CN106609799A - Magnetic suspension balance mass frame - Google Patents
Magnetic suspension balance mass frame Download PDFInfo
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- CN106609799A CN106609799A CN201510686820.5A CN201510686820A CN106609799A CN 106609799 A CN106609799 A CN 106609799A CN 201510686820 A CN201510686820 A CN 201510686820A CN 106609799 A CN106609799 A CN 106609799A
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- permanent magnet
- stator
- framework
- balance mass
- magnetic suspension
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Abstract
The invention relates to a magnetic suspension balance mass frame, in particular to a balance mass frame. A novel magnetic suspension balance mass frame is provided for solving the problems existing in an existing balance mass frame. A base frame is of a plane rectangular frame structure. Stators of four magnetic suspension supporting units are arranged at the four corner positions of the upper surface of the frame structure correspondingly. The balance mass frame is located over the base frame and fixedly connected with rotors of the four magnetic suspension supporting units. Stators of two magnetic force recovering mechanisms forming one pair of magnetic force recovering mechanisms are fixedly arranged on the two opposite sides of the base frame correspondingly. Stators of two electromagnetic dampers forming a pair of electromagnetic dampers are fixedly arranged on the two opposite sides of the base frame correspondingly. A rotor of each magnetic force recovering mechanism is fixedly connected with the balance mass frame, and a rotor of each electromagnetic damper is fixedly connected with the balance mass frame. The magnetic suspension balance mass frame is applicable to the vacuum environment.
Description
Technical field
The present invention is to be related to a kind of balance mass framework.
Background technology
In photo-etching machine work-piece platform, in order to improve motion control accuracy, reduce shock and vibration, the reaction force of linear electric motors high-speed motion generation is generally buffered using balance mass framework, balance mass framework typically adopts static pressure air-bearing.After balance mass framework deviates equilbrium position, need to adopt recovery mechanism, balance mass framework is set to return to equilbrium position, it is high frequency power that power on balance mass framework ought be particularly applied to, due to the damping of balance mass framework itself it is little, composed of external damping power is needed to carry out the vibration of rapid decay balance mass framework, to ensure the stability of system.The generation of traditional recovery mechanism and damping force typically realizes that the position and speed by detection balance mass framework makes balance mass framework quickly and accurately return to equilbrium position using closed-loop control using electric rotating machine.
But there are the following problems for above-mentioned balance mass framework：One is static pressure air-bearing system complex, and can not be used under vacuum conditions；Two is the generation device complexity of recovery mechanism and damping force, and control difficulty is big.
The content of the invention
In order to solve the problems, such as existing balance mass framework, the present invention proposes a kind of new magnetic levitation balanced Quality framework.
Magnetic levitation balanced Quality framework of the present invention includes basic framework, balance mass framework, four magnetic suspension support units, a pair of magnetic force recovery mechanisms and a pair of electromagnetic dampers；Basic framework is planar rectangular frame structure, and four Angle Positions of the frame structure upper surface are respectively arranged with the stator of four magnetic suspension support units, and the stator of four magnetic suspension support units is with basic framework by being fixedly connected；Balance mass framework is arranged in parallel with basic framework, and positioned at the surface of the basic framework, the mover of four magnetic suspension support units is fixedly connected with the balance mass framework；The stator of two magnetic force recovery mechanisms of the magnetic force recovery mechanism that partners is respectively and fixedly installed on two relative sides of basic framework；The stator of two electromagnetic dampers of electromagnetic damper of partnering is respectively and fixedly installed on two relative sides of basic framework；Also, it is provided with the stator of magnetic force recovery mechanism and the stator of electromagnetic damper simultaneously on the same side of basic framework；The mover of each magnetic force recovery mechanism is fixedly connected with balance mass framework, and the mover of each electromagnetic damper is fixed with balance mass framework and connected.
Magnetic suspension support unit of the present invention can adopt following structures：
Magnetic suspension support unit includes stator and mover, stator is made up of stator permanent magnet and stator permanent magnet fixed plate, stator permanent magnet is pasted and fixed on the air gap side of stator permanent magnet fixed plate, stator permanent magnet for parallel magnetization flat permanent magnet body, the magnetizing direction perpendicular to the stator permanent magnet adjacent air gap place plane；Mover is made up of rotor permanent magnet and rotor permanent magnet fixed plate, rotor permanent magnet is pasted and fixed on the air gap side of rotor permanent magnet fixed plate, rotor permanent magnet for parallel magnetization flat permanent magnet body, the magnetizing direction of the rotor permanent magnet perpendicular to the rotor permanent magnet adjacent air gap place plane；The magnetizing direction of stator permanent magnet and rotor permanent magnet is contrary.
Magnetic force recovery mechanism of the present invention can adopt following structures：
Magnetic force recovery mechanism includes outer exciting part and interior exciting part, and the outer exciting part is tubular construction, and interior exciting part is located inside outer exciting part, is air gap between interior exciting part and outer exciting part；Power mutually exclusive in the horizontal direction is produced between the outer exciting part and interior exciting part.
Electromagnetic damper of the present invention can adopt following structures：
Electromagnetic damper is made up of primary and secondary, and primary includes low-resistivity non-magnetic metal plate；Secondary be bilateral secondary structure, it is primary and it is bilateral secondary between be air gap；It is secondary per side to include that yoke plate, (n+1) organize X to Energizing unit and n group Y-direction Energizing units, n is the natural number more than or equal to l, X to Energizing unit is made up of polylith strip X to permanent magnet, the X is to permanent magnet along X to evenly distributed and be fixed on plate shaped yoke plate, permanent magnet is perpendicular to X-Y plane parallel magnetization, and the magnetizing direction per adjacent two pieces of permanent magnets is contrary；Y-direction Energizing unit is made up of polylith strip Y-direction permanent magnet, and the Y-direction permanent magnet is evenly distributed along Y-direction and is fixed on plate shaped yoke plate, and permanent magnet is perpendicular to X-Y plane parallel magnetization, and the magnetizing direction per adjacent two pieces of permanent magnets is contrary；The area covering X of primary low-resistivity non-magnetic metal plate is to Energizing unit and the range of movement of Y-direction Energizing unit.
