CN106653548B - A kind of insulation windows cooling device with magnetic screen function - Google Patents
A kind of insulation windows cooling device with magnetic screen function Download PDFInfo
- Publication number
- CN106653548B CN106653548B CN201510710206.8A CN201510710206A CN106653548B CN 106653548 B CN106653548 B CN 106653548B CN 201510710206 A CN201510710206 A CN 201510710206A CN 106653548 B CN106653548 B CN 106653548B
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- shell
- magnetic
- shielding cover
- opening
- cooling device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32651—Shields, e.g. dark space shields, Faraday shields
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a kind of insulation windows cooling devices with magnetic screen function, shell, magnetic shielding cover are made of permeability magnetic material, equally distributed multiple cooling holes are equipped in the one side of shell, and magnetic shielding cover is arranged on the one side of the shell with multiple cooling holes.So that inductively coupled plasma reactor at work, insulation windows cooling device can either play the role of it is air-cooled, and can realize external magnetic field to inductively coupled plasma reactor etch work interference shielding, improve etching efficiency, product quality.
Description
Technical field
The present invention relates to a kind of devices improving etching technics, and in particular to a kind of insulation windows with magnetic screen function are cold
But device.
Background technology
With the continuous development of ETCH technologies, ETCH technologies are required also more and more harsh to realize the better product of higher
Quality.Having previously been thought that influences process results little extraneous factor, is embodied in more and more harsh technological requirement more next
Bigger influence, the influence such as external magnetic field to process results.The requirement of high yield quality needs to eliminate these extraneous factors
It influences.
But current bench structure, because the requirement of functional character cannot be implanted directly into permeability magnetic material, as board LID is tied
The air-cooled hole planks of housing in structure just directly cannot replace shaping with permeability magnetic material or pad pasting, because the magnetic line of force can
With directly through the pore structure in permeability magnetic material, and the effect of magnetic-field is not achieved.
Invention content
The purpose of the present invention is to provide a kind of insulation windows cooling devices with magnetic screen function, by shell, magnetic screen
Cover is made of permeability magnetic material, and by being equipped with multiple cooling holes in the side of shell so that magnetic shielding cover is arranged with more
The side of the shell of a cooling hole；It allows the invention under the premise of not influencing air-cooled result, is completely led by one
Conversion zone of the magnetic loop by introduction by magnetic field in the container cavity around inductively coupled plasma reactor, it is pre- to realize
The interference that anti-external magnetic field works to inductively coupled plasma reactor improves production efficiency, improves product quality.
In order to achieve the above object, the invention is realized by the following technical scheme：
A kind of insulation windows cooling device with magnetic screen function, it is anti-that which is set to inductively coupled plasma
At the top of the container cavity for answering device, which includes：Insulation board, the coil being arranged on the insulation board, fan, feature
It is that the cooling device also includes：
Shell is arranged on the insulation board, multiple cooling holes is equipped at intervals in the one side wall of the shell；The shell
It is made of permeability magnetic material；
Magnetic shielding cover is arranged on the side wall with multiple cooling holes of the shell, and the magnetic shielding cover and side
A gas channel is formed between wall so that effluent stream reaches down to opening for lower section by the gas channel in cooling hole
Mouthful, the opening is located at below multiple cooling holes, and the magnetic shielding cover is made of permeability magnetic material.
Preferably, the shell is in cuboid, which is open, which matches company with the insulation board
It connects.
Preferably, fan-mounting support is equipped in the case top, the fan is set on the fan-mounting support.
A kind of inductively coupled plasma reactor, its main feature is that, it is equipped with container cavity, which is additionally provided with magnetic
The insulation windows cooling device of function of shielding；The insulation windows cooling device with magnetic screen function includes：
Insulation board is arranged on the container cavity；
Coil is arranged on the insulation board；
Shell is arranged on the insulation board, is equipped at intervals with cooled region in the one side wall of the shell, in cooled region
Equipped with multiple cooling holes；The shell is made of permeability magnetic material；
Fan is arranged in the shell；
Magnetic shielding cover is arranged on a side wall of the shell, and the magnetic shielding cover is made of permeability magnetic material, described
Magnetic shielding cover blocks the cooled region so that the gas flowed out in cooled region reaches one along the magnetic shielding cover inner wall
Opening outflow, projection of the opening on side wall are located at outside the cooled region.
Preferably, the shell is in cuboid, which is open, which matches company with the insulation board
It connects.
Preferably, fan-mounting support is equipped in the case top, the fan is set on the fan-mounting support.
Preferably, the magnetic shielding cover is arranged in the housing sidewall with the multiple cooling hole.
