CN106596059A - Aspheric element stress birefringence amount measuring method - Google Patents
Aspheric element stress birefringence amount measuring method Download PDFInfo
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- CN106596059A CN106596059A CN201611058939.9A CN201611058939A CN106596059A CN 106596059 A CN106596059 A CN 106596059A CN 201611058939 A CN201611058939 A CN 201611058939A CN 106596059 A CN106596059 A CN 106596059A
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- test point
- spherical element
- light source
- angle
- measuring method
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
The invention relates to an aspheric element stress birefringence amount measuring method. The method comprises the following steps: determining test points on an aspheric element and an initial position of a light source, and obtaining deflection angle of the light source according to the angle between the current test point and the optical axis of the aspheric element; determining the position of a detector of a stress birefringence device according to the position of the current test point; moving the detector to a corresponding position according to the position of the detector; obtaining stress birefringence amount of the current test point through the detector; rotating a test board to enable the aspheric element to rotate to the test points corresponding to a plurality of specific angles on the same circumference, and obtaining a plurality of stress birefringence amount of the test points corresponding to the plurality of specific angles on the same circumference through the detector; and entering the step of determining the test points on the aspheric element and the initial position of the light source and obtaining the deflection angle of the light source according to the angle between the current test point and the optical axis of the aspheric element until all test points are measured.
Description
Technical field
The present invention relates to optical element detection technique field, more particularly to a kind of stress birfringence amount of non-spherical element
Measuring method.
Background technology
As the development of semi-conductor industry, the characteristic size of large scale integrated circuit are less and less, photoetching technique is used as system
The key technology of standby semiconductor devices, faces new challenges.In order to improve the resolution ratio of etching system, the wavelength of exposure light source
Constantly reduce, from 436nm, the near ultraviolet of 355nm enters into 248nm, the deep ultraviolet band of 193nm.With 193nm ArF quasi-molecules
As a example by laser lithography, 90nm is broken through, 65nm and 45nm nodes become the exposure technique of current main flow.
In deep ultraviolet band, because the number of element in optical system is limited to the absorption of material, which results in non-
The extensive application of aspherical elements.And non-spherical element from blank to optical system in a part, need through processing, plated film,
It is integrated and the process such as debug.All element can be applied during these or introduce new stress, now need to compare process
The stress birfringence measurement result of element in front and back, but current stress birfringence test system can only measurement plane, sphere unit
The stress birfringence of part postpones, and aspheric stress birfringence amount then cannot be measured.
The content of the invention
Present invention seek to address that aspheric stress birfringence amount cannot be measured technical problem in prior art,
There is provided that a kind of measurement process is simple and cost is relatively low, and the stress birfringence amount of the non-spherical element of stress birfringence amount can be realized
Measuring method.
The present invention provides a kind of measuring method of the stress birfringence amount of non-spherical element, and the measuring method includes：
Determine the initial position of test point on non-spherical element and light source and according to current test point and aspheric bin
The angle of part optical axis obtains the deflection angle of the light source；
According to the size of non-spherical element, the position of current test point and current test point obtain described to the distance of light source
The shift length of light source；
Adjust the concentricity of the non-spherical element and the testboard；
The light source is moved by corresponding position according to the deflection angle of the light source and the shift length of the light source；
The position of the detector of the stress birfringence equipment is determined according to the position of current test point；
The detector is moved by corresponding position according to the position of the detector
The stress birfringence amount of current test point is obtained by detector；
The non-spherical element is turned to the multiple specified angles correspondence on same circumference by the rotation testboard
In test point, and the multiple specified angles obtained by detector on same circumference correspond to multiple stress birfringences of test point
Amount；
Into the initial position of the test point and light source determined on non-spherical element, according to current test point and light source optical axis
Angle the step of obtain the deflection angle of the light source, until all of test point measurement is finished.
