CN106596721B - The detection method of draw out mold arc surface internal flaw - Google Patents
The detection method of draw out mold arc surface internal flaw Download PDFInfo
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- CN106596721B CN106596721B CN201611130045.6A CN201611130045A CN106596721B CN 106596721 B CN106596721 B CN 106596721B CN 201611130045 A CN201611130045 A CN 201611130045A CN 106596721 B CN106596721 B CN 106596721B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/262—Arrangements for orientation or scanning by relative movement of the head and the sensor by electronic orientation or focusing, e.g. with phased arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
- G01N2291/0234—Metals, e.g. steel
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0421—Longitudinal waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/106—Number of transducers one or more transducer arrays
Abstract
The present invention relates to a kind of detection methods of draw out mold arc surface internal flaw, when including: detection great circle cambered surface, utilize phased array ultrasonic detection equipment, it is identical or almost the same as tested orthodrome that its curvature is adjusted using the voussoir that can adjust curvature, detection sensitivity is adjusted using sensitivity test block, the inner surface that probe is tightly attached to orthodrome detects orthodrome inside with the first detection parameters；When detecting transition arc, adjusting wedge curvature is identical or almost the same as tested transition arc, detection sensitivity is adjusted using sensitivity test block, the outer surface that the probe is close to transition circle cambered surface is detected with the second detection parameters, array element numerical value is detected in second detection parameters and is lower than the first detection parameters.The present invention can detect circular arc and its transition arc within the scope of 36~220mm of diameter simultaneously, not have to change probe and voussoir during detection.Detection efficiency greatly improves.Meanwhile being designed by sensitivity test block, the sensitivity of detection greatly improved.
Description
Technical field
The invention belongs to ultrasonic examination technical fields, and in particular to a kind of draw out mold arc surface internal flaw
Detection method, the draw out mould can be used for manufacturing the cast metals of sputtering target material.
Background technique
It shoots at the target a kind of critical material of the material as plated film field, it is aobvious to be usually used in large scale integrated chip, LCD plasma
Display screen, camera gun, building and auto industry glass plated film.The deposition rate of film is high and uniform when to guarantee sputtering
Film thickness, sputtering target material should have uniform internal organizational structure, including uniformly tiny crystal grain, uniform texture point
Cloth.
The ingot casting coarse grains that melting is produced, it is internal coarse to be crushed it that this must just carry out forging processing to ingot casting
Columnar grain, while the stomata for closing inside ingot is forged, keep ingot casting finer and close.Pulling is a kind of effective means of Broken Crystal, casting
Ingot coarse grains must apply larger pressure by the draw out mold of cast metals with Broken Crystal, make its crystal grain refinement,
Crystal grain is relatively uniform.During this, the uniformity of pressure is to guarantee the main factor of sputtering target material quality.Pressure it is uniform
Property must be guaranteed by die quality.Under high pressure, mold is easily cracked, especially in the maximum great circle cambered surface of stress, easily
It is cracked.After cracked, forging pressure, pulling pressure are unable to reach mold, thus can not be ensured inside sputtering target material
Quality.Therefore it must be detected before processing, traditional detection method is first to detect great circle cambered surface, afterwards using special
Method detect transition arc R, this means detection efficiency is low, and detection sensitivity is not high, needs to convert probe and voussoir, cost
It is high.
Summary of the invention
In view of the above problems, the present invention provides a kind of draw out mold arc surface Inner Defect Testing methods.Using this
Method can detect great circle cambered surface and transition arc R simultaneously.