Preferably, the magnetic shielding cover is in cuboid, and the one side wall for the magnetic shielding cover being connect with the shell is equipped with
First opening, the magnetic shielding cover bottom are equipped with the second opening.
Preferably, the area of first opening is more than the area that the multiple cooling hole is formed on the housing；Together
When this first opening area be less than equipped with the multiple cooling hole housing side area.
Compared with the prior art, the present invention has the following advantages：
Shell, magnetic shielding cover are used and are led by a kind of insulation windows cooling device with magnetic screen function provided by the invention
Magnetic material is made, and is equipped with equally distributed multiple cooling holes in the one side of shell, and magnetic shielding cover is arranged with multiple
On the one side of the shell of cooling hole.So that inductively coupled plasma reactor is at work, insulation windows cooling device can
Enough play the role of it is air-cooled, by a complete magnetic conductive loop by introduction by magnetic field around inductively coupled plasma reactor
Conversion zone in container cavity can realize that preventing external magnetic field does inductively coupled plasma reactor etching work
It disturbs, improves etching efficiency, product quality.
Description of the drawings
Fig. 1 is a kind of overall structure diagram of the insulation windows cooling device with magnetic screen function of the present invention.
Fig. 2 is a kind of overall structure sectional view of the insulation windows cooling device with magnetic screen function of the present invention.
Fig. 3 is a kind of one of embodiment schematic diagram of the insulation windows cooling device with magnetic screen function of the present invention.
Fig. 4 is the two of a kind of embodiment schematic diagram of the insulation windows cooling device with magnetic screen function of the present invention.
Fig. 5 is the three of a kind of embodiment schematic diagram of the insulation windows cooling device with magnetic screen function of the present invention.
Fig. 6 is the four of a kind of embodiment schematic diagram of the insulation windows cooling device with magnetic screen function of the present invention.
Specific implementation mode
The present invention is further elaborated by the way that a preferable specific embodiment is described in detail below in conjunction with attached drawing.
As shown in Figure 1, Figure 2 and shown in Fig. 6, a kind of insulation windows cooling device with magnetic screen function, cooling device setting
In 100 top of container cavity of inductively coupled plasma reactor.The cooling device includes：Insulation board 10, setting are exhausted at this
Coil 20 and fan 30, shell 40 on listrium 10 and magnetic shielding cover 50.Wherein, shell 40 is arranged on insulation board 10；Magnetic cup
Cover 50 is covered to be arranged on a side wall of shell 40.
As Figure 1-Figure 4, shell 40 is in cuboid, 40 bottom opening of shell, 40 bottom of shell and insulation board 10
Matching connection.Shell is equipped with fan-mounting support in 40 top, and fan 30 is set on the fan-mounting support.The one of shell 40
It is equipped at intervals with cooled region on side wall, multiple cooling holes 41 are equipped in cooled region, magnetic shielding cover 50 is arranged with multiple cold
But on 40 side wall of shell in hole 41, and a gas channel is formed between magnetic shielding cover and side wall so that flowed in cooling hole 41
Outlet stream reaches down to the opening 52 of lower section by the gas channel, and opening 52 is located at 41 lower section of multiple cooling holes.
Such as Fig. 5, magnetic shielding cover 50 is in cuboid, and the one side wall for the magnetic shielding cover 50 being connect with shell 40 is equipped with the first opening
51, which is equipped with the second opening 52.The area of first opening 51 is more than multiple cooling holes 41 on shell 40
The area of formation；The area of first opening 51 is less than the area of 40 side of shell equipped with the multiple cooling hole 41 simultaneously；
So that the connection overlapping with shell 40 of magnetic shielding cover 50.
Magnetic shielding cover 50 blocks the cooled region so that the gas flowed out in cooled region is arrived along magnetic shielding cover inner wall
Up to an opening outflow, the projection being open on side wall is located at outside the cooled region.
As shown in figure 5, for one of 50 embodiment of magnetic shielding cover of the present invention.That is, the first opening 51 is rectangle.First opens
Mouthfuls 51 area is more than the area on the be formed in shell in gap between multiple cooling holes 41 and cooling hole 41 40.It is actually using
In, the shape of the first opening 51 is determined according to the shape that multiple cooling holes 41 are formed.
As shown in Figure 4, Figure 5, in the present invention, magnetic shielding cover 50 is equipped between the one side and shell 40 of the first opening 51
Overlapping connection；It can ensure that the gas being discharged by fan 30 is only discharged outside to environment from the second opening 52, and can ensure outer
The magnetic line of force MFL in boundary magnetic field can not be cold into insulation windows by cooling hole 41 by magnetic shielding cover 50 and the junction of shell 40
But inside device.
