CN106558263B - A room temperature multi-stable equilibrium micromechanical system and its realization method - Google Patents
A room temperature multi-stable equilibrium micromechanical system and its realization method Download PDFInfo
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- CN106558263B CN106558263B CN201610936122.0A CN201610936122A CN106558263B CN 106558263 B CN106558263 B CN 106558263B CN 201610936122 A CN201610936122 A CN 201610936122A CN 106558263 B CN106558263 B CN 106558263B
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- 239000006185 dispersion Substances 0.000 claims abstract description 24
- 239000003989 dielectric material Substances 0.000 claims abstract description 18
- 239000007769 metal material Substances 0.000 claims abstract description 17
- 239000000696 magnetic material Substances 0.000 claims abstract description 15
- 230000000737 periodic effect Effects 0.000 claims abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
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- 239000004973 liquid crystal related substance Substances 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
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Abstract
The present invention relates to a kind of room temperature multistable balanced microcomputer tool system and its implementation.The micro mechanical system includes the plate 1 being parallel to each other and plate 2 that a pair of of spacing is micron dimension；Plate 1 is electrical hyperbolic dispersion metamaterials, by metal material thin layer and thin layer of dielectric material in the alternately stacked One Dimension Periodic layer structure constituted in z-axis direction；Plate 2 is magnetic hyperbolic dispersion metamaterials, constitutes One Dimension Periodic layer structure z-axis direction is alternately stacked by thin layers of magnetic material and thin layer of dielectric material.When room temperature, due to the special electromagnetic property of hyperbolic dispersion metamaterials, it will form multiple Casimir power in the region that plate spacing is micron dimension and obey and repel-zero-stable equilibrium point attracted, cause the adhesion between micro mechanical system component to provide a kind of effective ways by vacuum fluctuation under normal conditions to overcome.
Description
Technical field
The present invention relates to a kind of micro mechanical system, in particular to one kind has multiple stable stress balances under room temperature environment
The micro mechanical system of point.
Background technique
Two big foundation stones one of of the quantum theory as modern physics, the method for providing not only new cognition nature,
Considerable effect also has been played in the every aspect of social development simultaneously.At present the micromation of semiconductor devices has connect
The semiconductor fabrication process of near limit, 20nm is highly developed, develops towards smaller direction.In ruler small in this way
Under degree, quantum effect is clearly.One of them is in recent years by people's extensive concern precisely due to vacuum fluctuation institute
Caused Casimir effect.According to quantrm electrodynamics it is found that vacuum is not vacancy, but it is filled with virtual photon,
There are in the case where electromagnetic boundary, virtual photon density will receive influence, to generate the effect of power between macro object.It is this
Spacing between the size and object of power is related, so can be ignored in conventional macro-scale.However in micro-nano meter ruler
On degree, this power is very important.In recent years, people have experimentally measured this due to caused by vacuum fluctuation
Casimir power.Usually, Casimir power exists usually in the form of attraction, therefore can be very between micro nano structure device
It is easy to be influenced by Casimir attraction and adhesive attraction occurs, leads to thrashing, or even stop working.Therefore it studies
Casimir effect has important meaning to the research of micro mechanical system.
Research in recent years is it has already been indicated that the polarity (attract or repel) of Casimir power is decided by the electromagnetic property on boundary
And geomery.For the one-dimentional structure for being easiest to process, the Casimir power of repulsion is generated, must just be made
With two kinds of opposite as far as possible substances of electromagnetic property.For showing as electrical material, many metallicses present in nature
It can satisfy.And for magnetic material, magnetic material existing for nature is relatively difficult to meet.In addition, current research approach
Most of Casimir power being only limitted under zero temperature state of research, and more concerns with how to realize from attraction to stress balance to
The phase transformation of repulsive force.Stress balance point in such mechanical process is unstable equalization point, because of the direction of motion of object
Be consistent with Impact direction, once object in stress balance point by small sample perturbations, system is just destroyed, this to developing increasingly
Micro mechanical system have very big obstruction.
Summary of the invention
The purpose of the present invention is to provide a kind of micro mechanical system with multiple stable stress balance points at room temperature and
Its implementation can realize that the polarity of the Casimir power as caused by vacuum fluctuation obeys repulsion-attraction-row in multiple positions
The conversion of reprimand realizes stable stress balance point, enhances the stability of micro mechanical system.
The purpose of the present invention can be achieved through the following technical solutions: a kind of room temperature multistable balanced microcomputer tool system,
It is characterized in that, the micro mechanical system includes that spacing is flat in two the first plates being parallel to each other of micro-nano magnitude and second
Plate；First plate is electrical hyperbolic dispersion metamaterials, is handed over by metal material thin layer and thin layer of dielectric material in z-axis direction
For the One Dimension Periodic layer structure overlapped；Second plate is magnetic hyperbolic dispersion metamaterials, by magnetic material
Thin layer and thin layer of dielectric material are in the alternately stacked composition One Dimension Periodic layer structure in z-axis direction.
