CN106556891A - A kind of waveguide three-dimensional spot-size converter of protrusion of surface and preparation method thereof - Google Patents
A kind of waveguide three-dimensional spot-size converter of protrusion of surface and preparation method thereof Download PDFInfo
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- CN106556891A CN106556891A CN201611089770.3A CN201611089770A CN106556891A CN 106556891 A CN106556891 A CN 106556891A CN 201611089770 A CN201611089770 A CN 201611089770A CN 106556891 A CN106556891 A CN 106556891A
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- width
- strip
- wedge shape
- waveguide
- size converter
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12152—Mode converter
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a kind of waveguide three-dimensional spot-size converter, the substrate comprising writing board shape, under-clad layer over the substrate is set and transmission on the under-clad layer, the sandwich layer of conversion optical mode speckle is arranged on, it is characterised in that：The sandwich layer includes the wedge shape of the change width along optical propagation direction；The wedge-shaped surface is arranged a plurality of strip projection, and the angle between strip projection and optical propagation direction is between 45 °～45 °；And the height and wedge shape width of the strip projection change according to predetermined rule.The invention discloses a kind of preparation method of waveguide three-dimensional spot-size converter.
Description
Technical field
The present invention relates to photoelectron technical field, and in particular to a kind of three-dimensional of the protrusion of surface based on waveguide wedge structure
Spot-size converter is designed, and the preparation method of the three dimensional structure is directed to using semiconductor microactuator processing technique.
Background technology
In recent years, with two-forty, Large Copacity optical communication technique it is ripe and gradually practical, people are to opto-electronic device
Integrated level propose higher and higher requirement, the material of high index-contrast can greatly reduce the size and bending radius of waveguide
Size, be to make one of high integration opto-electronic device to select well.Although small size waveguide possesses wide application
Prospect, but it and the conversion of the mould speckle between large scale waveguide are always a serious problem, such as optical fiber and Nanowire Waveguides
Between, there is very serious mode mismatch.
In order to solve this problem, there has been proposed using the spot-size converter with wedge structure.At present research compared with into
Ripe has two-dimentional silicon based three-dimensional wedge, its simple structure, only in horizontal direction on realize the change of size.Although this conversion
It is easy that device technique is realized, but the restriction of vertical direction can substantially reduce the efficiency of mould speckle conversion, it is difficult to practical.Three-dimensional mould speckle turns
Parallel operation provides the change in size of horizontal and vertical directions, can effectively improve the matching between size mould field.However, three
In the making of dimension spot-size converter, how using existing semiconductor microactuator processing technique realize change in size in vertical direction into
For new difficult point.The existing scheme for making three-dimensional inclined-plane has making grayscale mask plate, inclines impressing, multiexposure, multiple exposure etching etc.,
It is complex process, with high costs, can not be generally used.
The content of the invention
The invention discloses a kind of waveguide three-dimensional spot-size converter, the substrate comprising writing board shape, the substrate is arranged on
On under-clad layer and be arranged on the under-clad layer transmission, the sandwich layer of conversion optical mode speckle, it is characterised in that：The sandwich layer includes
The wedge shape of change width along optical propagation direction；The wedge-shaped surface is arranged a plurality of strip projection, strip projection and light propagation side
Angle between is between -45 °～45 °；And the height and wedge shape width of the strip projection change according to predetermined rule.
Alternatively, the change procedure of the wedge shape width and strip rising height include it is following in any one：With wedge
Shape change width, strip rising height change simultaneously；Or when wedge shape change width, strip rising height is constant, and works as bar
When shape rising height changes, wedge shape width is constant, i.e. the change of wedge shape width and strip rising height alternately occurs.
Alternatively, the variation tendency of the wedge shape width and strip rising height include it is following in any one：Wedge shape
Width and strip rising height all gradually increase or are all gradually reduced along optical propagation direction；Or wedge shape width and strip projection height
Degree is along optical propagation direction with contrary Long-term change trend.
