CN106643571A - Angle calibration device and angle calibration method based on constant-temperature environment - Google Patents
Angle calibration device and angle calibration method based on constant-temperature environment Download PDFInfo
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- CN106643571A CN106643571A CN201611260319.3A CN201611260319A CN106643571A CN 106643571 A CN106643571 A CN 106643571A CN 201611260319 A CN201611260319 A CN 201611260319A CN 106643571 A CN106643571 A CN 106643571A
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- 238000000034 method Methods 0.000 title claims abstract description 8
- 239000007788 liquid Substances 0.000 claims abstract description 30
- 238000005259 measurement Methods 0.000 claims abstract description 11
- 210000004222 sensilla Anatomy 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000005057 refrigeration Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 230000008859 change Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 241000208340 Araliaceae Species 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004899 motility Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/08—Testing mechanical properties
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Lasers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention relates to an angle calibration device and an angle calibration method based on constant-temperature environment. The angle calibration device comprises a laser device, a diaphragm, a calibration instrument and an incubator, wherein the laser device, the diaphragm and the calibration instrument are sequentially arranged on a laser light path, and the diaphragm and the calibration instrument are arranged in the incubator; a first side plate, a second side plate, a third side plate and a fourth side plate of the calibration instrument form a rectangular structure with a hollow cavity, an opening with an aperture A is formed in the central position of the first side plate, a convex mirror with an aperture larger than that of the opening is arranged on the inner side of the opposite arranged third side plate, scale plates and corresponding light inductors are arranged on the inner sides of the first side plate, the second side plate and the fourth side plate, liquid layers are arranged on the corresponding light inductors on the inner sides of the first side plate, the second side plate and the fourth side plate, and the refractive indexes n1 of the liquid layers are larger than the refractive index n0 of air; and a temperature control system is arranged in the incubator. According to the angle calibration device, the laser device can be calibrated aiming at the angle measurement of light beams emitted by the laser device, the volume of the device is reduced, and the stability of the calibration device is improved, so that the accuracy of emission angle of the laser device is improved.
Description
Technical field
The present invention relates to field of optical measurements, and in particular to a kind of angle calibration system device and calibration side based on isoperibol
Method.
Background technology
Laser has the advantages that brightness height, good directionality, monochromaticity is good, coherence is good, thus is widely used in work
The every field such as industry, agricultural, accurate measurement and detection, communication and information processing, medical treatment, military affairs.People can be right using laser
Material is processed, process become more meticulous in disease treatment etc..
With social sciences and expanding economy, for the requirement also more and more higher of laser performance, if can be fine
That what is changed operates to laser, then more targetedly target can be operated in actual applications.At present, laser
Direction can be adjusted by changing the angle of the direction of the launch, but this adjustment mode depends on the hard of laser instrument itself mostly
Part and its measure of precision, for the operation of laser direction is also limited to after laser instrument itself is adjusted change the angle of departure of light beam
Degree, is not specifically designed for the actual launch angle of light beam and is calibrated, and reacts on the calibration of laser instrument itself, therefore calibrates
Precision is low.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art, there is provided a kind of to be directed to the angle that laser instrument launches light beam
Spend measurement to calibrate laser instrument, reduce device volume, the stability of calibrating installation is improve, so as to improve laser
The angle calibration system device based on isoperibol of the accuracy of device launch angle and calibration steps.
