CN106643571B - A kind of angle calibration system device and calibration method based on isoperibol - Google Patents

A kind of angle calibration system device and calibration method based on isoperibol Download PDF

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Publication number
CN106643571B
CN106643571B CN201611260319.3A CN201611260319A CN106643571B CN 106643571 B CN106643571 B CN 106643571B CN 201611260319 A CN201611260319 A CN 201611260319A CN 106643571 B CN106643571 B CN 106643571B
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laser
angle
side plate
laser beam
diaphragm
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CN106643571A (en
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余钊辉
于奋强
潘龙
白嘉瑜
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Yancheng Liyan New Material Co ltd
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Hangzhou Luosong Trading Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/08Testing mechanical properties

Abstract

A kind of angle calibration system device and calibration method based on isoperibol, including the laser set gradually on laser optical path direction, diaphragm and prover, it further include insulating box, diaphragm and prover are set in insulating box, the first of prover, two, three, four side plates surround the rectangular configuration with hollow cavity, it is the opening of A that first side plate center, which has aperture, the convex mirror that aperture is greater than hatch bore diameter is provided on the inside of the third side plate being oppositely arranged, first, second, scale and the corresponding optical flame detector are both provided on the inside of 4th side plate, first, second, liquid level is set on the correspondence optical flame detector of the inside of 4th side plate, the wherein refractive index n of liquid level1Greater than the refractive index n of air0, temperature control system is provided in insulating box, can be emitted the angle measurement of light beam for laser to calibrate to laser, be reduced device volume, improve the stability of calibrating installation, to improve the accuracy of laser launch angle.

