CN106629584A - Non-contact shock wave excitation apparatus for MEMS metal microstructure dynamic characteristic test - Google Patents
Non-contact shock wave excitation apparatus for MEMS metal microstructure dynamic characteristic test Download PDFInfo
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- CN106629584A CN106629584A CN201610866920.0A CN201610866920A CN106629584A CN 106629584 A CN106629584 A CN 106629584A CN 201610866920 A CN201610866920 A CN 201610866920A CN 106629584 A CN106629584 A CN 106629584A
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- shock wave
- mems metal
- dynamic characteristic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
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- Microelectronics & Electronic Packaging (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
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Abstract
The present invention discloses a non-contact shock wave excitation apparatus for an MEMS metal microstructure dynamic characteristic test. The apparatus comprises a manual triaxial displacement table and a support that are disposed on a baseboard. A needle electrode unit is disposed on a Z-axis slide board of the manual triaxial displacement table. A needle electrode of the needle electrode unit points at a microstructure unit disposed at the upper end of the support. The microstructure unit comprises a fixed sleeve. An installation board is installed at an annular step in a hole of the fixed sleeve in an insulated manner. A semi-circular through hole is disposed at the lower part of the installation board. An MEMS metal microstructure is pressed and mounted on the installation board by using a microstructure press board. The needle electrode and the installation board are electrically connected with two poles of a high voltage capacitor. A first air switch is disposed between the needle electrode and the high voltage capacitor and is used for controlling on and off. The two poles of the high voltage capacitor are electrically connected with a positive electrode and a negative electrode of a high voltage power supply and are controlled to connect or disconnect by using a second air switch. The apparatus can prevent impact of vibration response of the base structure on a test result, the metal microstructure is excited in a non-contact manner, the operation is simple and safe, and the excitation effect is good.
Description
Technical field
The invention belongs to micromachine electronic system technology field, more particularly to a kind of for MEMS metal micro structures dynamic
The contactless shock wave exciting bank of characteristic test.
Background technology
Because MEMS micro elements have the advantages that low cost, small volume and lightweight so as in automobile, Aero-Space, letter
Breath communication, biochemistry, medical treatment, automatically control and suffer from being widely applied prospect with the numerous areas such as national defence.For a lot
For MEMS, the micro-displacement of its internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structural carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structural, it is necessary first to make micro-structural produce vibration, that is, need to micro-
Structure enters row energization.Because MEMS micro-structurals have size little, lightweight and the features such as high intrinsic frequency, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination cannot be used in the middle of the vibrational excitation of MEMS micro-structurals.Recent two decades come, domestic
Outer researcher has carried out substantial amounts of exploration for the vibrational excitation method of MEMS micro-structurals, investigated some and can be used for
The motivational techniques of MEMS micro-structurals and corresponding exciting bank.Wherein, She Dongsheng etc. exists《MEMS micro-structurals bottom based on shock wave
Seat technique study excited by impact》A kind of seat excitation apparatus based on shock wave are described in one text, the device has excitation bandwidth
Greatly, applied widely the advantages of, possesses good application potential.But the device remains its own shortcomings：First, the dress
The mode that putting is to encourage using base enters row energization to micro-structural, therefore is being obtained using contactless optics vibration measuring method
The vibratory response of understructure can be included in the micro-structural vibration response signal for obtaining, this joins can the dynamic characteristic of acquisition micro-structural
Number becomes difficult；Second, in a device, feed mechanism can only be adjusted manually, it is impossible to realize auto-feed, and guiding discharge operation is numerous
It is trivial and security is poor；3rd, it is in a device fixing micro-structural, on the one hand to cause coupling stiffness by the way of bonding
It is deteriorated, so as to reduce the excitation bandwidth of exciting bank, on the other hand, because the glue after solidification is difficult to remove, if so thinking
Micro-structural is disassembled from micro-structural installing plate becomes very difficult.
The content of the invention
The technical problem to be solved is to provide a kind of for the non-of MEMS metal micro structure dynamic characteristic tests
Contact shock wave exciting bank, the device can avoid the vibratory response of understructure to the interference of test result, and it is right to realize
The contactless excitation of MEMS metal micro structures, easy to operate and safe, arousal effect is good, is easy to test the dynamic of metal micro structure
Characterisitic parameter.
