CN106625064A - Sapphire wafer polishing and grinding device - Google Patents
Sapphire wafer polishing and grinding device Download PDFInfo
- Publication number
- CN106625064A CN106625064A CN201611226022.5A CN201611226022A CN106625064A CN 106625064 A CN106625064 A CN 106625064A CN 201611226022 A CN201611226022 A CN 201611226022A CN 106625064 A CN106625064 A CN 106625064A
- Authority
- CN
- China
- Prior art keywords
- grinding
- polishing
- cylinder
- sapphire sheet
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/02—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a reciprocatingly-moved work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/06—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by liquid or gas pressure only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a sapphire wafer polishing and grinding device, and belongs to polishing and grinding equipment. The sapphire wafer polishing and grinding device comprises a rack, a carrier used for containing a sapphire wafer, a plurality of polishing and grinding mechanisms installed on the rack and a plurality of carrier hold-down and translation mechanisms, the polishing and grinding mechanisms comprise a mounting rack, a polishing and grinding tray and a first electric motor, the first electric motor is connected with the mounting rack, an output shaft of the first electric motor is connected with the polishing and grinding tray, the carrier hold-down and translation mechanisms comprise a mounting plate, a cylinder, a moving base, a connecting rod and an electric motor support connected to the mounting plate, a transverse guidepost is arranged on the mounting plate, the moving base is connected with the transverse guidepost through a first linear bearing, the electric motor support is provided with a second electric motor, an output shaft of the second electric motor is connected to an eccentric block, the two ends of the connecting rod are connected with the eccentric block and the moving base respectively in a hinge mode, the cylinder is installed on the moving base, a cylinder piston rod is connected with a pressure rod pillar, the carrier comprises a pressure plate and a sucker, and a concave hole is formed in the pressure plate. The sapphire wafer polishing and grinding device is good in polishing and grinding effect, stable in processing quality, high in production efficiency and convenient to operate.
Description
Technical field：
The present invention relates to a kind of rubbing down equipment, is especially a kind of sapphire sheet polishing and grinding apparatus.
Background technology：
The main component of sapphire sheet is alundum (Al2O3) (Al2O3), it is very wide that its optics penetrates band, also high, resistance to hardness
High temperature and erosion-resisting feature, are a kind of photoelectric cell materials having many uses, and are used as LED substrate, display screen, laser
Eyeglass etc., sapphire is a kind of fragile material, and with very high hardness, therefore processing difficulties.With optoelectronic information technology
Develop rapidly, to the yield and quality requirement of sapphire material all increasingly increasing, and it is crucial in sapphire process
A step be to need special rubbing down equipment to be polished grinding process to its surface, adopting two existing many rubbing down equipment more
The movement locus that disk is rotated against carries out rubbing down, and typically sapphire sheet outside deterioration speed causes rubbing down not more than inside
It is uniform and affect product quality, or even the phenomenon of turned-down edge, unfilled corner or fracture, low production efficiency can be caused；And to blue precious
Flag is carried out before rubbing down, it usually needs its position is fixed, and existing many equipment are by the way of aspiration disk to blue precious
Flag is fixed, and so not only needs a set of air-extractor, and also needs to design special pore, causes structure more multiple
It is miscellaneous, operate also more complicated.
The content of the invention：
The technical problem to be solved in the present invention is to provide that a kind of rubbing down effect is good, crudy is stable, production efficiency is high,
Easy to operate sapphire sheet polishing and grinding apparatus.
The technical solution of the present invention is to provide a kind of sapphire sheet polishing and grinding apparatus, including frame, for placing blue treasured
The carrier of flag and rack-mounted multiple polishing and grinding mechanisms, in the frame directly over each polishing and grinding mechanism one is mounted on
Individual carrier is compressed and translation mechanism, and each polishing and grinding mechanism is compressed with corresponding carrier and translation mechanism forms a rubbing down work
Position, polishing and grinding mechanism includes installing rack, polish-grinding plate and the first motor, and installing rack is connected with frame, and the first motor connects with installing rack
Connect, the output shaft of the first motor is connected with polish-grinding plate, carrier is compressed and translation mechanism includes installing plate, cylinder, Mobile base, connecting rod
And connection motor rack on a mounting board, in frame, in front and back both sides are provided with laterally steering post to installing plate on installing plate,
Mobile base is connected with laterally steering post by first straight line bearing and transversely lead column can be slided, and second is connected with motor rack
Motor, is connected with eccentric block on the output shaft of the second motor, one end and the eccentric block of connecting rod are hinged, the other end of connecting rod and movement
Seat is hinged, and cylinder is arranged on Mobile base, and depression bar post is connected with the piston rod of cylinder, and carrier includes platen and is connected to platen
Sucker on one end face, sucker is provided with the standing groove for placing sapphire sheet, is provided with standing groove for holding sapphire sheet
Fine hair, another end face of platen is provided with the shrinkage pool of voltage supply roofbolt press-in.