Description

A kind of angle calibration system device and calibration method based on isoperibol
Technical field
The present invention relates to field of optical measurements, and in particular to a kind of angle calibration system device and calibration side based on isoperibol Method.
Background technique
Laser has many advantages, such as that brightness height, good directionality, monochromaticjty are good, coherence is good, thus is widely used in work The every field such as industry, agricultural, accurate measurement and detection, communication and information processing, medical treatment, military affairs.People can be right using laser Material is processed, the processing etc. refined in disease treatment.
With social science and expanding economy, the requirement for laser performance is also higher and higher, if can be fine That changes operates laser, then can more targetedly operate in practical applications to target.Currently, laser Direction can be adjusted by changing the angle of the direction of the launch, however this adjustment mode depends on the hard of laser itself mostly Part and its measure of precision are also limited to the operation of laser direction the angle of departure for changing light beam after adjusting by laser itself Degree, is not calibrated specifically for the actual launch angle of light beam, and react on the calibration of laser itself, therefore is calibrated Precision is low.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of angles that can emit light beam for laser Degree measurement reduces device volume, improves the stability of calibrating installation, to improve laser to calibrate to laser The angle calibration system device and calibration method based on isoperibol of the accuracy of device launch angle.
The present invention provides a kind of angle calibration system device based on isoperibol, including successively set on laser optical path direction Laser, diaphragm and the prover set further include insulating box, and diaphragm and prover are set in insulating box:
First, second, third and fourth side plate of prover surrounds the rectangular configuration with hollow cavity, wherein the first and third side plate is opposite And be set on the direction vertical with laser optical path, second, four side plates are opposite and are set on the direction parallel with laser optical path; It is the opening of A that first side plate center, which has aperture, and aperture is provided on the inside of the third side plate being oppositely arranged and is greater than opening The convex mirror in aperture, the subsequent corrosion of convex mirror are definite value;
Diaphragm has aperture B, and the deflection angle of the laser beam of laser transmitting meets certain angular range, so that at angle Laser beam can pass through diaphragm (even if laser beam there is certain deflection angle can also pass through) in degree range;
The first, second, it is both provided with scale and the corresponding optical flame detector on the inside of the 4th side plate, optical flame detector senses sharp Electric signal is issued when light light beam is sent to controller;
Liquid level is set on the correspondence optical flame detector of the inside of the first, second, the 4th side plate, wherein the refractive index of liquid level n1Greater than the refractive index n of air0
Controller receives the deflection angle and real-time display that the laser beam of laser transmitting at this time is determined after electric signal;
Temperature control system is provided in insulating box, wherein temperature control system includes that temperature sensing unit and refrigeration are single Member.
Wherein, laser is gas, liquid, solid or semiconductor laser.
Wherein, indicator corresponding with scale label is provided on the outside of the first, second, the 4th side plate.
Wherein, the solution in the liquid level can be replaced.
Wherein, temperature sensing unit is realized in the way of unbalance bridge circuit.
Wherein, the temperature sensor of temperature sensing unit is Pt100 or Pt1000.
Wherein, refrigeration unit is semiconductor cooler.
The present invention also provides a kind of calibration methods using the angle calibration system device based on isoperibol, successively include such as Lower step:
(1) temperature control system is opened, is preheated 20 minutes, so that the temperature in temperature control box is maintained at 25 DEG C;
(2) control laser emits the parallel laser light beam of not angular deflection, so that laser beam after diaphragm by shining It is incident upon the center of convex mirror, if optical flame detector does not sense laser beam, enters step (3);
(3) make the laser beam of transmitting that there is first angle by the angular adjustment apparatus of laser, so that laser light Beam exposes to convex mirror after passing through diaphragm;
(4) laser beam is after convex mirror emits, with the first measurement angle transmitting, to the first side after the first liquid level Plate, when the photoreceptor on the first side plate senses the first sensed position of laser beam, sending includes the first of first position Electric signal is to controller, and the indicator of corresponding scale shines;
(5) laser beam is after the transmitting of the first side plate, with the second measurement angle transmitting after the first liquid level, by second Or the 4th after liquid level to the photoreceptor on the second or the 4th side plate, second or the 4th side plate sense laser beam second or When third sensed position, sending include second or the third place second or third electric signal to controller, and corresponding carve The indicator of degree shines;
(6) the corresponding deflection angle in first position and second or the corresponding deflection angle of the third place are compared, if partially Corner is identical, then using this deflection angle as collimation angle, step (2)-(5) are repeated if different;
(7) angular adjustment apparatus is calibrated using collimation angle, so that the adjustment of angular adjustment apparatus adjusted is joined Number is corresponding with first angle;