Alternatively, the spacing between the height of the strip projection, width and adjacent strip projection has following any one
The relation of kind：With the increase of strip rising height, the width of single strip projection becomes big, spacing increase between adjacent list structure；
Along the increase of strip rising height, the width of single strip projection is constant, spacing increase between adjacent list structure；Or along bar
The increase of shape rising height, the width of single strip projection become big, spacing increase between adjacent different list structures.
The invention also discloses a kind of preparation method of waveguide three-dimensional spot-size converter, including：Including substrate, under-clad layer
Photoresist is coated with the sandwich layer of the structure of sandwich layer, flagpole pattern array is write out on a photoresist；With photoresist as mask, in core
Strip projection is etched on layer；And remove photoresist and clean, obtain waveguide three-dimensional spot-size converter.
Alternatively, in flagpole pattern array the angle of each flagpole pattern and optical propagation direction between -45 °～45 °.
Alternatively, the top view outline of flagpole pattern includes the part that width is gradually changed.
Alternatively, the top view outline of flagpole pattern also includes the constant part of width.
Alternatively, as the spacing of flagpole pattern becomes big, the width of the flagpole pattern becomes big, constant, or diminishes.
Alternatively, the outline width of flagpole pattern array is changed or alternate simultaneously with the width of flagpole pattern.
Spot-size converter with protrusion of surface design of the invention, using the strip mask that spacing is fine and closely woven, uses
Plane exposure and etching technics, by the density for controlling flagpole pattern, produce different etching depths, while the bar of retention surface
Shape projection.Meanwhile, between -45 °～45 °, strip projection, can to center convergence for the angle of strip projection and optical propagation direction
Reduce the size of scattering loss.The design realizes the three-dimensional change of wedge shape using simple technique, can effectively improve mould speckle
The problem matched somebody with somebody.
Description of the drawings
Fig. 1 is the top view of waveguide three-dimensional spot-size converter outward appearance according to embodiments of the present invention and sees along optical propagation direction
The side view seen；
Fig. 2 shows waveguide three-dimensional spot-size converter structural representation according to embodiments of the present invention and preparation method thereof；
Fig. 3 shows waveguide three-dimensional spot-size converter structural representation according to embodiments of the present invention and preparation method thereof.
Specific embodiment
In order that the technological means of the present invention, system architecture and advantage are easy to understand, below in conjunction with the accompanying drawings, further
Illustrate the present invention.
It is in the method for realizing various sizes of mould speckle conversion, low using two-dimentional spot-size converter efficiency, and three-dimensional mould speckle
Transducer is difficult to make, and technique is loaded down with trivial details.In order to be effectively realized the conversion of mould speckle, the present invention proposes a kind of three-dimensional mould of protrusion of surface
The design of spot-size converter, using simple single exposure and etching, realizes bottom wedge shape width and the change on height.
Fig. 1 is the top view of waveguide three-dimensional spot-size converter outward appearance according to embodiments of the present invention and along optical propagation direction A-
The side view that A ' is watched.As shown in figure 1, the waveguide three-dimensional spot-size converter is based on semi-conducting material, the lining comprising writing board shape
Bottom 1, under-clad layer 2 over the substrate is set and is arranged on the under-clad layer and be used to transmitting and changing the sandwich layer of optical mode speckle
3.Its center core layer 3 includes the strip projection of the wedge shape and wedge-shaped surface of width and height change along optical propagation direction.According to
Embodiments of the invention, backing material can be Si, and under-clad layer material can be SiO2, core material can be Si.
The design principle of the spot-size converter of this protrusion of surface is：
If the opening of figure is sufficiently small in etch mask, etching depth and figure openings of sizes positive correlation.The present invention is adopted
Lithographic technique can include ultraviolet photolithographic, beamwriter lithography, reactive ion etching (RIE) or inductively coupled plasma
(ICP) etch.The distribution of flagpole pattern in designed mask so that the big region etch depth of pattern density is little, that is, form strip
The depth of projection is little, foot wedges height is high, and the little region etch depth of pattern density is big, that is, form the depth of strip projection
Greatly, bottom wedge shape is highly low.For total, the depth of strip projection is bigger, and the high regional center of equivalent refractive index is more leaned on
Nearly foot wedges, in transmission light field, light field is easily bound in bottom.Gradually increase when strip nub depth, wedge shape width
When being gradually reduced, light field will be to bottom, to central compressed, and mould speckle is tapered into.If it is further to note that strip is prominent
The width for rising is sufficiently small, and strip jut is equivalent to the low-refraction covering of three-dimensional wedge shape so that light field is only in bottom wedge shape
Distribution is without " leakage " in strip projection.
