CN106644156A - Fiber grating temperature sensor for measuring vacuum environment temperature - Google Patents
Fiber grating temperature sensor for measuring vacuum environment temperature Download PDFInfo
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- CN106644156A CN106644156A CN201610962348.8A CN201610962348A CN106644156A CN 106644156 A CN106644156 A CN 106644156A CN 201610962348 A CN201610962348 A CN 201610962348A CN 106644156 A CN106644156 A CN 106644156A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
- G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
Abstract
The invention discloses a fiber grating temperature sensor for measuring vacuum environment temperature. The fiber grating temperature sensor comprises a sealing box and a fiber grating, wherein the sealing box comprises a foundation and an upper cover, the foundation is provided with a slot and a groove, the upper cover is provided with a slot and a boss in matching with the foundation, the fiber grating is arranged in the slot of the foundation, first and tail ends of the fiber grating are sleeved in protection tubes, and the middle portion of the fiber grating is fixed with an aluminum foil through heat conduction silicone grease/heat conduction silica gel. The fiber grating temperature sensor is advantaged in that a packaging mode is simple, sealing performance is good, the fiber grating temperature sensor can realize operation in serious environments, and temperature measurement precision is high.
Description
Technical field
The present invention relates to sensory field of optic fibre, is specifically related to one kind and is applied to the thermometric fiber grating of vacuum environment
Temperature sensor.
Background technology
In order to measure to satellite surface temperature under vacuum of space environment, the measurement for considering temperature is needed to need high-precision
The characteristics such as degree, measurement range are big, Flouride-resistani acid phesphatase, and fiber grating meets this background just.
2007, Wuhan University of Technology's Guo Ming gold et al. devised two kinds of fiber-optical grating temperature sensor encapsulation, and to it
Low-temperature characteristics carried out experimental study, temperature control coefficient is respectively 28.2pm/ DEG C and 21.3pm/ DEG C；2010, swallow
Mountain university Zhang Yanjun et al. have developed a kind of distributed fiber grating cable temperature sensor, linear in the range of 20～100 DEG C
Degree is good, up to 99.8%；2013, China Seismology Bureau Ma Xiaochuan et al. entered to high sensitivity stable fiber grating temperature sensor
Go research, measure its sensitivity coefficient up to 345.9pm/ DEG C；2014, Beijing Information Science ＆ Technology University Zhang Yinmin et al. was to tubular type
The fiber-optical grating temperature sensor of encapsulation is studied, and enhanced sensitivity package temperature sensitivity coefficient reaches 29.97pm/ DEG C.
Solve the problems, such as to strain cross sensitivity for fiber-optical grating temperature sensor, the various solutions that comprehensive academia proposes are handed over
The method of fork tender subject, basic thought substantially can be divided three classes：Distinguish, go quick, counteracting.And go that quick mode is traditional to adopt
With tube-packaged, fiber grating is in one section of fixation, and one section of trip is floating.Temperature cannot be transmitted under vacuum conditions by heat transfer,
And heat radiation energy is low.
The content of the invention
It is an object of the invention to provide a kind of fiber-optical grating temperature sensor, for solving strain cross sensitivity and vacuum temperature
The problem of degree measurement.
The technical scheme is that：One kind is applied to the thermometric fiber-optical grating temperature sensor of vacuum environment to be included
Package boxes and fiber grating, it is characterised in that described Package boxes include base and upper lid, described base is provided with draw-in groove
And groove, it is described on be covered with the draw-in groove and boss matched with base, described fiber grating is placed in base draw-in groove, described
Fiber grating head and end be cased with protection pipe, the fiber grating mid portion is by heat-conducting silicone grease/heat conductive silica gel and aluminium foil
It is fixed.
Preferably, the two sides end of described base and upper lid is connected by laser welding.