(8) control temperature control system carries out heating 10 minutes, so that the temperature in temperature control box is maintained at 32 DEG C;By swashing The angular adjustment apparatus of light device makes the laser beam of transmitting have second angle, step (2)-(6) is repeated, using at 32 DEG C Under, the corresponding collimation angle of second angle calibrates angular adjustment apparatus, so that the adjustment of angular adjustment apparatus adjusted Parameter is corresponding with second angle, and calibration finishes.
Angle calibration system device and calibration method based on isoperibol of the invention may be implemented to emit light for laser Laser is calibrated in the angle measurement of beam, to improve the accuracy of laser launch angle, and visual indication The deflection angle of corresponding angle and the laser setting of corresponding calibration intuitively compares out, more convenient;Pass through the setting of liquid level Device volume is reduced, and the mode replaced improves flexibility, so that calibration is richer, has saved space;Temperature control system Setting so that device performance is more stable, calibrate more acurrate.
Detailed description of the invention
Fig. 1 is the angle calibration system apparatus structure schematic diagram based on isoperibol
Fig. 2 is the angle calibration system principle of device schematic diagram based on isoperibol
Specific embodiment
The following detailed description of specific implementation of the invention, it is necessary to it is indicated herein to be, implement to be only intended to this hair below Bright further explanation, should not be understood as limiting the scope of the invention, and field person skilled in the art is according to above-mentioned Some nonessential modifications and adaptations that summary of the invention makes the present invention, still fall within protection scope of the present invention.
Angle calibration system devices and methods therefor the present invention provides a kind of laser based on isoperibol, as shown in Figure 1, swashing Angle calibration system device of the light device based on isoperibol includes laser 1, diaphragm and the school set gradually on laser optical path direction Quasi- instrument 2 and insulating box 7, diaphragm and prover 2 are set in insulating box, and wherein the structure of prover 2 is as shown in Figure 1, calibration First, second, third and fourth side plate of instrument surrounds the rectangular configuration with hollow cavity, wherein the first and third side plate is opposite and is set to and swashs On the vertical direction of light optical path, second, four side plates are opposite and are set on the direction parallel with laser optical path;First side plate center It is the opening of A that position, which has an aperture, and the convex surface that aperture is greater than hatch bore diameter is provided on the inside of the third side plate being oppositely arranged Mirror 3, the laser beam of laser transmitting, by opening, are then irradiated on convex mirror 3, convex mirror 3 is anti-by light beam after diaphragm It is irradiated in after penetrating on the first side plate, is irradiated in second or the 4th again after the reflection of the first side plate on side plate;Diaphragm has aperture B, While its setting can be by wiping out background veiling glare, guarantee that the laser beam of laser transmitting can be by (even if laser beam has Have certain deflection angle), and the deflection angle of the laser beam of laser transmitting meets certain angular range, by diaphragm If laser beam afterwards is without deflection angle, and direct irradiation to the center of convex mirror 3, then laser beam is according to original Path returns, and during calibration, swashing for laser is adjusted by the transmitting beam angle means for correcting of laser itself Light emitting angle, to change the launch angle of the laser beam of laser, laser beam is irradiated to convex mirror 3 after passing through diaphragm On, it is irradiated on the first side plate after beam path will be changed after reflection.
The structure of prover 2 is fixed design, and the subsequent corrosion of convex mirror 3 is also the definite value after design, therefore with one Determining angular illumination can be reflected to the laser beam of convex mirror 3 with fixed angle, because the structure of prover 2 is fixed, In hollow cavity the 3 to the first side plate of convex mirror and the first side plate to second or the 4th the path of side plate be also fixed, the length in path Degree is also fixed, and the reflection point of the first side plate and second or the 4th side plate is also fixed, therefore passes through optical design, Prover is calibrated in advance, using after calibration structure and light path angle and length relation can be obtained by the light of laser The deflection angle of beam, to carry out the angular adjustment apparatus of correcting laser itself by the calculated value of deflection angle, to realize laser The calibration of device.
As shown in Figure 1, being both provided with scale and corresponding light on the inside of the first, second, the 4th side plate in concrete implementation Sensor, optical flame detector sense that electric signal is issued when laser beam is sent to controller (not shown), and controller receives telecommunications Determine the deflection angle and real-time display of the laser beam of the transmitting of laser at this time after number, furthermore the first, second, the 4th side plate Outside is provided with indicator corresponding with scale label, right while inductor senses laser beam during calibration The indicator of scale label is answered to shine, so as to intuitively read corresponding deflection angle, to adjust device with laser Adjusting parameter be compared, the calibration of laser is realized by calibration adjustment device.