The metal material thin layer, the thickness of thin layer of dielectric material and magnetic material thin layer in z-axis direction are small
In the 1/20 of the plasma wavelength of selected metal material；The metal material thin layer, thin layer of dielectric material and magnetism
Length of the material thin-layer in x-axis and y-axis direction is all larger than 10 times of the plasma wavelength of selected metal material.
The metal material includes gold, silver or copper.
The dielectric material includes aluminium oxide, silicon, resin or transparent plastic.
The magnetic material includes magneto-optic liquid crystal, Faraday Magneto-optical Glass Containing Rare-earth or magnesium ferrite.
The electrical hyperbolic dispersion metamaterials plate and magnetic hyperbolic dispersion metamaterials platen parallel are placed, between plate
Away from for micro-nano magnitude, room temperature multistable balanced microcomputer tool system is constituted.
As described above, a kind of room temperature multistable balanced microcomputer tool system of the present invention, has the advantages that
Micro mechanical system provided by the invention works at room temperature, since the special electromagnetism dispersion of hyperbolic material is closed
It is the influence to vacuum fluctuation, the balance that multiple Casimir power are 0 can be realized in the range of plate spacing is micro-nano magnitude
Point can maintain system steady wherein the equalization point for having 1 or more is stable stress balance point when system is influenced by perturbation
It is fixed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of micro mechanical system of the present invention；
Fig. 2 a and Fig. 2 b are the dispersion map of electrical property of the present invention and magnetic hyperbolic chromatic dispersion material；
Fig. 3 is the variation of Casimir power of the invention with plate spacing.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
As shown in Figure 1, a kind of room temperature multistable balanced microcomputer tool system, the micro mechanical system include spacing in micro-nano amount
Two the first plates and the second plate being parallel to each other of grade.Wherein first plate is electrical hyperbolic dispersion metamaterials,
It is respectively d by thicknessaAnd dbMetal material thin layer and thin layer of dielectric material in the alternately stacked composition One Dimension Periodic in z-axis direction
Layer structure.Second plate is magnetic hyperbolic dispersion metamaterials, is respectively d by thicknesseAnd ddThin layers of magnetic material and
Thin layer of dielectric material is in the alternately stacked composition One Dimension Periodic layer structure in z-axis direction.The thickness d of each material thin-layera、db、
dcAnd ddRespectively less than the 1/20 of the plasma wavelength of selected metal material；The metal material thin layer, thin layers of magnetic material and
Thin layer of dielectric material is all larger than 10 times of the plasma wavelength in the length of x-axis and y axis direction.
According to broad sense Maxwell Garnett EFFECTIVE MEDIUM THEORY, the electromagnetic property of electrical hyperbolic dispersion metamaterials can
To be expressed asAnd μ1=1, wherein εxx=εyy=faεa+fbεb, εzz=(fa/εa+fb/εb)-1；fa=
da/(da+db)=0.5, fb=db/(da+db)=0.5 is respectively metal material and medium material in electrical hyperbolic dispersion metamaterials
The duty ratio of material；εaFor the dielectric constant of metal material；εbFor dielectric constant of the dielectric material.
According to broad sense Maxwell Garnett EFFECTIVE MEDIUM THEORY, the electromagnetic property of magnetic hyperbolic dispersion metamaterials can
To be expressed asWherein μxx=μyy=fcμc+fdμd, μzz=(fc/μc+fd/μd)-1； fc=dc/(dc
+dd)=0.9, fd=dd/(dc+dd)=0.1 is respectively the duty ratio of magnetic material and dielectric material in magnetic hyperbolic material；μc
For the magnetic conductivity of magnetic material；μd=1 is the magnetic conductivity of aluminium oxide；The dielectric constant of magnetic hyperbolic dispersion metamaterials is expressed as
ε2=fcεc+fdεd, εcFor the dielectric constant of magnetic material；εdFor dielectric constant of the dielectric material.
The calculation formula of Casimir power under non-absolute zero temperature can be expressed asWherein k is edge
The wave beam in the direction x, ξmFor Songyuan City's frequency,WithRespectively the first plate and the second plate are under empty frequency to the anti-of p polarization field
Penetrate coefficient；A is the distance between the first plate and the second plate；T is the Kelvin of system local environment.To Casimir power
Contributive Songyuan City's frequency range is decided by the size of plate spacing.For specific plate spacing, in contributive Songyuan City's frequency model
In enclosing, if the first plate and the second plate all show as electrical property, Casimir power is just attraction；If the first plate shows
For electrical property, the second plate shows as magnetism, and Casimir power may be repulsive force.
