CN106594094A - Transmission connecting structure for magnet motor and belt pulley - Google Patents
Transmission connecting structure for magnet motor and belt pulley Download PDFInfo
- Publication number
- CN106594094A CN106594094A CN201611035972.XA CN201611035972A CN106594094A CN 106594094 A CN106594094 A CN 106594094A CN 201611035972 A CN201611035972 A CN 201611035972A CN 106594094 A CN106594094 A CN 106594094A
- Authority
- CN
- China
- Prior art keywords
- magnet motor
- belt pulley
- pulley
- central shaft
- extension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D1/00—Couplings for rigidly connecting two coaxial shafts or other movable machine elements
- F16D1/06—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end
- F16D1/08—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pulleys (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Abstract
The invention provides a transmission connecting structure for a magnet motor and a belt pulley. An intercalation structure which is coaxial with a central shaft, is positioned at the periphery of an extending section and is opened in the top-end plane of the extending section, is arranged on the central shaft extending section of the magnet motor; the belt pulley is ring-shaped, and tightly surrounds the periphery of the top end of the extending section; an intercalation structure which penetrates through the belt pulley is arranged on a position, which corresponds to the intercalation structure of the extending section, of the inner side surface of the belt pulley; one fixed part is inserted into a complete intercalation structure jointed by the extending section and the belt pulley, so that the fixed part, the extending section and the belt pulley are integrally connected; and the central shaft extending section, the belt pulley and the fixed part are connected through a circlip. According to the transmission connecting structure disclosed by the invention, the circlip is used for connecting and fixing a magnet motor center shaft, a fixed key and the belt pulley, so that power is guaranteed to be transmitted to the magnet motor; meanwhile, the fixed key is in tight contact with the central shaft, so that transmission failure caused by transmission efficiency reduction or loosening of the fixed key is avoided, normal uniform-speed rotation of the magnet motor is kept, and the final purpose of providing stable magnetic fields needed for a PVD process is finally achieved.
Description
Technical field
The present invention relates to the connection of IC manufacturing field, more particularly to a kind of magnet motor and pulley drive is tied
Structure.
Background technology
In IC manufacturing, it is conventional work to carry out metal film in the deposition of silicon chip surface by physical vapour deposition (PVD) PVD
Skill：It is general in pvd chamber body, by the collective effect in voltage, high current and magnetic field, with the inert gas ion that is ionized to target
Material Target is bombarded, and is caused target to be ejected in the form of ion, atom or molecule and be deposited on substrate surface and is formed thin
Film.In the PVD equipment cavity of deposit tantalum nitride, by magnet motor Magnet Motor with per minute 60 rotating speed, in target
Material Target surfaces rotate to form Surface field, are electrically excited ionized inert gas by strong dc, form plasma, plasma
Body clashes into Target surfaces under the acceleration of Magnet field, and the atomic deposition for sputtering Target forms the heavy of metal film in silicon chip
Product.
In prior art, magnet motor is as shown in Figure 1 with the attachment structure of belt pulley.In Fig. 1, left side is shone to overlook material object
Piece, right side are schematic cross-section.The central shaft of wherein magnet motor Magnet Mortor-A stretches out to form extension B, prolongs
Stretch, positioned at extension periphery, and be opened on the rectangular recess on extension top, belt pulley
Pulley-D is ring-type, is closely surrounded in extension top periphery, and Pulley medial surface is in the corresponding position of extension groove
Also there is the rectangular recess on an insertion Pulley surface, a strip, cross-sectional sizes can be tightly inserted into central shaft and prolong
Stretch section and belt pulley set into groove combination the complete intercalations of fixed spoon Key-C wherein, therefore, the section of Key be it is square, in
Heart axle extension and Pulley are linked together by fixed spoon Key.There is connecing for a depression on one strip side of Key
Tactile mouth, a fixed screw Set Screw-E on Pulley, is come in contact in the contact mouth with Key, tightens the spiral shell
Silk, fixes the position of Magnet Motor central shafts, Key and Pulley threes by way of extruding, so as to fixed Magnet
The connection of Motor and Pulley.In normal operation, power can be sent to by Pulley by above-mentioned connection
Magnet Motor, simultaneously because fixed spoon Key and the close contact of central shaft elongated end groove, can maintain Magnet
Motor keeps normally at the uniform velocity rotating, there is provided the stabilizing magnetic field needed for PVD.