Preferably, described base draw-in groove is arranged along its length, and described draw-in groove shape is in gradient, terraced from from left to right first
Degree, the second gradient and 3rd gradient size are matched respectively with protection pipe, optical fiber and aluminium foil size, 4th gradient and the 5th gradient chi
It is very little identical with the second gradient and first gradient size；Wherein, first gradient length 6mm-10mm, width 1mm-2mm, depth
1mm-2mm；Second gradient length 4mm-6mm, width 0.5mm-1mm, depth 0.5mm-1mm；3rd gradient length 26mm-
30mm, width 3mm-5mm, depth 1mm-2mm.
Preferably, base is divided into two parts by described base draw-in groove, and top half is provided with groove, and the groove is T-shaped,
Depth of groove 2mm-3mm.
Preferably, described upper lid draw-in groove and the pedestal parameters with base groove cooperation and base draw-in groove and groove parameters phase
Together.
Preferably, the junction of the 3rd gradient of the draw-in groove and the second gradient and 4th gradient is by heat-conducting silicone grease/lead
Hot silica gel is fixed.
The draw-in groove and groove design meet seal while preventing irradiation in space from impact is produced on fiber grating, and
Build vacuum environment.
Preferably, described upper lid geometric center position is provided with through hole, the through-hole diameter 0.3mm-1mm.
It is conveniently to vacuumize that the upper lid via design is met using fiber-optical grating temperature sensor, while convenient deflate.
Preferably, described Package boxes cross section is rectangle, square, circle or ellipse.
Preferably, -40～100 DEG C of described temperature sensor temperature-measuring range, temperature control 12pm/ DEG C.
Preferably, described protection pipe material is polytetrafluoroethylene (PTFE).
Polytetrafluoroethylene (PTFE) has good high-temperature stability, and fiber-optical grating temperature sensor can be applicable in adverse circumstances.
The invention has the beneficial effects as follows：The Package boxes of the present invention are externally provided with protection pipe, and it can be protected to fiber grating
Shield, protection pipe material is polytetrafluoroethylene (PTFE) so as in can be applicable to adverse circumstances；Aluminium foil and heat-conducting silicone grease/heat conductive silica gel are fixed
Fiber grating in Package boxes, heat-conducting silicone grease/heat conductive silica gel can be substituted as a kind of heat-conducting type organosilicon smectic compound
Air transmits temperature, effectively measured piece temperature is passed into fiber-optic grating sensor；Closure is realized in draw-in groove and groove design
Design, while having built vacuum environment.
Description of the drawings
With reference to the accompanying drawing enclosed, the present invention more purpose, function and advantages are by by the as follows of embodiment of the present invention
Description is illustrated, wherein：
Fig. 1 a illustrate that the present invention is applied to the thermometric fiber-optical grating temperature sensor understructure main view of vacuum environment
Figure；
Fig. 1 b illustrate that the present invention is applied to the thermometric fiber-optical grating temperature sensor understructure left view of vacuum environment
Figure；
Fig. 1 c illustrate that the present invention is applied to the thermometric fiber-optical grating temperature sensor understructure of vacuum environment and overlooks
Figure；
Fig. 2 illustrates that the present invention is applied to the top view of the thermometric fiber-optical grating temperature sensor of vacuum environment；
Fig. 3 illustrates the light for being applied to the thermometric fiber-optical grating temperature sensor of vacuum environment of the embodiment of the present invention 4
The schematic diagram that fine grating wavelength is varied with temperature；
Fig. 4 illustrates that the bare optical fibers and bare optical gratings sensor compression strain of the embodiment of the present invention 5 decouples curve map；
Fig. 5 illustrates that the bare optical fibers and bare optical gratings sensor elongation strain of the embodiment of the present invention 5 decouples curve map；
Fig. 6 illustrates the fiber-optical grating temperature sensor of the embodiment of the present invention 5 strain decoupling curve map.
Specific embodiment
By reference to one exemplary embodiment, the purpose of the present invention and function and the side for realizing these purposes and function
Method will be illustrated.However, the present invention is not limited to one exemplary embodiment disclosed below；Can by multi-form come
It is realized.The essence of specification is only to aid in the detail of the various equivalent modifications Integrated Understanding present invention.
Hereinafter, embodiments of the invention will be described with reference to the drawings.In the accompanying drawings, identical reference represents identical
Or similar part, or same or like step.
