CN106587969A - Low-dielectric-constant insulation composite ceramic material and preparation method thereof - Google Patents
Low-dielectric-constant insulation composite ceramic material and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a low-dielectric-constant insulation composite ceramic material and a preparation method thereof. The low-dielectric-constant insulation composite ceramic material is prepared from the following raw materials in parts by weight: 4 to 9 parts of magnesium oxide, 2 to 7 parts of aluminum oxide, 1 to 6 parts of calcium dioxide, 2 to 4 parts of zirconium dioxide, 2 to 4 parts of barium titanate, 4 to 8 parts of magnesium diboride, 1 to 4 parts of titanium nitride, 2 to 4 parts of aluminum nitride, 1 to 3 parts of boron nitride, 5 to 10 parts of magnesium silicate, 3 to 9 parts of carbon powder, 1 to 5 parts of fly ash, 3 to 6 parts of tetrahydrofuran, 1 to 3 parts of methylphenyldichlorosilane, 1 to 4 parts of n-hexane, 1 to 4 parts of dispersing agents, 2 to 5 parts of stabilizing agents and 1 to 2 parts of coupling agents. The prepared low-dielectric-constant insulation composite ceramic material has the advantages of stable performance, low dielectric constant, good insulation performance and strong pressure resistance. Meanwhile, the invention also discloses the preparation method of the low-dielectric-constant insulation composite ceramic material.
Description
Technical field
The present invention relates to ceramic material field, is related specifically to a kind of low dielectric constant insulation composite ceramic material and its system
Preparation Method.
Background technology
Structural ceramicss are used for manufacturing structural elements as structural material, such as plus intensity, tough mainly using its mechanical property
Property, hardness, modulus, wearability, resistance to elevated temperatures (elevated temperature strength, thermal shock resistance, ablation resistance) etc..Function ceramics is used as function
Material is used for manufacturing functional device, mainly using its physical property team such as electromagnetic performance, hot property, optical property, biological property etc..Example
As ferrite, ferroelectric ceramics are mainly used for manufacturing electromagnetic component using its electromagnetic performance.Dielectric ceramic is used for manufacturing capacitor, presses
Electroceramics is used for making displacement or pressure transducer.Solid electrolyte ceramic passes body characteristic and can make oxygen detection using its ion
Device. bioceramic is used for manufacture of intraocular skeleton and artificial tooth etc..Superconductor and optical fiberss fall within the model of function ceramics
Farmland.The new ceramics such as carborundum may further be used to manufacture the blade of electromotor, cutting tool, mechanical sealing member, bearing, rocket spray
Mouth, stove pipeline etc., with purposes widely.This invention address that the insulating ceramic materials of research and development low-k,
When retaining the hard firm property of ceramic material, the dielectric constant of material is reduced, increase its insulating properties so as to superior
Electrical properties, widen the scope of its application.
The content of the invention
To solve above-mentioned technical problem, the present invention provides a kind of low dielectric constant insulation composite ceramic material and its preparation side
Method, by being combined using specified raw material, coordinates corresponding production technology, the low dielectric constant insulation composite ceramicses material for obtaining
Material, its stable performance, dielectric constant the, good insulation preformance, compressive resistance is strong, disclosure satisfy that the requirement of industry, with preferably should
Use prospect.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of low dielectric constant insulation composite ceramic material, is prepared by the raw materials in:Magnesium oxide 4-9 parts, aluminium oxide
2-7 parts, calcium dioxide 1-6 parts, zirconium dioxide 2-4 parts, Barium metatitanate. 2-4 parts, magnesium diboride 4-8 parts, titanium nitride 1-4 parts, nitridation
Aluminum 2-4 parts, boron nitride 1-3 parts, magnesium silicate 5-10 parts, carbon dust 3-9 parts, flyash 1-5 parts, tetrahydrofuran 3-6 parts, benzyl two
Chlorosilane 1-3 parts, normal hexane 1-4 parts, dispersant 1-4 parts, stabilizer 2-5 parts, coupling agent 1-2 parts.