Compared with prior art, beneficial effect is technical scheme：Without the need for carrying out upgrading, nothing to equipment
Software programming need to be used, it is only necessary to measuring apparatus size, it is known that the situation of element under test size, aspherical equation and refractive index
The lower measurement that can carry out stress birfringence；The corresponding light source position of one radial direction test point of calculating and detector are only needed in addition
Position, just stress birfringence on the measurable circumference postpones so that the measurement process of this measuring method is simple and cost is relatively low.
Description of the drawings
Fig. 1 is a kind of flow chart of embodiment of misalignment measurement method of aspherical mirror of the present invention.
Fig. 2 is the structural representation of non-spherical element；
Fig. 3 is the position view of non-spherical element, detector and light source.
In figure, 31, detector；32nd, non-spherical element；33rd, light source；34th, test point.
Specific embodiment
The specific embodiment of the present invention is described further below in conjunction with the accompanying drawings.
The present invention provides a kind of measuring method of the stress birfringence amount of the non-spherical element of embodiment, as shown in figure 1, institute
Stating measuring method includes：
Step S11, determine test point on non-spherical element and light source initial position and according to current test point with
The angle of light source optical axis obtains the deflection angle of the light source；
Step S12, according to the size of non-spherical element, the distance of the position of current test point and current test point to light source
Obtain the shift length of the light source；
Step S13, adjusts the concentricity of the non-spherical element and the testboard of stress birfringence equipment；
Step S14, moves corresponding according to the deflection angle of the light source and the shift length of the light source by the light source
Position；
Step S15, the position of the detector of the stress birfringence equipment is determined according to the position of current test point；
Step S16, corresponding position is moved according to the position of the detector by the detector；
Step S17, by detector the stress birfringence amount of current test point is obtained；
Step S18, is turned to the non-spherical element by the rotation testboard multiple specified on same circumference
Angle is corresponded in test point, and multiple stress of the multiple specified angles correspondence test point on same circumference are obtained by detector
Double refraction amount；Into step S11；
Step S19, until all of test point measurement is finished.
In step s 13, non-spherical element is placed on the testboard of stress birfringence equipment be manually operated with
Adjust the concentricity of the non-spherical element and the testboard of stress birfringence equipment.
In being embodied as, the light source deflection angle is equal to the normal of current test point and the angle of non-spherical element optical axis
Deduct the aerial incidence angle of light, that is to say, that, it is assumed that light is propagated inside non-spherical element along optical axis direction, calculates light
Aerial incidence angle is incidence angle of the light in current test point, and is converted into light source deflection angle.
In being embodied as, polar mode is adopted during the stress birfringence equipment test non-spherical element, wherein
Point on the basis of the central point of non-spherical element, central point level vector to the right is pole axis.Overlap with pole axis Ji Wei 0 ° of position, pole
90 ° of axle rotate counterclockwise is 90 ° of positions.
In being embodied as, step S11, specially：
Non-spherical element to start selection unit from the center of non-spherical element in the radial direction default at intervals of first
N number of test point of distance, wherein N is the positive integer more than or equal to 1.Each first predeterminable range has angle on same circumference
For 0 °, 90 ° of two test points, naturally it is also possible to be, each first predeterminable range on same circumference have angle be 0 °,
90 °, 180 ° and 270 ° of four test points.Such as when the first predeterminable range is 5mm, the radius of non-spherical element is 35mm
When, four points that test point is specially with the distance at the center of non-spherical element is 5mm, the distance with the center of non-spherical element
For four points of 10mm, apart from tetra- points of 25mm, apart from tetra- points of 30mm.In addition the distance at the center of non-spherical element is 5mm
Two points angle circumferentially be 0 °, 90 °, 180 ° and 270 °.
In being embodied as, the initial position of the light source is：Displacement is 0mm, and deflection angle is 0 °
In being embodied as, the non-spherical element is less than or equal to 0.1mm with the concentricity of the testboard.
In being embodied as, the non-spherical element can be the element that twin polishing element and hair side apply matching fluid.