Sapphire sheet polishing and grinding apparatus of the present invention, wherein, regulation cylinder anteroposterior position is provided between cylinder and Mobile base
The governor motion put, governor motion refers to that the both sides of Mobile base are provided with longitudinally guiding post, and cylinder passes through second straight line bearing and indulges
Connect and can slide along longitudinally guiding post to lead column, screw mandrel is rotary with cylinder, screw mandrel is rotatably connected with Mobile base, screw mandrel
End is provided with handle.
Sapphire sheet polishing and grinding apparatus of the present invention, wherein, frame is provided with water inlet pipe, and the top of each polish-grinding plate is equal
The outlet pipe communicated with water inlet pipe is provided with, frame is provided with tank, each polish-grinding plate is respectively positioned in tank, frame is provided with and water
The drainpipe that groove is communicated.
Sapphire sheet polishing and grinding apparatus of the present invention, wherein, the lower end of depression bar post is in conical structure, and shrinkage pool side wall sets
There is the taper surface being engaged with conical structure.
After using above structure, compared with prior art, sapphire sheet polishing and grinding apparatus of the present invention have advantages below：Use
When, the sapphire sheet for needing rubbing down is placed in the standing groove of the sucker of carrier first, the fine hair in standing groove can hold indigo plant
Jewel piece, is then placed on the carrier with sapphire sheet on polish-grinding plate and makes shrinkage pool on the platen of carrier upward and be located at
The underface of depression bar post, at this moment being moved down by the piston rod of cylinder can be such that depression bar post is pressed in the shrinkage pool of platen, realize
Work sapphire sheet being pressed on polish-grinding plate, then drives polish-grinding plate to rotate come rubbing down sapphire sheet by the first motor, with
This simultaneously, the rotation of the second motor can drive eccentric block to rotate, the rotation of eccentric block can by connecting rod drive Mobile base, cylinder and
Together transversely lead column or so slidably reciprocates depression bar post, and the left and right of depression bar post moves back and forth can drive carrier or so to move back
It is dynamic, it is achieved thereby that sapphire sheet is on polish-grinding plate while rubbing down and left and right moves back and forth on polish-grinding plate work, therefore
The sapphire sheet rate of wear outwardly and inwardly can be made quite, rubbing down is more uniform to be less prone to turned-down edge, unfilled corner or fracture
Phenomenon, rubbing down effect is good, crudy is stable, while improve production efficiency, each rubbing down station can independently carry out rubbing down
Work, is independent of each other, therefore sapphire sheet polishing and grinding apparatus of the present invention can be while to individual multiple same models or different model
Sapphire sheet is polished, and considerably increases production chains；In addition with prior art by the way of aspiration disk to sapphire
Piece is fixed, and not only needs to design special pore, and also needs to a set of air-extractor and compares, and sapphire sheet of the present invention is thrown
Mill apparatus are that sapphire sheet is pressed on polish-grinding plate by cylinder, and structure is simpler, and easy to operate.
The effect of governor motion is：In debugging machine, the position before and after cylinder can be adjusted so as to change sapphire sheet
The position of the fore-and-aft direction on polish-grinding plate, for obtaining best rubbing down effect.
Water inlet pipe and outlet pipe are used to convey rubbing down position grinding fluid, and tank is used to collect used grinding fluid and lead to
Cross drainpipe discharge.
The lower end of depression bar post is in conical structure, and shrinkage pool side wall is provided with the taper surface being engaged with conical structure, can make
Depression bar post coordinates more precisely with the shrinkage pool on platen, makes depression bar post drive carrier movement more smooth.
Description of the drawings：
Fig. 1 is the dimensional structure diagram of sapphire sheet polishing and grinding apparatus of the present invention；
Fig. 2 is the dimensional structure diagram of polishing and grinding mechanism in sapphire sheet polishing and grinding apparatus of the present invention；
Fig. 3 is the dimensional structure diagram of carrier compression and translation mechanism in sapphire sheet polishing and grinding apparatus of the present invention；
Fig. 4 is the dimensional structure diagram in one direction of carrier in sapphire sheet polishing and grinding apparatus of the present invention；
Fig. 5 is the dimensional structure diagram in another direction of carrier in sapphire sheet polishing and grinding apparatus of the present invention.
