CN106645024A - TDLAS-based wide-range detector for concentration of gasified H2O2 - Google Patents
TDLAS-based wide-range detector for concentration of gasified H2O2 Download PDFInfo
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- CN106645024A CN106645024A CN201611172326.8A CN201611172326A CN106645024A CN 106645024 A CN106645024 A CN 106645024A CN 201611172326 A CN201611172326 A CN 201611172326A CN 106645024 A CN106645024 A CN 106645024A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
Abstract
The invention provides a TDLAS-based wide-range detector for the concentration of gasified H2O2, and relates to gas measurement technology. The detector includes a laser system, an optical mirror chamber, a mirror chamber condensation-preventing system, a mirror chamber cleaning system and a data acquisition and processing system for detection of the concentration of gasified H2O2 in a range of 0-2000 ppm. The optical mirror chamber adopts high-reflection curved mirrors of gold plating or gold plating and SiO2, can resist oxidation corrosion by gasified H2O2, and prolongs the service life of equipment. The mirror chamber condensation-preventing system can raise the surface temperature of the high-reflection curved mirrors, so that condensation of mirror surfaces is prevented in a high-humidity atmosphere. The mirror chamber cleaning system allows a layer of thin air flow to be formed on the surfaces of the curved mirrors, so that the surfaces of the mirrors are cleaned and dried, and adhesion of a dust layer is prevented. Through combination with a self-correction concentration inversion formula, the phenomenon that the measurement result is inaccurate due to continuous declination of laser intensity in a measurement process is overcome. Through technical innovation based on the TDLAS measurement method, stable, reliable, and fast detection of the concentration of gasified H2O2 in a wide range is achieved. The detector is simple in structure and low in cost.
Description
Technical field
The invention belongs to vaporized hydrogen peroxide Concentration Testing field, and in particular to one kind is based on TDLAS (Tunable
Diode Laser Absorption Spectroscopy, TDLAS) wide range gasification H2O2Concentration detector.
Background technology
Vaporized hydrogen peroxide (Vaporized Hydrogen Peroxide, VHP) as the term suggests be exactly gaseous peroxidating
Hydrogen, colourless, irritant smell is good to anaerobic spore-bearing bacilli killing effect with redox.Relative to liquid mistake
Hydrogen oxide, VHP has more efficient sterilization effect, and early in last century the nineties Environmental Protection Agency EPA is just passed through
Check and approve, as bactericidal agent, extensively apply in fields such as biology, medical treatment.
During VHP sterilizations, measurement and the control of VHP concentration are to ensure that sterilization effectively and protection user
The key of life and health, for example, in sterility test, VHP sterilizing measurement of concetrations will definitely not cause result false positive or false negative,
And VHP residual concentrations safety value will be less than 1ppm, irreversible injury, etc. otherwise can be caused to human body.Obviously, VHP is dense
The real-time accurate measurement of degree is basis and the premise that each field carries out sterilization using VHP.At present, VHP measurement of concetrations are main
Using electrochemical sensor, external import is relied on, manufacturer is mainly the Dreager of Germany and ATI companies of Britain.Such product
Not only expensive, maintenance cost is high, and presence measurement response lag, short life, high concentration measure easy poison deactivation etc. and ask
Topic.In addition, domestic correlation VHP detecting instruments are also as its critical component using import electrochemical sensor, and measure dense
Degree is normally no higher than 1000ppm, and measurement range is less.In order to solve the problems, such as electrochemical sensor, it is ensured that VHP measurements
Accuracy, it is necessary to propose a kind of quick response, measurement accurately and reliably, the big VHP concentration detectors of measurement range.