Preferably, the dispersant is one or more in sodium pyrophosphate, sodium orthophosphate, sodium tartrate, sodium silicate.
Preferably, the stabilizer is any in chlorine sodium silicate complex, lithium stearate, calcium benzoate, moon calcium silicates
It is a kind of.
Preferably, the coupling agent is selected from aminobenzyl phosphate, isopropyl bishexadecyl borate, vinyl triethoxyl silicon
Any one or a few in alkane, γ-glycidoxypropyltrimethoxysilane alkane.
The preparation method of described low dielectric constant insulation composite ceramic material, comprises the following steps:
(1)Each raw material is weighed according to weight portion;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 360-420 DEG C, the time
For 30 minutes, then Temperature fall was cooled to room temperature, stood 30 minutes;
(3)By magnesium oxide, aluminium oxide, calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, nitridation
Boron, step(2)Mixture add ball mill, in ball mill ratio of grinding media to material be 20:1, Ball-milling Time is 3-5 hours, ball mill
Rotating speed is 100-200 rev/min;
(4)By step(3)Ball milling powder mince, tetrahydrofuran, benzyl dichlorosilane, normal hexane, dispersant add together height
In speed pressurization homogenizer, 3000-5000 rev/min of rotating speed, pressure is 1-2MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture;
(6)By step(5)The mixture that sieves, stabilizer, coupling agent injection mould in, carry out in high-temperature calcination stove plus be pressed into
Type, calcining heat rises to 760-820 DEG C with 6-8 DEG C/minute of programming rate, and 60 points are then incubated when temperature is 760-820 DEG C
Clock, pressing speed is 0.05-0.1MPa/ point, and briquetting pressure is 2-5MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse maintenance 2-4 hours, i.e.,
Obtain finished product.
Preferably, the mesh size is 200-300 mesh.
Preferably, the couveuse temperature is 65-75 DEG C.
Compared with prior art, its advantage is the present invention:
(1)The present invention low dielectric constant insulation composite ceramic material, with magnesium silicate, carbon dust, flyash, magnesium oxide, aluminium oxide,
Calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, boron nitride are main component, by adding tetrahydrochysene
Furan, benzyl dichlorosilane, normal hexane, dispersant, stabilizer, coupling agent, be aided with heat treated, ball mill pulverizing, pressurize it is even
The techniques such as matter, sorting of sieving, high-temperature calcination, mould from dewaxing, maintenance molding so that the low dielectric constant insulation being prepared from is combined
Ceramic material, its stable performance, dielectric constant the, good insulation preformance, compressive resistance is strong, disclosure satisfy that the requirement of industry, with compared with
Good application prospect.
(2)The low dielectric constant insulation composite ceramic material raw material of the present invention is cheap, process is simple, is suitable to large-scale industry
Change and use, it is practical.
Specific embodiment
The technical scheme invented is described in detail with reference to specific embodiment.
Embodiment 1
(1)According to weight portion weigh 4 parts of magnesium oxide, 2 parts of aluminium oxide, 1 part of calcium dioxide, 2 parts of zirconium dioxide, 2 parts of Barium metatitanate., two
4 parts of boronation magnesium, 1 part of titanium nitride, 2 parts of aluminium nitride, 1 part of boron nitride, 5 parts of magnesium silicate, 3 parts of carbon dust, 1 part of flyash, tetrahydrofuran 3
Part, 1 part of benzyl dichlorosilane, 1 part of normal hexane, 1 part of sodium pyrophosphate, 2 parts of chlorine sodium silicate complex, 1 part of aminobenzyl phosphate;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 360 DEG C, and the time is 30
Minute, then Temperature fall is cooled to room temperature, stands 30 minutes;
(3)By magnesium oxide, aluminium oxide, calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, nitridation
Boron, step(2)Mixture add ball mill, in ball mill ratio of grinding media to material be 20:1, Ball-milling Time be 3 hours, ball mill turn
Speed is 100 revs/min;
(4)By step(3)Ball milling powder mince, tetrahydrofuran, benzyl dichlorosilane, normal hexane, sodium pyrophosphate are added together
At a high speed in pressurization homogenizer, 3000 revs/min of rotating speed, pressure is 1MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture, and mesh size is 200 mesh;
(6)By step(5)The mixture that sieves, chlorine sodium silicate complex, aminobenzyl phosphate injection mould in, in high-temperature calcination stove
In carry out extrusion forming, calcining heat rises to 760 DEG C with 6 DEG C/minute of programming rate, then temperature be 760 DEG C when be incubated 60
Minute, pressing speed is 0.05MPa/ point, and briquetting pressure is 2MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse conserve 2 hours, obtain final product
Finished product, couveuse temperature is 65 DEG C.