Specific embodiment：
Sapphire sheet polishing and grinding apparatus of the present invention are described further with reference to the accompanying drawings and detailed description：
As shown in Figures 1 to 5, sapphire sheet polishing and grinding apparatus of the present invention include frame 24, the load for placing sapphire sheet
Tool 20 and five polishing and grinding mechanisms in frame 24, in the frame 24 directly over each polishing and grinding mechanism one is mounted on
Carrier is compressed and translation mechanism, and each polishing and grinding mechanism is compressed with corresponding carrier and translation mechanism forms a rubbing down station,
Polishing and grinding mechanism includes installing rack 2, the motor 1 of polish-grinding plate 4 and first, and installing rack 2 is connected with frame 24, the first motor 1 and installation
Frame 2 connects, and the output shaft of the first motor 1 is connected with polish-grinding plate 4, and polish-grinding plate 4 can be turned by bearing and bearing block 3 with installing rack 2
Dynamic connection, carrier is compressed and translation mechanism includes installing plate 7, cylinder 14, Mobile base 17, connecting rod 11 and is connected to installing plate 7
On motor rack 8, installing plate 7 is arranged in frame 24, on installing plate 7 before and after both sides be provided with laterally steering post 6, Mobile base 17 leads to
Cross first straight line bearing 5 to be connected with laterally steering post 6 and transversely lead column 6 can slide, the second motor is connected with motor rack 8
9, eccentric block 10 is connected with the output shaft of the second motor 9, one end and the eccentric block 10 of connecting rod 11 are hinged, the other end of connecting rod 11
It is hinged with Mobile base 17, the governor motion for adjusting the front and back position of cylinder 14, the regulation machine is provided between cylinder 14 and Mobile base 17
Structure is specifically referred to：The both sides of Mobile base 17 are provided with longitudinally guiding post 16, and cylinder 14 is by second straight line bearing 15 and longitudinally guiding
Post 16 connects and can slide along longitudinally guiding post 16, and screw mandrel 12 is rotary with cylinder 14, and screw mandrel 12 is rotatably connected with Mobile base 17,
The end of screw mandrel 12 is provided with handle 13；Depression bar post 18 is connected with the piston rod of cylinder 14, carrier includes platen 20 and is connected to
Sucker 29 on 20 1 end faces of platen, sucker 29 is provided with the standing groove 21 for placing sapphire sheet, standing groove 21 and is provided with use
In the fine hair for holding sapphire sheet, the depth of standing groove 21 is slightly less than the thickness of sapphire sheet, and the diameter of standing groove 21 is slightly larger than
The diameter of sapphire sheet, the size for adjusting the standing groove 21 on sucker 29 is adapted to various sizes of sapphire sheet, platen 20
Another end face be provided with the shrinkage pool 22 of the press-in of voltage supply roofbolt 18, the lower end of depression bar post 18 is in conical structure 19, shrinkage pool 22
Side wall is provided with the taper surface 23 being engaged with conical structure 19, the diameter with diameter greater than twice platen 20 of polish-grinding plate 4, frame
24 are provided with water inlet pipe 25, and the top of each polish-grinding plate 4 is equipped with the outlet pipe 26 communicated with water inlet pipe 25, and frame 24 is provided with
Tank 28, each polish-grinding plate 4 is respectively positioned in tank 28, and frame 24 is provided with the drainpipe 27 communicated with tank 28, the first motor 1
Be built-in with reducing gear on the second motor 9, and the first motor 1 and the second motor 9 with reducing gear be it is commercially available
Product, thus its concrete structure here is not repeated.