The technical solution of the present invention is as follows: a kind of detection method of draw out mold arc surface internal flaw, comprising:
Detection sensitivity is adjusted by sensitivity test block, the sensitivity test block includes recessed orthodrome from step
Two transition circle cambered surfaces of face and great circle cambered surface and step joint, great circle cambered surface are pulled out with transition circle arc sizes with forging
Long mold is identical；
The sensitivity test block includes first cross-drilled hole at a wherein transition arc, for adjusting transition arc
Detection sensitivity；In second cross-drilled hole of transition arc and step joint；In the joint of transition arc and great circle cambered surface
Third cross-drilled hole；The 4th cross-drilled hole in great circle cambered surface bottom；The 5th be located above the 4th cross-drilled hole at great circle cambered surface
Cross-drilled hole, for adjusting orthodrome detection sensitivity；Second and third and four cross-drilled holes are used to adjust the scan angle popped one's head in；
When detecting great circle cambered surface, using phased array ultrasonic detection equipment, its song is adjusted using the voussoir that can adjust curvature
Rate is identical or almost the same as tested orthodrome, detection sensitivity is adjusted using sensitivity test block, with the first detection parameters spy
The inner surface that head is tightly attached to orthodrome detects orthodrome inside；
When detecting transition arc, adjusting wedge curvature is identical or almost the same as tested transition arc, is tried using sensitivity
Block adjusts detection sensitivity, and the outer surface that the probe is close to transition circle cambered surface is detected with the second detection parameters, described
Array element numerical value is detected in second detection parameters is lower than the first detection parameters.
In a specific embodiment of the invention, five cross-drilled holes are apart from 1~6mm of arc surface, 1~3mm of diameter.
In a specific embodiment of the invention, first cross-drilled hole is located in one of at the symmetry axis of transition arc；
Second cross-drilled hole is located at another transition arc and step joint；Third cross-drilled hole is in another described transition arc and great circle
The joint of cambered surface；4th cross-drilled hole is at the symmetry axis of great circle cambered surface；5th cross-drilled hole is located at first cross in great circle cambered surface
1/4 circular arc of hole side.
In a specific embodiment of the invention, by first cross-drilled hole tune transition arc detection sensitivity, spy is selected
Head frequency, the gap for detecting array number, array element for adjusting probe；Circular-arc detection sensitivity is tuned up by the 5th cross-drilled hole, selects spy
The frequency of head, the gap for detecting array number, array element for adjusting probe；The scan angle popped one's head in by second and third cross-drilled hole tune, anti-transition
Circular arc missing inspection；The scan angle popped one's head in by third and fourth cross-drilled hole tune, anti-orthodrome missing inspection.
In a specific embodiment of the invention, the first detection parameters include: that detection array element is 8~16, array element gap 0
30~70 ° of~0.3mm, scanning angle；Second detection parameters include: that detection array element is 1~4,0~0.3mm of array element gap, scanning angle
It is 40~60 °.
In a specific embodiment of the invention, use frequency for the probe of 2.5~10MHz.
In a specific embodiment of the invention, using 80~90 ° of test section angle, the voussoir of 1~20mm of curvature.
In a specific embodiment of the invention, when detecting orthodrome, the back wave wave amplitude of the 5th cross-drilled hole is utilized
80% dB value is that longitudinal wave detects initial sensitivity；When detecting transition arc, the back wave wave amplitude of first cross-drilled hole is utilized
80% dB value is that longitudinal wave detects initial sensitivity.
In a specific embodiment of the invention, when detecting the internal flaw of the joint of transition arc and orthodrome,
With the curvature and detection parameters of detection orthodrome；When detecting the internal flaw of the joint of transition arc and step, with detecting
Cross the detection parameters and curvature of circular arc.
Using the method for the present invention, the circular arc and its transition arc R within the scope of 36~220mm of diameter can be detected simultaneously, examined
During survey, without changing probe and voussoir.Detection efficiency greatly improves.Meanwhile being designed by sensitivity test block, inspection greatly improved
The sensitivity of survey.
Detailed description of the invention
Fig. 1 is the draw out mold arc surface test block schematic diagram for manufacturing the cast metals of sputtering target material.
Fig. 2 is the voussoir figure of selection.Using knob adjusting wedge, make the radian of voussoir (base corresponding with tested radian
This is consistent).
