CN106622878B - Spin coating instrument rotor capable of shooting real-time images - Google Patents

Spin coating instrument rotor capable of shooting real-time images Download PDF

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Publication number
CN106622878B
CN106622878B CN201610851460.4A CN201610851460A CN106622878B CN 106622878 B CN106622878 B CN 106622878B CN 201610851460 A CN201610851460 A CN 201610851460A CN 106622878 B CN106622878 B CN 106622878B
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CN
China
Prior art keywords
camera
base
spin coating
rotor capable
real time
Prior art date
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Expired - Fee Related
Application number
CN201610851460.4A
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Chinese (zh)
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CN106622878A (en
Inventor
王雪飞
丁琨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Chinese Academy of Sciences
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University of Chinese Academy of Sciences
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Filing date
Publication date
Application filed by University of Chinese Academy of Sciences filed Critical University of Chinese Academy of Sciences
Priority to CN201610851460.4A priority Critical patent/CN106622878B/en
Publication of CN106622878A publication Critical patent/CN106622878A/en
Application granted granted Critical
Publication of CN106622878B publication Critical patent/CN106622878B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention discloses a spin coating instrument rotor capable of shooting images in real time, wherein a camera is fixed above a base by the spin coating instrument rotor capable of shooting images in real time, and the base is driven by a motor to rotate. Therefore, even if the camera and the base are still relatively static during high-speed rotation, actions generated on the slide glass fixed on the upper surface of the base, such as spreading, centrifuging, concentrating and crystallizing of glue solution, can be shot by the camera positioned above the slide glass, and the speed and the intensity of the actions can be used as the basis for optimizing spin-coating parameters, such as rotating speed, concentration, temperature, solvent types and solute types, so that a way for deeply researching the properties of substances is opened.

Description

Spin coating instrument rotor capable of shooting real-time images
Technical Field
The invention belongs to the technical field of spin coating, and particularly relates to a spin coating instrument rotor capable of shooting images in real time.
Background
Spin coating is a technology for preparing a film on a slide glass, and the working principle of the spin coating is to drip glue solution on the slide glass, then the slide glass is rotated at a high speed by a specific device, the glue solution is coated on the slide glass by utilizing centrifugal force to form the film, and the thickness and the shape of the film are related to the viscosity coefficient between the glue solution and the slide glass and the rotating speed of the slide glass. If the glue is a solution, the rotation of the slide will also accelerate the evaporation of the solvent, eventually forming a solid film on the slide. Thus, the spin coating process involves a series of kinetic processes of spreading, centrifuging, concentrating, crystallizing, etc. of the glue solution on the slide, and these processes are related to the properties of the formed film.
The existing spin coating apparatus generally adjusts the thickness and the shape of a film by controlling the speed and the speed of a rotating speed through a program, and the control effect can only be judged by the properties of a finally obtained film. Therefore, an effective rotational speed change procedure is often obtained through repeated tests, which is time-consuming and labor-consuming, and also consumes a large amount of glue. If a series of variation processes such as dispersion, centrifugation, concentration, crystallization and the like of the glue solution in the spin coating process can be recorded in real time, the adjustment of the rotating speed can be determined. However, the rotational speed of the slide is typically in the range of hundreds to thousands of revolutions per minute, and it is difficult for a camera standing at such a high rotational speed to take a clear image. When the existing spin coating technology is used for preparing the film, the behaviors of spreading, centrifuging, concentrating, crystallizing and the like of the glue solution on a slide glass cannot be observed.
Disclosure of Invention
The invention aims to provide a rotor of a spin coater capable of shooting images in real time, and aims to solve the problem that when a spin coating technology is used for preparing a film, behaviors such as spreading, centrifuging, concentrating, crystallizing and the like of glue solution on a slide glass cannot be observed.
The invention is realized in such a way that the rotor of the spin coating instrument capable of shooting images in real time is provided with a base; the base is fixed on a rotating shaft of the motor and is driven by the motor to rotate;
the camera is fixed above the base through a bracket;
and a light source is fixed on the bracket.
Further, the camera transmits data to the computer in a WIFI or Bluetooth mode and is controlled to observe the change of the glue solution in real time.
Further, the camera stores data in an on-board memory.
Furthermore, a macro optical lens is arranged in front of the camera.
Further, a microscope objective is arranged in front of the camera.
Further, the distance between the camera and the base is adjustable.
Further, the base and the support are made of any one of aluminum alloy, stainless steel, polytetrafluoroethylene and organic glass.
Further, the light source is an LED patch and shares a power supply with the camera.
Another object of the present invention is to provide a spin coater equipped with the rotor of the spin coater capable of real-time image photographing.
The spin coating instrument rotor capable of shooting images in real time provided by the invention realizes image shooting and real-time monitoring on a series of actions such as spreading, centrifuging, concentrating, crystallizing and the like of a slide glass glue solution rotating at a high speed; the invention fixes the camera above the base, the lower part of the base is fixed with the motor, even when rotating at high speed, the camera and the base still keep relatively static, therefore, the actions generated on the slide fixed on the upper surface of the base, such as the spreading, centrifugation, concentration and crystallization of glue solution, can be shot by the camera above the slide, and the speed and the intensity of the actions can be used as the basis for optimizing spin coating parameters, such as rotating speed, concentration, temperature, solvent type and solute type, and a way for deeply researching the material property is opened up.
Drawings
FIG. 1 is a schematic structural diagram of a rotor of a spin-coating apparatus capable of real-time image shooting according to an embodiment of the present invention;
in the figure: 1. a base; 2. a support; 3. a camera; 4. macro optical lenses or microscope objectives; 5. a light source; 6. carrying a slide; 7. and (4) strip-shaped holes.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The structure of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1, a rotor of a spin coater according to an embodiment of the present invention includes: the device comprises a base 1, a bracket 2, a camera 3, a macro optical lens or a microscope objective 4, a light source 5, a slide glass 6 and a strip-shaped hole 7.
Spin coating is to apply a film onto a sheet-like carrier, usually the carrier is fixed in the center of a base and the glue is dropped onto the carrier. The rotor of the spin coating instrument provided by the invention has the advantages that the camera 3 is fixed above the base 1 through two to four brackets 2 and rotates along with the base, so that the camera 3 and the base 1 are ensured to be relatively static. When the base 1 rotates under the drive of the motor, the slide glass 6 and the camera 3 also rotate together at the same speed, and the camera 3 can clearly shoot the action of a liquid film on the slide glass. The camera 3 communicates with the outside in a wireless mode, and pictures can be displayed on a computer in real time, so that an operator can observe the pictures conveniently.
The camera 3 can be provided with a memory to store data, and then is transferred to a computer after the spin coating is finished.
2 one end of support and for base 1 screw fixation, 2 other end designs of support have a bar hole 7, the screw passes this bar hole 7 and twists the screw hole of 3 shells of camera, like this camera 3 can be adjusted at 7 length within ranges in bar hole with 1 interval of base.
The camera 3 is arranged above the glue solution, and the bracket 2 is arranged on the side. Because the light source in the environment is fixed, the slide 6 positioned in the center of the base can be periodically positioned in the shadow of the bracket when the rotor rotates, and the picture is alternately bright and dark. The solution of the invention is that a light source 5 of an LED patch is fixed on a bracket 2, and the light source rotates along with the bracket, so that the center of a base 1 can be stably illuminated, and the quality of a shot picture is ensured.
If the picture of the camera 3 is not clear or the visual field is not enough, a screw interface is arranged in front of the lens of the camera 3, and a macro or wide-angle optical lens can be additionally arranged.
If the microscopic change of the glue solution needs to be shot, a screw interface is arranged in front of the camera lens, and a microscope objective lens can be additionally arranged in front of the camera lens.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (2)