In the present invention, shell 40, magnetic shielding cover 50 are all made of permeability magnetic material and are made.In the present embodiment, shell 40, magnetic screen
Cover 50 can be used the permeability magnetic materials such as aluminium, steel, carbon steel and be made.
As shown in fig. 6, a kind of inductively coupled plasma reactor with magnetic screen function, the plasma reactor
Including：Container cavity 100, pedestal 122, wafer mounting disc 121, auxiliary adjustment ring 110, radio-frequency power supply lower electrode 130, and
The insulation windows cooling device with magnetic screen function at 100 top of container cavity is set.Wherein, 100 bottom of container cavity is set
There are exhaust apparatus, pedestal 122 to be arranged in container cavity 100, wafer mounting disc 121 is arranged on pedestal 122, pending wafer
120 are arranged on pedestal 122, and auxiliary adjustment ring 110 is arranged around pending wafer 120 on pedestal 122, under radio-frequency power supply
Electrode 130 is connect with pedestal 122.
The setting of insulation board 10 is at 100 top of container cavity so that 100 inside of container cavity is in sealing state；Shell 40 is set
It sets on insulation board 10；Magnetic shielding cover 50 is arranged on a side wall of shell 40.The insulation board in shell 40 is arranged in coil 20
On 10；Coil 20 is connect with the top electrode 140 of radio-frequency power supply.Fan 30 is arranged in 40 inner top of shell, and the side of shell 40 is set
There are multiple cooling holes 41, the side outer end for being equipped with the shell 40 of multiple cooling holes 41 is equipped with magnetic shielding cover 50.
As shown in Figure 4, Figure 5, in practical applications, concrete operating principle is as follows by the present invention：
When inductively coupled plasma reactor works, in order to reduce temperature, the fan 30 in insulation windows cooling device
Work promotes the air flowing inside insulation windows cooling device, and by multiple cooling holes 41 of shell 40, insulation windows is cooled down
Gas discharge inside device, due to being equipped with the second opening 52 in 50 bottom of magnetic shielding cover, then inside insulation windows cooling device
Gas realizes air cooling effect by the 52 entire inductively coupled plasma reactor of discharge of the opening of multiple cooling holes 41, second.
Meanwhile insulation windows cooling device is arranged in external magnetic field environment, since shell 40, magnetic shielding cover 50 are all made of and lead
Magnetic material is made, then the magnetic line of force of external magnetic field（MFL in Fig. 5）It can not enter inside insulation windows cooling device, but in shell
Body 40,50 outside of magnetic shielding cover form a complete magnetic conductive loop, by introduction by magnetic field to around the reaction in container cavity 100
Region, so as to realize the interference for preventing external magnetic field and etching work to inductively coupled plasma reactor.It reaches and provides
The effect of etching technics, the effect for improving etching product quality.
Although present disclosure is discussed in detail by above preferred embodiment, but it should be appreciated that above-mentioned
Description is not considered as limitation of the present invention.After those skilled in the art have read the above, for the present invention's
A variety of modifications and substitutions all will be apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (9)
1. a kind of insulation windows cooling device with magnetic screen function, which is set to inductively coupled plasma reaction
The container cavity of device（100）Top, the cooling device include：Insulation board（10）, be arranged in the insulation board（10）On coil
（20）, fan（30）, which is characterized in that the cooling device also includes：
Shell（40）, it is arranged in the insulation board（10）On, the shell（40）One side wall on be equipped at intervals with multiple cooling holes
（41）；The shell（40）It is made of permeability magnetic material；
Magnetic shielding cover（50）, it is arranged in the shell（40）The side wall with multiple cooling holes on, and the magnetic shielding cover
A gas channel is formed between side wall so that cooling hole（41）Middle effluent stream reaches down to down by the gas channel
The opening of side（52）, the opening（52）Positioned at multiple cooling holes（41）Lower section, the magnetic shielding cover（50）Using permeability magnetic material
It is made.
2. the insulation windows cooling device with magnetic screen function as described in claim 1, which is characterized in that the shell（40）
In cuboid, the shell（40）Bottom opening, the shell（40）Bottom and the insulation board（10）Matching connection.
3. the insulation windows cooling device with magnetic screen function as claimed in claim 2, which is characterized in that the shell（40）
Fan-mounting support, the fan are equipped in top（30）It is set on the fan-mounting support.