The performance test results of obtained low dielectric constant insulation composite ceramic material are as shown in table 1.
Embodiment 2
(1)According to weight portion weigh 5 parts of magnesium oxide, 3 parts of aluminium oxide, 2 parts of calcium dioxide, 2 parts of zirconium dioxide, 3 parts of Barium metatitanate., two
5 parts of boronation magnesium, 2 parts of titanium nitride, 2 parts of aluminium nitride, 2 parts of boron nitride, 7 parts of magnesium silicate, 5 parts of carbon dust, 2 parts of flyash, tetrahydrofuran 4
Part, 2 parts of benzyl dichlorosilane, 2 parts of normal hexane, 2 parts of sodium orthophosphate, 3 parts of lithium stearate, isopropyl bishexadecyl borate 1
Part;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 380 DEG C, and the time is 30
Minute, then Temperature fall is cooled to room temperature, stands 30 minutes;
(3)By magnesium oxide, aluminium oxide, calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, nitridation
Boron, step(2)Mixture add ball mill, in ball mill ratio of grinding media to material be 20:1, Ball-milling Time be 4 hours, ball mill turn
Speed is 120 revs/min;
(4)By step(3)Ball milling powder mince, tetrahydrofuran, benzyl dichlorosilane, normal hexane, sodium orthophosphate are added together
At a high speed in pressurization homogenizer, 4000 revs/min of rotating speed, pressure is 1.3MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture, and mesh size is 220 mesh;
(6)By step(5)The mixture that sieves, lithium stearate, isopropyl bishexadecyl borate injection mould in, forge in high temperature
Burning in stove carries out extrusion forming, and calcining heat rises to 780 DEG C with 6 DEG C/minute of programming rate, then protects when temperature is 780 DEG C
Temperature 60 minutes, pressing speed is 0.07MPa/ point, and briquetting pressure is 3MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse conserve 3 hours, obtain final product
Finished product, couveuse temperature is 67 DEG C.
The performance test results of obtained low dielectric constant insulation composite ceramic material are as shown in table 1.
Embodiment 3
(1)According to weight portion weigh 8 parts of magnesium oxide, 6 parts of aluminium oxide, 5 parts of calcium dioxide, 3 parts of zirconium dioxide, 3 parts of Barium metatitanate., two
7 parts of boronation magnesium, 3 parts of titanium nitride, 4 parts of aluminium nitride, 3 parts of boron nitride, 9 parts of magnesium silicate, 8 parts of carbon dust, 4 parts of flyash, tetrahydrofuran 5
Part, 3 parts of benzyl dichlorosilane, 3 parts of normal hexane, 3 parts of sodium tartrate, 4 parts of calcium benzoate, 2 parts of VTES;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 400 DEG C, and the time is 30
Minute, then Temperature fall is cooled to room temperature, stands 30 minutes;
(3)By magnesium oxide, aluminium oxide, calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, nitridation
Boron, step(2)Mixture add ball mill, in ball mill ratio of grinding media to material be 20:1, Ball-milling Time is 4.5 hours, ball mill
Rotating speed is 170 revs/min;
(4)By step(3)Ball milling powder mince, tetrahydrofuran, benzyl dichlorosilane, normal hexane, sodium tartrate are added together
At a high speed in pressurization homogenizer, 4500 revs/min of rotating speed, pressure is 1.7MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture, and mesh size is 250 mesh;
(6)By step(5)The mixture that sieves, calcium benzoate, VTES injection mould in, in high-temperature calcination
Extrusion forming is carried out in stove, calcining heat rises to 800 DEG C with 7 DEG C/minute of programming rate, be then incubated when temperature is 800 DEG C
60 minutes, pressing speed was 0.09MPa/ point, and briquetting pressure is 4MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse conserve 3.5 hours, i.e.,
Finished product is obtained, couveuse temperature is 72 DEG C.