Magnetic levitation balanced Quality framework of the present invention can also include gap control device, the gap control device is used to adjust the width of the air gap between the stator and mover of magnetic suspension support unit, gap control device is made up of electromagnetic force generating unit and control unit, the electromagnetic force generating unit is made up of stator and mover, the mover is fixedly connected with basic framework, the mover of the electromagnetic force generating unit is fixedly connected with balance mass framework, electromagnetic force is produced between the stator and mover of the electrical excitation generating unit, described control unit gives electromagnetic force generating unit for sending control signal, for the size of electromagnetic force produced between the stator and mover that control electromagnetic force generating unit, to adjust.
Main advantages of the present invention：(1) balance mass framework is supported using magnetic suspension, disturbs little, high precision, and can be used under vacuum conditions；(2) recovery mechanism adopts magnetic force recovery mechanism, realizes the Entirely contactless between balance mass framework and basic framework, and simple structure, it is not necessary to active control；(3) damping system adopts electromagnetic damper, it is ensured that the Entirely contactless between balance mass framework and basic framework, and simple structure, it is not necessary to active control, reduces energy ezpenditure, improves environment temperature control accuracy.
Description of the drawings
Fig. 1 is the general structure schematic diagram of magnetic levitation balanced Quality framework of the present invention；
Fig. 2 is the left view of figure l.
Specific embodiment
Magnetic levitation balanced Quality framework described in present embodiment includes basic framework l, 2, four magnetic suspension support units 3 of balance mass framework, a pair of magnetic force recovery mechanisms 4 and a pair of electromagnetic dampers 5；
Basic framework l is planar rectangular frame structure, and four Angle Positions of the frame structure upper surface are respectively arranged with the stator 3-1 of four magnetic suspension support units 3, and the stator 3-1 of four magnetic suspension support units is with basic framework l by being fixedly connected；
Balance mass framework 2 is arranged in parallel with basic framework l, and positioned at the surface of the basic framework, the mover 3-3 of four magnetic suspension support units is fixedly connected with the balance mass framework 2；
Referring to shown in figure l and 2, from fig. 2 it can be seen that a magnetic force recovery mechanism 4 and an electromagnetic damper 5 are located at the same side.
When the mover in said structure is realized using permanent magnet, by sense of current in solenoid of the control unit adjustment as stator, the adjustment to producing attraction or repulsive force between mover and stator is realized.
In said structure, the mover can also be realized using solenoid.
Balance mass framework in the present invention can be constituted using nonmagnetic substance.
Claims (3)
1. magnetic levitation balanced Quality framework, it is characterised in that：It includes basic framework (1), balance mass framework (2), four magnetic suspension support units (3), a pair of magnetic force recovery mechanisms (4) and a pair of electromagnetic dampers (5)；Basic framework (1) is planar rectangular frame structure, four Angle Positions of the frame structure upper surface are respectively arranged with the stator (3-1) of four magnetic suspension support units (3), and the stator (3-1) of four magnetic suspension support units is with basic framework (1) by being fixedly connected；Balance mass framework (2) is arranged in parallel with basic framework (1), and positioned at the surface of the basic framework, the mover 3-2 of four magnetic suspension support units is fixedly connected with the balance mass framework (2)；The stator of two magnetic force recovery mechanisms (4) of the magnetic force recovery mechanism that partners (4) is respectively and fixedly installed on two relative sides of basic framework (1).
2. the magnetic levitation balanced Quality framework according to claim l, it is characterised in that：Magnetic suspension support unit (3) is including stator and mover, stator is made up of stator permanent magnet and stator permanent magnet fixed plate, stator permanent magnet is pasted and fixed on the air gap side of stator permanent magnet fixed plate, stator permanent magnet for parallel magnetization flat permanent magnet body, the magnetizing direction perpendicular to the stator permanent magnet adjacent air gap place plane；Mover is made up of rotor permanent magnet and rotor permanent magnet fixed plate, rotor permanent magnet is pasted and fixed on the air gap side of rotor permanent magnet fixed plate, rotor permanent magnet for parallel magnetization flat permanent magnet body, the magnetizing direction of the rotor permanent magnet perpendicular to the rotor permanent magnet adjacent air gap place plane；The magnetizing direction of stator permanent magnet and rotor permanent magnet is contrary.
3. the magnetic levitation balanced Quality framework according to claim l, it is characterised in that：Magnetic force recovery mechanism (4) includes outer exciting part and interior exciting part, and the outer exciting part is tubular construction, and interior exciting part is located inside outer exciting part, is air gap between interior exciting part and outer exciting part；Power mutually exclusive in the horizontal direction is produced between the outer exciting part and interior exciting part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510686820.5A CN106609799A (en) | 2015-10-22 | 2015-10-22 | Magnetic suspension balance mass frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510686820.5A CN106609799A (en) | 2015-10-22 | 2015-10-22 | Magnetic suspension balance mass frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106609799A true CN106609799A (en) | 2017-05-03 |
Family
ID=58610429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510686820.5A Pending CN106609799A (en) | 2015-10-22 | 2015-10-22 | Magnetic suspension balance mass frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106609799A (en) |
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2015
- 2015-10-22 CN CN201510686820.5A patent/CN106609799A/en active Pending
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Legal Events
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| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170503 |
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| WD01 | Invention patent application deemed withdrawn after publication |