To solve the above problems, the present invention is adopted the following technical scheme that：
A kind of contactless shock wave exciting bank for MEMS metal micro structure dynamic characteristic tests, including substrate,
Substrate is provided with manual three-shaft displacement platform and bearing, and on the Z axis slide carriage of manual three-shaft displacement platform pin electrode unit is provided with；It is described
Pin electrode unit includes the right-angle connecting plate for connecting Z axis slide carriage, be provided with right-angle connecting plate two pieces be parallel to each other
Fagging, the axis of guide and leading screw that are arranged in parallel is provided between two pieces of gripper shoes and driver plate is arranged with the axis of guide, is driven
Connected by screw between plate and leading screw, wherein one piece of gripper shoe outside is provided with the stepper motor coaxially connected with leading screw,
There is pin electrode driver plate upper end by earthenware insulating mounting, and pin electrode points to the microstructure unit for being arranged on bearing upper end；
The microstructure unit includes being arranged on the fixed cover of bearing upper end, and stepped installing hole is provided with fixed cover,
Insulating mounting has installing plate at ring ladder in installing hole, is provided with semi-circular through hole in installing plate bottom, on a mounting board
Correspondence pin electrode side press-fits MEMS metal micro structures by micro-structural pressing plate, and the vibration end of MEMS metal micro structures protrudes micro- knot
Structure pressing plate is simultaneously suspended in the semi-circular through hole side；
The pin electrode and installing plate are electrically connected respectively with the two poles of the earth of high-voltage capacitance, are set between pin electrode and high-voltage capacitance
There is the first air switch to control break-make；The two poles of the earth of the high-voltage capacitance are electrically coupled to respectively the both positive and negative polarity of high voltage power supply, and pass through
Second air switch controls break-make.
Used as further preferred, the manual three-shaft displacement platform is arranged on a base plate, and the base plate is fixed by screw
On substrate.
Used as further preferred, the earthenware passes perpendicularly through driver plate and is consolidated by being located at the jackscrew of driver plate upper end
It is fixed.
Used as further preferred, the bearing is ladder shaft-like, and its lower end is bigger diameter end and is arranged with ring flange, ring flange
It is connected by screw with substrate and bearing is fixed on substrate, bearing upper end is threaded connection with fixed cover.
As further preferred, the ring ladder being bolted in installing hole that the installing plate passes through circumference uniform distribution
Place, is located between the ring ladder in installing plate and the installing hole on each bolt and distinguishes between fixed cover and nut
Ceramic washer is arranged with, for realizing the electric insulation between installing plate and fixed cover.
Used as further preferred, the micro-structural pressing plate is fixed on a mounting board by multiple screws, the micro- knot of MEMS metals
Structure is clamped between micro-structural pressing plate and installing plate.
As further preferred, a screw is provided with the outside of installing plate, for the wire that fixation is connected with high-voltage capacitance.
The invention has the beneficial effects as follows：
1st, due to eliminating understructure in the apparatus, MEMS metal micro structures are fitted in into peace by micro-structural pressing plate
Electrically connected on dress plate and with high-voltage capacitance by installing plate, will MEMS metal micro structures make directly as a sparking electrode
With the shock wave of generation of then discharging can be applied directly on MEMS metal micro structures, it is to avoid the vibratory response pair of understructure
The interference of test result, realizes the contactless excitation to metal micro structure.
2nd, due to being provided with the Z axis slide carriage of manual three-shaft displacement platform by the pin electrode unit of driving stepper motor displacement,
Therefore there are two kinds of functions of hand feed and auto-feed simultaneously；The preparatory stage of experiment is encouraged in shock wave, it is possible to use manually
The mode of feeding adjusts the relative position of pin electrode and MEMS metal micro structures, when travelling shock-wave excitation experiment is entered, can control
Stepper motor is discharged by way of auto-feed, and so both ensure that can neatly adjust pin electrode and MEMS metals
Relative position between micro-structural, in turn ensure that the security when discharge test is carried out, easy to operate and safe.
3rd, because MEMS metal micro structures are fixed on a mounting board by way of micro-structural pressing plate is adopted and is mechanically fixed,
On the one hand this mounting structure provides good coupling stiffness, makes arousal effect more preferably, ensure that MEMS metal micro structures
Dynamic characteristic parameter test accuracy；On the other hand, dismounting MEMS metal micro structures are made to become simpler, convenient.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the front view of the present invention.