Embodiment 1
Fig. 1 a illustrate that the present invention is applied to the thermometric fiber-optical grating temperature sensor understructure main view of vacuum environment
Figure；Fig. 1 b illustrate that the present invention is applied to the thermometric fiber-optical grating temperature sensor understructure left view of vacuum environment；Figure
1c illustrates that the present invention is applied to the thermometric fiber-optical grating temperature sensor understructure top view of vacuum environment.Such as Fig. 1 c institutes
Understructure top view is shown as, wherein base is provided with draw-in groove 101 and groove 102.
Package boxes include base and upper lid, it is described on be covered with the card being mutually matched with base draw-in groove 101, groove 102
Groove and boss.
The two sides end of the base of Package boxes and upper lid is connected by laser welding, and the material of Package boxes is metal material
Matter, in order that it is fast to heat absorption speed, material can be dark colour metal.
Fig. 2 illustrates that the present invention is applied to the top view of the thermometric fiber-optical grating temperature sensor of vacuum environment.Such as Fig. 2
Shown, fiber-optical grating temperature sensor includes fiber grating 210, protection pipe 220, silicon rubber 230 and aluminium foil 240.
The base of Package boxes is provided with draw-in groove 101, and described draw-in groove 101 is arranged along base length direction, the shape of draw-in groove 101
Shape in gradient, from first gradient from left to right, the second gradient and 3rd gradient size respectively with protection pipe 220, fiber grating 210 and aluminium
The size of paper tinsel 240 is matched, and 4th gradient and the 5th gradient size are equivalently-sized with the second gradient and first gradient respectively；Wherein,
One gradient length 6mm-10mm, width 1mm-2mm, depth 1mm-2mm；Second gradient length 4mm-6mm, width 0.5mm-1mm,
Depth 0.5mm-1mm；3rd gradient length 26mm-30mm, width 3mm-5mm, depth 1mm-2mm；Described base draw-in groove 101
Base is divided into two parts, top half is provided with groove 102, and the groove 102 is T-shaped, depth of groove 2mm-3mm, lower half
Divide groove symmetrical with top half；Described upper lid draw-in groove parameter and the pedestal parameters that coordinate with base groove respectively with base card
Groove is identical with groove parameters, and upper lid geometric center position is provided with through hole, the through-hole diameter 0.3mm-1mm；Described packaging cartridge
Body cross section is rectangle, square, circle or ellipse, described Package boxes appearance and size length 46mm-65mm, width
12mm-20mm, height 3mm-10mm.
Preferably, first gradient length 6mm of the draw-in groove 101, width 1mm, depth 1mm；Second gradient length 4mm, it is wide
Degree 0.5mm, depth 0.5mm；3rd gradient length 26mm, width 3mm, depth 1mm.
Preferably, depth 2mm of the base groove 102, upper lid boss height 2mm.
Preferably, described upper lid surface geometric center through-hole diameter 0.5mm.
Preferably, described Package boxes appearance and size length 46mm, width 15mm, height 5mm.
The described head and end of fiber grating 210 is cased with protection pipe 220, and the centre position of the fiber grating 210 is by leading
Hot silicone grease/heat conductive silica gel is fixed with aluminium foil 240.
The 3rd gradient of the base draw-in groove is fixed with the junction of the second gradient and 4th gradient by silicon rubber 230,
Preferred silicon rubber 230 selects GD414, and the technical indicator of GD414 is as shown in table 1.
The GD414 the key technical indexes of table 1
| Outward appearance | White or black paste |
| Tensile strength (MPa) | ≥4.0 |
| Elongation at break (%) | ≥300 |
| Hardness (HA) | ≥20 |
| Electrical strength (MV/m) | ≥15 |
The material of the protection pipe 220 is polytetrafluoroethylene (PTFE), with high-temperature stability, the normal sensor of temperature can be made to be applied to height
In warm adverse circumstances.