Fig. 3 is the draw out mold great circle of the cast metals of the manufacture sputtering target material of embodiment 2 in first group of embodiment
Cambered surface internal flaw figure.
Fig. 4 is the corresponding metallographic microscope of 2 internal flaw of embodiment in first group of embodiment.
Fig. 5 is the draw out die transition of the cast metals of the manufacture sputtering target material of embodiment 3 in second group of embodiment
Circular arc R internal flaw waveform diagram.
Fig. 6 is the draw out die transition circle for the cast metals that embodiment 3 manufactures sputtering target material in second group of embodiment
The corresponding metallographic microscope of arc R internal flaw.
Fig. 7 is the draw out die transition of the cast metals of the manufacture sputtering target material of embodiment 4 in third group embodiment
Circular arc justifies R internal flaw waveform diagram.
Fig. 8 is the draw out mold degree circular arc R for the cast metals that embodiment 4 manufactures sputtering target material in third group embodiment
The corresponding metallographic microscope of internal flaw.
Specific embodiment
Draw out mold arc surface Inner Defect Testing method of the invention utilizes phased array when detecting great circle cambered surface
Ultrasonic detection equipment, with 8~16 chips, 0~0.3mm of array element gap, scanning angle is 30~70 °, frequency is 2.5~10MHz's
Probe, the voussoir (can use existing, utilize knob adjusting wedge radian) with an artificial adjustable curvature, according to quilt
The curvature for examining the curvature adjusting wedge of orthodrome keeps the two almost the same, detection sensitivity is adjusted using sensitivity test block, spy
The inner surface that head is tightly attached to orthodrome detects orthodrome inside；When detecting transition arc, with same probe, 1~4 crystalline substance is adjusted
Piece, 0~0.3mm of array element gap, scanning angle are 40~60 °, and the curvature for mixing up voussoir again keeps it basic with transition arc curvature
Unanimously, using sensitivity test block detection sensitivity, the outer surface that probe is close to transition face is detected.During detection, do not change
Probe and voussoir.
Using the lower half of mold design sensitivity test block (lower half of its geomery and mold is almost the same,
Including recessed great circle cambered surface from step, the transition arc of great circle cambered surface and step joint), utilize this sensitivity test block tune
Save detection sensitivity, the scanning angle, the gap for detecting array element parameter, array element of probe.It designs in the hole of sensitivity test block: in test block
Longitudinal, 5 1~3mm of diameter of design at 1~6mm of arc surface cross-drilled hole, the 1st cross-drilled hole: one of transition arc R's
At symmetry axis；2nd cross-drilled hole: another transition arc and step joint；Third cross-drilled hole: in another described transition arc
With the joint of great circle cambered surface；4th cross-drilled hole: at the symmetry axis of great circle cambered surface；5th cross-drilled hole: (it is located in great circle cambered surface
1st cross-drilled hole side) half symmetry axis at (i.e. great circle cambered surface is located at the 1/4 of the 1st cross-drilled hole side).
Design the 1st hole purpose: adjusting transition arc R detection sensitivity, select frequency probe, the detection array number for adjusting probe,
The gap of array element；It designs the purpose of 2,3 through-holes: adjusting the scan angle of probe, anti-transition arc R missing inspection.Similarly, orthodrome is detected
When, utilize 5 through-hole tune detection sensitivities, the frequency for selecting probe, the gap for detecting array number, array element for adjusting probe；Utilize 3,4
The scan angle of through-hole tune probe, anti-orthodrome missing inspection.
Using a kind of focusing probe, this probe designs detection parameters by sensitivity test block, to meet two kinds of arcs of detection
The testing requirements of degree.Detect the design of the probe detection parameters of orthodrome: detection array element parameter for 8~16, array element gap 0~
30~70 ° of 0.3mm, scanning angle；Detect transition arc probe designs parameter: detection array element be 1~4, array element gap 0~
0.3mm, scanning angle are 40~60 °.The testing requirements of the inside full inspection of two kinds of detected arc surfaces are able to satisfy with a kind of probe.