Tunable diode laser absorption spectroscopy (Tunable Diode Laser Absorption Spectroscopy,
TDLAS) e measurement technology is a kind of common gas fast on-line measurement method, and high with selective strong, certainty of measurement, response is fast
The advantages of.Chinese patent Authorization Notice No. CN102706832A, in authorized announcement date on May 21st, 2014, entitled " one kind is based on
The patent of invention of the laser infrared gas analyzer of TDLAS-WMS ", there is provided a kind of TDLAS hydrogen chloride, the first of wavelength modulation
The gas analyzer of the one pack systems such as alkane, carbon monoxide and vapor.Including laser instrument, drive circuit for laser, temperature control electricity
Road, the optical system with optical cavity, Infrared Detectors, intensity modulated eliminate circuit, lock phase amplifying circuit and data acquisition
With display circuit；Using the space double light path Differential Detection method and division arithmetic circuit realiration accurate measurement of gas concentration.Should
Technical scheme eliminates impact of the laser intensity modulation to measurement result on the basis of gas concentration measurement is realized.It is Chinese special
Sharp Authorization Notice No. CN103645156A, authorized announcement date on March 2nd, 2016, a kind of entitled " TDLAS gas detection methods
And system " patent of invention, there is provided a kind of TDLAS gas detection methods and system towards mixed gas concentration, it is main special
Point is disposed vertically for air chamber, it is ensured that each gas blanket of laser penetration mixed gas.The technical scheme can realize that single-component gas are surveyed
Amount, it is also possible to realize that multicomponent mixed gas are measured, prevent the situation of gas missing inspection, reduce the mistake of mixed gas detection
Difference.
Foregoing invention patent proposes gas quick detection scheme based on TDLAS technologies, it is adaptable to most species gas
The concentration of body is quickly measured.Also along with decomposing while VHP is produced, it not only has stronger oxidisability and corrosivity, and
And in the case of high concentration (1000-2000ppm), humidity is usually more than 90%, to each element surfaces of TDLAS can cause condensation and
Corrosion, laser intensity drastically declines, so that it cannot effectively detection, measurement accuracy and stability cannot be ensured.Therefore, often
Rule TDLAS measurement schemes cannot ensure the accurate measurement of VHP, it is necessary to carry out innovative design to its structure and just adapt to high humidity
The special adverse circumstances such as degree, oxide etch.
The content of the invention
The purpose of the present invention is according to lambert-Beer law, based on TDLAS and wavelength-modulation technique detection VHP concentration.
The present invention is directed to special detection object VHP (oxidisability, corrosivity, high humility), by technological innovation, improves routine
TDLAS measuring methods, have been inherently eliminated the impacts of various environmental factors to measurement result such as oxidation, corrosion and high humidity, tool
Have the advantages that measurement range is big, it is accurate, reliable and stable to measure, it is fast to respond.
The technical scheme is that：A kind of wide range gasification H based on TDLAS2O2Concentration detector, it includes laser
System, optics hysteroscope, hysteroscope condensation prevention system, hysteroscope clean system and data Collection ＆ Processing System, are capable of achieving 0-2000ppm
The vaporized hydrogen peroxide real-time online detection of concentration, eliminates Conventional electrochemical sensor measurement response lag, high concentration measurement
The defects such as poison deactivation.The high frequency modulated narrow-linewidth laser of periodicity low-frequency sweep that laser system output has been collimated, as entering
Penetrate laser to be input in optics hysteroscope, optics hysteroscope is the cavity of a pair of high reflection mirror compositions, inside is full of under test gas VHP,
Incident laser internally comes and goes reflection and repeatedly projects from the output aperture of optics hysteroscope, and shoot laser (carries VHP concentration letter
Breath) received by data Collection ＆ Processing System and analyzed and processed, by self-correction Concentration Algorithm, it is to avoid cause because light intensity declines
Wrong concentration signal, calculates in real time and correctly shows VHP concentration values.Hysteroscope condensation prevention system and hysteroscope clean system are used to prevent
Lens surface liquid condenses and safeguards lens surface cleaning, both ensure that measurement data accuracy and long-time stability, extends again
Service life, reduce maintenance cost.
