CN106531756B - Detector anode assembly - Google Patents

Detector anode assembly Download PDF

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Publication number
CN106531756B
CN106531756B CN201610963911.3A CN201610963911A CN106531756B CN 106531756 B CN106531756 B CN 106531756B CN 201610963911 A CN201610963911 A CN 201610963911A CN 106531756 B CN106531756 B CN 106531756B
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China
Prior art keywords
plate
anode
signal
array
electronics
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Expired - Fee Related
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CN201610963911.3A
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Chinese (zh)
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CN106531756A (en
Inventor
吴金杰
张帅
周振杰
廖振宇
余继利
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National Institute of Metrology
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National Institute of Metrology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14634Assemblies, i.e. Hybrid structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14641Electronic components shared by two or more pixel-elements, e.g. one amplifier shared by two pixel elements

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Radiation (AREA)

Abstract

An embodiment of the present invention provides a kind of detector anode assembly, including:First anode plate, first anode plate have the first signal array;Second plate plate, the area of second plate plate is less than first anode plate, and in first anode plate, second plate plate has secondary signal array;First asic chip is connected with first anode plate, when electronics is beaten in first anode plate, the first signal of detection first anode plate generation;Second asic chip is connected with second plate plate, when electronics is beaten in second plate plate, the secondary signal of detection second plate plate generation;Electronics processor is connected with the first asic chip and the second asic chip, and obtaining electronics according to the first signal and the second signal beats position in first anode plate or second plate plate.Detector anode assembly of the embodiment of the present invention using two pieces of different anode plates, realizes the electronic position detection of different accuracy.

Description

Detector anode assembly
Technical field
The present invention relates to a kind of anode assembly more particularly to a kind of detector anode assemblies.
Background technology
At present, the anode plate of existing detector only has one piece, no matter which kind of resolution ratio, thus can only be into a resolution ratio Image, if necessary to change resolution ratio, can only just use other detectors instead because can not by the anode plate of detector carry out more It changes.
Therefore, the setting underaction of existing anode assembly.
The content of the invention
The defects of the purpose of the present invention is being directed to the prior art, provides a kind of detector anode assembly, utilizes two pieces of differences Anode plate, realize different accuracy electronic position detection.
To achieve the above object, an embodiment of the present invention provides a kind of detector anode assembly, the detector anode dresses Put including:
First anode plate, the first anode plate have the first signal array;
Second plate plate, the area of the second plate plate are less than first anode plate, and positioned at the first anode plate Interior, the second plate plate has secondary signal array;
First asic chip is connected with the first anode plate, when electronics is beaten in the first anode plate, detects institute State the first signal of first anode plate generation;
Second asic chip is connected with the second plate plate, when electronics is beaten in the second plate plate, detects institute State the secondary signal of second plate plate generation;
Electronics processor is connected with first asic chip and the second asic chip, according to first signal Electronics, which is obtained, with secondary signal beats position in the first anode plate or second plate plate.
Further, first signal array is N M array, and N is the first array line number, and M is the first array columns.
Further, first asic chip is inputted with N+M roads signal.
Further, the secondary signal array is P × Q arrays, and P is the second array line number, and Q is the second array columns.
Further, second asic chip is inputted with P+Q roads signal.
Further, the electronics processor obtains the row of the electronics with specific reference to the first signal and the second signal Position and column position beat position in the first anode plate or second plate plate so as to obtain the electronics.
Further, the electronics processor includes FPGA, is connected with first asic chip and the second asic chip It connects.
Detector anode assembly of the embodiment of the present invention using two pieces of different anode plates, realizes the electronics of different accuracy Position detection.
Description of the drawings
Fig. 1 is the schematic diagram of detector anode assembly provided in an embodiment of the present invention;
Fig. 2A is one of electronic array schematic diagram of detector anode assembly provided in an embodiment of the present invention;
Fig. 2 B are the two of the electronic array schematic diagram of detector anode assembly provided in an embodiment of the present invention;
Fig. 2 C are the three of the electronic array schematic diagram of detector anode assembly provided in an embodiment of the present invention.
Specific embodiment
Below by drawings and examples, technical scheme is described in further detail.
Fig. 1 is the schematic diagram of detector anode assembly provided in an embodiment of the present invention, as shown in the figure, the embodiment of the present invention Detector anode assembly includes:First anode plate 11, second plate plate 12, the first application-specific integrated circuit (Application Specific Integrated Circuits, ASIC) chip 21, the second asic chip 22 and electronics processor 3.
First anode plate 11 has the first signal array.The area of second plate plate 12 is less than first anode plate 11, and In first anode plate 11, second plate plate 12 has secondary signal array.
First asic chip 21 is connected with first anode plate 11, when electronics is beaten in the first anode plate 11, detection The first signal that first anode plate 11 generates;Second asic chip 22 is connected with second plate plate 12, when electronics is beaten second During anode plate 12, the secondary signal of 12 generation of detection second plate plate.
Electronics processor 3 is connected with the first asic chip 21 and the second asic chip 22, according to the first signal and Binary signal obtains electronics and beats position in first anode plate 11 or second plate plate 12.
Specifically, the first array of first anode plate 11 is N M array, N is the first array line number, and M is the first array column Number.Optionally, M and N is 64.Because the first asic chip 21 needs detection, electronics is beaten in the position of the first array, the One asic chip 21 is exported with N+M roads, that is, 64+64 roads signal output needs the first asic chip 21 to handle.
Similarly, the second array of second plate plate 12 is P × Q arrays, and P is the second array line number, and Q arranges for the second array Number.Optionally, P and Q is 64.Because the second asic chip 22 needs detection, electronics is beaten in the position of the second array, the Two asic chips 22 are exported with P+Q roads, that is, 64+64 roads signal output needs the second asic chip 22 to handle.
Electronics processor 3 obtains the row position and column position of electronics with specific reference to the first signal and the second signal, so as to It obtains electronics and beats position in the first anode plate or second plate plate.
Fig. 2A and Fig. 2 B are respectively the electronic array schematic diagram of detector anode assembly provided in an embodiment of the present invention, are such as schemed It is shown, for example, electronics is beaten on array (4,4), then the 4 of array line number Y and the 4 of columns X can all generate signal, pass through X4, Y4 The first signal generated determines that electronics is beaten on pad (4,4), it follows that electronics is beaten on first anode plate 21.
Fig. 2 C are the three of the electronic array schematic diagram of detector anode assembly provided in an embodiment of the present invention.For example, electronics Beat on array (6,6), then the 6 of array line number Y and the 6 of columns X can all generate signal, pass through X6, Y6 generate secondary signal Determine that electronics is beaten on pad (6,6), it follows that electronics is beaten on second plate plate 22.
Optionally, electronics processor 3 includes field programmable gate array (Field-Programmable Gate Array, FPGA), it is connected with the first asic chip and the second asic chip.The area of first anode plate 11 is more than second plate Plate 12, optional first anode board size are (200X200) mm, and the size of second plate plate is (43.3X43.3) mm, and first is positive The number of arrays of pole plate is identical with the number of arrays of second plate plate, is 64X64=128 roads, second plate plate 12 in unit area Pixel be 11 pixel of first anode plate 4.6 times of 200/43.3 ≈, when an equal amount of hot spot is respectively radiated to first When anode plate 11 and second plate plate 12, hot spot covered pixel of institute on second plate plate 12 is about hot spot in the first sun Pole plate can cover 4.6 times of pixel, and the precision of second plate plate 32 is 4.6 times of first anode plate precision, so as to reach The purpose of same detector different accuracy electronic position detection is arrived.
Professional should further appreciate that, be described with reference to the embodiments described herein each exemplary Unit and algorithm steps can be realized with the combination of electronic hardware, computer software or the two, hard in order to clearly demonstrate The interchangeability of part and software generally describes each exemplary composition and step according to function in the above description. These functions are performed actually with hardware or software mode, specific application and design constraint depending on technical solution. Professional technician can realize described function to each specific application using distinct methods, but this realization It is it is not considered that beyond the scope of this invention.
The step of method or algorithm for being described with reference to the embodiments described herein, can use hardware, processor to perform The combination of software module or the two is implemented.Software module can be placed in random access memory (RAM), memory, read-only memory (ROM), electrically programmable ROM, electrically erasable ROM, register, hard disk, moveable magnetic disc, CD-ROM or technical field In any other form of storage medium well known to interior.
Above-described specific embodiment has carried out the purpose of the present invention, technical solution and advantageous effect further It is described in detail, it should be understood that the foregoing is merely the specific embodiments of the present invention, is not intended to limit the present invention Protection domain, within the spirit and principles of the invention, any modification, equivalent substitution, improvement and etc. done should all include Within protection scope of the present invention.

