CN106597841B - The spotting scaming algorithm of trimmer motor in chemical-mechanical planarization - Google Patents
The spotting scaming algorithm of trimmer motor in chemical-mechanical planarization Download PDFInfo
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- CN106597841B CN106597841B CN201611158576.6A CN201611158576A CN106597841B CN 106597841 B CN106597841 B CN 106597841B CN 201611158576 A CN201611158576 A CN 201611158576A CN 106597841 B CN106597841 B CN 106597841B
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 61
- 230000001133 acceleration Effects 0.000 claims description 8
- 238000000926 separation method Methods 0.000 description 4
- 238000012888 cubic function Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 238000012886 linear function Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012887 quadratic function Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
- G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
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- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Artificial Intelligence (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Evolutionary Computation (AREA)
- Medical Informatics (AREA)
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Control Of Stepping Motors (AREA)
Abstract
The invention discloses a kind of spotting scaming algorithms of trimmer motor in chemical-mechanical planarization, one cycle of operation of the trimmer motor is divided into n isometric time interval Tn, displacement section corresponding to each time interval Tn is Zn, the curve that the running track of trimmer motor is characterized by preset time shifting function.Motor movement track of the present invention and preset degree of fitting improve, and the period of motor actual motion period and setting is more identical, and the smoothness of operation also gets a promotion, while by the control of the deviation of real time ratio and preset time ratio within 1 percent.
Description
Technical field
The present invention relates to a kind of spotting scaming algorithms of trimmer motor in chemical-mechanical planarization.
Background technique
The polishing part of based CMP apparatus needs trimmer to be swung, to modify to polishing pad.
The specific swinging track of trimmer needs to follow trimmer motor spotting scaming human-computer interaction interface (interface abbreviation Sweep) setting
Good time-displacement curve, and spotting scaming (Sweep) algorithm priority acccess control time scale of mainstream allow to swing section presence
Certain deviation is not considered real electrical machinery running track and the degree of fitting of the interface Sweep desired guiding trajectory.
Need to be arranged the operational mode of trimmer motor, starting point, terminating point, fortune in trimmer motor human-computer interaction interface
Line frequency is displaced the parameters such as the number in section.Wherein operational mode is that the function of institute's spotting scaming in motor operation course is bent
Line is divided into: No Sweep (motor is stationary in fixed position), Sin Sweep (sine curve spotting scaming), Custom
Sweep (custom curve spotting scaming) etc., is described below:
(1) No Sweep mode: slack after motor operation to designated position.
(2) Sin Sweep mode: then the time-displacement curve of motor operation is sin (sine) curve, such as starting point is set
It is set to 25inches, terminating point is set as 36inches, and displacement section (zone) is set as 10, set of frequency 10, then sweep
As shown in fig. 7, wherein Fig. 7 a is curvilinear path, Fig. 7 b is to wait displacement times space ratio for interface setting.
(3) Custom Sweep mode: the time-displacement curve of motor operation is Custom (customized) curve, such as is risen
Initial point is set as 25inches, and terminating point is set as 36inches, and zone is set as 10, set of frequency 10, then the interface sweep
As shown in figure 8, wherein Fig. 8 a is curvilinear path, Fig. 8 b is 8 time interval ratios for setting.
Trimmer human-computer interaction scanning interface can also modify the time interval ratio in zone corresponding displacement section, so that finishing
The time scale that device can be modified in the zone of setting is adjusted.Such as the time interval of the 4th zone of sin curve is set
5 are set to, as shown in figure 9, wherein Fig. 9 a is curvilinear path, Fig. 9 b is time interval ratio.
It is 5 by the time interval ratio setting of the 4th zone of custom sweep curve, as shown in Figure 10, wherein scheming
10a is curvilinear path, and Figure 10 b is time interval ratio.