But in practical operation, with the increase of the duration of runs, on the one hand, the fixation of screw fashion of extrusion can make Key
The contact mouth of side occurs to loosen because of continuous stress generation dilatancy deformation for a long time, connection, affects transmission efficiency；It is simultaneously square
Shape fix spoon 4 right angles can because rotate abrasion become fillet, be rounded the section of Key, as shown in Fig. 2 so as to cause its with
The contact area of Magnet Motor central shafts extension is reduced, and affects the uniform rotation of magnet motor.Even more serious situation
It is only to extrude to fix Pulley and fixed spoon due to prior art using single screw, the extruding occurs to loosen, such as Fig. 3
It is shown, then cause the position of Key insertion central shaft elongated ends to get loose；The compression failure, then Key can be from assigning position direct
Come off, cause the transmission of Pulley to Magnet Motor to be lost, Magnet Motor run out of steam, affect PVD normal
Production.
To avoid because prolonged operating makes the fixed Key of fixed magnet motor belt pulley cause transmission because there is abrasion
Efficiency is reduced, or even occurs to release and drop because of extruding contact failure, fixed spoon Key, causes to pass between magnet motor and belt pulley
The dynamic problem lost, needs the connected mode to belt pulley with magnet motor transmission to redesign, develop a kind of magnet motor with
The attachment structure of pulley drive, it is to avoid occur to cause to fix the reduction of spoon Key transmission efficiencies or because of fixation because of prolonged operating
Spoon Key is released and is dropped and cause transmission to lose, and realizes maintaining Magnet Motor normally at the uniform velocity to rotate, there is provided needed for PVD
Stable Magnet field final purpose.
The content of the invention
The technical problem to be solved is to avoid generation from causing to fix spoon Key and wear and tear to cause because of prolonged operating
Transmission efficiency reduces or occurs causing transmission to lose because fixed spoon Key is released and dropped, and realizes maintaining Magnet Motor normal
At the uniform velocity rotate, there is provided the final purpose of the stable Magnet field needed for PVD.
To solve above-mentioned technical problem, the present invention proposes the attachment structure of a kind of magnet motor and pulley drive, institute
The central shaft for stating magnet motor stretches out to form extension, has one with central shaft in the same direction, outside extension on extension
Week, and the intercalation structure of extension top plan is opened on, belt pulley is ring-type, is closely surrounded in extension top periphery, skin
Belt wheel medial surface has the intercalation structure of insertion belt pulley in extension intercalation structure correspondence position, and a fixed component insertion is described
The complete intercalation structure that extension is combined into belt pulley, three link into an integrated entity, it is characterised in that the central shaft extension,
Belt pulley is connected by jump ring with fixed component, relative position between fixed three；
Optionally, the intercalation for being inserted with fixed component of the magnet motor central shaft extension periphery and belt pulley medial surface
Structure is the groove of the strip for being opened on respective outer surface respectively；
Preferably, the section of the groove is trapezoidal, and surface opening is the trapezoidal minor face；
Preferably, the fixed component of the intercalation is a strip, and section can be tightly inserted into central shaft extension
The fixed spoon combined with the groove of belt pulley；
Preferably, the section of the fixed spoon is hourglass shape：
Optionally, the skin of the fixed component and magnet motor central shaft and belt pulley on central shaft extension top
By jump ring, band wheel surface realizes that relative position is fixed；
Preferably, the jump ring is arranged on surface of the belt pulley near the central shaft extension top of magnet motor；
Preferably, the installation method of the jump ring is that screw is fixed, or welded and installed, can also be embedded in belt pulley
In the specific turn pedestal in surface.