As shown in connection with fig. 2, the setting of convex mirror is so that incidence angle has a bigger angle outgoing after reflection, in this way the When the reception of side plate, it is necessary to the first side plate long enough, but growing side plate length will increase volume excessively, and can reduce survey The efficiency of amount, therefore liquid level is set on the correspondence optical flame detector of the inside of the first, second, the 4th side plate, the layer wall of liquid level For the minimum transparent glass of thickness, because thickness is minimum, the influence to optical path is ignored, according to Snell principle: n0sinθ0=n1sinθ1, wherein n0And n1The refractive index of liquid, θ respectively in air and liquid level0And θ1Respectively incidence angle and The angle of emergence, if that in liquid level liquid refractive index n1Greater than n0, then the angle of the angle of emergence can become smaller, if existed accordingly In same ranges of incidence angles, the setting length of corresponding optical flame detector be can reduce, then the length of corresponding side plate Setting reduces.
In addition, if only setting have refractive index be greater than air refraction dielectric layer, then will receive dielectric material and The constraint of attribute, such as can only be a certain medium of fixed refraction, however since liquid can be the solution with solute, So it can change the property of solution by adding the solute of different type and different amounts, to configure the refraction of needs Rate optimizes optical path.The variation fluctuation of temperature will affect the refractive index of liquid, and liquid penetrates rate with relatively high thermal coefficient Dn/dt, such as the thermal coefficient of water is 8 × 10-4DEG C, i.e. every 1 DEG C of the variation of temperature, refraction index changing 0.0008, it is therefore desirable to set Corresponding temperature control system is set to guarantee stable temperature environment, wherein the temperature sensing unit in temperature control system utilizes uneven electricity Bridge circuit mode realizes that temperature sensor selects Pt100 or Pt1000, and refrigeration unit is semiconductor cooler, utilizes this side The temperature control system of formula can guarantee that temperature keeps error at ± 0.1 DEG C.
Therefore, by the refractive index n of liquid level1Greater than the refractive index n of air0, and can combine it is right at different temperature Collimation angle corresponding to the different sensed positions answered compares, and such set-up mode reduces the setting length of side plate, from And can reduce the volume of prover 2, reduce the volume of entire calibrating installation.
The present invention also provides a kind of angle calibration system methods using the angle calibration system device based on isoperibol, successively wrap Include following steps:
(1) temperature control system is opened, is preheated 20 minutes, so that the temperature in temperature control box is maintained at 25 DEG C;
(2) control laser emits the parallel laser light beam of not angular deflection, so that laser beam after diaphragm by shining It is incident upon the center of convex mirror, if optical flame detector does not sense laser beam, enters step (3);
(3) make the laser beam of transmitting that there is first angle by the angular adjustment apparatus of laser, so that laser light Beam exposes to convex mirror after passing through diaphragm;
(4) laser beam is after convex mirror emits, with the first measurement angle transmitting, to the first side after the first liquid level Plate, when the photoreceptor on the first side plate senses the first sensed position of laser beam, sending includes the first of first position Electric signal is to controller, and the indicator of corresponding scale shines;
(5) laser beam is after the transmitting of the first side plate, with the second measurement angle transmitting after the first liquid level, by second Or the 4th after liquid level to the photoreceptor on the second or the 4th side plate, second or the 4th side plate sense laser beam second or When third sensed position, sending include second or the third place second or third electric signal to controller, and corresponding carve The indicator of degree shines;
(6) the corresponding deflection angle in first position and second or the corresponding deflection angle of the third place are compared, if partially Corner is identical, then using this deflection angle as collimation angle, step (2)-(5) are repeated if different;
(7) angular adjustment apparatus is calibrated using collimation angle, so that the adjustment of angular adjustment apparatus adjusted is joined Number is corresponding with first angle;
(8) control temperature control system carries out heating 10 minutes, so that the temperature in temperature control box is maintained at 32 DEG C;By swashing The angular adjustment apparatus of light device makes the laser beam of transmitting have second angle, step (2)-(6) is repeated, using at 32 DEG C Under, the corresponding collimation angle of second angle calibrates angular adjustment apparatus, so that the adjustment of angular adjustment apparatus adjusted Parameter is corresponding with second angle, and calibration finishes.
Furthermore it should be noted that design parameter and structure feature in the present invention can by being directly or indirectly arranged, The mode of measurement obtains, and the present invention is completed under reasonable be expected, and parameter, formula, the scheme of any discomfort should all exclude.
Although for illustrative purposes, it has been described that exemplary embodiments of the present invention, those skilled in the art Member it will be understood that, can be in form and details in the case where the scope and spirit for not departing from invention disclosed in appended claims On the change that carry out various modifications, add and replace etc., and all these changes all should belong to appended claims of the present invention Protection scope, and each step in the claimed each department of product and method, can in any combination Form is combined.Therefore, to disclosed in this invention the description of embodiment be not intended to limit the scope of the invention, But for describing the present invention.Correspondingly, the scope of the present invention is not limited by embodiment of above, but by claim or Its equivalent is defined.

