CN106683716B - First mirror of tokamak is synthesized and is washd platform - Google Patents
First mirror of tokamak is synthesized and is washd platform Download PDFInfo
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- CN106683716B CN106683716B CN201611126560.7A CN201611126560A CN106683716B CN 106683716 B CN106683716 B CN 106683716B CN 201611126560 A CN201611126560 A CN 201611126560A CN 106683716 B CN106683716 B CN 106683716B
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/11—Details
- G21B1/23—Optical systems, e.g. for irradiating targets, for heating plasma or for plasma diagnostics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/25—Maintenance, e.g. repair or remote inspection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32366—Localised processing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a comprehensive cleaning platform for a tokamak first mirror, which comprises a vacuum system, a plasma discharge system and a laser cleaning system. The invention integrates plasma cleaning and laser into the same vacuum chamber, can utilize the vacuum environment of plasma discharge to carry out laser cleaning, realizes laser cleaning on the first mirror in the vacuum environment, can utilize a proper laser light path to measure reflectivity in real time, evaluates the cleaning effect and deeply explores the time evolution process and a possible cleaning mechanism. The four wavelengths of the laser can be adjusted, the laser marking modes are various, and the mechanism of large-area scanning of single and composite deposition layers is realized.
Description
Technical Field
The invention relates to the field of tokamak devices, in particular to a comprehensive cleaning platform for a first mirror of tokamak.
Background
In the magnetic confinement fusion device, the plasma operation state is obtained mainly by means of an optical diagnosis system, and half of the diagnosis systems need to be provided with a reflecting mirror at the front end, wherein the reflecting mirror which is arranged in a vacuum chamber and is closest to the plasma is called a first mirror. Since the surface of the first mirror is directly faced with high-temperature plasma, the first mirror is subjected to bombardment by energetic ions, charge exchange atoms and the like, and deposition from impurities in the plasma, the optical performance is drastically deteriorated, the service life of the first mirror is greatly shortened (only several tens of seconds), and it is difficult to satisfy the requirements of the tokamak optical diagnostic system. Wherein the deposition effect has a great influence on the optical performance (mainly the reflectivity) of the first mirror. Even if only a dielectric film of 10 nm is deposited on the surface of the first mirror, the reflectivity of the first mirror is reduced to one fifth of the original reflectivity in the visible light wave band. In order to reduce the influence of the deterioration of the first mirror on the optical diagnostic signal and ensure the normal operation of the optical diagnostic system, a cleaning technology must be developed to remove the deposited layer on the surface of the first mirror and actively restore the reflectivity of the deposited layer. At present, the common research methods comprise plasma sputtering cleaning and laser cleaning, and certain research is carried out at home and abroad aiming at the two methods. The experimental result shows that for plasma sputtering cleaning, large-area cleaning can be realized, the cleaning is relatively uniform, but the reflectivity evaluation usually refers to that the specular reflectivity is indirectly known by measuring the total reflectivity and the diffuse reflectivity after a sample is taken out after the experiment is finished, the real-time measurement related to the specular reflectivity diagnosis is lacked, and the deep research and analysis on the cleaning process and mechanism are difficult. For laser cleaning, the cleaning device is relatively simple and operable, but it is difficult to clean the first mirror with large-area non-uniform surface, and at present, the experimental operation is performed in the atmospheric environment, so that the surface of the sample is seriously oxidized in the cleaning process and after the cleaning. At present, the International Organization (IO) of the International Thermonuclear Experimental Reactor (ITER) project also aims to explore the mechanism of the first mirror cleaning and the engineering feasibility of online cleaning, hopefully can solve the problems existing in the existing cleaning method, explores the cleaning mechanism, and evaluates different cleaning methods to find a more effective cleaning method suitable for future fusion reactors.