The selection of probe voussoir: one 80~90 ° of test section angle of selection, the voussoir of 1~20mm of curvature.Adjust this voussoir
Radius can satisfy can be detected inside orthodrome and transition arc R external detection requirement.
With embodiment combination attached drawing, the invention will be further described below.
The draw out mold orthodrome internal flaw of the cast metals of first group of embodiment detection manufacture sputtering target material.Benefit
It is that longitudinal wave detects initial sensitivity with 80% dB value of the back wave wave amplitude in the hole 5 in sensitivity test block (see Fig. 1), using battle array
First parameter is 8~16,0~0.3mm of array element gap, the mode of 30~70 ° of sectorings in scanning angle carrys out flyback inside circular arc.Figure
1 mesoporous 5 is that an aperture is 1~3mm cross-drilled hole, and position is in 1~6mm at one axis of hemimorphism of orthodrome.Embodiment testing result
It is shown in Table the defective waveform figure that one, Fig. 3 is embodiment 2, Fig. 4 is the corresponding metallographic microscope of 2 defect of embodiment.Embodiment testing result is shown in
Table 1.
Table 1
Table 1 is the testing result of the different model of first group of embodiment.
This group of embodiment of second group of embodiment predominantly detects die transition circular arc R internal flaw.By first group of detection mold
Since this group detects, the curvature of adjusting wedge utilizes 80% dB of the back wave wave amplitude of sensitivity test block (see Fig. 1) mesoporous 1
Value is that longitudinal wave detects initial sensitivity, uses array element parameter for 1~4,0~0.3mm of array element gap, 40~60 ° of scanning angle sector
The mode of scanning carrys out flyback outside circular arc.Fig. 1 mesoporous 1 is that an aperture is 1~3mm cross-drilled hole, and position is at R pairs of transition arc
Claim 1~6mm at axis.Embodiment testing result is shown in Table the defective waveform figure that 2, Fig. 5 is embodiment 2, and Fig. 6 is 2 defect pair of embodiment
The metallographic microscope answered.
Table 2
Table 2 is the testing result of the 2nd group of embodiment
Third group this group of embodiment of embodiment predominantly detects the interface and transition arc R of transition arc R and orthodrome
With the internal flaw of step interface, by second group of embodiment detect mold be used for this group detection, detection transition arc R with greatly
The curvature of the interface orthodrome of circular arc and the detection parameters for detecting orthodrome；Detect the interface of transition arc R and step
Internal flaw when, with detection transition arc R detection parameters and curvature.The testing result of embodiment is shown in Table 3, Fig. 7 to implement
The defective waveform figure of example 4, Fig. 8 are the corresponding metallographic microscope of defect.
Table 3
Table 3 is the testing result of third group embodiment.