Claims (3)

1. a kind of detector anode assembly, which is characterized in that the detector anode assembly includes:
First anode plate, the first anode plate have the first signal array;
Second plate plate, the area of the second plate plate are less than first anode plate, and in the first anode plate, institute Second plate plate is stated with secondary signal array;
First asic chip is connected with the first anode plate, when electronics is beaten in the first anode plate, detection described the The first signal that one anode plate generates;
Second asic chip is connected with the second plate plate, when electronics is beaten in the second plate plate, detection described the The secondary signal that two anode plates generate;
Electronics processor is connected with first asic chip and the second asic chip, according to first signal and Binary signal obtains electronics and beats position in the first anode plate or second plate plate;
Wherein, first signal array is N M array, and N is the first array line number, and M is the first array columns;
First asic chip is inputted with N+M roads signal;
Wherein, the secondary signal array is P × Q arrays, and P is the second array line number, and Q is the second array columns;
Second asic chip is inputted with P+Q roads signal.
2. detector anode plate device according to claim 1, which is characterized in that the electronics processor with specific reference to The first signal and the second signal obtain the row position and column position of the electronics, are beaten so as to obtain the electronics described The position of one anode plate or second plate plate.
3. detector anode plate device according to claim 1, which is characterized in that the electronics processor includes scene Programmable gate array FPGA is connected with first asic chip and the second asic chip.
CN201610963911.3A 2016-10-28 2016-10-28 Detector anode assembly Expired - Fee Related CN106531756B (en)

Priority Applications (1)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103298793A (en) * 2010-11-29 2013-09-11 埃吉斯药物股份公开有限公司 Method for the preparation of high-purity pharmaceutical intermediates
CN206339245U (en) * 2016-10-28 2017-07-18 中国计量科学研究院 Detector anode assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008227430A (en) * 2007-03-16 2008-09-25 Sharp Corp Photodetector for position detection, production process thereof, sensor, and electronic instrument

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103298793A (en) * 2010-11-29 2013-09-11 埃吉斯药物股份公开有限公司 Method for the preparation of high-purity pharmaceutical intermediates
CN206339245U (en) * 2016-10-28 2017-07-18 中国计量科学研究院 Detector anode assembly

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