According to above-mentioned principle, in layout design, the change of strip density of highly being arranged according to wedge-shaped design, Specific Principles
It is：By taking density increase as an example, the width of flagpole pattern is needed to increase, the spacing between flagpole pattern is decreased or increased.In order to reduce
Scattering loss, strip density figure are arranged along optical propagation direction, the angle of each section and optical propagation direction of figure all-
Between 45 °～45 °.
Embodiments in accordance with the present invention, in flagpole pattern array, the angle of each flagpole pattern and optical propagation direction is at -45 °
Between～45 °.
Embodiments in accordance with the present invention, the top view outline of flagpole pattern include the part that width is gradually changed.
Embodiments in accordance with the present invention, the top view outline of flagpole pattern also include the constant part of width.
Embodiments in accordance with the present invention, as the spacing of flagpole pattern becomes big, the width of the flagpole pattern becomes greatly, no
Become, or diminish.
Embodiments in accordance with the present invention, the outline width of flagpole pattern array and the width of flagpole pattern change simultaneously or
Alternate；And/or along optical propagation direction, the top view outline of flagpole pattern all gradually increase or be all gradually reduced or
Changed with opposite trend.
The making step of the spot-size converter of this protrusion of surface is：
Step 1：The domain of strip density figure is designed according to mentioned above principle；
Step 2：The density graphic array of strip is transferred on photoresist using electron beam or uv-exposure, in such as Fig. 2
Shown in (a) and (b).
Step 3：Mask graph is transferred on substrate by etching.Due to the width and spacing dimension of strip it is sufficiently small,
In dry etching, reacting gas can not act on space bottom completely so that when between strip, space is big, etching is deep
Degree is big, and space hour etching depth is little between strip；It is for wet etching, the speed and contact surface area of etching, molten
The factors such as the mobility of liquid are related, under conditions of reaction solution is not stirred, in the little strip in space, contact area is little, solution more
Cenotype is to slow, therefore etching depth is little, otherwise the big strip etching depth in space is big.Therefore, the density figure of different densities
Distribution can cause different etching depths, the height change of bottom three-dimensional wedge shape.
Step 4：Remove photoresist, cleaning.
After the completion of step 4, the both sides end view of the three-dimensional waveguide spot converter for obtaining respectively such as (c) in Fig. 2 and
Shown in (d).
The manufacture method of protrusion of surface three-dimensional forward direction SOI spot-size converters according to embodiments of the present invention is illustrated below.
The three-dimensional forward direction SOI spot-size converters include flat substrate, arrange under-clad layer over the substrate and setting
It is used for transmitting and changing the sandwich layer of optical mode speckle on the under-clad layer.The sandwich layer includes width and height along optical propagation direction
The strip projection of the wedge shape and wedge-shaped surface of change.Strip projection layout is one group of symmetrical figure, on axis most
Interior figure is the isosceles triangle that drift angle is 25 °, and strip projection is distributed in the both sides of triangle respectively；The strip of both sides
Projection is respectively parallel to the side of the triangle of corresponding side, and is respectively -12.5 ° and 12.5 ° with the angle of optical propagation direction；Edge
Outwards, the width of strip projection is constant, is 600nm for the axis of optical propagation direction, and the spacing of strip projection from 100nm with 10nm
For increments.In its design top plane view and side view such as Fig. 2 shown in (a) and (b).
The manufacturing step of the three-dimensional forward direction SOI spot-size converters is as follows：
Step 1 '：A piece of starting silicon-on-insulator (SOI) material is chosen, crystal orientation is 100 ＞ of ＜, and top layer silicon thickness is 4 μm.