Fig. 3 is the right view of Fig. 2.
Fig. 4 is the three-dimensional structure diagram of pin electrode unit of the present invention.
Fig. 5 is the three-dimensional structure diagram of microstructure unit of the present invention.
Fig. 6 is the structural representation of microstructure unit.
Fig. 7 is the A-A sectional views of Fig. 6.
Fig. 8 is the circuit block diagram of the present invention.
In figure：1st, substrate, 2, manual three-shaft displacement platform, 3, base plate, 4, screw, 5, microstructure unit, 51, fixed cover,
511st, installing hole, 52, bolt, 53, MEMS metal micro structures, 54, installing plate, 541, semi-circular through hole, 55, ceramic washer, 56,
Nut, 57, screw, 58, micro-structural pressing plate, 59, ceramic washer, 6, pin electrode unit, 601, right-angle connecting plate, 602, stepping electricity
Machine, 603, screw, 604, screw, 605, gripper shoe, 606, the axis of guide, 607, screw, 608, screw, 609, axle sleeve, 610, pass
Dynamic plate, 611, jackscrew, 612, earthenware, 613, pin electrode, 614, leading screw, 7, ring flange, 8, bearing, the 9, first air switch,
10th, the second air switch, 11, high-voltage capacitance, 12, high voltage power supply.
Specific embodiment
As shown in Figure 1-Figure 3, a kind of noncontact for MEMS metal micro structure dynamic characteristic tests according to the present invention
Formula shock wave exciting bank, including substrate 1, are provided with substrate 1 manual three-shaft displacement platform 2 and a bearing 8, the hand dynamic triaxial
Displacement platform 2 is arranged on a base plate 3, and the base plate 3 is fixed on substrate 1 by screw 4.In the Z axis of manual three-shaft displacement platform 2
Pin electrode unit 6 is installed on slide carriage.
As shown in figure 4, the pin electrode unit 6 includes the L-type right-angle connecting plate being fixed by screws on Z axis slide carriage
601, two pieces of gripper shoes 605 being parallel to each other are fixed with by screw on right-angle connecting plate 601, two pieces of gripper shoes 605 it
Between be provided with the axis of guide 606 and leading screw 614 that are arranged in parallel up and down and driver plate 610 be arranged with the axis of guide 606, in driver plate
The axle sleeve 609 being slidably matched with the axis of guide 606 is installed with 610 at the correspondence axis of guide 606, the two ends of the axis of guide 606 pass through screw
604 are fixed in two pieces of gripper shoes 605, and leading screw 614 is rotatably installed between two pieces of gripper shoes 605, driver plate 610 and silk
Screw 607 between thick stick 614 by being fixed on driver plate 610 by screw 608 connects, wherein one piece of outside of gripper shoe 605
The stepper motor 602 coaxially connected with leading screw 614 is fixed with by screw 603, in the upper end of driver plate 610 earthenware 612 is passed through
Insulating mounting has pin electrode 613, and the earthenware 612 passes perpendicularly through driver plate 610 and the top by being located at the upper end of driver plate 610
Silk 611 is fixed.The rear portion of pin electrode 613 is installed in earthenware 612, and the forward tip of pin electrode 613 is pointed to and is arranged on the upper end of bearing 8
Microstructure unit 5.
As shown in Figure 5-Figure 7, the microstructure unit 5 includes being arranged on the fixed cover 51 of the upper end of bearing 8, the bearing 8
For ladder shaft-like, its lower end is bigger diameter end and is arranged with ring flange 7, and ring flange 7 is connected by screw and by bearing 8 with substrate 1
Fix on substrate 1, the upper end of bearing 8 is threaded connection with the screw being arranged on the bottom surface of fixed cover 51.In fixed cover 51
Stepped installing hole 511 is provided with, insulating mounting has installing plate 54 at the ring ladder in installing hole 511, under installing plate 54
Portion is provided with semi-circular through hole 541, and correspondence pin electrode 613 side press-fits MEMS metals by micro-structural pressing plate 58 on installing plate 54
Micro-structural 53, the micro-structural pressing plate 58 is fixed on installing plate 54 by multiple screws 57, and MEMS metal micro structures 53 are clamped
Between micro-structural pressing plate 58 and installing plate 54, the vibration end protrusion micro-structural pressing plate 58 of MEMS metal micro structures 53 is simultaneously suspended in
The side of the semi-circular through hole 541.