The operation principle of sapphire sheet polishing and grinding apparatus of the present invention is：First the sapphire sheet for needing rubbing down is placed on carrier
Sucker 29 standing groove 21 in, the fine hair (particularly in the case of immersion) in standing groove 21 can hold sapphire sheet, so
Afterwards the carrier with sapphire sheet is placed on polish-grinding plate 4 and makes the shrinkage pool 22 on the platen 20 of carrier upward and positioned at depression bar
The underface of post 18, while sapphire sheet can be pressed on polish-grinding plate 4, be at this moment moved down and can be driven by the piston rod of cylinder 14
Depression bar post 18 is moved down, and depression bar post 18 is pressed in the shrinkage pool 22 of platen 20, realizes and sapphire sheet is pressed in polish-grinding plate 4
On work, then by the first motor 1 drive polish-grinding plate 4 rotate come rubbing down sapphire sheet, at the same time, the second motor 9
Rotation can drive eccentric block 10 to rotate, and the rotation of eccentric block 10 can drive Mobile base 17 by connecting rod 11, and transversely lead column 6 is left
The right side slidably reciprocates, and the left and right of Mobile base 17 moves back and forth can drive cylinder 14 and depression bar post 18 or so to move back and forth, depression bar post 18
Left and right move back and forth carrier or so can be driven to move back and forth, it is achieved thereby that sapphire sheet is on polish-grinding plate 4 while rubbing down
And the work that left and right moves back and forth on polish-grinding plate 4, make the sapphire sheet rate of wear outwardly and inwardly quite, rubbing down is more uniform
The phenomenon of turned-down edge, unfilled corner or fracture is less prone to, rubbing down effect is good, crudy is stable, improves production efficiency, polish-grinding plate
4 diameter with diameter greater than twice platen 20, can make sapphire sheet pass fully through throwing when left and right moves back and forth on polish-grinding plate 4
The center of circle of mill 4.Each rubbing down station can independently carry out rubbing down work, be independent of each other, therefore sapphire sheet rubbing down of the present invention
Device can carry out rubbing down to the sapphire sheet of multiple same models or different model simultaneously, considerably increase the flexible of production
Property.In addition in the machine of tune, the forward and reverse rotation of screw mandrel 12 can be driven by artificial forward and reverse rotation handle 13, screw mandrel 12 is just
The position before and after cylinder 14 can be made to move forward and backward along longitudinally guiding post 16 to change cylinder 14 is rotated backward, and in sapphire sheet
Rubbing down during, the position before and after cylinder 14 is constant.
Particular embodiments described above is only that the preferred embodiment of the present invention is described, not to the present invention
Scope be defined, on the premise of without departing from design spirit of the present invention, those of ordinary skill in the art to the present invention skill
Various modifications and improvement that art scheme is made, all should fall in the protection domain of claims of the present invention determination.
Claims (4)
1. a kind of sapphire sheet polishing and grinding apparatus, it is characterised in that：Including frame (24), the carrier for placing sapphire sheet and
Multiple polishing and grinding mechanisms in frame (24), in the frame (24) directly over described each polishing and grinding mechanism one is mounted on
Carrier is compressed and translation mechanism, and described each polishing and grinding mechanism is compressed with corresponding carrier and translation mechanism forms a rubbing down work
Position, the polishing and grinding mechanism includes installing rack (2), polish-grinding plate (4) and the first motor (1), the installing rack (2) and frame (24)
Connection, first motor (1) is connected with installing rack (2), and the output shaft of first motor (1) is connected with polish-grinding plate (4), institute
Stating carrier compression and translation mechanism includes installing plate (7), cylinder (14), Mobile base (17), connecting rod (11) and is connected to installation
Motor rack (8) on plate (7), in frame (24), in front and back both sides are provided with the installing plate (7) on the installing plate (7)
Laterally steering post (6), the Mobile base (17) is connected with laterally steering post (6) by first straight line bearing (5) and can be transversely
Lead column (6) is slided, and the second motor (9) is connected with the motor rack (8), is connected on the output shaft of second motor (9)
One end and the eccentric block (10) for having eccentric block (10), the connecting rod (11) is hinged, the other end and Mobile base of the connecting rod (11)
(17) it is hinged, the cylinder (14) is connected with depression bar post on Mobile base (17) on the piston rod of the cylinder (14)
(18), the carrier includes platen (20) and the sucker (29) being connected on (20) end faces of platen, on the sucker (29)
The fine hair being provided with for holding sapphire sheet is provided with the standing groove (21) for placing sapphire sheet, the standing groove (21), it is described
Another end face of platen (20) is provided with the shrinkage pool (22) of voltage supply roofbolt (18) press-in.
2. sapphire sheet polishing and grinding apparatus according to claim 1, it is characterised in that：The cylinder (14) and Mobile base (17)
Between be provided with the governor motion for adjusting cylinder (14) front and back position, the governor motion refers to, the both sides of the Mobile base (17)
Longitudinally guiding post (16) is provided with, the cylinder (14) is connected with longitudinally guiding post (16) by second straight line bearing (15) and can edge
Longitudinally guiding post (16) slides, and screw mandrel (12) is rotary with the cylinder (14), and the screw mandrel (12) is rotatable with Mobile base (17)
Connection, the end of the screw mandrel (12) is provided with handle (13).