Step 2 '：In the photoresist of one layer of 1 μ m-thick of SOI surfaces spin coating, figure is transferred to the mode of electron beam exposure
On photoresist, in such as Fig. 3 shown in (a) and (b).
Step 3 '：ICP etches top layer silicon, and maximum etching depth is 3 μm, after etching in shape such as Fig. 3 shown in (c).
Step 4 '：Photoresist is removed, SOI pieces are cleaned, in such as Fig. 3 shown in (d).
In the three-dimensional forward direction spot-size converters such as Fig. 3 of SOI that making is obtained shown in (d), bottom is in three-dimensional wedge shape.Due to strip
The width of projection only has 600nm so that light field still can be transmitted in foot wedges.
Embodiments of the invention are desirable to be able to the next item down or multinomial beneficial effect：
1. this waveguide three-dimensional spot-size converter that the present invention is provided, the compression to mould field have horizontal and vertical two sides
Effect upwards, is conducive to reducing the model field unbalance in mould speckle transformation process.
2. this waveguide three-dimensional spot-size converter that the present invention is provided, the strip projection on surface and the angle of optical propagation direction
Less than 45 °, be conducive to reducing the energy loss brought by light scattering.
3. the manufacture method of the three-dimensional spot-size converter of this waveguide that the present invention is provided, manufacturing process are simple, it is only necessary to general
Logical exposure and lithographic technique, once etch or corrode and can complete, reduce the difficulty and complexity of technique.
4. the manufacture method of this waveguide three-dimensional spot-size converter that the present invention is provided, can pass through freely to combine strip
Density, obtain need duct height and change width, it is not limited to smooth change or linear change, have very strong extension
Property.
The above instantiation has been made to further explain to the purpose of the present invention, technical scheme and useful achievement,
It should be appreciated that the above specific embodiment is only used for explaining the present invention, the present invention is not limited to.All essences in the present invention
Within god and principle, any modification, equivalent substitution and improvements done etc. are all contained within protection scope of the present invention.
Claims (10)
1. a kind of waveguide three-dimensional spot-size converter, the substrate comprising writing board shape, arrange under-clad layer over the substrate and
It is arranged on transmission on the under-clad layer, the sandwich layer of conversion optical mode speckle, it is characterised in that：
The sandwich layer includes the wedge shape of the change width along optical propagation direction；
The wedge-shaped surface is arranged a plurality of strip projection, the angle between strip projection and optical propagation direction -45 °～45 ° it
Between；And
The height and wedge shape width of the strip projection changes according to predetermined rule.
2. waveguide according to claim 1 three-dimensional spot-size converter, it is characterised in that the wedge shape width and strip projection
The change procedure of height include it is following in any one：
With wedge shape change width, strip rising height changes simultaneously；Or
When wedge shape change width, strip rising height is constant, and when strip rising height changes, wedge shape width is constant, i.e.,
The change of wedge shape width and strip rising height alternately occurs.
3. waveguide according to claim 1 three-dimensional spot-size converter, it is characterised in that the wedge shape width and strip projection
The variation tendency of height include it is following in any one：
Wedge shape width and strip rising height all gradually increase or are all gradually reduced along optical propagation direction；Or
Wedge shape width and strip rising height are along optical propagation direction with contrary Long-term change trend.
4. waveguide according to claim 1 three-dimensional spot-size converter, it is characterised in that the height of the strip projection, width
Spacing between degree and adjacent strip projection has following any one relation：
With the increase of strip rising height, the width of single strip projection becomes big, spacing increase between adjacent list structure；
Along the increase of strip rising height, the width of single strip projection is constant, spacing increase between adjacent list structure；Or
Along the increase of strip rising height, the width of single strip projection becomes big, spacing increase between adjacent different list structures.