The performance test results of obtained low dielectric constant insulation composite ceramic material are as shown in table 1.
Embodiment 4
(1)According to weight portion weigh 9 parts of magnesium oxide, 7 parts of aluminium oxide, 6 parts of calcium dioxide, 4 parts of zirconium dioxide, 4 parts of Barium metatitanate., two
8 parts of boronation magnesium, 4 parts of titanium nitride, 4 parts of aluminium nitride, 3 parts of boron nitride, 10 parts of magnesium silicate, 9 parts of carbon dust, 5 parts of flyash, tetrahydrofuran
6 parts, 3 parts of benzyl dichlorosilane, 4 parts of normal hexane, 5 parts of 4 part, month calcium silicates of sodium silicate, γ-glycidyl ether propyl group front three
2 parts of TMOS;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 420 DEG C, and the time is 30
Minute, then Temperature fall is cooled to room temperature, stands 30 minutes;
(3)By magnesium oxide, aluminium oxide, calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, nitridation
Boron, step(2)Mixture add ball mill, in ball mill ratio of grinding media to material be 20:1, Ball-milling Time be 5 hours, ball mill turn
Speed is 200 revs/min;
(4)By step(3)Ball milling powder mince, tetrahydrofuran, benzyl dichlorosilane, normal hexane, sodium silicate add together height
In speed pressurization homogenizer, 5000 revs/min of rotating speed, pressure is 2MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture, and mesh size is 300 mesh;
(6)By step(5)The mixture that sieves, moon calcium silicates, γ-glycidoxypropyltrimethoxysilane alkane injection mould
In, extrusion forming is carried out in high-temperature calcination stove, calcining heat rises to 820 DEG C with 8 DEG C/minute of programming rate, then in temperature
For 820 DEG C when be incubated 60 minutes, pressing speed is 0.1MPa/ point, and briquetting pressure is 5MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse conserve 4 hours, obtain final product
Finished product, couveuse temperature is 75 DEG C.
The performance test results of obtained low dielectric constant insulation composite ceramic material are as shown in table 1.
Comparative example 1
(1)According to weight portion weigh 4 parts of magnesium oxide, 1 part of calcium dioxide, 2 parts of zirconium dioxide, 2 parts of Barium metatitanate., 4 parts of magnesium diboride,
1 part of titanium nitride, 2 parts of aluminium nitride, 1 part of boron nitride, 5 parts of magnesium silicate, 3 parts of carbon dust, 1 part of flyash, 1 part of benzyl dichlorosilane,
1 part of normal hexane, 1 part of sodium pyrophosphate, 2 parts of chlorine sodium silicate complex, 1 part of aminobenzyl phosphate;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 360 DEG C, and the time is 30
Minute, then Temperature fall is cooled to room temperature, stands 30 minutes;
(3)By magnesium oxide, calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, boron nitride, step
(2)Mixture add ball mill, in ball mill ratio of grinding media to material be 20:1, Ball-milling Time is 3 hours, and the rotating speed of ball mill is 100
Rev/min;
(4)By step(3)Ball milling powder mince, benzyl dichlorosilane, normal hexane, sodium pyrophosphate add together pressurize at a high speed it is even
In matter machine, 3000 revs/min of rotating speed, pressure is 1MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture, and mesh size is 200 mesh;
(6)By step(5)The mixture that sieves, chlorine sodium silicate complex, aminobenzyl phosphate injection mould in, in high-temperature calcination stove
In carry out extrusion forming, calcining heat rises to 760 DEG C with 6 DEG C/minute of programming rate, then temperature be 760 DEG C when be incubated 60
Minute, pressing speed is 0.05MPa/ point, and briquetting pressure is 2MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse conserve 2 hours, obtain final product
Finished product, couveuse temperature is 65 DEG C.