Claims (9)
1. a kind of detection method of draw out mold arc surface internal flaw, characterized by comprising:
Detection sensitivity is adjusted by sensitivity test block, the sensitivity test block includes recessed great circle cambered surface from step, with
And two transition circle cambered surfaces of great circle cambered surface and step joint, great circle cambered surface and transition circle arc sizes and draw out mold
It is identical；
The sensitivity test block includes first cross-drilled hole at a wherein transition arc, for adjusting transition arc detection
Sensitivity；In second cross-drilled hole of transition arc and step joint；In the third of transition arc and the joint of great circle cambered surface
A cross-drilled hole；The 4th cross-drilled hole in great circle cambered surface bottom；The 5th cross-drilled hole being located above the 4th cross-drilled hole at great circle cambered surface,
For adjusting orthodrome detection sensitivity；Second and third and four cross-drilled holes are used to adjust the scan angle popped one's head in；
In the longitudinal direction of test block, design at 1~6mm of arc surface the cross-drilled hole of 5 1~3mm of diameter, first cross-drilled hole: wherein one
At the symmetry axis of a transition arc R；Second cross-drilled hole: another transition arc and step joint；Third cross-drilled hole: described
The joint of another transition arc and great circle cambered surface；4th cross-drilled hole: at the symmetry axis of great circle cambered surface；5th cross-drilled hole:
In great circle cambered surface, at the symmetry axis of the half of first cross-drilled hole side, i.e., great circle cambered surface is located at first cross-drilled hole side
At 1/4；
When detecting great circle cambered surface, using phased array ultrasonic detection equipment, using the voussoir that can adjust curvature adjust its curvature with
Tested orthodrome is identical or almost the same, adjusts detection sensitivity using sensitivity test block, with the first detection parameters that probe is tight
The inner surface for being attached to orthodrome detects orthodrome inside；
When detecting transition arc, adjusting wedge curvature is identical or almost the same as tested transition arc, utilizes sensitivity test block tune
Detection sensitivity is saved, the outer surface that the probe is close to transition circle cambered surface is detected with the second detection parameters, described second
Array element numerical value is detected in detection parameters is lower than the first detection parameters.
2. the detection method of draw out mold arc surface internal flaw according to claim 1, it is characterised in that: five
Cross-drilled hole is apart from 1~6mm of arc surface, 1~3mm of diameter.
3. the detection method of draw out mold arc surface internal flaw according to claim 1, it is characterised in that: first
A cross-drilled hole is located in one of at the symmetry axis of transition arc；Second cross-drilled hole is located at another transition arc and connects with step
Place；Third cross-drilled hole is in the joint of described another transition arc and great circle cambered surface；Pair of 4th cross-drilled hole in great circle cambered surface
Claim at axis；5th cross-drilled hole is located at 1/4 circular arc of first cross-drilled hole side in great circle cambered surface.
4. the detection method of draw out mold arc surface internal flaw according to claim 1,2 or 3, feature exist
In: by first cross-drilled hole tune transition arc detection sensitivity, selects frequency probe, adjusts the detection array number, array element popped one's head in
Gap；Circular-arc detection sensitivity, the frequency for selecting probe, the detection array number for adjusting probe, array element are tuned up by the 5th cross-drilled hole
Gap；The scan angle popped one's head in by second and third cross-drilled hole tune, anti-transition arc missing inspection；It is popped one's head in by third and fourth cross-drilled hole tune
Scan angle, anti-orthodrome missing inspection.
5. the detection method of draw out mold arc surface internal flaw according to claim 1,2 or 3, feature exist
In: the first detection parameters include: that detection array element is 8~16,0~0.3mm of array element gap, 30~70 ° of scanning angle；Second detection ginseng
Number include: detection array element be 1~4,0~0.3mm of array element gap, scanning angle are 40~60 °.
6. the detection method of draw out mold arc surface internal flaw according to claim 1,2 or 3, feature exist
In: use frequency for the probe of 2.5~10MHz.
7. the detection method of draw out mold arc surface internal flaw according to claim 1,2 or 3, feature exist
In: use 80~90 ° of test section angle, the voussoir of 1~20mm of curvature.
8. the detection method of draw out mold arc surface internal flaw according to claim 1,2 or 3, feature exist
In: when detection orthodrome, the 80% dB value using the back wave wave amplitude of the 5th cross-drilled hole is that longitudinal wave detects initial sensitivity；Inspection
When surveying transition arc, the 80% dB value using the back wave wave amplitude of first cross-drilled hole is that longitudinal wave detects initial sensitivity.
9. the detection method of draw out mold arc surface internal flaw according to claim 1,2 or 3, feature exist
In: when detecting the internal flaw of the joint of transition arc and orthodrome, with the curvature and detection parameters of detection orthodrome；Detection
When the internal flaw of the joint of transition arc and step, with the detection parameters and curvature of detection transition arc.
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