The described design of base draw-in groove 101 and fiber grating 210 and the relating to parameters of protection pipe 220；Draw-in groove purpose of design
It is for seal and prevents in space irradiation to produce impact to fiber grating；Described base groove 102 sets with upper lid boss
Meter, equally realizes seal, has built vacuum environment.
The present invention provides one kind and is applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its operation principle
It is：The basic sensing principle of fiber grating is that broadband light enters to inject optical fiber, and the light of only specific wavelength is returned by optical grating reflection,
Back wave long value generally uses λBRepresent, with grating period A and reverse coupled effective refractive index neffRelevant, coupled-mode theory can
, meet the centre wavelength of the fiber grating of phase-matching condition:
λB=2neff*Λ (1)
Most it is directly stress, strain parameter in all factors for causing optic fiber grating wavelength to shift.Causing optical fiber light
The displacement of grid centre wavelength can be by formula (2) Unify legislation:
ΔλB=2neffΔΛ+2ΔneffΛ (2)
In formula, Δ Λ is the elastic deformation that optical fiber is present in itself under stress；ΔneffFor the elasto-optical effect of optical fiber.
Spreading out deformation can obtain：
In formula：Thermal refractive index coefficient is represented, can be represented with ξ；(Δneff)epRepresent the bullet light that thermal expansion causes
Effect；Represent due to expanding the waveguiding effect for causing fibre core diameter to change and producing；Represent light
Fine thermal linear expansion coefficient, can be represented with a.Then formula (3) can be rewritten as：
Isotropism recklessly can law general type understand that the strain of fiber grating all directions is：
Understand that the strain regime caused by temperature is：
Obtaining Temperature Sensitivity Coefficient of Fiber Bragg Gratings expression formula is：
In formula：Represent the Bragg wavelength drift coefficient that waveguiding effect causes.
Understand that the temperature sensitive coefficient of fiber grating is a definite value related to optical fiber material itself according to analysis, because
This fiber grating has preferable linearity output when using as temperature sensor.
The present invention be applied to the technological process that the thermometric fiber-optical grating temperature sensor of vacuum environment uses include with
Lower step：
1st, cleaning substructure and upper lid
Metab and upper lid are cleaned with supersonic cleaning machine, alcohol wipe is used after cleaning.
2nd, fiber grating is prepared
Teflon pipe box 220 is enclosed within into the two ends of fiber grating 210.
3rd, dispensing
Optical fiber is fixed in base draw-in groove 3rd gradient two ends spot printings silicon rubber 230, solidifies two hours.
4th, filling heat-conductive silicone grease
1/2～2/3 heat-conducting silicone grease is injected in draw-in groove, grating fibers are adjusted, interference is prevented, is put on silicone grease with syringe needle several
Individual hole, and the silicone grease unnecessary in addition to groove with the de- fat cotton rub of alcohol is accounted for.
5th, lid aluminium foil
With blade cutting small pieces strip aluminium foil 240, it is covered in above heat-conducting silicone grease.
6th, in four angle point silicon rubber glue of aluminium foil.
7th, Teflon sleeve pipe 220 stretches out unnecessary 1/2 draw-in groove in draw-in groove part, and in draw-in groove gap silicon rubber is injected.
8th, cover tightly and solidify more than two hours simultaneously in upper lid ballast.
9th, in base and upper lid two sides end laser welding.
10th, laser welding is completed base and upper lid two sides end coating silicon rubber.
11st, vacuumize in vacuum tank and the quick dispensing in the aperture of upper lid.
12nd, sensor polishing surface is taken out.
13rd, use silicon rubber point instead to vacuumize again in the aperture of upper lid.
14th, deflate, take out temperature sensor.
The fiber grating that described step 2 prepares is not limited to one, during multiple fiber gratings, can pass through Teflon sleeve pipe
Connection fiber grating, constitutes fiber grating matrix, and adjacent two fiber gratings pass through Teflon sleeve pipe connection, in Teflon sleeve pipe
The distance of two sections of fiber gratings is less than 5mm.
Test 1：A kind of Sensitivity Calibration for being applied to vacuum environment temperature survey fiber-optical grating temperature sensor of the present invention
Test.
