CN106587991B - Low-temperature sintered composite microwave dielectric ceramic material and preparation method thereof - Google Patents
Low-temperature sintered composite microwave dielectric ceramic material and preparation method thereof Download PDFInfo
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- 229910010293 ceramic material Inorganic materials 0.000 title claims abstract description 17
- 239000002131 composite material Substances 0.000 title claims abstract description 13
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 238000005245 sintering Methods 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 7
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 7
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 7
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 claims abstract description 7
- 229910052808 lithium carbonate Inorganic materials 0.000 claims abstract description 7
- 239000011656 manganese carbonate Substances 0.000 claims abstract description 7
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 claims abstract description 7
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 7
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 7
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 7
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract description 7
- 238000002156 mixing Methods 0.000 claims description 13
- 239000002994 raw material Substances 0.000 claims description 9
- 239000000843 powder Substances 0.000 claims description 8
- 238000001238 wet grinding Methods 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 7
- 238000002485 combustion reaction Methods 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- 238000007873 sieving Methods 0.000 claims description 5
- 238000005266 casting Methods 0.000 claims description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims description 3
- 238000000748 compression moulding Methods 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 238000009766 low-temperature sintering Methods 0.000 claims description 3
- 229910001385 heavy metal Inorganic materials 0.000 claims description 2
- 239000004615 ingredient Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 16
- 239000000919 ceramic Substances 0.000 abstract description 11
- 229910052709 silver Inorganic materials 0.000 abstract description 6
- 239000004332 silver Substances 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000004891 communication Methods 0.000 abstract description 3
- 239000011162 core material Substances 0.000 abstract description 2
- 238000009776 industrial production Methods 0.000 abstract description 2
- 239000012071 phase Substances 0.000 description 9
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention belongs to the field of electronic ceramics and manufacture thereof, and particularly relates to a low-temperature sintered composite microwave dielectric ceramic material and a preparation method thereof. Of the materials of the inventionThe base material is BaTi5O11nCuO-xM, n is more than or equal to 0.005 and less than or equal to 0.020 weight ratio, M is a burning reducing agent, and x is more than or equal to 0.010 and less than or equal to 0.075 weight ratio. M is specifically: ba of 27.25% or more2CO3≤46.74%、4.25%≤Li2CO3≤7.47%、8.65%≤SiO2≤9.19%、25.59%≤B2O3≤38.29%、20.88%≤ZnO≤32.95%、1.58%≤Al2O3≤9.83%、0.29%≤MnCO3Less than or equal to 0.95 percent. The material provided by the invention has the advantages of compact system, dielectric constant (30-40) and loss (less than or equal to 10) at the sintering temperature (875-920 ℃), and‑4) And Qxf (GHz) 20000 to 30000, can be co-fired with silver well in LTCC process, and is easy for industrial production. The low-temperature high-dielectric-constant microwave dielectric core material can be widely applied to microwave devices such as dielectric resonators, filters, oscillators and the like in satellite communication, and has important industrial application value.
Description
Technical Field
The invention belongs to the field of electronic ceramics and manufacture thereof, and relates to a composite microwave dielectric ceramic material, in particular to a low-temperature sintered composite microwave dielectric ceramic material and a preparation method thereof.
Background
The microwave dielectric ceramic is used as a dielectric material and can perform one or more functions in a microwave (300MHz to 300GHz) frequency band circuit, is a key basic material in modern communication technology, and is widely applied to microwave components such as dielectric resonators, filters, dielectric substrates, dielectric waveguide loops, microwave capacitors, duplexers, antennas and the like.