Disclosure of Invention
The invention aims to provide a comprehensive cleaning platform for a first mirror of a tokamak, which aims to solve the problems of the existing cleaning method, provide a theoretical basis for online cleaning of the first mirror of a fusion reactor and accumulate engineering experience.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the utility model provides a first mirror of tokamak is synthesized and is washd platform which characterized in that: including vacuum system, plasma discharge system, laser cleaning system, wherein:
the vacuum system comprises a vacuum chamber and a gas source for introducing working gas into the vacuum chamber, wherein the vacuum chamber is provided with a plurality of optical windows with different angles;
the plasma discharge system comprises a radio frequency power supply and a matcher, wherein a first mirror to be cleaned is arranged in a vacuum chamber, the output end of the radio frequency power supply is connected with the input end of the matcher, the output end of the matcher is connected with the first mirror through a radio frequency cable, and the first mirror connected with the radio frequency power supply is used as a discharge electrode;
the laser cleaning system is arranged outside the vacuum chamber and comprises a laser with a plurality of wavelength outputs, a zooming and beam expanding telescope and a beam splitter are sequentially arranged on an emergent light path of the laser, a converging lens, a scanning galvanometer and an angle-adjustable reflector are sequentially arranged on a transmission light path of the beam splitter, and the reflector can be aligned to any optical window of the vacuum chamber;
working gas is introduced into the vacuum chamber by a gas source, the first mirror in the vacuum chamber discharges after being connected with a radio frequency power supply, the working gas is ionized into plasma, and a plasma cleaning environment is formed in the vacuum chamber;
laser emitted by the laser enters the beam splitter after passing through the zooming and beam expanding telescope, part of the laser is transmitted by the beam splitter to be used as cleaning light beams, and the cleaning light beams sequentially pass through the converging lens and the scanning vibrating mirror and then are reflected to one optical window of the vacuum chamber by the reflector, so that the cleaning light beams enter the vacuum chamber from the optical window and enter the first mirror, and the first mirror is cleaned.
A first mirror of tokamak synthesize and wash platform, its characterized in that: in the vacuum system, the vacuum chamber is controlled by a vacuum pump, the vacuum pump comprises a mechanical pump and a molecular pump, and the vacuum chamber is also provided with a vacuum gauge and a vacuum gauge.
A first mirror of tokamak synthesize and wash platform, its characterized in that: in the vacuum system, a gas source introduces working gas into a vacuum chamber through a gas mass flow controller, and the gas mass flow controller controls the mass flow of the working gas.
A first mirror of tokamak synthesize and wash platform, its characterized in that: in the vacuum system, a corrugated pipe is respectively arranged on each optical window of the vacuum chamber.
A first mirror of tokamak synthesize and wash platform, its characterized in that: in the plasma discharge system, a first mirror is supported and fixed by the axial front end of a target head outer sleeve through a metal base, and a radio frequency cable on the output end of a matcher penetrates through the target head outer sleeve from the axial rear end of the target head outer sleeve and then penetrates through the metal base to be connected with the first mirror; a cooling flow channel is arranged in the metal base, a cooling water inlet pipe and a cooling water outlet pipe are arranged in the cylinder wall of the outer target sleeve, one end of each of the cooling water inlet pipe and the cooling water outlet pipe is communicated to two ends of the cooling flow channel, and the other end of each of the cooling water inlet pipe and the cooling water outlet pipe penetrates out of the rear end of the outer target sleeve in the axial direction and is connected with an external cooling water source.
A first mirror of tokamak synthesize and wash platform, its characterized in that: in the plasma discharge system, the axial rear end of the target head outer sleeve is isolated from the vacuum chamber through the tetrafluoro sleeve to form insulation, the cylinder wall of the target head outer sleeve is isolated from the inner wall of the vacuum chamber through the tetrafluoro gasket in a sleeved mode to form insulation, and an O-shaped ring is arranged between the metal base and the axial front end of the target head outer sleeve to form sealing.
A first mirror of tokamak synthesize and wash platform, its characterized in that: in the laser cleaning system, a first laser energy meter is arranged on a reflection light path of a beam splitter, a second laser energy meter is also arranged outside each optical window of a vacuum chamber, other laser emitted by a laser is reflected by the beam splitter to be used as an original beam, and the original beam is received by the first laser energy meter; the cleaning beam is reflected by the first mirror, then exits from the other optical window of the vacuum chamber and is received by the second laser energy meter corresponding to the optical window, and the reflectivity of the surface of the first mirror can be measured by comparing the beam intensity in the first laser energy meter and the second laser energy meter.
The invention has the beneficial effects that:
1. the plasma cleaning and the laser are integrated into the same vacuum chamber, and the laser cleaning can be carried out by utilizing the vacuum environment of plasma discharge, so that the laser cleaning of the first mirror is realized in the vacuum environment.
2. The invention integrates plasma cleaning and laser into the same vacuum chamber, and plasma cleaning can utilize a proper laser light path to measure reflectivity in real time, evaluate the cleaning effect and deeply explore the time evolution process and possible cleaning mechanism.