The invention provides a kind of angle calibration system device based on isoperibol, is included on laser optical path direction and sets successively
Laser instrument, diaphragm and the prover put, also including calorstat, diaphragm and prover are arranged in calorstat：
First, second, third and fourth side plate of prover surrounds the rectangular configuration with middle cavity, wherein first and third side plate is relative
And be arranged on the direction vertical with laser optical path, second, four side plates are relative and are arranged on the direction parallel with laser optical path；
First side plate center has the opening that aperture is A, and aperture is provided with the inside of the 3rd side plate being oppositely arranged more than opening
The convex mirror in aperture, the subsequent corrosion of convex mirror is definite value；
The deflection angle that diaphragm has aperture B, the laser beam of laser instrument transmitting meets certain angular range so that at angle
Laser beam can be by diaphragm (even if there is laser beam certain deflection angle also can pass through) in the range of degree；
First, secondth, scale and the corresponding sensillum opticum are both provided with the inside of the 4th side plate, sensillum opticum senses sharp
The signal of telecommunication is sent during light light beam to send to controller；
Liquid level, the wherein refractive index of liquid level are set on the corresponding sensillum opticum of the inner side of the first, second, the 4th side plate
n1More than refractive index n of air0；
Controller receives the deflection angle of the laser beam that now laser instrument transmitting is determined after the signal of telecommunication and shows in real time；
Temperature control system is provided with calorstat, wherein temperature control system includes that temperature sensing unit and refrigeration are single
Unit.
Wherein, laser instrument is gas, liquid, solid or semiconductor laser.
Wherein, it is provided with indicator corresponding with scale label on the outside of the first, second, the 4th side plate.
Wherein, the solution in the liquid level can be changed.
Wherein, temperature sensing unit is realized using unbalance bridge circuit mode.
Wherein, the temperature sensor of temperature sensing unit is Pt100 or Pt1000.
Wherein, refrigeration unit is semiconductor cooler.
Present invention also offers it is a kind of using based on isoperibol angle calibration system device calibration steps, include successively as
Lower step：
(1) temperature control system is opened, is preheated 20 minutes so that the temperature in temperature control box is maintained at 25 DEG C；
(2) laser instrument parallel laser light beam of the transmitting without angular deflection is controlled so that laser beam is shone after diaphragm
The center of convex mirror is incident upon, if sensillum opticum does not sense laser beam, into step (3)；
(3) cause the laser beam launched that there is first angle by the angular adjustment apparatus of laser instrument so that laser light
Beam exposes to convex mirror after diaphragm；
(4) laser beam is launched, to the first side after first liquid layer Jing after convex mirror transmitting with the first measurement angle
Plate, when the photoreceptorss on the first side plate sense the first sensed position of laser beam, sends and includes the first of first position
The signal of telecommunication is to controller, and the indicator of correspondence scale lights；
(5) laser beam is launched, through second after first liquid layer Jing after the transmitting of the first side plate with the second measurement angle
The 4th after liquid level to second or the 4th side plate, second or the 4th the photoreceptorss on side plate sense laser beam second or
During three sensed positions, send include second or the 3rd position second or the 3rd the signal of telecommunication to controller, and correspondence carve
The indicator of degree lights；
(6) by the corresponding deflection angle in first position and second or the 3rd the corresponding deflection angle in position be compared, if partially
Corner is identical, then using this deflection angle as collimation angle, repeat step (2)-(5) if difference；
(7) angular adjustment apparatus are calibrated using collimation angle so that the adjustment ginseng of the angular adjustment apparatus after adjustment
Number is corresponding with first angle；
(8) controlling temperature control system carries out heating 10 minutes so that the temperature in temperature control box is maintained at 32 DEG C；By swashing
The angular adjustment apparatus of light device cause the laser beam launched to have second angle, repeat step (2)-(6), using at 32 DEG C
Under, the corresponding collimation angle of second angle is calibrated to angular adjustment apparatus so that the adjustment of the angular adjustment apparatus after adjustment
Parameter is corresponding with second angle, and calibration is finished.
The angle calibration system device based on isoperibol and calibration steps of the present invention, it is possible to achieve for laser instrument launching light
The angular surveying of beam calibrating to laser instrument, so as to improve the accuracy of laser instrument launch angle, and visual indication
Go out the corresponding angle of corresponding calibration, and the deflection angle that laser instrument is arranged intuitively is contrasted, it is more convenient；By the setting of liquid level
Device volume is reduced, and the mode changed improves motility so that and calibration is more rich, has saved space；Temperature control system
Setting cause device performance more stable, calibrate it is more accurate.