The installing plate 54 is fixed at the ring ladder in installing hole 511, at each by the bolt 52 of circumference uniform distribution
It is located on bolt 52 between the ring ladder in installing plate 54 and the installing hole 511 and between fixed cover 51 and nut 56 and divides
Ceramic washer 59 and ceramic washer 55 are not arranged with, for realizing the electric insulation between installing plate 54 and fixed cover 51.Installing
The outside of plate 54 is provided with a screw, for the wire that fixation is connected with high-voltage capacitance 11.
As shown in figure 8, the shock wave exciting bank is additionally provided with high-voltage capacitance 11 and high voltage power supply 12, the He of the pin electrode 613
Installing plate 54 is electrically connected respectively with the two poles of the earth of high-voltage capacitance 11 by wire, is provided between pin electrode 613 and high-voltage capacitance 11
First air switch 9 controls break-make；The two poles of the earth of the high-voltage capacitance 11 are electrically coupled to respectively the both positive and negative polarity of high voltage power supply 12, and lead to
Cross the control break-make of the second air switch 10.
When using, first the first air switch 9 and the second air switch 10 are all turned off into state, adjust manual three
Axle position moving stage 2 makes the tip alignment MEMS metal micro structure 53 of pin electrode 613, and ensures that the distance between they are more than high-tension electricity
Hold 11 it is fully charged after maximum air breakdown gap；Then, the second air switch 10 is closed, the use of high voltage power supply 12 is high pressure
Electric capacity 11 charges, and disconnects the second air switch 10 again after charging complete；Finally, the first air switch 9, control stepping electricity are closed
Machine 602 starts, and rotarily drives driver plate 610 by leading screw 614 and moves, and makes the slow close MEMS metal micro structures of pin electrode 613
53 vibration end, when the distance between the needle point and MEMS metal micro structures 53 of pin electrode 613 are met under current charging voltage
During air breakdown condition, the air gap is breakdown, completes the shock wave that discharges and produce, and realization connects to the non-of MEMS metal micro structures 53
Touch is excited by impact.
Although embodiment of the present invention is disclosed as above, it is not restricted to listed in specification and embodiment
With, it can be applied to completely various suitable the field of the invention, for those skilled in the art, can be easily
Other modification is realized, therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited
In specific details and shown here as the legend with description.
Claims (7)
1. a kind of contactless shock wave exciting bank for MEMS metal micro structure dynamic characteristic tests, including substrate, it is special
Levying is：Manual three-shaft displacement platform and bearing are provided with substrate, on the Z axis slide carriage of manual three-shaft displacement platform pin electrode list is provided with
Unit；The pin electrode unit includes the right-angle connecting plate for connecting Z axis slide carriage, two pieces is provided with right-angle connecting plate and is mutually put down
Capable gripper shoe, the axis of guide and leading screw that are arranged in parallel is provided between two pieces of gripper shoes and transmission is arranged with the axis of guide
Plate, is connected between driver plate and leading screw by screw, and wherein one piece of gripper shoe outside is provided with the stepping coaxially connected with leading screw
Motor, has pin electrode in driver plate upper end by earthenware insulating mounting, and pin electrode points to the micro-structural for being arranged on bearing upper end
Unit；
The microstructure unit includes being arranged on the fixed cover of bearing upper end, stepped installing hole is provided with fixed cover, in peace
Insulating mounting has installing plate at ring ladder in dress hole, and in installing plate bottom semi-circular through hole is provided with, and corresponds on a mounting board
Pin electrode side press-fits MEMS metal micro structures, the vibration end protrusion micro-structural pressure of MEMS metal micro structures by micro-structural pressing plate
Plate is simultaneously suspended in the semi-circular through hole side；
The pin electrode and installing plate are electrically connected respectively with the two poles of the earth of high-voltage capacitance, and is provided between pin electrode and high-voltage capacitance
One air switch controls break-make；The two poles of the earth of the high-voltage capacitance are electrically coupled to respectively the both positive and negative polarity of high voltage power supply, and by second
Air switch controls break-make.
