691A (en) * | 2016-08-25 | 2017-01-04 | 乐视控股（北京）有限公司 | Automobile head-up display and display packing |
| CN206564253U (en) * | 2017-02-28 | 2017-10-17 | 常州精睿新能源汽车技术有限公司 | The display backpanel of panchromatic scanning display apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5020980B2 (en) * | 2006-02-15 | 2012-09-05 | プリズム インコーポレイテッド | Servo-assisted scanning beam display system using fluorescent screen |
| CN101950122B (en) * | 2007-05-17 | 2012-01-04 | Prysm公司 | Multilayered screens with light-emitting stripes for scanning beam display systems |
| JP6340554B2 (en) * | 2012-12-26 | 2018-06-13 | パナソニックＩｐマネジメント株式会社 | Image display device |
-
2017
- 2017-02-28 CN CN201710115409.1A patent/CN106684083B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1454009A (en) * | 2002-04-22 | 2003-11-05 | 奚登贵 | Light-scanning color image display screen |
| CN1735917A (en) * | 2003-01-14 | 2006-02-15 | 拉贾·图利 | Laser guided display with persistence |
| CN103681978A (en) * | 2012-09-13 | 2014-03-26 | 深圳市斯迈得光电子有限公司 | White LED package method and white LED using package method |
| CN204758919U (en) * | 2015-07-07 | 2015-11-11 | 吉林大学 | Novel new line display instrument |
| CN106274691A (en) * | 2016-08-25 | 2017-01-04 | 乐视控股（北京）有限公司 | Automobile head-up display and display packing |
| CN206564253U (en) * | 2017-02-28 | 2017-10-17 | 常州精睿新能源汽车技术有限公司 | The display backpanel of panchromatic scanning display apparatus |
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| CN106684083A (en) | 2017-05-17 |
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