Description of the drawings
Fig. 1 is based on the angle calibration system apparatus structure schematic diagram of isoperibol
Fig. 2 is based on the angle calibration system principle of device schematic diagram of isoperibol
Specific embodiment
The following detailed description of being embodied as the present invention, it is necessary to it is pointed out here that, below implement to be only intended to this
Bright further illustrates, it is impossible to be interpreted as limiting the scope of the invention, and art skilled person is according to above-mentioned
Some nonessential modifications and adaptations that the content of the invention is made to the present invention, still fall within protection scope of the present invention.
The invention provides a kind of angle calibration system devices and methods therefor of laser instrument based on isoperibol, as shown in figure 1, swashing
Light device is included in the laser instrument 1, diaphragm and school set gradually on laser optical path direction based on the angle calibration system device of isoperibol
Quasi- instrument 2, and calorstat 7, diaphragm and prover 2 are arranged in calorstat, and wherein the structure of prover 2 is as shown in figure 1, calibration
First, second, third and fourth side plate of instrument surrounds the rectangular configuration with middle cavity, wherein first and third side plate is relative and is arranged at and swashs
On the vertical direction of light light path, second, four side plates are relative and are arranged on the direction parallel with laser optical path；First side plate center
Position has opening of the aperture for A, and convex surface of the aperture more than hatch bore diameter is provided with the inside of the 3rd side plate being oppositely arranged
Mirror 3, the laser beam of laser instrument transmitting, by opening, is then irradiated on convex mirror 3 Jing after diaphragm, and convex mirror 3 is anti-by light beam
It is irradiated in after penetrating on the first side plate, is irradiated in second or the 4th again Jing after the reflection of the first side plate on side plate；Diaphragm has aperture B,
Its arrange can by wiping out background veiling glare while, it is ensured that laser instrument transmitting laser beam can by (even if laser beam tool
Have certain deflection angle), and the deflection angle of the laser beam of laser instrument transmitting meets certain angular range, through diaphragm
If laser beam afterwards is without deflection angle, and direct irradiation to the center of convex mirror 3, then laser beam is according to original
Path returns, and during calibration, swashing for laser instrument is adjusted by the transmitting beam angle correcting unit of laser instrument itself
Light launch angle, so as to change the launch angle of the laser beam of laser instrument, laser beam is irradiated to convex mirror 3 after diaphragm
On, will change be irradiated to after beam path on the first side plate after reflection.
The structure of prover 2 is Fixed Design, and the subsequent corrosion of convex mirror 3 is also the definite value after design, therefore with one
Determine angular illumination to convex mirror 3 laser beam can with fixed angle reflection, because the structure of prover 2 is fixed,
The hollow side plate of intracavity convex mirror 3 to the first and the first side plate to second or the 4th the path of side plate be also fixed, the length in path
Degree is also fixed, and the pip of the first side plate and second or the 4th side plate is also fixed, therefore by optical design,
Prover is calibrated in advance, using the structure and light path angle and length relation after calibration the light of laser instrument is can be obtained by
The deflection angle of beam, so as to by the value of calculation of deflection angle, carry out the angular adjustment apparatus of correcting laser itself, so as to realize laser
The calibration of device.
As shown in figure 1, in concrete implementation, scale and correspondence light are both provided with the inside of the first, second, the 4th side plate
Sensor, sensillum opticum sends the signal of telecommunication and sends to controller (not shown) when sensing laser beam, controller receives telecommunications
The deflection angle of the laser beam of now laser instrument transmitting is determined after number and show in real time, in addition the first, second, the 4th side plate
Outside is provided with indicator corresponding with scale label, right while induction apparatuss sense laser beam during calibration
Answer scale label indicator light, such that it is able to intuitively read corresponding deflection angle, so as to laser instrument adjusting apparatus
Adjusting parameter be compared, realize the calibration of laser instrument by calibrating adjusting apparatus.