By high-low temperature test chamber (150 DEG C of the ∽ of temperature range -60) and thermocouple (0.5 DEG C of precision) detection fiber grating
Grid region temperature.
The average 10 DEG C of temperature intervals in temperature interval are set to high-low temperature test chamber, and a thermal cycle is done in intensification cooling,
Chamber is tested temperature sensor.
Fig. 3 illustrates that the present invention is applied to the optic fiber grating wavelength of the thermometric fiber-optical grating temperature sensor of vacuum environment
The schematic diagram for varying with temperature.Result of the test is as shown in figure 3, during cooling and intensification two, the wavelength of fiber grating is equal
Even stretching, wherein 12pm/ DEG C of temperature spirit degree, the linearity 99.9%.
Test 2：Probe into the impact that testpieces produces temperature sensor of the deformation to being pasted onto on testpieces.
In order to probe into the impact that testpieces produces temperature sensor of the deformation to being pasted onto on testpieces.Preparing experiment device
Material：Baybac (FBG) demodulators (included light source), PC, heat sealing machine suit, APC optical patchcords, capture card NI-DAQ9237 modules, resistance
Strain gauge, fiber-optical grating temperature sensor, bare optical fibers and bare optical gratings, epoxy resin, the beam of uniform strength.
With epoxy resin while adhering resistance strain gauge, fiber-optical grating temperature sensor and naked light wherein on the beam of uniform strength
Fine grating；Baybac (FBG) demodulators (included light source) are connected with PC by serial ports；Capture card NI-DAQ9237 modules and another PC
Connected by serial ports；Baybac (FBG) demodulators (included light source) are connected by APC optical patchcords with bare optical fibers and bare optical gratings；Bare optical fibers and bare optical gratings
It is connected with fiber-optical grating temperature sensor by APC optical patchcords；Capture card NI-DAQ9237 modules by APC optical patchcords with
Strain ga(u)ge connects.
Loaded by the differential head of the beam of uniform strength, recorded strain value and the demodulation of capture card NI-DAQ9237 ohmers
The centre wavelength of the fiber grating on instrument.Differential head is moved up and down, and loading compression is represent respectively with unloading compression.
Data processing：Using resistance strain measurement value as transverse axis, bare optical fibers and bare optical gratings are distinguished with fiber-optical grating temperature sensor
As the longitudinal axis, data processing is carried out.
Fig. 4 show bare optical fibers and bare optical gratings sensor compression strain decoupling curve, and Fig. 5 show the drawing of bare optical fibers and bare optical gratings sensor
Stretching strain decouples curve.Fig. 6 is fiber-optical grating temperature sensor strain decoupling curve.Uncoated optical fiber as shown in Figure 4 and Figure 5
Grating compression strain carry-over factor 1.36pm/ μ ε, elongation strain carry-over factor 1.345pm/ μ ε.
Fig. 6 is fiber-optical grating temperature sensor strain decoupling curve.As shown in Figure 6 the optical fiber grating temperature of Vacuum Package is passed
Sensor centre wavelength maximum drift 2pm, from the Sensitivity Calibration of the temperature sensor of embodiment 4, the temperature of this kind of packing forms
Degree sensitivity coefficient is 12pm/ DEG C, is not more than 0.2 DEG C equivalent to temperature floating, it is possible to understand that this kind of packing forms are not received substantially
Temperature affects.Because beam of uniform strength clamping plate is nonstandard, in compression, strain ga(u)ge initial value is -160 μ ε, and resistance should during stretching
Become meter initial value into 157 μ ε, there is systematic error, so unloading overlaps with strain data when loading in compression, but not
Affect the sensitivity coefficient of sensor.
Conclusion (of pressure testing)：Testpieces produces deformation in the range of ± 1000 μ ε, to the temperature sensor being pasted onto on testpieces
There is the effect of temperature and strain decoupling without impact, i.e. this temperature sensor.The fiber bragg grating center wavelength of temperature sensor
Upper and lower drift 1.3nm, equivalent to measurement range ± 109 DEG C that temperature control coefficient is 12pm/ DEG C.