In being embodied as, step S15, specially：The detector of stress birfringence equipment is moved to into current test point
Underface.Because stress birfringence equipment is in measurement, test light is propagated in non-spherical element along optical axis direction, that is,
Vertical direction is propagated.Specifically, non-spherical element lower surface is plane, and the light vertically propagated hangs down with non-spherical element lower surface
Directly, will not reflect, so light Exit positions are identical with incoming position, as long as detector is in the test point of non-spherical element
Lower section, just can detect and complete emergent light.
In being embodied as, in step S18, also include：According to the test point of selection in the circumference of non-spherical element
Number M obtains the specified angle, and wherein M is the positive integer more than or equal to 1.The test point of selection in the circumference of non-spherical element
Number M determines that, when number of checkpoints M is bigger, the result of measurement is more accurate, such as number of checkpoints according to the actual conditions of measurement
M can be 4,8 or 12 etc..When number of checkpoints M is 2, multiple specified angles are：0 ° and 90 °.When number of checkpoints M is 4,
Multiple specified angles are：0 °, 90 °, 180 ° and 270 °.That is, when current test point be angle for 0 °, 90 °, 180 ° and
For the moment, it is 0 °, 90 °, 180 ° that the multiple specified angles correspondence test point on same circumference is angle to 270 ° of four test points
With remaining three of 270 ° of four angles, then next test point is that the multiple specified angles correspondence on same circumference is tested
One in point, after having detected four test points of radially same first predeterminable range, into step S11, then surveys
Measure remaining test point.
In being embodied as, the stress birfringence amount of non-spherical element is described in detail by taking the non-spherical element in Fig. 2 as an example
Measuring method.The wherein formula of the aspherical I of non-spherical element：
Wherein, the diameter r of aspherical I0The coefficient k of=100mm, aspherical I=- 1.329873206, non-spherical element
Diameter length x=104mm, center thickness y=10mm.
Then, start to select 10 points at intervals of 5mm radially from center in above-mentioned non-spherical element to be measured, each
0 ° of selection and 90 ° of two points are tested on circumference, as a example by 1 point away from center 20mm, as shown in figure 3, the measuring method
Comprise the following steps that：Determine the initial position of test point 34 on non-spherical element 32 and light source 33, such as test point 34
Angle is 0 °.It is then assumed that light is propagated in element internal along optical axis direction, the aerial incidence angle of light is calculated, and be converted into
5.216 ° of light source deflection angle；Size, the position of selected test point 34 and the position according to non-spherical element 32 to light source away from
From calculating light source displacements are apart from 53mm；Non-spherical element 32 is placed on the testboard of stress birfringence equipment, sample is adjusted
With testboard concentricity 0.02mm；By light source according to the deflection angle and displacement movement for calculating, as shown in figure 3, detector 31 is moved
Move the underface 20mm of test point 34；Measurement and record data；Rotary sample to specified angle, due to current test point 34
Angle is 0 °, and rotary sample is extremely away from center 20mm and angle is 90 ° of upper measurements and record datas, that is, after having surveyed one week, under selection
The test point of one distance is such as away from center 25mm and angle is 0 ° of repetition above step, by all of test of non-spherical element 32
Data carry out processing the stress birfringence amount for obtaining non-spherical element.
The measuring method of the present invention need not carry out upgrading to equipment, without using software programming, it is only necessary to which measurement sets
Standby size, it is known that the measurement of stress birfringence can be carried out in the case of element under test size, aspherical equation and refractive index；
Only need in addition to calculate the radially corresponding light source position of a test point and detector position, just the stress on the measurable circumference
Birefringent retardation so that the measurement process of this measuring method is simple and cost is relatively low.
Merely illustrating the principles of the invention described in above-described embodiment and specification and most preferred embodiment, without departing from this
On the premise of spirit and scope, the present invention also has various changes and modifications, and these changes and improvements both fall within requirement and protect
In the scope of the invention of shield.