With reference to shown in Fig. 2, the setting of convex mirror causes angle of incidence to have bigger angle outgoing after reflection, so the
During the reception of side plate, it is necessary to the first side plate long enough, but growing side plate length excessively can increase volume, and can reduce surveying
The efficiency of amount, therefore liquid level is set on the corresponding sensillum opticum of the inner side of the first, second, the 4th side plate, the layer wall of liquid level
For the minimum clear glass of thickness, because thickness is minimum, its impact to light path is ignored, according to Snell principles：
n0sinθ0=n1sinθ1, wherein n0And n1The refractive index of liquid, θ respectively in air and liquid level0And θ1Respectively angle of incidence and
The angle of emergence, then if in liquid level liquid refractive index n1More than n0, then the angle of the angle of emergence can diminish, if existed accordingly
In same ranges of incidence angles, the setting length of corresponding sensillum opticum can reduce, then the length of corresponding side plate just can be with
Arrange and reduce.
If additionally, simply arrange the dielectric layer with refractive index more than air refraction, can be subject to dielectric material and
The constraint of attribute, for example, can only be a certain medium of fixed refraction, can be the solution with solute yet with liquid,
The property of solution so can be changed by the solute of the different type of addition and different amounts, so as to configure the refraction of needs
Rate, optimizes light path.The change fluctuation of temperature can affect the rate of penetrating of the refractive index of liquid, liquid to have relatively high heat conductivity
The heat conductivity of dn/dt, such as water is 8 × 10-4DEG C, i.e., temperature often changes 1 DEG C, refraction index changing 0.0008, it is therefore desirable to set
Put corresponding temperature control system to ensure stable temperature environment, the temperature sensing unit wherein in temperature control system is using uneven electricity
Bridge circuit mode realizes that temperature sensor selects Pt100 or Pt1000, and refrigeration unit is semiconductor cooler, using this side
The temperature control system of formula can ensure that temperature keeps error at ± 0.1 DEG C.
Therefore, by refractive index n of liquid level1More than refractive index n of air0, and can be with reference to right at different temperature
The collimation angle corresponding to different sensed positions answered is contrasted, and such set-up mode reduces the setting length of side plate, from
And the volume of prover 2 can be reduced, reduce the volume of whole calibrating installation.
Present invention also offers a kind of angle calibration system method of the angle calibration system device using based on isoperibol, wraps successively
Include following steps：
(1) temperature control system is opened, is preheated 20 minutes so that the temperature in temperature control box is maintained at 25 DEG C；
(2) laser instrument parallel laser light beam of the transmitting without angular deflection is controlled so that laser beam is shone after diaphragm
The center of convex mirror is incident upon, if sensillum opticum does not sense laser beam, into step (3)；
(3) cause the laser beam launched that there is first angle by the angular adjustment apparatus of laser instrument so that laser light
Beam exposes to convex mirror after diaphragm；
(4) laser beam is launched, to the first side after first liquid layer Jing after convex mirror transmitting with the first measurement angle
Plate, when the photoreceptorss on the first side plate sense the first sensed position of laser beam, sends and includes the first of first position
The signal of telecommunication is to controller, and the indicator of correspondence scale lights；
(5) laser beam is launched, through second after first liquid layer Jing after the transmitting of the first side plate with the second measurement angle
The 4th after liquid level to second or the 4th side plate, second or the 4th the photoreceptorss on side plate sense laser beam second or
During three sensed positions, send include second or the 3rd position second or the 3rd the signal of telecommunication to controller, and correspondence carve
The indicator of degree lights；
(6) by the corresponding deflection angle in first position and second or the 3rd the corresponding deflection angle in position be compared, if partially
Corner is identical, then using this deflection angle as collimation angle, repeat step (2)-(5) if difference；
(7) angular adjustment apparatus are calibrated using collimation angle so that the adjustment ginseng of the angular adjustment apparatus after adjustment
Number is corresponding with first angle；
(8) controlling temperature control system carries out heating 10 minutes so that the temperature in temperature control box is maintained at 32 DEG C；By swashing
The angular adjustment apparatus of light device cause the laser beam launched to have second angle, repeat step (2)-(6), using at 32 DEG C
Under, the corresponding collimation angle of second angle is calibrated to angular adjustment apparatus so that the adjustment of the angular adjustment apparatus after adjustment
Parameter is corresponding with second angle, and calibration is finished.