1. A spin coating instrument rotor capable of shooting images in real time is characterized in that the spin coating instrument rotor capable of shooting images in real time is provided with a base; the base is fixed on a rotating shaft of the motor and is driven by the motor to rotate;
the camera is fixed above the base through a bracket;
a light source is fixed on the bracket;
the camera wirelessly transmits data to the computer and receives control for observing the change of the glue solution in real time;
the camera stores data in an own memory;
a macro optical lens is arranged in front of the camera;
a microscope objective is arranged in front of the camera;
the distance between the camera and the base is adjustable;
the base and the bracket are made of any one of aluminum alloy, stainless steel, polytetrafluoroethylene and organic glass;
the light source is an LED patch and shares a power supply with the camera;
the spin coating instrument rotor capable of shooting images in real time realizes image shooting and real-time monitoring on a series of actions of unfolding, centrifuging, concentrating and crystallizing glue solution on a slide glass rotating at a high speed.
2. A spin coater equipped with the spin coater rotor capable of real-time image capture according to claim 1.
CN201610851460.4A 2016-09-27 2016-09-27 Spin coating instrument rotor capable of shooting real-time images Expired - Fee Related CN106622878B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610851460.4A CN106622878B (en) 2016-09-27 2016-09-27 Spin coating instrument rotor capable of shooting real-time images

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610851460.4A CN106622878B (en) 2016-09-27 2016-09-27 Spin coating instrument rotor capable of shooting real-time images

Publications (2)

Publication Number Publication Date
CN106622878A CN106622878A (en) 2017-05-10
CN106622878B true CN106622878B (en) 2020-01-17

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ID=58853433

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610851460.4A Expired - Fee Related CN106622878B (en) 2016-09-27 2016-09-27 Spin coating instrument rotor capable of shooting real-time images

Country Status (1)

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05129271A (en) * 1991-11-06 1993-05-25 Hitachi Ltd Method and system for rotational treatment
JPH11354419A (en) * 1998-06-12 1999-12-24 Dainippon Screen Mfg Co Ltd Coating device
US8322300B2 (en) * 2008-02-07 2012-12-04 Sunpower Corporation Edge coating apparatus with movable roller applicator for solar cell substrates
CN101915661A (en) * 2010-09-03 2010-12-15 无锡市奥达光电子有限责任公司 Method and device for detecting optical axis angle of polarization property component
CN203061381U (en) * 2013-01-29 2013-07-17 广州正奇科技有限公司 Automatic device for positioning, detecting and spin coating
CN203917073U (en) * 2014-05-28 2014-11-05 深圳华海达科技有限公司 A kind of vision positioning dispensing mechanism
CN204154469U (en) * 2014-09-05 2015-02-11 南京大学 Rotating flow mechanical experimental system setup

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Granted publication date: 20200117

Termination date: 20200927