The performance test results of obtained low dielectric constant insulation composite ceramic material are as shown in table 1.
Comparative example 2
(1)9 parts of magnesium oxide, 7 parts of aluminium oxide, 6 parts of calcium dioxide, 4 parts of zirconium dioxide, 4 parts of titanium nitride, nitrogen are weighed according to weight portion
Change 4 parts of aluminum, 3 parts of boron nitride, 10 parts of magnesium silicate, 9 parts of carbon dust, 5 parts of flyash, 6 parts of tetrahydrofuran, 3 parts of benzyl dichlorosilane,
4 parts of normal hexane, 5 parts of 4 part, month calcium silicates of sodium silicate, γ -2 parts of glycidoxypropyltrimethoxysilane alkane;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 420 DEG C, and the time is 30
Minute, then Temperature fall is cooled to room temperature, stands 30 minutes;
(3)By magnesium oxide, aluminium oxide, calcium dioxide, zirconium dioxide, titanium nitride, aluminium nitride, boron nitride, step(2)Mixture
Ball mill is added, ratio of grinding media to material is 20 in ball mill:1, Ball-milling Time is 5 hours, and the rotating speed of ball mill is 200 revs/min;
(4)By step(3)Ball milling powder mince, tetrahydrofuran, benzyl dichlorosilane, normal hexane, sodium silicate add together height
In speed pressurization homogenizer, 5000 revs/min of rotating speed, pressure is 2MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture, and mesh size is 300 mesh;
(6)By step(5)The mixture that sieves, moon calcium silicates, γ-glycidoxypropyltrimethoxysilane alkane injection mould
In, extrusion forming is carried out in high-temperature calcination stove, calcining heat rises to 820 DEG C with 8 DEG C/minute of programming rate, then in temperature
For 820 DEG C when be incubated 60 minutes, pressing speed is 0.1MPa/ point, and briquetting pressure is 5MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse conserve 4 hours, obtain final product
Finished product, couveuse temperature is 75 DEG C.
The performance test results of obtained low dielectric constant insulation composite ceramic material are as shown in table 1.
By the obtained low dielectric constant insulation composite ceramic material of embodiment 1-4 and comparative example 1-2 carry out dielectric constant,
Skin-friction coefficient, fracture toughness, this several performance tests of density.
Table 1
Dielectric constant, ε r | Skin-friction coefficient | Fracture toughness, Mpa.m0.5 | Density, g/cm2 | |
Embodiment 1 | 19.3 | 0.46 | 4.42 | 2.63 |
Embodiment 2 | 19.4 | 0.49 | 4.22 | 2.71 |
Embodiment 3 | 18.8 | 0.47 | 3.91 | 2.59 |
Embodiment 4 | 18.4 | 0.51 | 4.01 | 2.65 |
Comparative example 1 | 22.5 | 1.21 | 2.16 | 1.79 |
Comparative example 2 | 21.7 | 1.34 | 2.57 | 1.92 |
The present invention low dielectric constant insulation composite ceramic material, with magnesium silicate, carbon dust, flyash, magnesium oxide, aluminium oxide, two
Calcium oxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, boron nitride are main component, by adding tetrahydrochysene furan
Mutter, benzyl dichlorosilane, normal hexane, dispersant, stabilizer, coupling agent, be aided with heat treated, ball mill pulverizing, pressurize it is homogeneous,
Sieve sorting, high-temperature calcination, mould from dewaxing, the maintenance technique such as molding so that the low dielectric constant insulation composite ceramic being prepared from
Ceramic material, its stable performance, dielectric constant the, good insulation preformance, compressive resistance is strong, the requirement of industry is disclosure satisfy that, with preferable
Application prospect.The low dielectric constant insulation composite ceramic material raw material of the present invention is cheap, process is simple, is suitable to large-scale industry
Change and use, it is practical.