Preferably, described laser system drives mould comprising semiconductor laser with tunable, temperature control modules, electric current
Block and light collimating module；Wherein, semiconductor laser with tunable has output line width, power stability feature, temperature control mould
Block is capable of achieving the high accuracy of laser instrument, high stable and controls, the achievable laser output wavelength low frequency scanning of electric current drive module,
High frequency modulation；Light collimating module is used for the collimation of laser and exports.
Preferably, described optics hysteroscope is a pair of high reflection curved mirrors, a pair of high reflection mirror curved mirror focal length f phases
Together, it is distributed in opposite directions along same optical axis, minute surface centre distance D meets：f≤D≤2f；At least there is a high reflection curved mirror to be provided with
Aperture, for incident and shoot laser.
Preferably, high reflection curved mirror surface Coating Materials is gold, the optional plating SiO of golden film outer layer2Film, with gasification
H2O2Keep good material compatibility.
Preferably, described hysteroscope condensation prevention system includes heat-insulation layer, heater, radiator valve.Its Main Function
It is the mirror temperature for improving high reflection curved mirror, prevents minute surface from condensation occur under high humidity environment.Above-mentioned constant temperature
Controller includes temperature sensor, temperature control circuit.Radiator valve real-time monitoring and display mirror temperature, are adjusted by reponse system
Section heater voltage, electric current, so as to realize mirror temperature stability contorting, keep mirror temperature to be higher than environment temperature to be measured, but low
In 60 DEG C.
Preferably, heater is led using flexible heater material, ceramic heating material or other heating materials as heating
Body, heater Jing high-temperature plastics are seamlessly connected at the high reflection curved mirror back side, and described heat-insulation layer is covered in outside heater.
By being capable of achieving the heat temperature raising to minute surface to heater applied voltage, electric current.
Preferably, described hysteroscope clean system includes Filter dryer, air pump, minute surface cleaning apparatus and clean control
Module.Wherein, Filter dryer, air pump are used for providing the dry cleansing air with certain pressure.
Preferably, minute surface cleaning apparatus are tightly connected with minute surface outward flange, multiple gas outlets are uniformly arranged on device, it is clean
The net gas being dried steadily flows out from venthole, and in lens surface one layer of uniform gas curtain layer is formed；Minute surface cleaning apparatus are provided with
Inlet end and outlet side, inlet end is sequentially connected air pump, filter, and outlet side can collect unnecessary clean gas and connect exhaust
Pipe is delivered to gas handling system.
Preferably, described data Collection ＆ Processing System is included at photodetector, data collecting card, second harmonic
Reason module and data disaply moudle.
Preferably, described data Collection ＆ Processing System：First, self-correction retrieving concentration formula is set upV2fFor second harmonic signal voltage, VDIt is to survey without the light intensity signal voltage at GAS ABSORPTION position
Value, CH2O2For the H that gasifies2O2Concentration value, the inversion formula adds optical intensity voltage signal, eliminates gasification H2O2Under high humidity environment
Light intensity changes the impact to measurement of concetration；Then, in measurement process, V is obtained in real time2fAnd VDMean value in short time；Finally,
Using the mean value and inversion formula that measure, linear interpolation, gasification H is calculated and be shown2O2Concentration value.
Preferably,For：K and b is experiment
Calibration constants, V2f,bAnd VD,bRespectively second harmonic and light intensity signal voltage bias, VD0It is without the light intensity at GAS ABSORPTION position
, that is, there is not light intensity signal magnitude of voltage during light intensity attenuation in signal voltage initial value.
Compared with prior art, the invention has the beneficial effects as follows：First, it is real by with reference to TDLAS and wavelength-modulation technique
Wide range, high accuracy, the quick detection of VHP concentration are showed；Second, by introducing hysteroscope condensation prevention system and the clean system of hysteroscope
System, eliminates the lens surface moisture condensation phenomenon in measurement process, maintains lens surface cleaning, reduces condensation or dust
Impact to light intensity, accurately calculates for follow-up data and provides necessary guarantee；3rd, using the plated film good with VHP compatibility
Material, i.e. gold and silica, reduce oxide etch of high concentration VHP to eyeglass and act on, and extend service life；4th,
Using with the retrieving concentration formula for reviewing one's lessons by oneself orthofunction, with reference to V2fAnd VDMean value, improves the accuracy of Concentration Testing.Separately
Outward, relative to other TDLAS schemes, without the need for introducing double light path differential system or signal processing module, with simple structure, cost
Low advantage.