Claims (10)
1. the measuring method of the stress birfringence amount of a kind of non-spherical element, it is characterised in that：The measuring method includes：
Determine the initial position of test point on non-spherical element and light source and according to current test point and non-spherical element light
The angle of axle obtains the deflection angle of the light source；
According to the size of non-spherical element, the position of current test point and current test point obtain the light source to the distance of light source
Shift length；
Adjust the concentricity of the non-spherical element and the testboard；
The light source is moved by corresponding position according to the deflection angle of the light source and the shift length of the light source；
The position of the detector of the stress birfringence equipment is determined according to the position of current test point；
The detector is moved by corresponding position according to the position of the detector；
The stress birfringence amount of current test point is obtained by detector；
The multiple specified angles correspondence turned to the non-spherical element by the rotation testboard on same circumference is tested
On point, and the multiple specified angles obtained by detector on same circumference correspond to multiple stress birfringence amounts of test point；
Into the initial position of the test point and light source determined on non-spherical element, according to current test point and the angle of light source optical axis
The step of degree obtains the deflection angle of the light source, until all of test point measurement is finished.
2. measuring method according to claim 1, it is characterised in that：The initial position of the light source is：Displacement is
0mm, deflection angle is 0 °.
3. measuring method according to claim 1, it is characterised in that：The stress birfringence equipment tests non-spherical element
Point on the basis of the polar modes of Shi Caiyong, the wherein central point of non-spherical element, central point level vector to the right is pole axis.
4. measuring method according to claim 3, it is characterised in that：The step of the test point on the determination non-spherical element
Suddenly, specially：
Start selection unit at intervals of the first predeterminable range from the center of non-spherical element in the radial direction in non-spherical element
N number of test point, wherein N is the positive integer more than or equal to 1.
5. measuring method according to claim 4, it is characterised in that：It is described in non-spherical element in the radial direction from non-
The center of aspherical elements starts N number of test point of the selection unit at intervals of the first predeterminable range, specially：
Each first predeterminable range is on same circumference with four test points that angle is 0 °, 90 °, 180 ° and 270 °.
6. measuring method according to claim 5, it is characterised in that：Multiple specified angles correspondence on same circumference is tested
Point, specially：
It is multiple on same circumference when current test point is four test points a period of time that angle is 0 °, 90 °, 180 ° and 270 °
Specified angle correspondence test point is remaining three for four angles that angle is 0 °, 90 °, 180 ° and 270 °.
7. measuring method according to claim 1, it is characterised in that：The non-spherical element is concentric with the testboard
Degree is less than or equal to 0.1mm.
8. measuring method according to claim 1, it is characterised in that：The current test point of the basis and non-spherical element
Optical axis angle obtains the deflection angle of the light source, specially：
Light is propagated in the inside of non-spherical element along optical axis direction, calculates the aerial incidence angle of light；
It is aerial that the light source deflection angle deducts light equal to the normal of current test point with the angle of non-spherical element optical axis
Incidence angle.
9. measuring method according to claim 1, it is characterised in that：The position of the current test point of the basis determines described
The position of the detector of stress birfringence equipment, specially：
The detector of stress birfringence equipment is moved to into the underface of current test point.
10. measuring method according to claim 1, it is characterised in that：The non-spherical element can be twin polishing unit
Part and hair side apply the element of matching fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201611058939.9A CN106596059B (en) | 2016-11-25 | 2016-11-25 | A kind of measurement method of the stress birfringence amount of non-spherical element |
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| CN201611058939.9A CN106596059B (en) | 2016-11-25 | 2016-11-25 | A kind of measurement method of the stress birfringence amount of non-spherical element |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107543684A (en) * | 2017-08-18 | 2018-01-05 | 清华大学深圳研究生院 | A kind of device and method for measuring optical window birefringence effect |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107543684A (en) * | 2017-08-18 | 2018-01-05 | 清华大学深圳研究生院 | A kind of device and method for measuring optical window birefringence effect |
| CN107543684B (en) * | 2017-08-18 | 2019-05-10 | 清华大学深圳研究生院 | A kind of device and method measuring optical window birefringence effect |
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