To avoid because prolonged operating causes the fixed Key of magnet motor belt pulley because abrasion occurs transmission efficiency drop
It is low, or even fixed spoon Key occurs release to drop, cause the problem of transmission failure between magnet motor and belt pulley, the present invention to carry
Go out the attachment structure of a kind of magnet motor and belt pulley, change using single fixed screw, by with fixed spoon contacts side surfaces
Mouth realizes the connected mode of fixed magnet motor and belt pulley with the fashion of extrusion for tightening screw, is connected as an alternative with jump ring.
In the pulley surface near magnet motor central shaft extension top, will fixed spoon and central shaft extension card using jump ring
Jail, binds together, and realizes that its relative position is fixed.Fixed screw is substituted with jump ring, the squash type contact for changing single-point is whole
The Multi-contact of turn, not only increases contact area, increases frictional resistance, and can also better ensure that magnet motor center
Axle, belt pulley and as connection bridge fixed spoon between relative position it is constant；Increase which with fixed spoon using jump ring simultaneously
Contact area, also can delay contact surface dilatancy deformation caused by prolonged operating well；Finally, jump ring Multi-contact
Benefit can more be embodied between belt pulley and magnet motor the uniformity and the aspect such as stability for maintaining power transmission.
In prior art, Jing often fix spoon because long time running wear and tear and section is rounded, cause with magnet motor
Heart axle and pulley contact area tail off, and the transmission efficiency for causing is reduced, or even affect the uniform rotation of magnet motor, the present invention
Proposing further prioritization scheme is, central shaft and intercalation on belt pulley are fixed the side of the shape by prior art of spoon groove
Shape, is changed to trapezoidal, the corresponding section for changing fixed spoon, becomes energy hourglass shape intimate contact therewith.Can so increase embedding
The contact area of slotting groove and fixed spoon, it is to avoid cause transmission efficiency reduction or even fixed spoon Key loose because fixed spoon abrasion is rounded
Take off and cause transmission failure, on the other hand, the hourglass shape section of fixed spoon also preferably avoids or delays to be rounded because of abrasion
Process.
To provide stable jump ring connection, prioritization scheme proposed by the present invention is to install over pulleys carried jump ring, adopt
Firm screw is fixed, and is welded and fixed, or is further improved in pulley surface cutting fixed groove, and turn is inlaid in
Avoid getting loose or shifting in fixed pedestal.
In sum, the present invention proposes the attachment structure of a kind of magnet motor and pulley drive, using jump ring by Magnet
Motor center's axle, belt pulley and fixed keycard jail, bind together, realize that its relative position is fixed, it is to avoid occur because of long-time
Operating cause to fix the transmission efficiency that spoon Key abrasions cause and reduce or occur causing transmission because fixed spoon Key is released and dropped
Failure, realizes maintaining Magnet Motor normally at the uniform velocity to rotate, there is provided the final purpose of the stabilizing magnetic field needed for PVD.
Description of the drawings
Fig. 1 is the attachment structure of prior art magnet motor and belt pulley.
Fig. 2 is the photo that prior art fixes contact mouth and partial enlargement on spoon with fixed screw.
Fig. 3 is that prior art fixes spoon in normal position and the contrast photo for falling off.
Fig. 4 is the attachment structure schematic cross-section of the magnet motor with belt pulley of the present invention.
Fig. 5 is that the magnet motor of the present invention is overlooked with the attachment structure of belt pulley and fixed spoon close-up schematic view.
Specific embodiment
To make present disclosure more clear understandable, below in conjunction with Figure of description, present disclosure is made into one
Step explanation.Certainly the specific embodiment, the general replacement known to those skilled in the art be the invention is not limited in
Cover within the scope of the present invention.
Secondly, the present invention carries out detailed statement using schematic diagram, when present example is described in detail, for convenience of description,
Schematic diagram, should not be in this, as limitation of the invention not according to general ratio partial enlargement.
With reference to Figure of description, the invention will be further described.