Description of the drawings
Accompanying drawing 1 is overall structure diagram of the invention；
Accompanying drawing 2 is the structural representation of the laser system of the present invention；
Accompanying drawing 3 is the collection of the present invention and the structural representation of processing system；
Accompanying drawing 4 is the structure chart of the optics hysteroscope of the present invention；
Accompanying drawing 5 is the structure chart of the hysteroscope condensation prevention system of the present invention；
Accompanying drawing 6 is the structure chart of the hysteroscope clean system of the present invention；
In figure：1- laser systems；2- optics hysteroscopes；3- hysteroscope condensation prevention systems；4- hysteroscope clean systems；5- data acquisitions
With processing system；101- temperature control modules；102- semiconductor laser with tunable；103- electric current drive modules；104- light is accurate
Straight module；201- high reflection curved mirror I；202- high reflections curved mirror II；301- heat-insulation layers；302- heaters；303- high temperature resistants
Glue；304- temperature sensors；305- radiator valves；401- Filter dryers；402- air pumps；403- minute surface cleaning apparatus；
404- cleaning control modules；405- gas handling systems；501- photodetectors；502- data collecting cards；503- second harmonics
Processing module；504- data disaply moudles.Wherein, high reflection curved mirror perforate situation is various in accompanying drawing 4, can be with two sides high reflection
Curved mirror perforate simultaneously, can open eccentric orfice, combine very many, not enumerate here, but at least there is a high reflection song
Face mirror perforate.Accompanying drawing 5 and accompanying drawing 6 are high reflection curved mirror I condensation-proofs and clean system structure chart, and high reflection curved mirror II is anti-cold
Solidifying and clean system structure chart is identical with accompanying drawing 5 and 6, but centre is without aperture.
Specific embodiment
Below by embodiment, and accompanying drawing is combined, technical scheme is described in further detail.
Embodiment 1：
As shown in Fig. 1-6, a kind of wide range gasification H based on TDLAS2O2Concentration detector, it include laser system 1,
Optics hysteroscope 2, hysteroscope condensation prevention system 3, hysteroscope clean system 4, data Collection ＆ Processing System 5, are capable of achieving 0-2000ppm
The real-time detection of wide range VHP concentration.
Laser system 1 includes temperature control modules 101, semiconductor laser with tunable 102, the and of electric current drive module 103
Laser alignment module 104, wherein, temperature control modules 101 and electric current drive module 103 are ITC4001, tunable semiconductor
Laser instrument 102 is 1410nmDFB laser instruments, and live width ＜ 3MHz, power are 10mW, and laser is superimposed with the triangular modulation of 20Hz
The high_frequency sine wave modulation output of 4kHz, output laser is in the collimated incident of laser alignment module 104 to optics hysteroscope 2.Light
Learn hysteroscope 2 be a pair of high reflection curved mirrors (I, II) along same optical axis it is opposite it is arranged evenly form, using gold or gold+SiO2Enter
Row plated film, it is ensured that it possesses good material compatibility with VHP, it is to avoid the phenomenons such as oxide etch, a pair of high reflection curved surfaces occur
The focal length f of mirror is identical, and minute surface centre distance D meets：F≤D≤2f, and at least one high reflection curved mirror of presence is provided with aperture,
For incident and shoot laser, in the embodiment, independent high reflection curved mirror I is provided with centre bore 201a, for incident and outgoing
Laser, f=10cm, D=18cm, whole optics hysteroscope 2 is placed in the environment full of VHP.Incident laser is in optics hysteroscope 2
Come and go and connect by data Collection ＆ Processing System 5 by high reflection curved mirror I centre bore 201a outgoing, shoot laser after reflection repeatedly
Receive, it mainly includes photodetector 501, data collecting card 502, second harmonic processing module 503 and data disaply moudle