In addition it should be noted that the design parameter and architectural feature in the present invention can by directly or indirectly arranging,
The mode of measurement is obtained, and the present invention is completed under rational expection, and parameter, formula, the scheme of any discomfort all should be excluded.
Although for illustrative purposes, it has been described that the illustrative embodiments of the present invention, those skilled in the art
Member will be understood that, in the case of the scope and spirit without departing from the invention disclosed in claims, can be in form and details
On carry out various modifications, addition and replace etc. change, and it is all these change should all belong to claims of the present invention
Protection domain, and each department of claimed product and each step in method, can be in any combination
Form is combined.Pair therefore, disclosed in this invention the description of embodiment be not intended to limit the scope of the present invention,
But for describing the present invention.Correspondingly, the scope of the present invention is not limited by embodiment of above, but by claim or
Its equivalent is defined.
Claims (8)
1. a kind of angle calibration system device based on isoperibol, it is characterised in that：It is included on laser optical path direction and sets gradually
Laser instrument, diaphragm and prover, also including calorstat, diaphragm and prover are arranged in calorstat：
First, second, third and fourth side plate of prover surrounds the rectangular configuration with middle cavity, wherein first and third side plate is relative and sets
It is placed on the direction vertical with laser optical path, second, four side plates are relative and are arranged on the direction parallel with laser optical path；First
Side plate center has the opening that aperture is A, and aperture is provided with the inside of the 3rd side plate being oppositely arranged more than hatch bore diameter
Convex mirror, the subsequent corrosion of convex mirror is definite value；
The deflection angle that diaphragm has aperture B, the laser beam of laser instrument transmitting meets certain angular range so that in angle model
Enclosing interior laser beam can be by diaphragm (even if there is laser beam certain deflection angle also can pass through)；
First, secondth, scale and the corresponding sensillum opticum are both provided with the inside of the 4th side plate, sensillum opticum senses laser light
Send the signal of telecommunication during beam to send to controller；
Liquid level, wherein refractive index n of liquid level are set on the corresponding sensillum opticum of the inner side of the first, second, the 4th side plate1Greatly
In refractive index n of air0；
Controller receives the deflection angle of the laser beam that now laser instrument transmitting is determined after the signal of telecommunication and shows in real time；
Temperature control system is provided with calorstat, wherein temperature control system includes temperature sensing unit and refrigeration unit.
2. device as claimed in claim 1, it is characterised in that：Laser instrument is gas, liquid, solid or semiconductor laser.
3. device as claimed in claim 1 or 2, it is characterised in that：First, secondth, it is provided with and mark on the outside of the 4th side plate
The corresponding indicator of chi scale.
4. the device as described in claim 1 or 2 or 3, it is characterised in that：Solution in the liquid level can be changed.
5. device as claimed in claim 1 or 2 or 3 or 4, it is characterised in that：Temperature sensing unit is using unbalanced bridge electricity
Road mode is realized.
6. device as claimed in claim 5, it is characterised in that：The temperature sensor of temperature sensing unit be Pt100 or
Pt1000。
7. device as claimed in claim 6, it is characterised in that：Refrigeration unit is semiconductor cooler.