The attachment structure of magnet motor proposed by the present invention and belt pulley is as shown in Figure 4,5.Fig. 4 is the section of the structure
Schematic diagram, Fig. 5 are the schematic top plan view of the structure.
As shown in figure 4, the central shaft of magnet motor Magnet Mortor-A stretches out to form extension B, on extension
There is one with central shaft in the same direction, positioned at extension periphery, and be opened on the groove on extension top, belt pulley Pulley-D is ring
Shape, closely surrounds in extension top periphery, and Pulley medial surface also has an insertion in the corresponding position of extension groove
The groove on Pulley surfaces, a strip, cross-sectional sizes can be tightly inserted into central shaft extension and belt pulley set into
The complete intercalations of fixed spoon Key-C of groove combination wherein, in the pulley surface on close magnet motor central shaft extension top,
Spoon and central shaft extension card jail will be fixed using jump ring E, bound together, realized that its relative position is fixed.Substituted with jump ring
Fixed screw of the prior art, the squash type contact for changing single-point is the Multi-contact of whole turn, can increase contact area,
Increase frictional resistance, moreover it is possible to better ensure that between magnet motor central shaft, belt pulley and the fixed spoon as connection bridge
Relative position is constant；Its contact area with fixed spoon can be increased using jump ring simultaneously, delay then prolonged fortune well
Contact surface deformable caused by turning；Finally, the benefit of jump ring Multi-contact can more be embodied between belt pulley and magnet motor and maintain
The aspects such as the uniformity and stability of power transmission.
As shown in figure 5, the section of fixed spoon-D is caused and Magnet to avoid being rounded because long time running abrasion occurs section
Motor center's axle and pulley contact area tail off, and the transmission efficiency for causing reduces the uniform rotation for even affecting magnet motor,
It is designed to hourglass shape.In order to be able to combine closely therewith, two intercalation structures on central shaft extension and belt pulley are also designed to
Section is trapezoidal long striped groove.Jump ring E is by central shaft extension B together with belt pulley C and fixed spoon D lock rings.Card
Spring is installed in pulley surface, can be fixed using firm screw, is welded and fixed, or digs fixation in pulley surface
Groove, turn is inlaid in above-mentioned fixed pedestal, further avoids jump ring from getting loose or shift.
The present invention realizes Magnet Motor central shafts, fixed spoon Key and belt pulley Pulley three position using jump ring
Connection and fixation, so as to ensure for power to be sent to Magnet Motor by Pulley, simultaneously because fixed ShiKeyYu centers
The close contact of axle elongated end groove, can avoid transmission efficiency from reducing or occur causing transmission because fixed spoon Key releases to drop
Failure, realizes maintaining Magnet Motor to keep normally at the uniform velocity rotating, produces the final mesh of the stabilizing magnetic field needed for PVD
's.
Foregoing description is only the description to the embodiment of the present invention, not any restriction to the scope of the invention, present invention neck
Any change that the those of ordinary skill in domain is done according to the disclosure above content, modification, belong to the protection domain of claims.
Claims (8)
1. the attachment structure of a kind of magnet motor and pulley drive, the central shaft of the magnet motor stretch out to form extension
Section, has one with central shaft in the same direction on extension, positioned at extension periphery, and be opened on the intercalation knot of extension top plan
Structure, belt pulley are ring-type, are closely surrounded in extension top periphery, and belt pulley medial surface is in extension intercalation structure correspondence position
There is the intercalation structure of insertion belt pulley, a fixed component inserts the complete intercalation structure that the extension is combined into belt pulley,
Three links into an integrated entity, it is characterised in that the central shaft extension, belt pulley are connected by jump ring with fixed component, fixed
Relative position between three.
2. the attachment structure of a kind of magnet motor as claimed in claim 1 and pulley drive, it is characterised in that the Magnet
The intercalation structure for being inserted with fixed component of motor center's axle extension periphery and belt pulley medial surface is to be opened on outside each respectively
The groove of the strip of perimeter surface.