In order to enable the running track of trimmer motor meets the time-displacement curve of desired guiding trajectory, need according to man-machine friendship
Mutual interface preset data designs a kind of spotting scaming motor operation algorithm.Traditional algorithm is rising with each displacement section zone
Initial point moves with uniform velocity in displacement section zone accordingly as separation.If the position of motor in n-th of displacement section zone
Moving is Yn, and the time interval of n-th of displacement section zone is Tn, then motor is displaced the speed of section zone at n-th are as follows:
Vn=Yn/Tn
I.e. trimmer first runs to starting point, after receiving initial signal, accelerates to first with a biggish acceleration
Uniform velocity size in a displacement section zone, accelerates to second position when reaching the terminating point of first displacement section zone
The uniform velocity size of section zone is moved, the final position of second displacement section zone is run to this speed, and so on.
The shortcomings that above-mentioned traditional algorithm, is:
(1) there are cycle of operation accumulated time errors: in the setting of desired guiding trajectory interface, passing through setting trimmer motor
Frequency determines the cycle of operation of trimmer.Traditional technology is to accelerate to uniform velocity size, but motor in the starting point of each Zone
Uniform velocity size is accelerated to from present speed and needs the regular hour, therefore there are time errors.Each displacement section zone
Having time accumulated error then runs a cycle and necessarily undergoes a accumulated time error of 2 × N (zones), wherein N (zones) table
Show the number of displacement section zone.
(2) smoothness is inadequate: the starting point of each displacement section zone is to accelerate a moment in traditional algorithm
Process, so the starting point trajectory tortuosity of each displacement section zone is very big in real electrical machinery operation, and the previous time
The curvature at interval is 0, larger in displacement section zone separation the right and left curvature difference, therefore two neighboring displacement section zone
The smoothness of junction operation is poor.
(3) poor with the degree of fitting of desired guiding trajectory: traditional technology is to be displaced section zone as separation, in displacement section
Uniform motion in zone, displacement are linear functions about the time, and are displaced in the zone of section and are displaced about the time in interface
Cubic function, therefore the time shifting information that tradition sweep algorithm does not make full use of interface to provide, each displacement section zone
Intrinsic displacement does not embody in actual motor operation about the cubic function information of time, therefore the operation rail of traditional algorithm motor
Mark and the degree of fitting at interface are poor.
Summary of the invention
Present invention aim to address current trimmers there are cycle of operation accumulated time error, smoothness is poor and with it is pre-
If the technical problem of the degree of fitting difference of operation curve.
To realize above goal of the invention, the present invention provides a kind of spotting scaming of trimmer motor in chemical-mechanical planarization
One cycle of operation of the trimmer motor is divided into n isometric time interval Tn, each time interval Tn by algorithm
Corresponding motor operation displacement is Zn, the song that the running track of trimmer motor is characterized by preset time shifting function
Line, the spotting scaming algorithm include the following steps:
(1) curve time shifting function coefficients all within a cycle of operation are pre-stored in four numbers
Group A [n], B [n], C [n], in D [n], A [n], B [n], C [n], D [n] are respectively represented in n-th of displacement section
The coefficient of each secondary item in time shifting function, wherein A [n] is the coefficient of cubic term, and B [n] is the coefficient of quadratic term, and C [n] is one
The coefficient of secondary item, D [n] are the coefficients of constant term, and t is the time point in n-th of displacement section, and Yn is n-th of displacement section
Displacement；
(2) determine that time interval number n, n are greater than preset threshold value；
(3) dividing time interval Tn for Tn1 and Tn2, S1 is the displacement of the motor operation in time Tn1, and S2 is in the time
The displacement that the time runs in Tn2, Sn are the total displacement of motor motor operation within the Tn time, need to meet the following conditions；
Tn1+Tn2=Tn (1)
S1+S2=Sn (2)
(4) select the operational mode of the trimmer motor for Jog Manual Mode, the trimmer within the Tn1 period
Motor carries out uniformly accelrated rectilinear motion with acceleration a (n)；The trimmer motor is within the Tn2 period with speed VnIt carries out even
Speed linear motion.