The dielectric ceramic applied to the microwave frequency band meets the following requirements: (1) appropriate dielectric constant to facilitate miniaturization of the device (size of dielectric component and dielectric constant epsilon)rIs inversely proportional to the square root of); (2) a high quality factor Q is required to reduce loss, and Q x f is generally equal to or greater than 3000GHz (where f is the resonant frequency). (ii) a (3) A stable frequency temperature coefficient close to zero to ensure the temperature stability of the device; (4) has good cofiring property with silver or copper. In recent years, the development of electronic information technology is moving to high frequency and digitalizationThe demand for miniaturization, integration and modularization of components is also more and more urgent. Low Temperature cofired ceramic LTCC (Low Temperature Co-fired Ceramics) has become one of the main technologies for electronic device modularization due to its excellent electrical, mechanical, thermal and process characteristics. Researchers at home and abroad in recent years have conducted extensive research and study on some low-burning system materials. Ceramic BaO-TiO in microwave medium2In the system, BaTi5O11Has good microwave dielectric property, but has high sintering temperature (more than 1100 ℃), can not be directly co-sintered with low-melting-point metals such as Ag, Cu and the like, thereby greatly limiting the application of the low-melting-point metals in the field of LTCC. Therefore, how to reduce the sintering temperature of the microwave dielectric material becomes a research focus, and currently, generally adopted methods for reducing the sintering temperature of the microwave dielectric material include: (1) the preparation process is improved, such as the preparation by adopting a chemical synthesis method, the sintering temperature is reduced, but the method has complex process and increased manufacturing period; (2) the superfine powder is used as a raw material, so that the activity of the powder is improved, and the sintering temperature of the ceramic is reduced, but the method has high cost; (3) the low-melting-point oxide or the low-melting-point glass sintering aid is added, and the low-melting-point oxide or the low-melting-point glass sintering aid forms a liquid phase in the sintering process, so that the cooling effect is obvious, the process is simple, and the batch production is easy. Therefore, in order to reduce the manufacturing cost, the third method is mostly adopted to reduce the sintering temperature of the microwave dielectric material.
For BaO-TiO2The microwave dielectric ceramic system is generally prepared by adding low-melting point oxide, such as B2O3And V2O5Can reduce BaO-TiO2The sintering temperature of the system. But added low-melting oxides, B2O3And V2O5In the later casting process, the slurry is easy to cause overlarge viscosity and instability, and is not matched with an industrial casting process, so that the practical application of the slurry is limited. And low-temperature sintering affects BaO-TiO2The compactness of the microwave dielectric ceramic system can cause silver infiltration in the LTCC process, and the ceramic cannot be co-fired with silver well. The other method is to mix low-melting glass, but the existence of the glass phase greatly improves the dielectric loss of the material, and the glass has unstable performance and higher cost in the smelting process,greatly limit BaO-TiO2In view of the above, the development of system materials and microwave multilayer devices has enabled industrial application of how to prepare a stable, low temperature sinterable, dense composite microwave dielectric ceramic material. [1]H.f.Zhou,X.b.Liu,H.Wang,L.Fang,X.l.Chen,Phase stability,lowtemperature cofiring and microwave dielectric properties of BaTi5O11ceramicswith BaCu(B2O5) addition, J Mater Sci Mater Electron (2013)24: 299-304 discloses a BaTi5O11After the sintering temperature is reduced from 1100 ℃ to 925 ℃ after the sintering reducing agent is added into the microwave ceramic material, the microwave dielectric property is obtained: epsilonr=37.4,Qxf=25502GHz。
The above document reduces BaTi5O11The sintering temperature of 925 ℃ is still relatively high in the application of LTCC, which limits the application of LTCC.
Disclosure of Invention
Aiming at the problems or the defects, the invention provides a low-temperature sintered composite microwave dielectric ceramic material and a preparation method thereof; the sintering temperature (875 ℃ -920 ℃) of the material is compact, the material has medium dielectric constant (30-40) and low loss (less than or equal to 10)-4) And Qxf (GHz) 20000 to 30000, can be co-fired with silver well in LTCC process, and is easy for industrial production.
The chemical composition of the low-temperature sintered composite microwave dielectric ceramic material is as follows: BaTi5O11nCuO-xM, n is more than or equal to 0.005 and less than or equal to 0.020 weight ratio, M is a burning reducing agent, and x is more than or equal to 0.010 and less than or equal to 0.075 weight ratio.
The weight percentage of the raw materials of the combustion reducing agent M is as follows: BaCO not less than 27.25%3≤46.74%、4.25%≤Li2CO3≤7.47%、8.65%≤SiO2≤9.19%、25.59%≤B2O3≤38.29%、20.88%≤ZnO≤32.95%、1.58%≤Al2O3≤9.83%、0.29%≤MnCO3≤0.95%。
The preparation method of the low-temperature sintered composite microwave dielectric ceramic material comprises the following steps:
step 1, mixing BaCO3、CuO、TiO2According to BaTi5O11-nCuO, wherein n is more than or equal to 0.005 and less than or equal to 0.020 in weight ratio, then wet-grinding and mixing for 3-5 hours by taking deionized water as a medium, drying at 80-120 ℃ after taking out, sieving by using a 40-100 mesh sieve, and then presintering for 5-8 hours in an atmosphere at 800-1200 ℃ to synthesize a main crystal phase BaTi5O11Phase, i.e. the base.