8. a kind of calibration side of the angle calibration system device based on isoperibol using as described in above-mentioned any one of claim 1-7
Method, it is characterised in that in turn include the following steps：
(1) temperature control system is opened, is preheated 20 minutes so that the temperature in temperature control box is maintained at 25 DEG C；
(2) laser instrument parallel laser light beam of the transmitting without angular deflection is controlled so that laser beam is exposed to after diaphragm
The center of convex mirror, if sensillum opticum does not sense laser beam, into step (3)；
(3) cause the laser beam launched that there is first angle by the angular adjustment apparatus of laser instrument so that laser beam leads to
Cross after diaphragm and expose to convex mirror；
(4) laser beam is launched Jing after convex mirror transmitting with the first measurement angle, to the first side plate after first liquid layer, the
When photoreceptorss on side plate sense the first sensed position of laser beam, first signal of telecommunication for including first position is sent
To controller, and the indicator of correspondence scale lights；
(5) laser beam is Jing after the transmitting of the first side plate, with the transmitting of the second measurement angle after first liquid layer, through second or the
To second or the 4th side plate after four liquid levels, second or the 4th the photoreceptorss on side plate sense the second or the 3rd of laser beam
During sensed position, send include second or the 3rd position second or the 3rd the signal of telecommunication to controller, and correspondence scale
Indicator lights；
(6) by the corresponding deflection angle in first position and second or the 3rd the corresponding deflection angle in position be compared, if deflection angle
It is identical, then using this deflection angle as collimation angle, repeat step (2)-(5) if difference；
(7) angular adjustment apparatus are calibrated using collimation angle so that the adjusting parameter of the angular adjustment apparatus after adjustment with
First angle correspondence；
(8) controlling temperature control system carries out heating 10 minutes so that the temperature in temperature control box is maintained at 32 DEG C；By laser instrument
Angular adjustment apparatus cause the laser beam launched that there is second angle, repeat step (2)-(6), using at 32 DEG C, the
The corresponding collimation angle of two angles is calibrated to angular adjustment apparatus so that the adjusting parameter of the angular adjustment apparatus after adjustment with
Second angle correspondence, calibration is finished.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611260319.3A CN106643571B (en) | 2016-12-30 | 2016-12-30 | A kind of angle calibration system device and calibration method based on isoperibol |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611260319.3A CN106643571B (en) | 2016-12-30 | 2016-12-30 | A kind of angle calibration system device and calibration method based on isoperibol |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106643571A true CN106643571A (en) | 2017-05-10 |
| CN106643571B CN106643571B (en) | 2019-08-20 |
Family
ID=58837582
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611260319.3A Active CN106643571B (en) | 2016-12-30 | 2016-12-30 | A kind of angle calibration system device and calibration method based on isoperibol |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6432105A (en) * | 1987-07-28 | 1989-02-02 | Pioneer Electronic Corp | Angle deviation measuring instrument for flat plate member |
| CN1560563A (en) * | 2004-02-25 | 2005-01-05 | 北京交通大学 | Laser colimation system and method of automatic measuring light drift angle |
| TW200951526A (en) * | 2008-06-06 | 2009-12-16 | Hon Hai Prec Ind Co Ltd | Inclination angle measurement method for lens module |
| CN202305177U (en) * | 2011-10-28 | 2012-07-04 | 北京锐光仪器有限公司 | Excitation light source drift correction device |
| CN102735190A (en) * | 2011-04-07 | 2012-10-17 | 上海微电子装备有限公司 | Detection device and detection method used for laser-beam deflection angle |
-
2016
- 2016-12-30 CN CN201611260319.3A patent/CN106643571B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6432105A (en) * | 1987-07-28 | 1989-02-02 | Pioneer Electronic Corp | Angle deviation measuring instrument for flat plate member |
| CN1560563A (en) * | 2004-02-25 | 2005-01-05 | 北京交通大学 | Laser colimation system and method of automatic measuring light drift angle |
| TW200951526A (en) * | 2008-06-06 | 2009-12-16 | Hon Hai Prec Ind Co Ltd | Inclination angle measurement method for lens module |
| CN102735190A (en) * | 2011-04-07 | 2012-10-17 | 上海微电子装备有限公司 | Detection device and detection method used for laser-beam deflection angle |
| CN202305177U (en) * | 2011-10-28 | 2012-07-04 | 北京锐光仪器有限公司 | Excitation light source drift correction device |
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| Publication number | Publication date |
|---|---|
| CN106643571B (en) | 2019-08-20 |
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