The dielectric constant and magnetic conductivity for shown in Fig. 2 a being a kind of electrical hyperbolic dispersion metamaterials, can with the variation of frequency
It is equal to its magnetic conductivity to see that the dielectric constant of electrical hyperbolic dispersion metamaterials is consistently greater than, is showed in entire frequency separation
For electrical property.
The dielectric constant and magnetic conductivity for shown in Fig. 2 b being a kind of magnetic hyperbolic dispersion metamaterials, can with the variation of frequency
It is electric in entire frequency separation to see the dielectric constant of electrical hyperbolic dispersion metamaterials and the size variation complexity of magnetic conductivity
Property and magnetic alternately change.
Shown in Fig. 3 is the above-mentioned electrical property hyperbolic dispersion metamaterials when temperature is 300 Kelvins (26.85 degrees Celsius)
Casimir power between plate and magnetic hyperbolic dispersion metamaterials plate with plate spacing variation.As can be seen from the figure it deposits
The equalization point for being 0 in 4 stress.It is flat when system is by perturbation, and plate spacing reduces (increases) for equalization point 1 and 3
Existing between plate is attraction (repulsive force), and final result is that two plates bond (separate), therefore the two equalization points are unstable
Equalization point.For equalization point 2 and 4, the direction of existing power and plate are by the phase always of the direction of motion after perturbation between plate
Instead, therefore plate will move back and forth at left and right sides of equalization point, eventually stable in former equalization point under the influence of air drag,
So far, a kind of room temperature multistable balanced microcomputer tool system is achieved.
Claims (4)
1. a kind of room temperature multistable balanced microcomputer tool system, which is characterized in that the micro mechanical system includes spacing in micro-nano amount
Two the first plates and the second plate being parallel to each other of grade；First plate is electrical hyperbolic dispersion metamaterials, by gold
Belong to material thin-layer and thin layer of dielectric material in the One Dimension Periodic layer structure of the alternately stacked composition in z-axis direction；Described second is flat
Plate is magnetic hyperbolic dispersion metamaterials, constitutes one z-axis direction is alternately stacked by thin layers of magnetic material and thin layer of dielectric material
Tie up periodic layer structure；
The metal material thin layer, the thickness of thin layer of dielectric material and magnetic material thin layer in z-axis direction are respectively less than institute
The 1/20 of the plasma wavelength of selected metal material；The metal material thin layer, thin layer of dielectric material and magnetic material
Length of the thin layer in x-axis and y-axis direction is all larger than 10 times of the plasma wavelength of selected metal material.
2. a kind of room temperature multistable balanced microcomputer tool system according to claim 1, which is characterized in that the metal material
Including gold, silver or copper.
3. a kind of room temperature multistable balanced microcomputer tool system according to claim 1, which is characterized in that the dielectric material
Including aluminium oxide, silicon, resin or transparent plastic.
4. a kind of room temperature multistable balanced microcomputer tool system according to claim 1, which is characterized in that the magnetic material
Including magneto-optic liquid crystal, Faraday Magneto-optical Glass Containing Rare-earth or magnesium ferrite.
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Citations (6)
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|---|---|---|---|---|
| US6650527B1 (en) * | 2000-07-11 | 2003-11-18 | Fabrizio Pinto | Article comprising a casimir force modulator and methods therefor |
| CN1696653A (en) * | 2005-06-09 | 2005-11-16 | 江苏大学 | Measuring Method of Kashmir Force in Rectangular Cavity |
| CN1718531A (en) * | 2005-06-09 | 2006-01-11 | 江苏大学 | Quantum micro-thruster driven by vacuum "zero-point energy" |
| CN1719568A (en) * | 2005-06-09 | 2006-01-11 | 江苏大学 | Quantum microswitch driven by vacuum "zero-point energy" |
| WO2012125070A1 (en) * | 2011-03-14 | 2012-09-20 | Urmatskikh Anatolii Vasilievich | Micro- and nanodrive |
| CN103205723A (en) * | 2013-04-03 | 2013-07-17 | 同济大学 | Preparation device and method of nanometer superfine powder |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6650527B1 (en) * | 2000-07-11 | 2003-11-18 | Fabrizio Pinto | Article comprising a casimir force modulator and methods therefor |
| CN1696653A (en) * | 2005-06-09 | 2005-11-16 | 江苏大学 | Measuring Method of Kashmir Force in Rectangular Cavity |
| CN1718531A (en) * | 2005-06-09 | 2006-01-11 | 江苏大学 | Quantum micro-thruster driven by vacuum "zero-point energy" |
| CN1719568A (en) * | 2005-06-09 | 2006-01-11 | 江苏大学 | Quantum microswitch driven by vacuum "zero-point energy" |
| WO2012125070A1 (en) * | 2011-03-14 | 2012-09-20 | Urmatskikh Anatolii Vasilievich | Micro- and nanodrive |
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