504, light intensity signal obtains V Jing after detection, collection, analysis2fAnd VDMean value, using VHP retrieving concentration formulaCan obtain and show VHP concentration values.Wherein, k and b is that test inhabitant area is normal
Number, V2f,bAnd VD,bRespectively second harmonic and light intensity signal voltage bias, VD0It is without the light intensity signal electricity at GAS ABSORPTION position
, that is, there is not light intensity signal magnitude of voltage during light intensity attenuation in pressure initial value.The photodetector 501, data collecting card for being used
502nd, second harmonic processing module 503 is respectively InGaAs detectors, PCI6229, SRS830 lock-in amplifier.Hysteroscope condensation-proof
System 3 includes heat-insulation layer 301, heater 302, radiator valve 305, and radiator valve 305 includes temperature sensor 304, temperature
Control circuit, the Jing high-temperature plastics 303 of heater 302 are seamlessly connected at the high reflection curved mirror back side, and heat-insulation layer 301 is covered in heater
Outside 302.In VHP measurement process, heater voltage, electric current are adjusted by temperature control circuit, so as to realize that mirror temperature is stablized
Control, keeps mirror temperature to be higher than environment temperature to be measured, but preferably lower than 60 DEG C, effect is the mirror for improving high reflection curved mirror
Face temperature, prevents minute surface from condensation occur under high humidity environment.Heater 302 adopts flexible heater material, ceramic heat
, used as Heating body, Jing high-temperature plastics 303 are seamlessly connected at high reflection curved mirror I, II back side, outward for material or other heating materials
Portion is covered by heat-insulation layer 301, prevents heat from outwards dispersing.Hysteroscope clean system 4 includes Filter dryer 401, air pump 402, mirror
Face cleaning apparatus 403, clean control module 404 and gas handling system 405.Minute surface cleaning apparatus 403 are hollow torus, with
Minute surface outward flange is tightly connected, and multiple gas outlets and air inlet are uniformly arranged on device to be guaranteed to form one layer uniformly in lens surface
Gas curtain layer 3a, minute surface cleaning apparatus are provided with inlet end and outlet side, and inlet end is sequentially connected air pump 402, Filter dryer
401, outlet side can collect unnecessary clean gas and connect blast pipe and be delivered to gas handling system 405, and all modules are by clean
Net control module 404 is controlled.In VHP measurement process, hysteroscope clean system 4 provides the dry cleansing air of certain pressure,
High reflection curved mirror I, II surface forms the airflow layer of thin layer, for dry cleansing lens surface.
Above-mentioned specific embodiment is used for illustrating the present invention, rather than limits the invention, the present invention's
In spirit and scope of the claims, any modifications and changes made to the present invention both fall within the protection model of the present invention
Enclose.
Claims (13)
1. a kind of wide range based on TDLAS gasifies H2O2Concentration detector, it is characterised in that include：Laser system, optics cavity
Mirror, hysteroscope condensation prevention system, hysteroscope clean system, data Collection ＆ Processing System.
2. a kind of wide range based on TDLAS gasifies H2O2Concentration detector, it is characterised in that：The gasification H of the detector2O2It is dense
Tolerance journey is 0-2000ppm.
3. the wide range based on TDLAS according to claim 1 and 2 gasifies H2O2Concentration detector, it is characterised in that：Institute
The laser system stated includes semiconductor laser with tunable, temperature control modules, electric current drive module and light collimating module.
4. the wide range based on TDLAS according to claim 1 and 2 gasifies H2O2Concentration detector, it is characterised in that：Institute
The optics hysteroscope stated is a pair of high reflection curved mirrors, and a pair of described high reflection mirror curved mirror focal length f are identical, along same optical axis phase
To distribution, minute surface centre distance D meets：f≤D≤2f；At least there is a high reflection curved mirror and be provided with aperture, for incident and
Shoot laser.