4. a kind of inductively coupled plasma reactor is equipped with container cavity, which is characterized in that the reactor is additionally provided with magnetic
The insulation windows cooling device of function of shielding；The insulation windows cooling device with magnetic screen function includes：
Insulation board（10）, it is arranged on the container cavity；
Coil（20）, it is arranged in the insulation board（10）On；
Shell（40）, it is arranged in the insulation board（10）On, the shell（40）One side wall on be equipped at intervals with cooled region, it is cold
But multiple cooling holes are equipped in region（41）；The shell（40）It is made of permeability magnetic material；
Fan（30）, it is arranged in the shell（40）It is interior；
Magnetic shielding cover（50）, it is arranged in the shell（40）A side wall on, the magnetic shielding cover（50）Using permeability magnetic material
It is made, the magnetic shielding cover（50）Block the cooled region so that the gas flowed out in cooled region is along the magnetic screen
Cover inner wall reaches an opening outflow, and the opening is located in the projection where cooled region on side wall outside the cooled region.
5. inductively coupled plasma reactor as claimed in claim 4, which is characterized in that the shell（40）In rectangular
Body, the shell（40）Bottom opening, the shell（40）Bottom and the insulation board（10）Matching connection.
6. inductively coupled plasma reactor as claimed in claim 5, which is characterized in that the shell（40）It is set in top
There are fan-mounting support, the fan（30）It is set on the fan-mounting support.
7. inductively coupled plasma reactor as claimed in claim 5, which is characterized in that the magnetic shielding cover（50）Setting
With the multiple cooling hole（41）The shell（40）On side wall.
8. inductively coupled plasma reactor as claimed in claim 7, which is characterized in that the magnetic shielding cover（50）In length
Cube, with the shell（40）The magnetic shielding cover of connection（50）One side wall be equipped with first opening（51）, the magnetic shielding cover
（50）Bottom is equipped with the second opening（52）.
9. inductively coupled plasma reactor as claimed in claim 8, which is characterized in that first opening（51）Face
Product is more than the multiple cooling hole（41）In the shell（40）The area of upper formation；First opening simultaneously（51）Area it is small
In equipped with the multiple cooling hole（41）Shell（40）The area of side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510710206.8A CN106653548B (en) | 2015-10-28 | 2015-10-28 | A kind of insulation windows cooling device with magnetic screen function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510710206.8A CN106653548B (en) | 2015-10-28 | 2015-10-28 | A kind of insulation windows cooling device with magnetic screen function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106653548A CN106653548A (en) | 2017-05-10 |
| CN106653548B true CN106653548B (en) | 2018-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510710206.8A Active CN106653548B (en) | 2015-10-28 | 2015-10-28 | A kind of insulation windows cooling device with magnetic screen function |
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| Country | Link |
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| CN (1) | CN106653548B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112117176B (en) * | 2019-06-20 | 2023-03-07 | 中微半导体设备(上海)股份有限公司 | Plasma processing apparatus and plasma processing system |
| CN115602406A (en) * | 2021-07-09 | 2023-01-13 | 北京北方华创微电子装备有限公司（Cn） | Coil device for generating plasma and semiconductor processing equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW278204B (en) * | 1995-06-07 | 1996-06-11 | Materials Research Corp | Plasma sputter etching system with reduced particle contamination |
| US5944899A (en) * | 1996-08-22 | 1999-08-31 | Applied Materials, Inc. | Inductively coupled plasma processing chamber |
| CN1907514A (en) * | 2005-03-22 | 2007-02-07 | 巨佰－雪莱公司 | Magnetic shielding aimd housing equipped with window for magnetic actuation type switch |
| CN102291968A (en) * | 2010-08-25 | 2011-12-21 | 兰州大学 | Magnetic field shielding case |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4384301B2 (en) * | 1999-09-13 | 2009-12-16 | 株式会社日立製作所 | Plasma processing equipment |
| JP5812561B2 (en) * | 2009-10-27 | 2015-11-17 | 東京エレクトロン株式会社 | Plasma processing equipment |
| JP6224717B2 (en) * | 2013-09-30 | 2017-11-01 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
-
2015
- 2015-10-28 CN CN201510710206.8A patent/CN106653548B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW278204B (en) * | 1995-06-07 | 1996-06-11 | Materials Research Corp | Plasma sputter etching system with reduced particle contamination |
| US5944899A (en) * | 1996-08-22 | 1999-08-31 | Applied Materials, Inc. | Inductively coupled plasma processing chamber |
| CN1907514A (en) * | 2005-03-22 | 2007-02-07 | 巨佰－雪莱公司 | Magnetic shielding aimd housing equipped with window for magnetic actuation type switch |
| CN102291968A (en) * | 2010-08-25 | 2011-12-21 | 兰州大学 | Magnetic field shielding case |
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| Publication number | Publication date |
|---|---|
| CN106653548A (en) | 2017-05-10 |
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Address after: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee after: Medium and Micro Semiconductor Equipment (Shanghai) Co., Ltd. Address before: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee before: Advanced Micro-Fabrication Equipment (Shanghai) Inc. |