5. the preparation method of a kind of waveguide three-dimensional spot-size converter, including：
Photoresist is coated on the sandwich layer including the structure of substrate, under-clad layer and sandwich layer, flagpole pattern battle array is write out on a photoresist
Row；
With photoresist as mask, strip projection is etched on sandwich layer；And
Remove photoresist and clean, obtain waveguide three-dimensional spot-size converter.
6. method according to claim 5, wherein：
In flagpole pattern array, the angle of each flagpole pattern and optical propagation direction is between -45 °～45 °.
7. method according to claim 5, the top view outline of wherein flagpole pattern include the portion that width is gradually changed
Point.
8. method according to claim 5, wherein the top view outline of flagpole pattern also include the constant part of width.
9. method according to claim 5, wherein as the spacing of flagpole pattern becomes big, the width of the flagpole pattern becomes
Greatly, it is constant, or diminish.
10. method according to claim 5, wherein：
The outline width of flagpole pattern array is changed simultaneously with the width of flagpole pattern or alternate；And/or
Along optical propagation direction, the top view outline of flagpole pattern is all gradually increased or is all gradually reduced or is become with opposite trend
Change.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611089770.3A CN106556891A (en) | 2016-11-30 | 2016-11-30 | A kind of waveguide three-dimensional spot-size converter of protrusion of surface and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201611089770.3A CN106556891A (en) | 2016-11-30 | 2016-11-30 | A kind of waveguide three-dimensional spot-size converter of protrusion of surface and preparation method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107329208A (en) * | 2017-07-10 | 2017-11-07 | 昆明理工大学 | A kind of silicon photon spot-size converter of refractive index gradient change |
| CN112241047A (en) * | 2020-11-03 | 2021-01-19 | 上海交通大学 | Ultra-wideband mode spot converter based on-chip integrated dragon juniper lens |
| CN113568106A (en) * | 2021-07-21 | 2021-10-29 | 中山大学 | Broadband end face coupler based on lithium niobate thin film and preparation method thereof |
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| KR20010019870A (en) * | 1999-08-31 | 2001-03-15 | 윤종용 | A spot-size converter laser diode a manufacturing method thereof |
| KR20010045328A (en) * | 1999-11-04 | 2001-06-05 | 윤종용 | Double core spot size converter using selective area growth and fabricating method thereof |
| CN202854366U (en) * | 2012-01-09 | 2013-04-03 | 东南大学 | Silicon-based three-dimensional superposition type fiber coupling structure |
| CN105158847A (en) * | 2015-10-15 | 2015-12-16 | 中国科学院半导体研究所 | Waveguide three-dimensional speckle converter |
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2016
- 2016-11-30 CN CN201611089770.3A patent/CN106556891A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010019870A (en) * | 1999-08-31 | 2001-03-15 | 윤종용 | A spot-size converter laser diode a manufacturing method thereof |
| KR20010045328A (en) * | 1999-11-04 | 2001-06-05 | 윤종용 | Double core spot size converter using selective area growth and fabricating method thereof |
| CN202854366U (en) * | 2012-01-09 | 2013-04-03 | 东南大学 | Silicon-based three-dimensional superposition type fiber coupling structure |
| CN105158847A (en) * | 2015-10-15 | 2015-12-16 | 中国科学院半导体研究所 | Waveguide three-dimensional speckle converter |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107329208A (en) * | 2017-07-10 | 2017-11-07 | 昆明理工大学 | A kind of silicon photon spot-size converter of refractive index gradient change |
| CN112241047A (en) * | 2020-11-03 | 2021-01-19 | 上海交通大学 | Ultra-wideband mode spot converter based on-chip integrated dragon juniper lens |
| WO2022095421A1 (en) * | 2020-11-03 | 2022-05-12 | 上海交通大学 | Ultra-wideband spot-size converter based on on-chip integrated luneburg lens |
| CN113568106A (en) * | 2021-07-21 | 2021-10-29 | 中山大学 | Broadband end face coupler based on lithium niobate thin film and preparation method thereof |
| CN113568106B (en) * | 2021-07-21 | 2022-07-26 | 中山大学 | Broadband end face coupler based on lithium niobate thin film and preparation method thereof |
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Application publication date: 20170405 |