5. the wide range based on TDLAS according to claim 4 gasifies H2O2Concentration detector, it is characterised in that：Described
High reflection curved mirror surface is coated with golden film.
6. the wide range based on TDLAS according to claim 5 gasifies H2O2Concentration detector, it is characterised in that：Described
Golden film outer layer is coated with and gasification H2O2Keep the SiO of good material compatibility2Film.
7. the wide range based on TDLAS according to claim 1 and 2 gasifies H2O2Concentration detector, it is characterised in that：Institute
The hysteroscope condensation prevention system stated includes heat-insulation layer, heater, radiator valve.
8. the wide range based on TDLAS according to claim 7 gasifies H2O2Concentration detector, it is characterised in that：Described
Using flexible heater material, ceramic heating material as Heating body, heater Jing high-temperature plastics are seamlessly connected heater
The high reflection curved mirror back side, described heat-insulation layer is covered in outside heater.
9. the wide range based on TDLAS according to claim 1 and 2 gasifies H2O2Concentration detector, it is characterised in that：Institute
The hysteroscope clean system stated has certain pressure dry cleansing air comprising minute surface cleaning apparatus, clean control module, offer
Filter dryer and air pump.
10. the wide range based on TDLAS according to claim 8 gasifies H2O2Concentration detector, it is characterised in that：Minute surface
Cleaning apparatus are tightly connected with minute surface outward flange, and multiple gas outlets, the gas of clean dried are uniformly arranged on minute surface cleaning apparatus
Steadily flow out from venthole, in lens surface one layer of uniform gas curtain layer is formed；Minute surface cleaning apparatus are provided with inlet end and outlet
End, inlet end is sequentially connected air pump, filter, and outlet side can collect unnecessary clean gas and connect blast pipe and be delivered to gas
Processing system.
The 11. wide ranges gasification H based on TDLAS according to claim 1 and 22O2Concentration detector, it is characterised in that：Institute
The data Collection ＆ Processing System stated includes photodetector, data collecting card, second harmonic processing module and data display mould
Block.
The 12. wide range gasification H according to claim 11 based on TDLAS2O2Concentration detector, it is characterised in that：Described data
Collection and processing system, first, set up self-correction retrieving concentration formulaV2fFor second harmonic signal electricity
Pressure, VDBe without the light intensity signal voltage measured value at GAS ABSORPTION position,For the H that gasifies2O2Concentration value, the inversion formula adds
Enter optical intensity voltage signal, eliminate gasification H2O2Impact of the light intensity change to measurement of concetration under high humidity environment；Then, surveying
During amount, V is obtained in real time2fAnd VDMean value in short time；Finally, it is linear to insert using the mean value and inversion formula for measuring
Value, is calculated and be shown gasification H2O2Concentration value.
The 13. wide ranges gasification H based on TDLAS according to claim 122O2Concentration detector, it is characterised in that：It is described
Self-correction retrieving concentration formula,Meet：K and b
For test inhabitant area constant, V2f,bAnd VD,bRespectively second harmonic and light intensity signal voltage bias, VD0It is without at GAS ABSORPTION position
Light intensity signal Initial Voltage Value, that is, there is not light intensity signal magnitude of voltage during light intensity attenuation.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107389604A (en) * | 2017-06-26 | 2017-11-24 | 中国科学院光电研究院 | A kind of laser, which declines, swings detection method |
| CN112121218A (en) * | 2020-09-30 | 2020-12-25 | 深圳市英乐斐科技有限公司 | VHP (very high frequency protocol) sterilization effect judgment method and device, electronic equipment and storage medium |
| CN113654757A (en) * | 2021-08-27 | 2021-11-16 | 中国科学技术大学 | Device for simulating high supersonic velocity condensation process in spray pipe and diagnosis method |
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