3. sapphire sheet polishing and grinding apparatus according to claim 1 and 2, it is characterised in that：The frame (24) be provided with into
Water pipe (25), above described each polish-grinding plate (4) outlet pipe (26) communicated with water inlet pipe (25), the frame are equipped with
(24) tank (28) is provided with, described each polish-grinding plate (4) is respectively positioned in tank (28), and the frame is provided with and tank (28)
The drainpipe (27) for communicating.
4. sapphire sheet polishing and grinding apparatus according to claim 1, it is characterised in that：The lower end of the depression bar post (18) is in circle
Pyramidal structure (19), shrinkage pool (22) side wall is provided with the taper surface (23) being engaged with conical structure (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611226022.5A CN106625064B (en) | 2016-12-27 | 2016-12-27 | Sapphire sheet polishing and grinding apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611226022.5A CN106625064B (en) | 2016-12-27 | 2016-12-27 | Sapphire sheet polishing and grinding apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106625064A true CN106625064A (en) | 2017-05-10 |
| CN106625064B CN106625064B (en) | 2018-07-10 |
Family
ID=58832620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611226022.5A Active CN106625064B (en) | 2016-12-27 | 2016-12-27 | Sapphire sheet polishing and grinding apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106625064B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108620967A (en) * | 2018-05-07 | 2018-10-09 | 刘淑音 | A kind of efficient grinding device of quartz crystal processing |
| CN115781494A (en) * | 2022-12-01 | 2023-03-14 | 中国科学院西安光学精密机械研究所 | Reciprocating type grinding and polishing processing device and optical element processing method |
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| JPH11254300A (en) * | 1998-03-09 | 1999-09-21 | Speedfam Co Ltd | Washing device for carrier in surface polishing device |
| US20130200559A1 (en) * | 2005-03-28 | 2013-08-08 | Naoki Asada | Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device |
| CN204171847U (en) * | 2014-09-15 | 2015-02-25 | 冠亿精密工业(昆山)有限公司 | A kind of new and effective flat polisher |
| CN204487385U (en) * | 2015-02-12 | 2015-07-22 | 雅安六方星群光电有限公司 | The sanding apparatus that a kind of sapphire sheet is special |
| CN104924195A (en) * | 2015-06-12 | 2015-09-23 | 浙江工业大学 | Sapphire wafer efficient ultra-precision machining method |
| CN204868553U (en) * | 2015-06-30 | 2015-12-16 | 深圳市悦目光学器件有限公司 | Multi -functional copper mill of sapphire double -end |
| CN206343984U (en) * | 2016-12-27 | 2017-07-21 | 嘉兴高维智控有限公司 | Sapphire sheet polishing and grinding apparatus |
-
2016
- 2016-12-27 CN CN201611226022.5A patent/CN106625064B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11254300A (en) * | 1998-03-09 | 1999-09-21 | Speedfam Co Ltd | Washing device for carrier in surface polishing device |
| US20130200559A1 (en) * | 2005-03-28 | 2013-08-08 | Naoki Asada | Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device |
| CN204171847U (en) * | 2014-09-15 | 2015-02-25 | 冠亿精密工业(昆山)有限公司 | A kind of new and effective flat polisher |
| CN204487385U (en) * | 2015-02-12 | 2015-07-22 | 雅安六方星群光电有限公司 | The sanding apparatus that a kind of sapphire sheet is special |
| CN104924195A (en) * | 2015-06-12 | 2015-09-23 | 浙江工业大学 | Sapphire wafer efficient ultra-precision machining method |
| CN204868553U (en) * | 2015-06-30 | 2015-12-16 | 深圳市悦目光学器件有限公司 | Multi -functional copper mill of sapphire double -end |
| CN206343984U (en) * | 2016-12-27 | 2017-07-21 | 嘉兴高维智控有限公司 | Sapphire sheet polishing and grinding apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108620967A (en) * | 2018-05-07 | 2018-10-09 | 刘淑音 | A kind of efficient grinding device of quartz crystal processing |
| CN115781494A (en) * | 2022-12-01 | 2023-03-14 | 中国科学院西安光学精密机械研究所 | Reciprocating type grinding and polishing processing device and optical element processing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106625064B (en) | 2018-07-10 |
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