Claims (8)

1. a kind of angle calibration system device based on isoperibol, it is characterised in that: including being set gradually on laser optical path direction Laser, diaphragm and prover, further include insulating box, diaphragm and prover are set in insulating box:
First, second, third and fourth side plate of prover surrounds the rectangular configuration with hollow cavity, wherein the first and third side plate is opposite and sets It is placed on the direction vertical with laser optical path, second, four side plates are opposite and are set on the direction parallel with laser optical path;First It is the opening of A that side plate center, which has aperture, and aperture is provided on the inside of the third side plate being oppositely arranged greater than hatch bore diameter Convex mirror, the subsequent corrosion of convex mirror is definite value;
Diaphragm has aperture B, and the deflection angle of the laser beam of laser transmitting meets certain angular range, so that in angle model Diaphragm can be passed through by enclosing interior laser beam;
The first, second, it is both provided with scale and corresponding optical flame detector on the inside of the 4th side plate, when optical flame detector senses laser beam It issues electric signal and is sent to controller;
Liquid level is set on the correspondence optical flame detector of the inside of the first, second, the 4th side plate, wherein the refractive index n of liquid level1Greatly In the refractive index n of air0
Controller receives the deflection angle and real-time display that the laser beam of laser transmitting at this time is determined after electric signal;
Temperature control system is provided in insulating box, wherein temperature control system includes temperature sensing unit and refrigeration unit.
2. device as described in claim 1, it is characterised in that: laser is gas, liquid, solid or semiconductor laser.
3. device as claimed in claim 1 or 2, it is characterised in that: be provided with and mark on the outside of the first, second, the 4th side plate The corresponding indicator of ruler scale.
4. device as claimed in claim 3, it is characterised in that: the solution in the liquid level can be replaced.
5. device as claimed in claim 4, it is characterised in that: temperature sensing unit is real in the way of unbalance bridge circuit It is existing.
6. device as claimed in claim 5, it is characterised in that: the temperature sensor of temperature sensing unit be Pt100 or Pt1000。
7. device as claimed in claim 6, it is characterised in that: refrigeration unit is semiconductor cooler.
8. a kind of calibration side using such as the described in any item angle calibration system devices based on isoperibol of the claims 1-7 Method, which is characterized in that in turn include the following steps:
(1) temperature control system is opened, is preheated 20 minutes, so that the temperature in temperature control box is maintained at 25 DEG C;
(2) control laser emits the parallel laser light beam of not angular deflection, so that laser beam after diaphragm by exposing to The center of convex mirror enters step (3) if optical flame detector does not sense laser beam;
(3) make the laser beam of transmitting that there is first angle by the angular adjustment apparatus of laser, so that laser beam is logical Convex mirror is exposed to after crossing diaphragm;
(4) laser beam is after convex mirror emits, with the first measurement angle transmitting, to the first side plate after the first liquid level, the When photoreceptor on side plate senses the first sensed position of laser beam, sending includes the first electric signal of first position Indicator to controller, and corresponding scale shines;
(5) laser beam is after the transmitting of the first side plate, with the second measurement angle transmitting after the first liquid level, by second or the Second or third of laser beam are sensed after four liquid levels to the photoreceptor on the second or the 4th side plate, second or the 4th side plate When sensed position, sending include second or the third place second or third electric signal to controller, and corresponding scale Indicator shines;
(6) the corresponding deflection angle in first position and second or the corresponding deflection angle of the third place are compared, if deflection angle It is identical, then using this deflection angle as collimation angle, step (2)-(5) are repeated if different;
(7) angular adjustment apparatus is calibrated using collimation angle so that the adjusting parameter of angular adjustment apparatus adjusted with First angle is corresponding;
(8) control temperature control system carries out heating 10 minutes, so that the temperature in temperature control box is maintained at 32 DEG C;Pass through laser Angular adjustment apparatus make the laser beam of transmitting that there is second angle, repeat step (2)-(6), using at 32 DEG C, the The corresponding collimation angle of two angles calibrates angular adjustment apparatus so that the adjusting parameter of angular adjustment apparatus adjusted with Second angle is corresponding, and calibration finishes.
CN201611260319.3A 2016-12-30 2016-12-30 A kind of angle calibration system device and calibration method based on isoperibol Active CN106643571B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6432105A (en) * 1987-07-28 1989-02-02 Pioneer Electronic Corp Angle deviation measuring instrument for flat plate member
CN1560563A (en) * 2004-02-25 2005-01-05 北京交通大学 Laser colimation system and method of automatic measuring light drift angle
TW200951526A (en) * 2008-06-06 2009-12-16 Hon Hai Prec Ind Co Ltd Inclination angle measurement method for lens module
CN202305177U (en) * 2011-10-28 2012-07-04 北京锐光仪器有限公司 Excitation light source drift correction device
CN102735190A (en) * 2011-04-07 2012-10-17 上海微电子装备有限公司 Detection device and detection method used for laser-beam deflection angle

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6432105A (en) * 1987-07-28 1989-02-02 Pioneer Electronic Corp Angle deviation measuring instrument for flat plate member
CN1560563A (en) * 2004-02-25 2005-01-05 北京交通大学 Laser colimation system and method of automatic measuring light drift angle
TW200951526A (en) * 2008-06-06 2009-12-16 Hon Hai Prec Ind Co Ltd Inclination angle measurement method for lens module
CN102735190A (en) * 2011-04-07 2012-10-17 上海微电子装备有限公司 Detection device and detection method used for laser-beam deflection angle
CN202305177U (en) * 2011-10-28 2012-07-04 北京锐光仪器有限公司 Excitation light source drift correction device

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