Step 2, the raw materials are as follows by mass percent: BaCO not less than 27.25%3≤46.74%、4.25%≤Li2CO3≤7.47%、8.65%≤SiO2≤9.19%、25.59%≤B2O3≤38.29%、20.88%≤ZnO≤32.95%、1.58%≤Al2O3≤9.83%、0.29%≤MnCO3Batching less than or equal to 0.95 percent, wet-milling and mixing for 3-7 hours by taking deionized water as a medium, sieving by using a 40-100 mesh sieve after drying, pre-burning for 2-8 hours at 500-800 ℃, and preparing the combustion reducing agent M powder for later use.
And 3, adding the sintering agent powder which is prepared in the step 2 and accounts for 1-7.5 percent of the total mass percent into the base material prepared in the step 1, uniformly mixing, wet-grinding and mixing for 3-5 hours by taking alcohol as a medium, taking out, drying at 80-120 ℃, granulating by taking an acrylic acid solution which accounts for 2-5 percent of the total mass of the raw materials as a binder, performing compression molding, and sintering for 1-3 hours in an atmosphere of 875-920 ℃ to prepare the microwave medium ceramic material.
In summary, compared with the prior art, the invention has the beneficial effects that:
1. the formula of the invention does not contain heavy metal components, can be applied to products in the high-frequency field, is green, environment-friendly and pollution-free, and meets the strict standard requirements of the latest RHOS and WEEE in the European Union.
2. The sintering temperature is 875-920 ℃, the further reduction is realized, and the energy saving advantage is achieved.
3. The sintering aid uses the composite eutectic point oxide and the additive, and improves the low-melting point oxide (B) which can not be matched with the casting process in the traditional sintering aid2O3And V2O5) And/or high cost and unstable performance.
4. The dielectric constant of the material is adjustable from 30 to 40, and the loss is low (less than or equal to 10)-4),Qxf(GHz)20000~30000。
5. The invention can be widely applied to low-temperature high-dielectric constant microwave dielectric core materials in microwave devices such as dielectric resonators, filters, oscillators and the like in satellite communication, and has important industrial application value.
Drawings
Figure 1 is the XRD pattern of the examples.
Detailed Description
The invention is described in further detail below with reference to the figures and the specific embodiments.
The material of the invention is prepared from 92.5-97.5 percent of BaTi by mass percent5O11Base material and 1-7.5 wt% of combustion reducing agent, BaTi5O11The base material consists of BaTi5O11-nCuO, wherein: n is more than or equal to 0.005 and less than or equal to 0.020 by weight, and the composition of the combustion reducing agent is more than or equal to 27.25 percent of BaCO3≤46.74%、4.25%≤Li2CO3≤7.47%、8.65%≤SiO2≤9.19%、25.59%≤B2O3≤38.29%、20.88%≤ZnO≤32.95%、1.58%≤Al2O3≤9.83%、0.29%≤MnCO3≤0.95%。
Table 1 shows data of several specific examples of the contents of the respective components constituting the present invention, and Table 2 shows the microwave dielectric properties of the respective examples.
The preparation method comprises the following steps:
step 1, mixing BaCO3、CuO、TiO2According to BaTi5O11-nCuO, wherein: n is more than or equal to 0.005 and less than or equal to 0.020 by weight ratio, deionized water is used as a medium for wet grinding and mixing for 4 hours, the mixture is taken out and dried at 100 ℃, a 60-mesh screen is used for sieving, and then the mixture is presintered in the atmosphere of 900 ℃ for 6 hours to synthesize the main crystal phase BaTi5O11Phase, i.e. the base;
step 2, the raw materials are as follows by mass percent: BaCO not less than 27.25%3≤46.74%、4.25%≤Li2CO3≤7.47%、8.65%≤SiO2≤9.19%、25.59%≤B2O3≤38.29%、20.88%≤ZnO≤32.95%、1.58%≤Al2O3≤9.83%、0.29%≤MnCO3Batching at less than or equal to 0.95 percent, wet-milling and mixing for 6 hours by taking deionized water as a medium, drying, sieving by a 60-mesh sieve, pre-burning for 4 hours at 600 ℃, and preparing into sintering agent powder for later use;
and step 3: adding the sintering agent powder which is prepared in the step 2 and accounts for 1-7.5 percent of the total mass into the base material prepared in the step 1, uniformly mixing, wet-grinding and mixing for 4 hours by taking alcohol as a medium, drying at 80 ℃, granulating by taking an acrylic acid solution which accounts for 5 percent of the total mass of the raw materials as a binder, performing compression molding, and finally sintering for 1 hour in the atmosphere of 875-920 ℃ to prepare the microwave medium ceramic material.