Further, in the step (1), in the time shifting function that n-th is displaced in section are as follows:
Yn=A [n] * (t-tn-1)3+B[n]*(t-tn-1)2+C[n]*(t-tn-1)+D[n] (3)
Further, the operation of time interval Tn is divided into two parts Tn1 and Tn2, and finds out speed in the following manner
Spend VnWith acceleration a (n):
The displacement Y of time interval Tn starting point is obtained by formula (1)nsAre as follows:
Yns=A [n] * (ts-tn-1)3+B[n]*(ts-tn-1)2+C[n]*(ts-tn-1)+D[n](4)
The displacement Yne of time interval Tn terminating point are as follows:
Yne=A [n] * (te-tn-1)3+B[n]*(te-tn-1)2+C[n]*(te-tn-1)+D[n](5)
If the uniform velocity size in (n-1)th time interval Tn-1 is Vn-1, then the uniform velocity size within the Tn2 period
Are as follows:
(6)
Acceleration magnitude within the Tn1 period are as follows:
A (n)=(Vn-Vn-1)/(Tn/2)
(7)
Further, threshold value described in step (2) is characterized by time shifting function described in motor operation a cycle
The number of segment of curve.
Further, the motor is with the operation of Jog Manual Mode.
Compared with prior art, the beneficial effects of the present invention are:
Problems solved by the invention:
(1) cycle of operation accumulated time error is eliminated:
The present invention not to be displaced section as line of demarcation, but will the time as line of demarcation.Trimmer is in each time
Half the time is used for uniformly accelerated motion in being spaced, and half the time is used for uniform motion.Therefore the present invention is in a time interval
The time interval at runing time and practical interface is coincide, motor operation one week simultaneously in the absence of between accumulated error.
(2) smoothness is improved:
The present invention improves the smoothness of curve, and the algorithm of use is to add for even the time of the first half in the time interval
The time of speed movement, later half is used for uniform motion.Displacement is conic section about the time in accelerator, but for motor
The time of the stability of operation, half needs uniform motion.Therefore the curvature at previous interval end is 0 between two time intervals,
It is a (n) that the latter time interval, which originates curvature, and Curvature varying is significantly lower before and after spaced points.Therefore the present invention is by the smooth of curve
Degree greatly promotes.
(3) degree of fitting with desired guiding trajectory is improved:
The algorithm that the present invention uses is in one cycle using constant duration as separation, by of time interval point
Number is set as n.And the size of time interval number can be determined according to input information, if the cycle of operation of motor is longer,
Lesser time interval number can be can be used if the cycle of operation of motor is shorter using biggish time interval number.Using this side
The time shifting information that formula can make full use of display interface to provide, so as to preferably be fitted.The root in each time interval
According to the time shifting function in section where its time spaced points, the displacement Ys of time interval starting point, the displacement of terminating point are found out
Ye does uniformly accelerated motion in the first half time of time interval, and later half does linear uniform motion, therefore in each time interval
The first half displacement is quadratic function about the time, and second half section displacement is linear function about the time.And it takes full advantage of each
It is displaced cubic function information of the section intrinsic displacement about the time, information is maximally utilized, therefore the degree of fitting of pre-programmed curve
Also it gets a promotion.
Detailed description of the invention
Fig. 1 is the pre-programmed curve of one embodiment of the invention；
Fig. 2 is the result being fitted using the prior art to the pre-programmed curve of Fig. 1；
Fig. 3 is the result that one embodiment of the invention is fitted the pre-programmed curve of Fig. 1；
Fig. 4 is the pre-programmed curve of another embodiment of the present invention；
Fig. 5 is the result being fitted using the prior art to the pre-programmed curve of Fig. 4；
Fig. 6 is the result that another embodiment of the present invention is fitted the pre-programmed curve of Fig. 4；
Fig. 7-10 is the curvilinear path and time interval ratio of existing several operational modes of trimmer motor.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings and specific examples.
Embodiment 1
With starting point 3.5inch, terminating point 5inch, frequency 10Hz, the by stages Zone such as displacement is 10 (preset thresholds
Value), now when selection criteria sin curve, by pre-programmed curve (Fig. 1), the matched curve (Fig. 2) and the present invention of prior art
The matched curve of (Fig. 3) is compared.