2. a kind of contactless shock wave for MEMS metal micro structure dynamic characteristic tests according to claim 1 is encouraged
Device, is characterized in that：The manual three-shaft displacement platform is arranged on a base plate, and the base plate is fixed by screws on substrate.
3. a kind of contactless shock wave for MEMS metal micro structure dynamic characteristic tests according to claim 1 is encouraged
Device, is characterized in that：The earthenware passes perpendicularly through driver plate and is fixed by being located at the jackscrew of driver plate upper end.
4. a kind of contactless shock wave for MEMS metal micro structure dynamic characteristic tests according to claim 1 is encouraged
Device, is characterized in that：The bearing is ladder shaft-like, and its lower end is bigger diameter end and is arranged with ring flange, and ring flange leads to substrate
Cross mode connects for screw and bearing is fixed on substrate, bearing upper end is threaded connection with fixed cover.
5. a kind of contactless shock wave for MEMS metal micro structure dynamic characteristic tests according to claim 1 is encouraged
Device, is characterized in that：At the ring ladder being bolted in installing hole that the installing plate passes through circumference uniform distribution, in each spiral shell
It is located on bolt between the ring ladder in installing plate and the installing hole and between fixed cover and nut and is arranged with ceramics respectively
Packing ring, for realizing the electric insulation between installing plate and fixed cover.
6. a kind of contactless shock wave for MEMS metal micro structure dynamic characteristic tests according to claim 5 is encouraged
Device, is characterized in that：The micro-structural pressing plate is fixed on a mounting board by multiple screws, and MEMS metal micro structures are clamped in micro-
Between structure pressing plate and installing plate.
7. a kind of contactless shock wave for MEMS metal micro structure dynamic characteristic tests according to claim 6 is encouraged
Device, is characterized in that：A screw is provided with the outside of installing plate, for the wire that fixation is connected with high-voltage capacitance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610866920.0A CN106629584B (en) | 2016-09-30 | 2016-09-30 | A kind of contactless shock wave exciting bank for MEMS metal micro structure dynamic characteristic tests |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610866920.0A CN106629584B (en) | 2016-09-30 | 2016-09-30 | A kind of contactless shock wave exciting bank for MEMS metal micro structure dynamic characteristic tests |
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| Publication Number | Publication Date |
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| CN106629584A true CN106629584A (en) | 2017-05-10 |
| CN106629584B CN106629584B (en) | 2018-06-26 |
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| CN201610866920.0A Expired - Fee Related CN106629584B (en) | 2016-09-30 | 2016-09-30 | A kind of contactless shock wave exciting bank for MEMS metal micro structure dynamic characteristic tests |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114973830A (en) * | 2022-05-26 | 2022-08-30 | 华南理工大学 | Experimental device and method for microstructure and blood interface behavior research |
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| CN1710428A (en) * | 2005-06-08 | 2005-12-21 | 大连理工大学 | High-load micro-mechanism dynamic characteristic testing apparatus |
| CN101476970A (en) * | 2009-01-14 | 2009-07-08 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| US20140352403A1 (en) * | 2013-05-30 | 2014-12-04 | MCube Inc. | Centrifuge mems stiction test system and method |
| CN204608008U (en) * | 2015-04-24 | 2015-09-02 | 苏州大学 | The MEMS system of the unicellular excitation of a kind of scleroblast and detection |
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2016
- 2016-09-30 CN CN201610866920.0A patent/CN106629584B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1666952A (en) * | 2005-03-29 | 2005-09-14 | 华中科技大学 | Dynamic testing loading unit for MEMS disc or device |
| CN1710428A (en) * | 2005-06-08 | 2005-12-21 | 大连理工大学 | High-load micro-mechanism dynamic characteristic testing apparatus |
| CN101476970A (en) * | 2009-01-14 | 2009-07-08 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| US20140352403A1 (en) * | 2013-05-30 | 2014-12-04 | MCube Inc. | Centrifuge mems stiction test system and method |
| CN204608008U (en) * | 2015-04-24 | 2015-09-02 | 苏州大学 | The MEMS system of the unicellular excitation of a kind of scleroblast and detection |
Non-Patent Citations (1)
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114973830A (en) * | 2022-05-26 | 2022-08-30 | 华南理工大学 | Experimental device and method for microstructure and blood interface behavior research |
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