3. The invention integrates plasma cleaning and laser into the same vacuum chamber, thus greatly saving the space occupied by two systems when being placed independently.
4. The plasma water cooling system connected with the sample table can avoid the influence on the cleaning result caused by the temperature rise of the surface of the sample due to the continuous sputtering of the plasma or the long-time bombardment of the surface by the laser beam.
5. The four wavelengths of the laser can be adjusted, the laser marking modes are various, and the mechanism of large-area scanning of single and composite deposition layers is realized.
Drawings
FIG. 1 is a schematic view of a laser cleaning system and the overall structure thereof.
FIG. 2 is a schematic diagram of a plasma discharge system according to the present invention.
FIG. 3 is a schematic view of the vacuum system of the present invention.
Detailed Description
As shown in fig. 1-3, a tokamak first mirror comprehensive cleaning platform comprises a vacuum system, a plasma discharge system and a laser cleaning system, wherein:
the vacuum system comprises a vacuum chamber 1 and an air source 8 for introducing working gas into the vacuum chamber 1, wherein the vacuum chamber 1 is provided with a plurality of optical windows with different angles;
the plasma discharge system comprises a radio frequency power supply 6 and a matcher 7, wherein a first mirror 10 to be cleaned is arranged in a vacuum chamber 1, the output end of the radio frequency power supply 6 is connected with the input end of the matcher 7, the output end of the matcher 7 is connected with the first mirror 10 through a radio frequency cable 17, and the first mirror 10 connected with the radio frequency power supply 6 is used as a discharge electrode;
the laser cleaning system is arranged outside the vacuum chamber 1 and comprises a laser 18 with a plurality of wavelength outputs, a zooming and beam expanding telescope 19 and a beam splitter 23 are sequentially arranged on an emergent light path of the laser 18, a converging lens 21, a scanning vibrating mirror 20 and an angle-adjustable reflector 24 are sequentially arranged on a transmission light path of the beam splitter 23, and the reflector 24 can be aligned to any optical window of the vacuum chamber 1;
working gas is introduced into the vacuum chamber 1 from the gas source 8, and the first mirror 10 in the vacuum chamber 1 discharges after being connected with the radio frequency power supply 6, so that the working gas is ionized into plasma, and a plasma cleaning environment is formed in the vacuum chamber 1;
laser emitted by the laser 18 enters the beam splitter 23 after passing through the zooming beam expanding telescope 19, part of the laser is transmitted by the beam splitter 23 to be used as a cleaning beam, the cleaning beam sequentially passes through the converging lens 21 and the scanning vibrating mirror 20 and then is reflected to one optical window of the vacuum chamber 1 by the reflector 24, so that the cleaning beam enters the vacuum chamber 1 from the optical window and enters the first mirror 10, and the first mirror is cleaned.
In the vacuum system, a vacuum chamber 1 is controlled by a vacuum pump including a mechanical pump 2 and a molecular pump 3, and a vacuum gauge 4 and a vacuum gauge 5 are provided in the vacuum chamber.
In the vacuum system, a gas source 8 introduces working gas into a vacuum chamber 1 through a gas mass flow controller 9, and the mass flow of the working gas is controlled by the gas mass flow controller 9.
In the vacuum system, a bellows is mounted on each optical window of the vacuum chamber 1.
In the plasma discharge system, a first mirror 10 is supported and fixed by the axial front end of a target head outer sleeve 14 through a metal base 11, and a radio frequency cable 17 on the output end of an adapter 7 penetrates through the target head outer sleeve 14 from the axial rear end of the target head outer sleeve 14 and then penetrates through the metal base 11 to be connected with the first mirror 10; a cooling flow channel is arranged in the metal base 11, a cooling water inlet pipe 12 and a cooling water outlet pipe 13 are arranged in the wall of the target head outer sleeve 14, one end of each of the cooling water inlet pipe 12 and the cooling water outlet pipe 13 is respectively communicated with two ends of the cooling flow channel, and the other end of each of the cooling water inlet pipe 12 and the cooling water outlet pipe 13 is respectively connected with an external cooling water source after penetrating out from the axial rear end of the target head outer sleeve 14.
In the plasma discharge system, the axial rear end of a target head outer sleeve 14 is isolated from a vacuum chamber 1 through a PTFE sleeve 25 to form insulation, the cylinder wall of the target head outer sleeve 14 is isolated from the inner wall of the vacuum chamber 1 through a PTFE gasket 15 sleeved on the cylinder wall to form insulation, and an O-shaped ring 16 is arranged between a metal base 11 and the axial front end of the target head outer sleeve 14 to form sealing.