Fig. 3 is that motor is run according to algorithm provided by the invention, and a time cycle is divided into 20 sections, small with first
In the times such as section for motor operating parameter, motor operation is set as 150ms per a bit of time:
The starting point of (1) first segment is 0, the first segment cubic curve A [0]=0.149, B [0]=0.306, C [0]=
0, D [0]=3.5,
Therefore the first segment starting displacement Y [0] and last bit are moved Y [1] and are respectively as follows:
Y [0]=3.5mm
Y [1]=A [0] × (0.15-0)3+B[0]×(0.15-0)2+C[0]×(0.15-0)
+D[0]
=3.507mm
The second half section of (2) first segments is in uniform motion
A (0)=(Vn-Vn-1)/(Tn/ 2)=0.827mm/s2
Therefore motor operation is 0.827mm/s in the acceleration of Jog Manual Mode2；Uniform velocity is 0.062mm/s, other are small
Section and so on.
Embodiment 2
With starting point 3.5inch, terminating point 5inch, frequency 10Hz, the by stages Zone such as displacement is 10 (preset thresholds
Value), the time interval ratio in the 5th displacement section is revised as 5, and the fitting of pre-programmed curve (Fig. 4), prior art is bent
Line (Fig. 5) is compared with matched curve (Fig. 6) of the invention.
Fig. 6 is that motor is run according to algorithm provided by the invention, and a time cycle is divided into 20 sections, small with first
In the times such as section for motor operating parameter, motor operation is set as 150ms per a bit of time
The starting point of (1) the 6th segment is 0, the 6th segment cubic curve A [6]=- 1.280, B [6]=0.960, C [6]
=0.548, D [6]=3.65,
Therefore the first segment starting displacement Y [0] and last bit are moved Y [1] and are respectively as follows:
Y [0]=A [6] × (0.75-0.489)3+B[6]×(0.75-0.489)2
+ C [6] × (0.75-0.489)+D [6]=3.835mm
Y [1]=A [6] × (1.05-0.489)3+B[6]×(1.05-0.489)2
+C[6]×(1.05-0.489)+D[6]
=4.033mm
The second half section of (2) first segments is in uniform motion
A (6)=(Vn-Vn-1)/(Tn/ 2)=1.560mm/s2
Therefore motor operation is 1.560mm/s in the acceleration of Jog Manual Mode2；Uniform velocity is 0.914mm/s, other are small
Section and so on.
Can be seen that existing technical solution by the Comparative result of both examples above can not be according to pre-programmed curve
Track operation, displacement section junction it is rough, displacement section in also according to pre-programmed curve offer displacement
Operation, and the junction in motor operation of the invention to displacement section can also smoothly transition from, in displacement section also as far as possible
Ground approached pre-programmed curve offer displacement information, so the invention enables motor actual motion track to a greater degree close to
The time shifting information that pre-programmed curve provides.
Taking the above-mentioned ideal embodiment according to the present invention as inspiration, through the above description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property range is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.
Claims (5)
1. the spotting scaming algorithm of trimmer motor in chemical-mechanical planarization, which is characterized in that by the trimmer motor
One cycle of operation is divided into n isometric time interval Tn, each time interval TnCorresponding motor operation is displaced
Zn, the curve that the running track of trimmer motor is characterized by preset time shifting function, the spotting scaming algorithm includes
Following steps:
(1) curve time shifting function coefficients all within a cycle of operation are pre-stored in four array A [n], B
In [n], C [n], D [n], A [n], B [n], C [n], D [n] are respectively represented in n-th of displacement section in time shifting function
The coefficient of each secondary item, wherein A [n] is the coefficient of cubic term, and B [n] is the coefficient of quadratic term, and C [n] is the coefficient of first order, D
[n] is the coefficient of constant term, and t is the time point in n-th of displacement section, YnIt is the displacement in n-th of displacement section；
(2) determine that time interval number n, n are greater than preset threshold value；
(3) by time interval TnIt is divided into Tn1And Tn2, S1For in time Tn1The displacement of interior motor operation, S2For in time Tn2When interior
Between the displacement that runs, SnIt is motor in TnThe total displacement of motor operation in time, need to meet the following conditions；
Tn1 +Tn2 =Tn(1)；
S1 +S2 =Sn(2)；
(4) operational mode for selecting the trimmer motor, in Tn1In period the trimmer motor with acceleration a (n) into
Row uniformly accelrated rectilinear motion；In Tn2The trimmer motor is in period with speed VnCarry out linear uniform motion.