The microwave dielectric property is evaluated by a cylindrical dielectric resonator method, and the detection method is GB/T7265.2-1987 open cavity method.
TABLE 1
TABLE 2
As can be seen from the table above, the addition of the sintering reducing agent provided by the invention enables the system to be sintered and compact at low temperature, and medium dielectric constant (30-40) and excellent microwave dielectric property to be obtained. It can be seen from the XRD diffraction patterns (FIG. 1) of examples 4 and 8 that the system can obtain pure BaTi during low-temperature sintering5O11Crystalline phase, no hetero-phase is generated. The sintering reducing agent is stated to be effective in promoting sintering without introducing a heterogeneous phase.
Claims (2)
1. A low-temperature sintered composite microwave dielectric ceramic material is characterized in that:
the raw material composition is BaTi5O11-nCuO-xM,0.0125N is more than or equal to 0.020 weight ratio, M is a combustion reducing agent, x is more than or equal to 0.010 and less than or equal to 0.075 weight ratio;
the combustion reducing agent comprises the following components in percentage by weight: BaCO not less than 27.25%3≤46.74%、4.25%≤Li2CO3≤7.47%、8.65%≤SiO2≤9.19%、25.59%≤B2O3≤38.29%、20.88%≤ZnO≤32.95%、1.58%≤Al2O3≤9.83%、0.29%≤MnCO3Less than or equal to 0.95 percent, and the sum of the percentages of the components meets 100 percent;
the sintering temperature of the ceramic material is 875-920 ℃, and the dielectric constant is not less than 30 epsilonrNot more than 40, Qxf (GHz) 20000 to 30000, and frequency temperature coefficient tauf30-40 ppm/DEG C, loss less than or equal to 10-4;
The low-temperature sintering composite microwave dielectric ceramic material does not contain heavy metal components, can be applied to products in the high-frequency field, is matched with a subsequent casting process, and has stable performance.
2. The preparation method of the low-temperature sintered composite microwave dielectric ceramic material as claimed in claim 1, comprising the following steps:
step 1, according to BaTi5O11-nCuO ingredient, n is more than or equal to 0.0125 and less than or equal to 0.020 in weight ratio, then the raw materials are wet-milled and mixed for 3 to 5 hours by taking deionized water as a medium, the mixture is taken out and dried at 80 to 120 ℃, sieved by a 40 to 100-mesh screen, and then presintered for 5 to 8 hours in the atmosphere at 800 to 1200 ℃ to synthesize a main crystal phase BaTi5O11Phase, i.e. the base;
step 2, according to mass percent: BaCO not less than 27.25%3≤46.74%、4.25%≤Li2CO3≤7.47%、8.65%≤SiO2≤9.19%、25.59%≤B2O3≤38.29%、20.88%≤ZnO≤32.95%、1.58%≤Al2O3≤9.83%、0.29%≤MnCO3Batching less than or equal to 0.95 percent, wet-milling and mixing for 3-7 hours by taking deionized water as a medium, sieving by using a 40-100 mesh sieve after drying, pre-burning for 2-8 hours at 500-800 ℃, and preparing into sintering agent reducing powder for later use;
and 3, adding the sintering agent powder which is prepared in the step 2 and accounts for 1-7.5 percent of the total mass percent into the base material prepared in the step 1, uniformly mixing, wet-grinding and mixing for 3-5 hours by taking alcohol as a medium, taking out, drying at 80-120 ℃, granulating by taking an acrylic acid solution which accounts for 2-5 percent of the total mass of the raw materials as a binder, performing compression molding, and sintering for 1-3 hours in an atmosphere of 875-920 ℃ to prepare the microwave medium ceramic material.
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