In the laser cleaning system, a first laser energy meter 22.1 is arranged on a reflection light path of a beam splitter 23, a second laser energy meter 22.2 is also arranged outside each optical window of the vacuum chamber 1, the rest laser emitted by the laser 18 is reflected by the beam splitter to be used as an original beam, and the original beam is received by the first laser energy meter 22.1; the cleaning beam is reflected by the first mirror 10 and then exits from another optical window of the vacuum chamber 1 and is received by the second laser energy meter 22.2 corresponding to the optical window, and the reflectivity of the surface of the first mirror can be measured by comparing the intensity of the beam in the first laser energy meter and the second laser energy meter.
In the invention, the radio frequency power supply is a transistor radio frequency power supply, the frequency is 13.56MHz, and the continuous output with the power increase of 1W can be realized. The matcher can automatically and quickly adjust a matching network, ensure the stability of the matcher during operation, display the change of incident power and reflected power in real time, indicate the precision to be 3 percent and display the self-bias voltage. The working gas is usually hydrogen, helium, neon, argon or a mixture of two or more thereof.
In the invention, cooling water is introduced into the cooling flow channel of the metal base to maintain the normal temperature of the surface of the first mirror.
In the invention, the Nd-YAG solid laser with stable performance is used as the laser, and stable output of laser with four wavelengths of 1064 nm, 532nm, 355 nm and 266 nm can be realized. The scanning system is composed of a zooming beam expanding telescope 19, a scanning galvanometer 20, a converging lens 21 and a beam splitter 23. The rotary zooming beam expanding telescope 19 can adjust the size of the light spot of the first lens, and the rotary cylinder of the beam expanding telescope is marked with scales, so that the light spot can be adjusted quantitatively. The scanning system is in joint adjustment with the laser to control the light spots to move in the X direction and the Y direction. The reflectivity measuring system divides the beam emitted by the laser into two beams by the beam splitter 23, one beam is used as an original beam, the other beam is used as a cleaning beam to clean the first mirror, the intensity of the reflected beam on the surface of the first mirror measured by the first laser energy meter 22.1 is compared with the intensity of the reflected beam on the surface of the first mirror measured by the second laser energy meter 22.2, and the reflectivity of the surface of the first mirror can be measured. The change of the optical path in the laser system is achieved by means of a mirror 24.
In the invention, the laser marking modes are various, and large-area scanning can be realized on single and composite deposition layers on the surface of the first mirror; specifically, three optical windows can be arranged at 45 degrees, 30 degrees and 90 degrees of the vacuum chamber, laser is incident at three angles to clean the surface of the first mirror, and the corrugated pipe is arranged on each optical window at each angle, so that the optical windows can be finely adjusted to ensure the accuracy of laser beams.
Claims (4)
1. The utility model provides a first mirror of tokamak is synthesized and is washd platform which characterized in that: including vacuum system, plasma discharge system, laser cleaning system, wherein:
the vacuum system comprises a vacuum chamber and an air source for introducing working gas into the vacuum chamber, wherein three optical windows are arranged at 45-degree, 30-degree and 90-degree positions of the vacuum chamber
The plasma discharge system comprises a radio frequency power supply and a matcher, wherein a first mirror to be cleaned is arranged in a vacuum chamber, the output end of the radio frequency power supply is connected with the input end of the matcher, the output end of the matcher is connected with the first mirror through a radio frequency cable, and the first mirror connected with the radio frequency power supply is used as a discharge electrode;
the laser cleaning system is arranged outside the vacuum chamber and comprises a laser, the laser uses an Nd-YAG solid laser with stable performance, stable output of lasers with four wavelengths of 1064 nm, 532nm, 355 nm and 266 nm can be realized, a zoom beam expanding telescope and a beam splitter are sequentially arranged on an emergent light path of the laser, a converging lens, a scanning galvanometer and an angle-adjustable reflecting mirror are sequentially arranged on a transmission light path of the beam splitter, and the reflecting mirror can be aligned to any optical window of the vacuum chamber; working gas is introduced into the vacuum chamber from a gas source, the first mirror in the vacuum chamber discharges after being connected with a radio frequency power supply, the working gas is ionized into plasma, and a plasma cleaning environment is formed in the vacuum chamber; laser emitted by a laser enters a beam splitter after passing through a zooming and beam expanding telescope, part of the laser is transmitted by the beam splitter to be used as a cleaning beam, the cleaning beam sequentially passes through a converging lens and a scanning vibrating mirror and then is reflected to one optical window of a vacuum chamber by a reflector, so that the cleaning beam enters the vacuum chamber from the optical window and enters a first mirror, and the first mirror is cleaned;