2. the spotting scaming algorithm of trimmer motor in chemical-mechanical planarization as described in claim 1, which is characterized in that institute
It states in step (1), in the time shifting function that n-th is displaced in section are as follows:
Yn=A [n] * (t-tn-1)3 +B[n]*(t-tn-1)2 +C[n]*(t-tn-1)+D[n] (3)；
tn-1The start time point in section is displaced for n-th.
3. the spotting scaming algorithm of trimmer motor in chemical-mechanical planarization as claimed in claim 2, which is characterized in that will
Time interval TnOperation be divided into two parts Tn1And Tn2, and speed V is found out in the following mannernWith acceleration a (n):
Time interval T is obtained by formula (1)nThe displacement Y of starting pointnsAre as follows:
Yns=A [n] * (ts-tn-1) 3 +B[n]*(ts-tn-1) 2 +C[n]*(ts-tn-1)+D[n] (4)
Time interval TnThe displacement Y of terminating pointneAre as follows:
Yne=A [n] * (te-tn-1) 3 +B[n]*(te-tn-1) 2 +C[n]*(te-tn-1)+D[n] (5)
tsFor time interval TnThe time point of starting point, teFor time interval TnThe time point of terminating point；
If (n-1)th time interval Tn-1Interior uniform velocity size is Vn-1, then in Tn2Uniform velocity size in period are as follows:
In Tn1Acceleration magnitude in period are as follows:
A (n)=(Vn-Vn-1)/(Tn/2) (7)。
4. the spotting scaming algorithm of trimmer motor in chemical-mechanical planarization as described in any one of claims 1-3, special
Sign is that threshold value described in step (2) is characterized the number of segment of curve by time shifting function described in motor operation a cycle.
5. the spotting scaming algorithm of trimmer motor in chemical-mechanical planarization as claimed in claim 4, which is characterized in that institute
Motor is stated with the operation of Jog Manual Mode.
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| CN109767974B (en) * | 2019-01-14 | 2020-12-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Material cleaning method, device and controller |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5222329A (en) * | 1992-03-26 | 1993-06-29 | Micron Technology, Inc. | Acoustical method and system for detecting and controlling chemical-mechanical polishing (CMP) depths into layers of conductors, semiconductors, and dielectric materials |
| US5582534A (en) * | 1993-12-27 | 1996-12-10 | Applied Materials, Inc. | Orbital chemical mechanical polishing apparatus and method |
| CN101934496B (en) * | 2010-08-05 | 2012-02-15 | 清华大学 | Chemical mechanical polishing machine and chemical mechanical polishing equipment with same |
| JP5927083B2 (en) * | 2012-08-28 | 2016-05-25 | 株式会社荏原製作所 | Dressing process monitoring method and polishing apparatus |
| CN104097145A (en) * | 2013-04-02 | 2014-10-15 | 盛美半导体设备（上海）有限公司 | Grinding pad trimmer |
| CN103522191A (en) * | 2013-09-26 | 2014-01-22 | 中国电子科技集团公司第四十五研究所 | Polishing pad dressing device applied to wafer chemical-mechanical planarization equipment |
| CN103506956B (en) * | 2013-09-26 | 2016-04-27 | 中国电子科技集团公司第四十五研究所 | A kind of for the polishing pad trimmer in wafer chemical CMP apparatus |
| CN103887206B (en) * | 2014-04-02 | 2017-05-31 | 中国电子科技集团公司第四十五研究所 | Method for detecting chemical and mechanical flattening endpoint and device |
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