3. the attachment structure of a kind of magnet motor as claimed in claim 2 and pulley drive, it is characterised in that the groove
Section for trapezoidal, surface opening is the trapezoidal minor face.
4. the attachment structure of a kind of magnet motor as claimed in claim 2 and pulley drive, it is characterised in that the intercalation
Fixed component be a strip, section can be tightly inserted into the fixation that central shaft extension is combined with the groove of belt pulley
Spoon.
5. the attachment structure of a kind of magnet motor as claimed in claim 4 and pulley drive, it is characterised in that the fixation
The section of spoon is hourglass shape：
6. the attachment structure of a kind of magnet motor as claimed in claim 1 and pulley drive, it is characterised in that the fixation
Pulley surface of the part with magnet motor central shaft and belt pulley on central shaft extension top realizes phase by jump ring
Position is fixed.
7. the attachment structure of a kind of magnet motor as claimed in claim 6 and pulley drive, it is characterised in that the jump ring
Installed in belt pulley near the central shaft extension top of magnet motor surface.
8. the attachment structure of a kind of magnet motor as claimed in claim 7 and pulley drive, it is characterised in that the jump ring
Installation method be that screw is fixed, or welded and installed, can also be embedded in the specific turn pedestal of pulley surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611035972.XA CN106594094B (en) | 2016-11-09 | 2016-11-09 | A kind of connection structure of magnet motor and pulley drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611035972.XA CN106594094B (en) | 2016-11-09 | 2016-11-09 | A kind of connection structure of magnet motor and pulley drive |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106594094A true CN106594094A (en) | 2017-04-26 |
| CN106594094B CN106594094B (en) | 2019-06-21 |
Family
ID=58591814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611035972.XA Active CN106594094B (en) | 2016-11-09 | 2016-11-09 | A kind of connection structure of magnet motor and pulley drive |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106594094B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114381703A (en) * | 2022-01-27 | 2022-04-22 | 上海华力微电子有限公司 | Fixing mechanism and PVD (physical vapor deposition) machine table with same |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US423701A (en) * | 1890-03-18 | Julius roemmele | ||
| US1326868A (en) * | 1919-05-09 | 1919-12-30 | Gen Electric | Elastic-fluid turbine. |
| US4615639A (en) * | 1984-11-23 | 1986-10-07 | The Falk Corporation | Key and key joint |
| CN2517165Y (en) * | 2001-12-28 | 2002-10-16 | 崔勤川 | Double-rotation electric generator |
| CN201485031U (en) * | 2009-09-16 | 2010-05-26 | 上虞市春晖风冷设备有限公司 | Transmission wheel fixed structure |
| CN202713001U (en) * | 2012-07-22 | 2013-01-30 | 衡阳韵翔电机有限公司 | Sealed permanent-magnet rotor of explosion-proof motor |
-
2016
- 2016-11-09 CN CN201611035972.XA patent/CN106594094B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US423701A (en) * | 1890-03-18 | Julius roemmele | ||
| US1326868A (en) * | 1919-05-09 | 1919-12-30 | Gen Electric | Elastic-fluid turbine. |
| US4615639A (en) * | 1984-11-23 | 1986-10-07 | The Falk Corporation | Key and key joint |
| CN2517165Y (en) * | 2001-12-28 | 2002-10-16 | 崔勤川 | Double-rotation electric generator |
| CN201485031U (en) * | 2009-09-16 | 2010-05-26 | 上虞市春晖风冷设备有限公司 | Transmission wheel fixed structure |
| CN202713001U (en) * | 2012-07-22 | 2013-01-30 | 衡阳韵翔电机有限公司 | Sealed permanent-magnet rotor of explosion-proof motor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114381703A (en) * | 2022-01-27 | 2022-04-22 | 上海华力微电子有限公司 | Fixing mechanism and PVD (physical vapor deposition) machine table with same |
| CN114381703B (en) * | 2022-01-27 | 2024-01-23 | 上海华力微电子有限公司 | PVD machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106594094B (en) | 2019-06-21 |
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