in the vacuum system, a vacuum chamber is controlled by a vacuum pump to control the internal vacuum degree, the vacuum pump comprises a mechanical pump and a molecular pump, and the vacuum chamber is also provided with a vacuum gauge and a vacuum gauge;
in the plasma discharge system, a first mirror is supported and fixed by the axial front end of a target head outer sleeve through a metal base, and a radio frequency cable on the output end of a matcher penetrates through the target head outer sleeve from the axial rear end of the target head outer sleeve and then penetrates through the metal base to be connected with the first mirror; a cooling flow channel is arranged in the metal base, a cooling water inlet pipe and a cooling water outlet pipe are arranged in the cylinder wall of the outer sleeve of the target head, one end of each of the cooling water inlet pipe and the cooling water outlet pipe is respectively communicated with two ends of the cooling flow channel, and the other end of each of the cooling water inlet pipe and the cooling water outlet pipe respectively penetrates out of the rear end of the outer sleeve of the target head in the axial direction and then is connected with an;
in the laser cleaning system, a first laser energy meter is arranged on a reflection light path of a beam splitter, a second laser energy meter is also arranged outside each optical window of the vacuum chamber, other laser emitted by the laser is reflected by the beam splitter to be used as an original beam, and the original beam is received by the first laser energy meter; the cleaning beam is reflected by the first mirror, then exits from another optical window of the vacuum chamber and is received by a second laser energy meter corresponding to the optical window, and the reflectivity of the surface of the first mirror can be measured by comparing the beam intensity in the first laser energy meter and the second laser energy meter.
2. The integrated cleaning platform for the first mirror of tokamak according to claim 1, wherein: in the vacuum system, a gas source introduces working gas into a vacuum chamber through a gas mass flow controller, and the gas mass flow controller controls the mass flow of the working gas.
3. The integrated cleaning platform for the first mirror of tokamak according to claim 1, wherein: in the vacuum system, a corrugated pipe is respectively arranged on each optical window of the vacuum chamber.
4. The integrated cleaning platform for the first mirror of tokamak according to claim 1, wherein: in the plasma discharge system, the axial rear end of the target head outer sleeve is isolated from the vacuum chamber through the tetrafluoro sleeve to form insulation, the cylinder wall of the target head outer sleeve is isolated from the inner wall of the vacuum chamber through the tetrafluoro gasket in a sleeved mode to form insulation, and an O-shaped ring is arranged between the metal base and the axial front end of the target head outer sleeve to form sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201611126560.7A CN106683716B (en) | 2016-12-09 | 2016-12-09 | First mirror of tokamak is synthesized and is washd platform |
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| CN201611126560.7A CN106683716B (en) | 2016-12-09 | 2016-12-09 | First mirror of tokamak is synthesized and is washd platform |
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| CN106683716A CN106683716A (en) | 2017-05-17 |
| CN106683716B true CN106683716B (en) | 2020-09-29 |
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| CN111957675A (en) * | 2020-06-28 | 2020-11-20 | 中国科学院上海光学精密机械研究所 | Method for removing deposited pollutant on surface of optical element in vacuum system |
| CN113161020B (en) * | 2021-04-20 | 2023-01-24 | 核工业西南物理研究院 | Multi-system combined plasma control platform for Tokamak device |
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| CN101496111A (en) * | 2006-05-30 | 2009-07-29 | 柯蒂斯·比恩巴赫 | Method and system for controlled fusion reactions |
| US7441305B2 (en) * | 2006-08-04 | 2008-10-28 | Cascio Gregory R | Floor cleaner |
| CN102218415B (en) * | 2011-03-10 | 2014-10-22 | 大连理工大学 | Method and device for cleaning tokamak first mirror by vacuum ultraviolet laser |
| CN105195468B (en) * | 2014-06-25 | 2017-08-18 | 核工业西南物理研究院 | A kind of method and apparatus of on-line cleaning and the detection mirror of fusion facility first |
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