With reference to the explanation of the invention and practice that disclose here, the other embodiment of the present invention is for those skilled in the art
All will be readily apparent and understand.Illustrate and embodiment be to be considered only as it is exemplary, the present invention true scope and purport it is equal
It is defined in the claims.
Claims (9)
1. one kind is applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, including Package boxes and fiber grating；
Described Package boxes include base and upper lid；
Described base is provided with draw-in groove and groove, it is described on be covered with the draw-in groove and boss matched with base, described optical fiber
Grating is placed in base draw-in groove, and described fiber grating head and end is cased with protection pipe, and the fiber grating mid portion passes through
Heat-conducting silicone grease/heat conductive silica gel is fixed with aluminium foil.
2. according to claim 1 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In described base and the two sides of upper lid is connected by laser welding.
3. according to claim 1 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In, described draw-in groove is arranged along its length, described draw-in groove shape shape in gradient, from first gradient from left to right, the second gradient and
3rd gradient size is matched respectively with protection pipe, optical fiber and aluminium foil size, and 4th gradient and the 5th gradient size are respectively with second
Gradient and first gradient are equivalently-sized；Wherein, first gradient length 6mm-10mm, width 1mm-2mm, depth 1mm-2mm；Second
Gradient length 4mm-6mm, width 0.5mm-1mm, depth 0.5mm-1mm；3rd gradient length 26mm-30mm, width 3mm-
5mm, depth 1mm-2mm.
4. according to claim 3 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In base is divided into two parts by described base draw-in groove, and top half is provided with groove, and the groove is T-shaped, depth of groove 2mm-
3mm, the latter half groove is symmetrical with top half.
5. according to claim 3 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In the 3rd gradient of the draw-in groove is fixed with the junction of the second gradient and 4th gradient by silicon rubber.
6. according to claim 1 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In described upper lid geometric center position is provided with through hole, the through-hole diameter 0.3mm-1mm.
7. according to claim 1 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In described Package boxes cross section is rectangle, square, circle or ellipse, and described Package boxes appearance and size is long
Degree 46mm-65mm, width 12mm-20mm, height 3mm-10mm, described fiber grating length is more than Package boxes appearance and size
Length.
8. according to claim 1 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In described temperature sensor temperature control 12pm/ DEG C.
9. according to claim 1 to be applied to the thermometric fiber-optical grating temperature sensor of vacuum environment, its feature exists
In the material of described protection pipe is polytetrafluoroethylene (PTFE).
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| CN109612602A (en) * | 2018-12-29 | 2019-04-12 | 北京信息科技大学 | A kind of novel fiber grating temperature sensor and packaging method |
| CN109682322A (en) * | 2019-03-05 | 2019-04-26 | 南京聚科光电技术有限公司 | Experiment porch microstrain real-time monitoring device and method under a kind of vacuum environment |
| CN109974755A (en) * | 2019-04-08 | 2019-07-05 | 四川大学 | A kind of flexible multi-parameter sensor and its preparation based on fiber grating principle |
| CN110186589A (en) * | 2019-05-15 | 2019-08-30 | 中国葛洲坝集团第一工程有限公司 | A kind of fiber grating temperature sensor and assembly method of high water pressure resistant |
| CN111413006A (en) * | 2020-03-25 | 2020-07-14 | 北京空间科技信息研究所 | Vacuum low-temperature fiber grating temperature sensor and packaging method thereof |
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| CN109974755B (en) * | 2019-04-08 | 2021-07-30 | 四川大学 | Flexible multi-parameter sensor based on fiber grating principle and preparation thereof |
| CN110186589A (en) * | 2019-05-15 | 2019-08-30 | 中国葛洲坝集团第一工程有限公司 | A kind of fiber grating temperature sensor and assembly method of high water pressure resistant |
| CN111413006A (en) * | 2020-03-25 | 2020-07-14 | 北京空间科技信息研究所 | Vacuum low-temperature fiber grating temperature sensor and packaging method thereof |
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Application publication date: 20170510 |