Embodiments of the invention are the foregoing is only, the scope of the claims of the present invention is not thereby limited, it is every using this
Equivalent structure or equivalent flow conversion that bright description is made, or directly or indirectly it is used in other related technology necks
Domain, is included within the scope of the present invention.
Claims (7)
1. a kind of low dielectric constant insulation composite ceramic material, it is characterised in that:It is prepared by the raw materials in:Magnesium oxide
4-9 parts, aluminium oxide 2-7 parts, calcium dioxide 1-6 parts, zirconium dioxide 2-4 parts, Barium metatitanate. 2-4 parts, magnesium diboride 4-8 parts, nitridation
Titanium 1-4 parts, aluminium nitride 2-4 parts, boron nitride 1-3 parts, magnesium silicate 5-10 parts, carbon dust 3-9 parts, flyash 1-5 parts, tetrahydrofuran 3-
6 parts, benzyl dichlorosilane 1-3 parts, normal hexane 1-4 parts, dispersant 1-4 parts, stabilizer 2-5 parts, coupling agent 1-2 parts.
2. low dielectric constant insulation composite ceramic material according to claim 1, it is characterised in that:The dispersant is Jiao
One or more in sodium phosphate, sodium orthophosphate, sodium tartrate, sodium silicate.
3. low dielectric constant insulation composite ceramic material according to claim 1, it is characterised in that:The stabilizer is chlorine
Any one in sodium silicate complex, lithium stearate, calcium benzoate, moon calcium silicates.
4. low dielectric constant insulation composite ceramic material according to claim 1, it is characterised in that:The coupling agent is selected from
Aminobenzyl phosphate, isopropyl bishexadecyl borate, VTES, γ-glycidyl ether propyl group trimethoxy
Any one or a few in base silane.
5., according to the preparation method of the arbitrary described low dielectric constant insulation composite ceramic material of claim 1-4, its feature exists
In comprising the following steps:
(1)Each raw material is weighed according to weight portion;
(2)Magnesium silicate, carbon dust, flyash are added carries out heat treatment in tube furnace, heat treatment temperature is 360-420 DEG C, the time
For 30 minutes, then Temperature fall was cooled to room temperature, stood 30 minutes;
(3)By magnesium oxide, aluminium oxide, calcium dioxide, zirconium dioxide, Barium metatitanate., magnesium diboride, titanium nitride, aluminium nitride, nitridation
Boron, step(2)Mixture add ball mill, in ball mill ratio of grinding media to material be 20:1, Ball-milling Time is 3-5 hours, ball mill
Rotating speed is 100-200 rev/min;
(4)By step(3)Ball milling powder mince, tetrahydrofuran, benzyl dichlorosilane, normal hexane, dispersant add together height
In speed pressurization homogenizer, 3000-5000 rev/min of rotating speed, pressure is 1-2MPa, is mixed 30 minutes;
(5)By step(4)Homogeneous mixture sieve sorting, collection is sieved mixture;
(6)By step(5)The mixture that sieves, stabilizer, coupling agent injection mould in, carry out in high-temperature calcination stove plus be pressed into
Type, calcining heat rises to 760-820 DEG C with 6-8 DEG C/minute of programming rate, and 60 points are then incubated when temperature is 760-820 DEG C
Clock, pressing speed is 0.05-0.1MPa/ point, and briquetting pressure is 2-5MPa;
(7)By step(6)Calcining model be down to after room temperature, mould from, dewax, be put in nitrogen couveuse maintenance 2-4 hours, i.e.,
Obtain finished product.
6. the preparation method of low dielectric constant insulation composite ceramic material according to claim 5, it is characterised in that described
Step(5)In, mesh size is 200-300 mesh.
7. the preparation method of low dielectric constant insulation composite ceramic material according to claim 5, it is characterised in that described
Step(7)Middle couveuse temperature is 65-75 DEG C.
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